KR100934032B1 - Tester Opener - Google Patents

Abstract

The present invention relates to an opener for a test handler.

According to the present invention, an open plate having an open pin capable of releasing a holding state of a holding device provided in a carrier board, a cylinder for lifting the open plate, and a fixing for fixing the opening plate to have a play on the rod of the cylinder. A technique is disclosed that includes a carrier and an elastic device that elastically supports an open plate against a rod so that the carrier board and open plate can be properly matched.

Description

Opener for test handlers {OPENER FOR TEST HANDLER}

The present invention relates to a test handler, and more particularly, to an opener for releasing a holding state of a holding device for holding a semiconductor element loaded on a carrier board.

The test handler electrically contacts the tester to the tester when the tester passes the test process before the semiconductor device manufactured through the predetermined manufacturing process is shipped, and the tester can be tested by the tester. The finished semiconductor devices are automated equipment classified by grade according to the test results.

Test handlers, which are widely used today, allow semiconductor devices to be in electrical contact with a tester while being mounted on a carrier board.

That is, the semiconductor devices are supplied to the test handler while being loaded on the customer tray, but the test handler loads the semiconductor devices loaded on the customer tray onto the carrier board and then tests the semiconductor devices loaded on the carrier board. After the test is made by electrically contacting to support the test, the tested semiconductor devices are classified by test class and unloaded from the carrier board to the customer tray.

To this end, the test handler loads the carrier board into the loading position (where the semiconductor element is loaded from the customer tray to the carrier board), the test position (the position where the semiconductor element is tested) and the unloading position (the semiconductor element is removed from the carrier board by the customer tray). Through the unloading position) and back to the loading path. The carrier board is provided with a holding device so that the semiconductor device can be stably held even during the circulation path. The holding device is described in detail in the Patent Registration No. 10-0486412 (name of the invention: a test tray insert of a test handler, hereinafter referred to as a 'prior invention') previously proposed by the applicant of the present invention. For reference, in the prior invention, the holding device is composed of a stopper, a compression spring, and a locker.

However, when the semiconductor device is loaded into or unloaded from the carrier board, the holding state of the holding device must be released. For this purpose, the test handler includes an opening for releasing the holding state of the holding device. Regarding an example of the opener, the applicant of the present invention has previously presented through the registered patent registration No. 10-0687676 (name of the test handler), and the present invention relates to such an opener.

1 is a schematic side cross-sectional view of a conventional opener 100.

As shown in FIG. 1, the conventional opener 100 includes a pneumatic casing 130 for moving the open plate 110, the piston rod 120, and the piston rod 120 to elevate the open plate, and a fixing bolt. 140 and the coil spring 150.

The upper surface of the open plate 110 is provided with a plurality of open pins (P), the holding state of the holding device provided on the carrier board is operated by the lifting of the open plate (110). That is, when the open plate 110 is raised, the open pin P releases the holding state of the holding device, and when the open plate 110 is lowered, the holding state of the holding device is maintained.

The piston rod 120 retreats downward by the pneumatic pressure applied by the pneumatic casing 130 or elevates the open plate 110 while advancing upward by the elastic force of the coil spring 150.

Pneumatic casing 130 provides the pneumatic pressure required for the forward and backward operation of the piston rod (120).

The fixing bolt 140 fixes the opening plate 110 to the piston rod 120.

The coil spring 150 elastically supports the open plate 110 with respect to the pneumatic casing 130.

When the opener 100 as described above is opened by the elastic force of the coil spring 150 when the pneumatic pressure of the pneumatic casing 130 is released, as shown in Figure 2, the open plate 110, ) Is matched to the carrier board (CB). When the opening plate 110 is matched to the carrier board CB, the opening pin P operates the holding device to release the holding state. Of course, when the pneumatic casing 130 retracts the piston rod 120 by applying pneumatic pressure, the holding plate 110 is operated while the opening plate 110 is lowered.

On the other hand, the mechanical devices have a tolerance in the manufacturing or installation, such occurrence of the tolerance acts as an obstacle to the opening plate 110 is precisely matched to the carrier board (CB).

For example, as shown in the exaggeration of Fig. 3, when the carrier board (CB) or the open plate 110 is kept slightly inclined with respect to each other (tilted at Θ angle with respect to each other) When the air pressure of the pneumatic casing 130 is released to raise the open plate 110, some of the open pins p may not be properly inserted into the carrier board CB, resulting in jam and carrier board ( Will cause damage to the CB).

Therefore, referring to the enlarged portion of FIG. 1, the fixing bolt 140 fixes the opening plate 110 to have a clearance T with respect to the piston rod 120, and an upper end of the coil spring 150 is opened. By supporting the rear surface of 110 and having the lower end of the coil spring 150 supported by the upper end of the pneumatic casing 130, it is possible to compensate the tolerances from the manufacture or installation of the device. That is, the opening plate 110 is supported by the coil spring 150 with the clearance T on the piston rod 120 to compensate for the tolerance so that the opening plate 110 can be properly matched with the carrier board CB. It is to be possible.

On the other hand, the elastic force of the coil spring 150 is -kX (k: elastic modulus, X: the compressed length of the coil spring), the coil spring 150 in the state in which the coil spring 150 pushed up the open plate 110 to the maximum ( The elastic force of 150 is weakened, and when the opening plate 110 is lowered by the piston rod 120, the elastic force of the coil spring 150 becomes maximum.

However, according to the above structure, in the state in which the open plate 110 is raised to some extent, the elastic force of the coil spring 150 is weakened so that the function thereof cannot be properly exhibited, and thus the holding state of the holding device is not properly released. Problems arise.

That is, for example, as shown exaggerated in Figure 4, the carrier board (CB) and the open plate 110 is inclined with respect to each other (in the state in which the right side of the carrier board is located higher than the left side). If present, the left part of the carrier board (CB) is matched to the left part of the open plate 110, but the right part of the carrier board (CB) is not matched to the right part of the open plate (110). Because in the state as shown in FIG. 4, since the coil spring 150 is at the maximum point, the elastic force becomes the lowest and is pressed by the load of the open plate 110, so that the right side of the open plate 110 cannot be pushed with a strong force. It comes from.

Furthermore, the opening plate 110 should be operated to release the holding state of the holding device by matching with the carrier board (CB). When the elastic modulus of the coil spring 150 is low, the open plate 110 rises to match with the carrier board CB, and the holding state of the holding device cannot be released.

However, when the elastic modulus of the coil spring 150 is increased, the elastic force of the coil spring 150 is increased, so that when the pneumatic pressure of the pneumatic casing 130 is weak, the piston rod 120 does not retreat properly. Will occur.

That is, the above problem is that the coil spring 150 is elastically supported between the rear surface of the open plate 110 and the upper end of the pneumatic casing 130, resulting in a length deformation of the piston rod 120 by the advance and return distance, It is caused by the weakening or increasing of the elastic force proportional to the deformed length.

Of course, by minimizing the distance between the opening plate 110 and the carrier board (CB) to minimize the retraction distance of the piston rod 120, the short coil spring (the application of the short coil spring is short because its deformation length is short) It may be possible to consider a technique to apply a weakening or increasing the elastic force). However, there is still a weakening or increasing elastic force, which cannot be a fundamental solution.

The present invention has been made to solve the above-mentioned problems, shorten the length of the spring, and to maintain a constant elastic force acting on the spring irrespective of the lifting of the open plate to minimize the increase or decrease of the elastic force due to the lifting of the open plate It is aimed at providing a technology that can be used.

According to an aspect of the present invention, there is provided a test handler opener including: an open plate having an open pin capable of releasing a holding state of a holding device for holding a semiconductor device mounted on a carrier board; A retraction rod for retracting the opening plate toward the carrier board so that the holding state of the holding device can be manipulated by the opening pin; A drive source for advancing and retreating the retraction rod; Fixing device for fixing the opening plate to the play to the advance rod; And an elastic device for elastically supporting the opening plate with respect to the advancing rod; Characterized in that it comprises a.

The elastic device is another feature that supports the open plate with a constant elastic force at all times irrespective of the retraction of the retraction rod.

The elastic device, the washer is located at one point of the retraction rod; And a spring having one end supporting the opening plate and the other end supported by the washer; It is another feature to include a.

The spring is another feature that is a leaf spring.

According to the present invention as described above has the following effects.

Since the elastic force of the spring remains almost the same without changing the length of the retracting rod, there is no problem as in the prior art due to the increase or decrease of the elastic force.

Furthermore, by applying the leaf spring has an effect that can be properly installed even when the spring installation space is narrow.

Hereinafter, a test handler opener according to the present invention as described above (hereinafter abbreviated as 'opener') will be described with reference to the accompanying drawings.

5 is a schematic side cross-sectional view of an opener according to an embodiment of the present invention.

Opener 500 according to the present embodiment, as shown in Figure 5, the opening plate 510, piston rod 520, pneumatic casing 530, fixing bolt 540, washer 550 and plate And a spring 560 or the like.

The open plate 510 has a plurality of open pins P capable of releasing the holding state of the holding device for holding the semiconductor elements loaded on the carrier board. For reference, the reference G is a guide protrusion for guiding the opening plate 110 to be properly matched to the carrier board. The open plate 110 is a pin plate 511 having an open pin (P) formed on the upper surface and a rod coupling coupled to the piston rod 520 and fixed by a bolt (not shown) to the rear side of the pin plate 511. It consists of a plate 512. Of course, the pin plate and the rod coupling plate may be integrally configured.

The piston rod 520 is provided as a retraction rod which is advanced and retracted in order to elevate and open the opening plate 510, and the rear surface of the opening plate 510 (more specifically, the rod coupling plate) has a clearance thereon. It is fixed. The upper portion of the piston rod 520 has a step in two stages so that the washer 550 described later can be appropriately supported.

The pneumatic casing 530 is provided as a driving source for supplying a driving force (pneumatic) for advancing and retracting the piston rod 520. The piston rod 520 and the pneumatic casing 530 constitute a cylinder.

The fixing bolt 540 is provided as a fixing device that allows the rod coupling plate 512 and the piston rod 520 to be fixed in a state where they are free from each other.

The washer 550 is provided to support the plate spring 560 to be described later to the piston rod 520, and is fixedly installed in a state inserted into an upper portion (stepped point) of the piston rod 520.

The leaf spring 560 has an upper end supporting the open plate 510 and a lower end supported by the washer 550 so that the open plate 510 can be fixed with a clearance with respect to the piston rod 520. do. This leaf spring 560 is able to overcome the reduction in the spring installation space and the resulting shortening of the spring length required to enable the lower end of the open plate 510 to be supported by the piston rod 520, unlike the prior art To have a profit.

The washer 550 and the leaf spring 560 constitute an elastic device that elastically supports the open plate 510 with respect to the piston rod 520.

The operation of the opener 500 having the configuration as described above will be described with reference to FIG.

In order to release the holding state by operating the holding device of the carrier board, as shown in FIG. 6, the pneumatic casing 530 applies the pneumatic pressure to advance the piston rod 520 upward to open the plate ( When raising the 510 and maintaining the holding state of the holding device of the carrier board, the pneumatic casing 530 applies the air pressure to retract the piston rod 520 downward to lower the opening plate 510. Let's do it.

On the other hand, as in the exaggeration of Fig. 7, the carrier board (CB) and the open plate 510 is kept slightly inclined with respect to each other (the angle of Φ is maintained with each other with the right side of the carrier board on the drawing high) If the upper end of the piston rod 520 can be raised by the height of the horizontal line L, as shown in FIG. 8, the piston rod 520 is advanced (the upper end of the piston rod is raised to the horizontal line). When the open plate 510 is raised, the leaf spring 560 on the right side becomes slightly compressed or uncompressed, and the leaf spring 560 on the left side is compressed a little more so that the open plate 510 is opened. While inclining by the inclined state of the carrier board CB, the carrier board CB may be properly matched.

In this example, the state of the leaf spring when the piston rod is advanced and the state of the leaf spring when the piston rod is retracted are almost the same. That is, the leaf spring always supports the open plate with a constant elastic force regardless of the retraction of the piston rod. However, when the piston rod is advanced and the open plate is matched with the carrier board, a slight increase in elastic force is caused by deformation of the leaf spring caused by the matching of the open plate and the carrier board or by compensating for the tolerances resulting from the manufacture or installation of the device. May be present.

On the other hand, in the above-described example, the piston rod 520 is applied as the forward and backward rod, and the pneumatic casing 530 is applied as the driving source for driving the forward and backward rod, but the cylinder is configured as a rack, pinion, and motor. It may be possible to use them to perform the same role.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings, but since the above-described embodiments have only been described with reference to the preferred examples of the present invention, the present invention is limited to the above embodiments only. It should not be understood to be limited, and the scope of the present invention should be understood as the following claims and equivalent concepts.

1 to 4 are reference diagrams for explaining a conventional opener.

5 is a schematic side cross-sectional view of an opener according to an embodiment of the present invention.

6 to 8 are reference views for explaining the operation of the opener of FIG.

* Description of the code for the main parts of the drawings *

500: opener

510: open plate

520: Piston Rod

530: pneumatic casing

540: fixing bolt

550: Washer

560: leaf spring

Claims (4)

An open plate having an open pin capable of releasing a holding state of a holding device for holding a semiconductor device mounted on a carrier board; A retraction rod for retracting the opening plate toward the carrier board so that the holding state of the holding device can be manipulated by the opening pin; A drive source for advancing and retreating the retraction rod; Fixing device for fixing the opening plate to the play to the advance rod; And An elastic device for elastically supporting the opening plate with respect to the advancing rod; Including; The elastic device, A washer located at one point of the retraction rod; And A spring having one end supporting the opening plate and the other end supported by the washer; Characterized in that it comprises a Opener for test handler. The method of claim 1, The elastic device is characterized in that it supports the open plate at a constant elastic force at all times irrespective of the retraction of the retraction rod Opener for test handler. delete The method of claim 1, The spring is characterized in that the leaf spring Opener for test handler.

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