KR102235190B1 - 광전 디바이스 내 박막 비아 세그먼트 방법 - Google Patents
광전 디바이스 내 박막 비아 세그먼트 방법 Download PDFInfo
- Publication number
- KR102235190B1 KR102235190B1 KR1020167021506A KR20167021506A KR102235190B1 KR 102235190 B1 KR102235190 B1 KR 102235190B1 KR 1020167021506 A KR1020167021506 A KR 1020167021506A KR 20167021506 A KR20167021506 A KR 20167021506A KR 102235190 B1 KR102235190 B1 KR 102235190B1
- Authority
- KR
- South Korea
- Prior art keywords
- via hole
- cigs
- contact layer
- laser
- line segment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H01L31/0463—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
- H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
- H10F19/33—Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
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- H01L31/02366—
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- H01L31/03923—
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- H01L31/0749—
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- H01L31/18—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/167—Photovoltaic cells having only PN heterojunction potential barriers comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/16—Material structures, e.g. crystalline structures, film structures or crystal plane orientations
- H10F77/169—Thin semiconductor films on metallic or insulating substrates
- H10F77/1694—Thin semiconductor films on metallic or insulating substrates the films including Group I-III-VI materials, e.g. CIS or CIGS
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/707—Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Photovoltaic Devices (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IBPCT/IB2014/058708 | 2014-01-31 | ||
| IB2014058708 | 2014-01-31 | ||
| EP2014025031 | 2014-12-31 | ||
| EPPCT/EP2014/025031 | 2014-12-31 | ||
| PCT/IB2015/050555 WO2015114498A1 (en) | 2014-01-31 | 2015-01-26 | Method for thin-film via segments in photovoltaic device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20160117470A KR20160117470A (ko) | 2016-10-10 |
| KR102235190B1 true KR102235190B1 (ko) | 2021-04-02 |
Family
ID=52434916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020167021506A Active KR102235190B1 (ko) | 2014-01-31 | 2015-01-26 | 광전 디바이스 내 박막 비아 세그먼트 방법 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10096731B2 (https=) |
| EP (1) | EP3100307B1 (https=) |
| KR (1) | KR102235190B1 (https=) |
| CN (1) | CN106258012B (https=) |
| BR (1) | BR112016017717B1 (https=) |
| HU (1) | HUE046935T2 (https=) |
| MY (1) | MY179233A (https=) |
| WO (1) | WO2015114498A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3391418B1 (en) * | 2015-12-15 | 2022-11-16 | Flisom AG | Solar module busbar |
| WO2017103663A1 (en) | 2015-12-15 | 2017-06-22 | Flisom Ag | Structuring of a photovoltaic apparatus |
| US10700227B2 (en) | 2016-01-06 | 2020-06-30 | Flisom Ag | Flexible photovoltaic apparatus |
| CN107785442A (zh) * | 2016-08-31 | 2018-03-09 | 北京铂阳顶荣光伏科技有限公司 | 太阳能薄膜电池及其制备方法 |
| EP3648173B1 (en) * | 2018-10-30 | 2023-05-24 | IMEC vzw | Thin-film photovoltaic module with integrated electronics and methods for manufacturing thereof |
| CN111900218B (zh) * | 2020-07-10 | 2023-05-12 | 唐山科莱鼎光电科技有限公司 | 用于制备薄膜太阳能电池第二道刻线的方法 |
| CN119302057A (zh) * | 2023-11-24 | 2025-01-10 | 中建材玻璃新材料研究院集团有限公司 | 基于表面修改的金属网格横纵比优化方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000124488A (ja) * | 1998-10-15 | 2000-04-28 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
Family Cites Families (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4697041A (en) | 1985-02-15 | 1987-09-29 | Teijin Limited | Integrated solar cells |
| US4965655A (en) | 1987-12-10 | 1990-10-23 | Minnesota Mining And Manufacturing Company | Interconnected semiconductor devices |
| JPH0243776A (ja) | 1988-08-03 | 1990-02-14 | Fuji Electric Corp Res & Dev Ltd | 薄膜太陽電池の製造方法 |
| JPH02268472A (ja) | 1989-04-10 | 1990-11-02 | Showa Shell Sekiyu Kk | 光起電力装置およびその製造方法 |
| JPH03124067A (ja) | 1989-10-07 | 1991-05-27 | Showa Shell Sekiyu Kk | 光起電力装置およびその製造方法 |
| US7732243B2 (en) | 1995-05-15 | 2010-06-08 | Daniel Luch | Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays |
| US6011215A (en) | 1997-12-18 | 2000-01-04 | United Solar Systems Corporation | Point contact photovoltaic module and method for its manufacture |
| JPH11312815A (ja) * | 1998-04-28 | 1999-11-09 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
| US7635810B2 (en) | 1999-03-30 | 2009-12-22 | Daniel Luch | Substrate and collector grid structures for integrated photovoltaic arrays and process of manufacture of such arrays |
| US6300593B1 (en) | 1999-12-07 | 2001-10-09 | First Solar, Llc | Apparatus and method for laser scribing a coated substrate |
| US6372538B1 (en) | 2000-03-16 | 2002-04-16 | University Of Delaware | Fabrication of thin-film, flexible photovoltaic module |
| US6559411B2 (en) | 2001-08-10 | 2003-05-06 | First Solar, Llc | Method and apparatus for laser scribing glass sheet substrate coatings |
| US7512297B2 (en) | 2003-05-02 | 2009-03-31 | John Farah | Polymide substrate bonded to other substrate |
| US7170001B2 (en) | 2003-06-26 | 2007-01-30 | Advent Solar, Inc. | Fabrication of back-contacted silicon solar cells using thermomigration to create conductive vias |
| US7649141B2 (en) | 2003-06-30 | 2010-01-19 | Advent Solar, Inc. | Emitter wrap-through back contact solar cells on thin silicon wafers |
| US7122398B1 (en) | 2004-03-25 | 2006-10-17 | Nanosolar, Inc. | Manufacturing of optoelectronic devices |
| US7838868B2 (en) | 2005-01-20 | 2010-11-23 | Nanosolar, Inc. | Optoelectronic architecture having compound conducting substrate |
| US7276724B2 (en) | 2005-01-20 | 2007-10-02 | Nanosolar, Inc. | Series interconnected optoelectronic device module assembly |
| US20070186971A1 (en) | 2005-01-20 | 2007-08-16 | Nanosolar, Inc. | High-efficiency solar cell with insulated vias |
| JP4681352B2 (ja) | 2005-05-24 | 2011-05-11 | 本田技研工業株式会社 | カルコパイライト型太陽電池 |
| DE102005042072A1 (de) | 2005-06-01 | 2006-12-14 | Forschungsverbund Berlin E.V. | Verfahren zur Erzeugung von vertikalen elektrischen Kontaktverbindungen in Halbleiterwafern |
| US9211609B2 (en) * | 2005-12-28 | 2015-12-15 | Intel Corporation | Laser via drilling apparatus and methods |
| US20080023065A1 (en) | 2006-07-25 | 2008-01-31 | Borden Peter G | Thin film photovoltaic module wiring for improved efficiency |
| US7999174B2 (en) * | 2006-10-09 | 2011-08-16 | Solexel, Inc. | Solar module structures and assembly methods for three-dimensional thin-film solar cells |
| US8153889B2 (en) | 2007-01-22 | 2012-04-10 | Solopower, Inc. | Roll-to-roll integration of thin film solar modules |
| US8716591B2 (en) | 2007-06-20 | 2014-05-06 | Ascent Solar Technologies, Inc. | Array of monolithically integrated thin film photovoltaic cells and associated methods |
| US20110041890A1 (en) | 2007-11-19 | 2011-02-24 | Sheats James R | High-efficiency, high current solar cell and solar module |
| US20090145472A1 (en) * | 2007-12-10 | 2009-06-11 | Terra Solar Global, Inc. | Photovoltaic devices having conductive paths formed through the active photo absorber |
| KR101368904B1 (ko) | 2007-12-31 | 2014-02-28 | 주성엔지니어링(주) | 박막형 태양전지 및 그 제조방법 |
| US20090229666A1 (en) | 2008-03-14 | 2009-09-17 | Jason Stephan Corneille | Smoothing a metallic substrate for a solar cell |
| KR20110020276A (ko) | 2008-06-04 | 2011-03-02 | 솔렉슨트 코포레이션 | 모노리식 집적 및 백사이드 컨택을 갖는 박막 태양 전지 |
| JP2011523228A (ja) | 2008-06-13 | 2011-08-04 | ソリブロ リサーチ アーベー | 薄膜太陽電池の選択的除去および接触 |
| US20100000589A1 (en) * | 2008-07-03 | 2010-01-07 | Amelio Solar, Inc. | Photovoltaic devices having conductive paths formed through the active photo absorber |
| US20110171757A1 (en) | 2008-09-22 | 2011-07-14 | Ulvac, Inc. | Method of manufacturing photovoltaic cell |
| WO2010039245A1 (en) | 2008-09-30 | 2010-04-08 | Global Solar Energy, Inc. | Thin film solar cell string |
| SE533596C2 (sv) | 2008-10-14 | 2010-11-02 | Atricon Ab | Förfarande och skivfixtur för montage av byggskivor |
| JP5180781B2 (ja) * | 2008-11-05 | 2013-04-10 | 三菱重工業株式会社 | 光電変換装置の製造方法および光電変換装置 |
| WO2011066367A1 (en) | 2009-11-30 | 2011-06-03 | Esi-Pyrophotonics Lasers, Inc. | Method and apparatus for scribing a line in a thin film using a series of laser pulses |
| US8759664B2 (en) | 2009-12-28 | 2014-06-24 | Hanergy Hi-Tech Power (Hk) Limited | Thin film solar cell strings |
| US8263494B2 (en) | 2010-01-25 | 2012-09-11 | Stion Corporation | Method for improved patterning accuracy for thin film photovoltaic panels |
| EP3557624A1 (en) * | 2010-05-28 | 2019-10-23 | Flisom AG | Method and apparatus for integrated optoelectronic modules with busbar and with via holes interconnects |
| US20130000715A1 (en) | 2011-03-28 | 2013-01-03 | Solexel, Inc. | Active backplane for thin silicon solar cells |
| US20120074109A1 (en) | 2010-09-29 | 2012-03-29 | General Electric Company | Method and system for scribing a multilayer panel |
| DE102010048522A1 (de) | 2010-10-14 | 2012-04-19 | Manz Automation Ag | Optisches System mit kaskadierten, verstellbaren Strahlteilern |
| US8329496B2 (en) | 2010-10-14 | 2012-12-11 | Miasole | Dithered scanned laser beam for scribing solar cell structures |
| US8048706B1 (en) | 2010-10-14 | 2011-11-01 | Miasole | Ablative scribing of solar cell structures |
| US20120094425A1 (en) | 2010-10-14 | 2012-04-19 | Miasole | Ablative scribing of solar cell structures |
| FR2972294B1 (fr) * | 2011-03-02 | 2013-04-26 | Commissariat Energie Atomique | Procede de gravure chimique selective |
| WO2012135052A1 (en) | 2011-03-25 | 2012-10-04 | Kevin Michael Coakley | Foil-based interconnect for rear-contact solar cells |
| CN103094408B (zh) * | 2011-10-31 | 2016-01-27 | 香港中文大学 | 太阳能电池及其制造方法以及太阳能电池图案 |
| US8841157B2 (en) * | 2012-01-04 | 2014-09-23 | Esi-Pyrophotonics Lasers Inc | Method and structure for using discontinuous laser scribe lines |
| US20130199606A1 (en) * | 2012-02-06 | 2013-08-08 | Applied Materials, Inc. | Methods of manufacturing back surface field and metallized contacts on a solar cell device |
| KR101832230B1 (ko) * | 2012-03-05 | 2018-04-13 | 엘지전자 주식회사 | 태양 전지 및 이의 제조 방법 |
| US9911881B2 (en) * | 2012-04-03 | 2018-03-06 | Flisom Ag | Thin-film photovoltaic device with wavy monolithic interconnects |
-
2015
- 2015-01-26 HU HUE15701852A patent/HUE046935T2/hu unknown
- 2015-01-26 US US15/111,975 patent/US10096731B2/en active Active
- 2015-01-26 EP EP15701852.4A patent/EP3100307B1/en active Active
- 2015-01-26 CN CN201580006416.7A patent/CN106258012B/zh active Active
- 2015-01-26 MY MYPI2016702494A patent/MY179233A/en unknown
- 2015-01-26 BR BR112016017717-7A patent/BR112016017717B1/pt active IP Right Grant
- 2015-01-26 WO PCT/IB2015/050555 patent/WO2015114498A1/en not_active Ceased
- 2015-01-26 KR KR1020167021506A patent/KR102235190B1/ko active Active
-
2018
- 2018-10-08 US US16/154,709 patent/US10566479B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000124488A (ja) * | 1998-10-15 | 2000-04-28 | Matsushita Electric Ind Co Ltd | 薄膜太陽電池の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3100307A1 (en) | 2016-12-07 |
| HUE046935T2 (hu) | 2020-03-30 |
| MY179233A (en) | 2020-11-02 |
| US10096731B2 (en) | 2018-10-09 |
| US20190157482A1 (en) | 2019-05-23 |
| US20160359065A1 (en) | 2016-12-08 |
| BR112016017717A2 (https=) | 2017-08-08 |
| CN106258012A (zh) | 2016-12-28 |
| US10566479B2 (en) | 2020-02-18 |
| WO2015114498A1 (en) | 2015-08-06 |
| KR20160117470A (ko) | 2016-10-10 |
| BR112016017717B1 (pt) | 2022-01-25 |
| CN106258012B (zh) | 2018-07-17 |
| EP3100307B1 (en) | 2019-09-18 |
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