KR102254858B1 - 핀 기반의 전계 효과 트랜지스터 - Google Patents

핀 기반의 전계 효과 트랜지스터 Download PDF

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KR102254858B1
KR102254858B1 KR1020190072445A KR20190072445A KR102254858B1 KR 102254858 B1 KR102254858 B1 KR 102254858B1 KR 1020190072445 A KR1020190072445 A KR 1020190072445A KR 20190072445 A KR20190072445 A KR 20190072445A KR 102254858 B1 KR102254858 B1 KR 102254858B1
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layer
polar
fin
sidewall
sidewall surface
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KR1020190072445A
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KR20200036707A (ko
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마티아스 파슬락
피터 람발
거벤 두른보스
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타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드
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Priority claimed from US16/353,664 external-priority patent/US11257818B2/en
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