KR102247116B1 - 데이터 처리 방법, 데이터 처리 장치, 및 데이터 처리 프로그램 - Google Patents

데이터 처리 방법, 데이터 처리 장치, 및 데이터 처리 프로그램 Download PDF

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KR102247116B1
KR102247116B1 KR1020190006849A KR20190006849A KR102247116B1 KR 102247116 B1 KR102247116 B1 KR 102247116B1 KR 1020190006849 A KR1020190006849 A KR 1020190006849A KR 20190006849 A KR20190006849 A KR 20190006849A KR 102247116 B1 KR102247116 B1 KR 102247116B1
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time series
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sampling
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KR20190096276A (ko
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히데지 나오하라
마사시 아키타
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가부시키가이샤 스크린 홀딩스
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/021—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system adopting a different treatment of each operating region or a different mode of the monitored system, e.g. transient modes; different operating configurations of monitored system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • G05B23/0235—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0262—Confirmation of fault detection, e.g. extra checks to confirm that a failure has indeed occurred
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • G07C3/005—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles during manufacturing process
    • H01L21/67276—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31282—Data acquisition, BDE MDE

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
KR1020190006849A 2018-02-08 2019-01-18 데이터 처리 방법, 데이터 처리 장치, 및 데이터 처리 프로그램 Active KR102247116B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018020797A JP7074489B2 (ja) 2018-02-08 2018-02-08 データ処理方法、データ処理装置、および、データ処理プログラム
JPJP-P-2018-020797 2018-02-08

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KR20190096276A KR20190096276A (ko) 2019-08-19
KR102247116B1 true KR102247116B1 (ko) 2021-04-30

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US (1) US11274995B2 (https=)
JP (1) JP7074489B2 (https=)
KR (1) KR102247116B1 (https=)
CN (1) CN110134077B (https=)
TW (1) TWI691047B (https=)

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JP6933630B2 (ja) * 2018-12-06 2021-09-08 ファナック株式会社 処理時間監視装置
JP7249902B2 (ja) * 2019-07-17 2023-03-31 東京エレクトロン株式会社 状態管理システム及び状態管理方法
KR102455758B1 (ko) 2020-01-30 2022-10-17 가부시키가이샤 스크린 홀딩스 데이터 처리 방법, 데이터 처리 장치 및 기억 매체
CN113342610B (zh) * 2021-06-11 2023-10-13 北京奇艺世纪科技有限公司 一种时序数据异常检测方法、装置、电子设备及存储介质
CN116561545B (zh) * 2023-05-17 2025-11-04 广东恒翼能科技股份有限公司 锂电池化成和分容工艺的多元时间序列实时异常检测方法、电子设备、存储介质

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US11274995B2 (en) 2022-03-15
JP7074489B2 (ja) 2022-05-24
JP2019140194A (ja) 2019-08-22
KR20190096276A (ko) 2019-08-19
US20190242788A1 (en) 2019-08-08
CN110134077A (zh) 2019-08-16
TWI691047B (zh) 2020-04-11
CN110134077B (zh) 2022-07-19
TW201937690A (zh) 2019-09-16

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