CN110134077B - 数据处理方法、数据处理装置及记录介质 - Google Patents

数据处理方法、数据处理装置及记录介质 Download PDF

Info

Publication number
CN110134077B
CN110134077B CN201910096735.1A CN201910096735A CN110134077B CN 110134077 B CN110134077 B CN 110134077B CN 201910096735 A CN201910096735 A CN 201910096735A CN 110134077 B CN110134077 B CN 110134077B
Authority
CN
China
Prior art keywords
sampling
series data
data
time series
cycle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910096735.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN110134077A (zh
Inventor
犹原英司
秋田正史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Publication of CN110134077A publication Critical patent/CN110134077A/zh
Application granted granted Critical
Publication of CN110134077B publication Critical patent/CN110134077B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M99/00—Subject matter not provided for in other groups of this subclass
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0208—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system
    • G05B23/021—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the configuration of the monitoring system adopting a different treatment of each operating region or a different mode of the monitored system, e.g. transient modes; different operating configurations of monitored system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4183—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by data acquisition, e.g. workpiece identification
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • G05B23/0235—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0262—Confirmation of fault detection, e.g. extra checks to confirm that a failure has indeed occurred
    • G—PHYSICS
    • G07—CHECKING-DEVICES
    • G07C—TIME OR ATTENDANCE REGISTERS; REGISTERING OR INDICATING THE WORKING OF MACHINES; GENERATING RANDOM NUMBERS; VOTING OR LOTTERY APPARATUS; ARRANGEMENTS, SYSTEMS OR APPARATUS FOR CHECKING NOT PROVIDED FOR ELSEWHERE
    • G07C3/00—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
    • G07C3/005—Registering or indicating the condition or the working of machines or other apparatus, other than vehicles during manufacturing process
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0612—Production flow monitoring, e.g. for increasing throughput
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31282—Data acquisition, BDE MDE

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
CN201910096735.1A 2018-02-08 2019-01-31 数据处理方法、数据处理装置及记录介质 Active CN110134077B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018020797A JP7074489B2 (ja) 2018-02-08 2018-02-08 データ処理方法、データ処理装置、および、データ処理プログラム
JP2018-020797 2018-02-08

Publications (2)

Publication Number Publication Date
CN110134077A CN110134077A (zh) 2019-08-16
CN110134077B true CN110134077B (zh) 2022-07-19

Family

ID=67475524

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910096735.1A Active CN110134077B (zh) 2018-02-08 2019-01-31 数据处理方法、数据处理装置及记录介质

Country Status (5)

Country Link
US (1) US11274995B2 (https=)
JP (1) JP7074489B2 (https=)
KR (1) KR102247116B1 (https=)
CN (1) CN110134077B (https=)
TW (1) TWI691047B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6933630B2 (ja) * 2018-12-06 2021-09-08 ファナック株式会社 処理時間監視装置
JP7249902B2 (ja) * 2019-07-17 2023-03-31 東京エレクトロン株式会社 状態管理システム及び状態管理方法
KR102455758B1 (ko) 2020-01-30 2022-10-17 가부시키가이샤 스크린 홀딩스 데이터 처리 방법, 데이터 처리 장치 및 기억 매체
CN113342610B (zh) * 2021-06-11 2023-10-13 北京奇艺世纪科技有限公司 一种时序数据异常检测方法、装置、电子设备及存储介质
CN116561545B (zh) * 2023-05-17 2025-11-04 广东恒翼能科技股份有限公司 锂电池化成和分容工艺的多元时间序列实时异常检测方法、电子设备、存储介质

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001273336A (ja) 2000-03-27 2001-10-05 Matsushita Electric Ind Co Ltd データ収集方法
JP4128339B2 (ja) * 2001-03-05 2008-07-30 株式会社日立製作所 試料処理装置用プロセスモニタ及び試料の製造方法
JP4355193B2 (ja) 2003-11-10 2009-10-28 株式会社ルネサステクノロジ 半導体デバイスの製造方法及び半導体デバイス製造システム
US7745803B2 (en) * 2004-02-03 2010-06-29 Sharp Kabushiki Kaisha Ion doping apparatus, ion doping method, semiconductor device and method of fabricating semiconductor device
US7200523B1 (en) * 2005-11-30 2007-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system for filtering statistical process data to enhance process performance
US7877233B2 (en) * 2006-07-26 2011-01-25 Invensys Systems, Inc. Selectively presenting timestamped time-series data values for retrieved supervisory control and manufacturing/production parameters
JP5105399B2 (ja) 2006-08-08 2012-12-26 東京エレクトロン株式会社 データ収集方法，基板処理装置，基板処理システム
US7490010B2 (en) 2006-08-08 2009-02-10 Tokyo Electron Limited Data collection method, substrate processing apparatus, and substrate processing system
TWI422798B (zh) * 2006-10-06 2014-01-11 荏原製作所股份有限公司 加工終點檢測方法、研磨方法及研磨裝置
US20080120346A1 (en) * 2006-11-22 2008-05-22 Anindya Neogi Purging of stored timeseries data
US8078552B2 (en) 2008-03-08 2011-12-13 Tokyo Electron Limited Autonomous adaptive system and method for improving semiconductor manufacturing quality
JP5363213B2 (ja) * 2009-06-30 2013-12-11 東京エレクトロン株式会社 異常検出システム、異常検出方法、記憶媒体及び基板処理装置
JP2011243088A (ja) 2010-05-20 2011-12-01 Sony Corp データ処理装置、データ処理方法、及び、プログラム
JP5616174B2 (ja) * 2010-09-14 2014-10-29 株式会社トプコン レーザ測量装置
JP5455866B2 (ja) 2010-10-28 2014-03-26 株式会社日立製作所 異常診断装置および産業機械
JP2012123521A (ja) 2010-12-07 2012-06-28 Toppan Printing Co Ltd 製造装置のプロセス条件と判定条件の自動変更システム
JP5764473B2 (ja) 2011-11-17 2015-08-19 株式会社日立製作所 イベントデータ処理装置
JP2013257712A (ja) * 2012-06-12 2013-12-26 Nippon Telegr & Teleph Corp <Ntt> 類似部分シーケンス検出装置、方法、及びプログラム
JP2014130077A (ja) * 2012-12-28 2014-07-10 Hitachi High-Technologies Corp パターン形状評価方法、半導体装置の製造方法及びパターン形状評価装置
WO2015136971A1 (ja) * 2014-03-14 2015-09-17 オムロン株式会社 制御システム
US10210606B2 (en) 2014-10-14 2019-02-19 Kla-Tencor Corporation Signal response metrology for image based and scatterometry overlay measurements
CN109917622B (zh) * 2015-04-10 2021-08-06 Asml荷兰有限公司 用于检查和量测的方法和设备
WO2016172122A1 (en) * 2015-04-21 2016-10-27 Kla-Tencor Corporation Metrology target design for tilted device designs
TWI539298B (zh) * 2015-05-27 2016-06-21 國立成功大學 具取樣率決定機制的量測抽樣方法 與其電腦程式產品
US9983148B2 (en) * 2015-05-28 2018-05-29 Kla-Tencor Corporation System and method for production line monitoring
CN107636619B (zh) 2015-08-06 2020-12-29 日铁系统集成株式会社 信息处理装置、信息处理系统、信息处理方法及记录介质
JP6599727B2 (ja) 2015-10-26 2019-10-30 株式会社Ｓｃｒｅｅｎホールディングス 時系列データ処理方法、時系列データ処理プログラム、および、時系列データ処理装置
CN116936393B (zh) 2016-02-24 2024-12-20 科磊股份有限公司 光学计量的准确度提升
CN106548035B (zh) 2016-11-24 2019-08-06 腾讯科技（深圳）有限公司 一种数据异常的诊断方法及装置

Also Published As

Publication number Publication date
US11274995B2 (en) 2022-03-15
KR102247116B1 (ko) 2021-04-30
JP7074489B2 (ja) 2022-05-24
JP2019140194A (ja) 2019-08-22
KR20190096276A (ko) 2019-08-19
US20190242788A1 (en) 2019-08-08
CN110134077A (zh) 2019-08-16
TWI691047B (zh) 2020-04-11
TW201937690A (zh) 2019-09-16

Similar Documents

Publication Publication Date Title
CN110134077B (zh) 数据处理方法、数据处理装置及记录介质
US7058467B2 (en) Process monitoring device for sample processing apparatus and control method of sample processing apparatus
JP6073117B2 (ja) 自動分析装置、自動分析方法
TWI770348B (zh) 資料處理方法、資料處理裝置以及電腦可讀取記錄媒體
JP2008057988A (ja) デジタル重量計
US12385889B2 (en) Device and method for anomaly detection of gas sensor
JP2019140194A5 (https=)
JP5401070B2 (ja) 処理装置の管理システム
TWI726401B (zh) 資料處理方法、裝置與系統、以及電腦可讀取記錄媒體
CN110134916A (zh) 数据处理方法、数据处理装置及记录介质
CN113721139A (zh) 按键检测方法及系统
US7272540B2 (en) Method and device for multistage data processing, of a power generating station
NO161526B (no) Fremgangsmaate for testing av en elektrisk krets.
US20240319690A1 (en) Method for controlling a measuring device and measuring device
WO2009007041A1 (en) A system and a method for processing a signal from an electric device
CN110532116B (zh) 一种系统可靠性建模方法及装置
JP2025116380A (ja) 情報処理方法及び情報処理装置
CN116820017A (zh) 一种生物实验室检测检验设备信息监测方法及监测终端
CN118170045A (zh) 控制系统的方法以及系统
TW202520346A (zh) 製程異常檢測方法、程式記錄媒體及基板處理設備
CN115014420A (zh) 用于检测压电传感器的方法、装置及设备、存储介质
JP2009085641A (ja) ハンドラー装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant