CN106258012B - 用于光伏器件中的薄膜通孔段的方法 - Google Patents

用于光伏器件中的薄膜通孔段的方法 Download PDF

Info

Publication number
CN106258012B
CN106258012B CN201580006416.7A CN201580006416A CN106258012B CN 106258012 B CN106258012 B CN 106258012B CN 201580006416 A CN201580006416 A CN 201580006416A CN 106258012 B CN106258012 B CN 106258012B
Authority
CN
China
Prior art keywords
hole
line segment
laser
cigs
contact layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580006416.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN106258012A (zh
Inventor
R·齐特纳
T·内特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jim Fulisuo Co Ltd
Original Assignee
Jim Fulisuo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jim Fulisuo Co Ltd filed Critical Jim Fulisuo Co Ltd
Publication of CN106258012A publication Critical patent/CN106258012A/zh
Application granted granted Critical
Publication of CN106258012B publication Critical patent/CN106258012B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/33Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/167Photovoltaic cells having only PN heterojunction potential barriers comprising Group I-III-VI materials, e.g. CdS/CuInSe2 [CIS] heterojunction photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/16Material structures, e.g. crystalline structures, film structures or crystal plane orientations
    • H10F77/169Thin semiconductor films on metallic or insulating substrates
    • H10F77/1694Thin semiconductor films on metallic or insulating substrates the films including Group I-III-VI materials, e.g. CIS or CIGS
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • H10F77/707Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
CN201580006416.7A 2014-01-31 2015-01-26 用于光伏器件中的薄膜通孔段的方法 Active CN106258012B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IBPCT/IB2014/058708 2014-01-31
IB2014058708 2014-01-31
EP2014025031 2014-12-31
EPPCT/EP2014/025031 2014-12-31
PCT/IB2015/050555 WO2015114498A1 (en) 2014-01-31 2015-01-26 Method for thin-film via segments in photovoltaic device

Publications (2)

Publication Number Publication Date
CN106258012A CN106258012A (zh) 2016-12-28
CN106258012B true CN106258012B (zh) 2018-07-17

Family

ID=52434916

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580006416.7A Active CN106258012B (zh) 2014-01-31 2015-01-26 用于光伏器件中的薄膜通孔段的方法

Country Status (8)

Country Link
US (2) US10096731B2 (https=)
EP (1) EP3100307B1 (https=)
KR (1) KR102235190B1 (https=)
CN (1) CN106258012B (https=)
BR (1) BR112016017717B1 (https=)
HU (1) HUE046935T2 (https=)
MY (1) MY179233A (https=)
WO (1) WO2015114498A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3391418B1 (en) * 2015-12-15 2022-11-16 Flisom AG Solar module busbar
WO2017103663A1 (en) 2015-12-15 2017-06-22 Flisom Ag Structuring of a photovoltaic apparatus
US10700227B2 (en) 2016-01-06 2020-06-30 Flisom Ag Flexible photovoltaic apparatus
CN107785442A (zh) * 2016-08-31 2018-03-09 北京铂阳顶荣光伏科技有限公司 太阳能薄膜电池及其制备方法
EP3648173B1 (en) * 2018-10-30 2023-05-24 IMEC vzw Thin-film photovoltaic module with integrated electronics and methods for manufacturing thereof
CN111900218B (zh) * 2020-07-10 2023-05-12 唐山科莱鼎光电科技有限公司 用于制备薄膜太阳能电池第二道刻线的方法
CN119302057A (zh) * 2023-11-24 2025-01-10 中建材玻璃新材料研究院集团有限公司 基于表面修改的金属网格横纵比优化方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102105991A (zh) * 2008-11-05 2011-06-22 三菱重工业株式会社 光电转换装置的制造方法及光电转换装置
WO2011148346A1 (en) * 2010-05-28 2011-12-01 Flisom Ag Method and apparatus for thin film module with dotted interconnects and vias
WO2012117372A1 (fr) * 2011-03-02 2012-09-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de gravure chimique selective
CN103094408A (zh) * 2011-10-31 2013-05-08 香港中文大学 太阳能电池及其制造方法以及太阳能电池图案
WO2013150418A2 (en) * 2012-04-03 2013-10-10 Flisom Ag Thin-film photovoltaic device with wavy monolithic interconnects

Family Cites Families (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4697041A (en) 1985-02-15 1987-09-29 Teijin Limited Integrated solar cells
US4965655A (en) 1987-12-10 1990-10-23 Minnesota Mining And Manufacturing Company Interconnected semiconductor devices
JPH0243776A (ja) 1988-08-03 1990-02-14 Fuji Electric Corp Res & Dev Ltd 薄膜太陽電池の製造方法
JPH02268472A (ja) 1989-04-10 1990-11-02 Showa Shell Sekiyu Kk 光起電力装置およびその製造方法
JPH03124067A (ja) 1989-10-07 1991-05-27 Showa Shell Sekiyu Kk 光起電力装置およびその製造方法
US7732243B2 (en) 1995-05-15 2010-06-08 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US6011215A (en) 1997-12-18 2000-01-04 United Solar Systems Corporation Point contact photovoltaic module and method for its manufacture
JPH11312815A (ja) * 1998-04-28 1999-11-09 Matsushita Electric Ind Co Ltd 薄膜太陽電池の製造方法
JP2000124488A (ja) * 1998-10-15 2000-04-28 Matsushita Electric Ind Co Ltd 薄膜太陽電池の製造方法
US7635810B2 (en) 1999-03-30 2009-12-22 Daniel Luch Substrate and collector grid structures for integrated photovoltaic arrays and process of manufacture of such arrays
US6300593B1 (en) 1999-12-07 2001-10-09 First Solar, Llc Apparatus and method for laser scribing a coated substrate
US6372538B1 (en) 2000-03-16 2002-04-16 University Of Delaware Fabrication of thin-film, flexible photovoltaic module
US6559411B2 (en) 2001-08-10 2003-05-06 First Solar, Llc Method and apparatus for laser scribing glass sheet substrate coatings
US7512297B2 (en) 2003-05-02 2009-03-31 John Farah Polymide substrate bonded to other substrate
US7170001B2 (en) 2003-06-26 2007-01-30 Advent Solar, Inc. Fabrication of back-contacted silicon solar cells using thermomigration to create conductive vias
US7649141B2 (en) 2003-06-30 2010-01-19 Advent Solar, Inc. Emitter wrap-through back contact solar cells on thin silicon wafers
US7122398B1 (en) 2004-03-25 2006-10-17 Nanosolar, Inc. Manufacturing of optoelectronic devices
US7838868B2 (en) 2005-01-20 2010-11-23 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate
US7276724B2 (en) 2005-01-20 2007-10-02 Nanosolar, Inc. Series interconnected optoelectronic device module assembly
US20070186971A1 (en) 2005-01-20 2007-08-16 Nanosolar, Inc. High-efficiency solar cell with insulated vias
JP4681352B2 (ja) 2005-05-24 2011-05-11 本田技研工業株式会社 カルコパイライト型太陽電池
DE102005042072A1 (de) 2005-06-01 2006-12-14 Forschungsverbund Berlin E.V. Verfahren zur Erzeugung von vertikalen elektrischen Kontaktverbindungen in Halbleiterwafern
US9211609B2 (en) * 2005-12-28 2015-12-15 Intel Corporation Laser via drilling apparatus and methods
US20080023065A1 (en) 2006-07-25 2008-01-31 Borden Peter G Thin film photovoltaic module wiring for improved efficiency
US7999174B2 (en) * 2006-10-09 2011-08-16 Solexel, Inc. Solar module structures and assembly methods for three-dimensional thin-film solar cells
US8153889B2 (en) 2007-01-22 2012-04-10 Solopower, Inc. Roll-to-roll integration of thin film solar modules
US8716591B2 (en) 2007-06-20 2014-05-06 Ascent Solar Technologies, Inc. Array of monolithically integrated thin film photovoltaic cells and associated methods
US20110041890A1 (en) 2007-11-19 2011-02-24 Sheats James R High-efficiency, high current solar cell and solar module
US20090145472A1 (en) * 2007-12-10 2009-06-11 Terra Solar Global, Inc. Photovoltaic devices having conductive paths formed through the active photo absorber
KR101368904B1 (ko) 2007-12-31 2014-02-28 주성엔지니어링(주) 박막형 태양전지 및 그 제조방법
US20090229666A1 (en) 2008-03-14 2009-09-17 Jason Stephan Corneille Smoothing a metallic substrate for a solar cell
KR20110020276A (ko) 2008-06-04 2011-03-02 솔렉슨트 코포레이션 모노리식 집적 및 백사이드 컨택을 갖는 박막 태양 전지
JP2011523228A (ja) 2008-06-13 2011-08-04 ソリブロ リサーチ アーベー 薄膜太陽電池の選択的除去および接触
US20100000589A1 (en) * 2008-07-03 2010-01-07 Amelio Solar, Inc. Photovoltaic devices having conductive paths formed through the active photo absorber
US20110171757A1 (en) 2008-09-22 2011-07-14 Ulvac, Inc. Method of manufacturing photovoltaic cell
WO2010039245A1 (en) 2008-09-30 2010-04-08 Global Solar Energy, Inc. Thin film solar cell string
SE533596C2 (sv) 2008-10-14 2010-11-02 Atricon Ab Förfarande och skivfixtur för montage av byggskivor
WO2011066367A1 (en) 2009-11-30 2011-06-03 Esi-Pyrophotonics Lasers, Inc. Method and apparatus for scribing a line in a thin film using a series of laser pulses
US8759664B2 (en) 2009-12-28 2014-06-24 Hanergy Hi-Tech Power (Hk) Limited Thin film solar cell strings
US8263494B2 (en) 2010-01-25 2012-09-11 Stion Corporation Method for improved patterning accuracy for thin film photovoltaic panels
US20130000715A1 (en) 2011-03-28 2013-01-03 Solexel, Inc. Active backplane for thin silicon solar cells
US20120074109A1 (en) 2010-09-29 2012-03-29 General Electric Company Method and system for scribing a multilayer panel
DE102010048522A1 (de) 2010-10-14 2012-04-19 Manz Automation Ag Optisches System mit kaskadierten, verstellbaren Strahlteilern
US8329496B2 (en) 2010-10-14 2012-12-11 Miasole Dithered scanned laser beam for scribing solar cell structures
US8048706B1 (en) 2010-10-14 2011-11-01 Miasole Ablative scribing of solar cell structures
US20120094425A1 (en) 2010-10-14 2012-04-19 Miasole Ablative scribing of solar cell structures
WO2012135052A1 (en) 2011-03-25 2012-10-04 Kevin Michael Coakley Foil-based interconnect for rear-contact solar cells
US8841157B2 (en) * 2012-01-04 2014-09-23 Esi-Pyrophotonics Lasers Inc Method and structure for using discontinuous laser scribe lines
US20130199606A1 (en) * 2012-02-06 2013-08-08 Applied Materials, Inc. Methods of manufacturing back surface field and metallized contacts on a solar cell device
KR101832230B1 (ko) * 2012-03-05 2018-04-13 엘지전자 주식회사 태양 전지 및 이의 제조 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102105991A (zh) * 2008-11-05 2011-06-22 三菱重工业株式会社 光电转换装置的制造方法及光电转换装置
WO2011148346A1 (en) * 2010-05-28 2011-12-01 Flisom Ag Method and apparatus for thin film module with dotted interconnects and vias
WO2012117372A1 (fr) * 2011-03-02 2012-09-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de gravure chimique selective
CN103094408A (zh) * 2011-10-31 2013-05-08 香港中文大学 太阳能电池及其制造方法以及太阳能电池图案
WO2013150418A2 (en) * 2012-04-03 2013-10-10 Flisom Ag Thin-film photovoltaic device with wavy monolithic interconnects

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Change of electrical properties of CIGS thin-film solar cells after structuring with ultrashort laser pulses V;A. Wehrmann,et al.;《Proc. of SPIE》;20110221;第7921卷;全文 *

Also Published As

Publication number Publication date
EP3100307A1 (en) 2016-12-07
HUE046935T2 (hu) 2020-03-30
MY179233A (en) 2020-11-02
US10096731B2 (en) 2018-10-09
US20190157482A1 (en) 2019-05-23
US20160359065A1 (en) 2016-12-08
BR112016017717A2 (https=) 2017-08-08
KR102235190B1 (ko) 2021-04-02
CN106258012A (zh) 2016-12-28
US10566479B2 (en) 2020-02-18
WO2015114498A1 (en) 2015-08-06
KR20160117470A (ko) 2016-10-10
BR112016017717B1 (pt) 2022-01-25
EP3100307B1 (en) 2019-09-18

Similar Documents

Publication Publication Date Title
CN106258012B (zh) 用于光伏器件中的薄膜通孔段的方法
CN104335351B (zh) 光伏薄层太阳能模块以及用于制造这种薄层太阳能模块的方法
US8841157B2 (en) Method and structure for using discontinuous laser scribe lines
US9306093B2 (en) Chalcopyrite-type semiconductor photovoltaic device
PT1319254E (pt) Método para a produção de um contacto metálico semicondutor atrvés de uma camada dieléctrica.
US20160247960A1 (en) Method for Fabricating a Photovoltaic Cell
TWI433340B (zh) 半導體元件以及增加半導體元件有效運作面積的方法
TW201141646A (en) Method and apparatus for scribing a line in a thin film using a series of laser pulses
CN114097095B (zh) 制造薄膜光伏产品的方法
CN102763220B (zh) 用于至少局部地除去层堆叠的层的方法
WO2012051574A2 (en) Ablative scribing of solar cell structures
CN104737300A (zh) 用于局部接触半导体元件的基于激光的方法和加工台
EP4000105B1 (en) Method of manufacturing a thin-film photovoltaic product
Schultz et al. Laser-based series interconnection of chalcopyrite und perovskite solar cells: Analysis of material modifications and implications for achieving small dead area widths
JP6635924B2 (ja) 光起電デバイスの薄膜ビアセグメントのための方法
CN103094408B (zh) 太阳能电池及其制造方法以及太阳能电池图案
CN202199936U (zh) 太阳电池前电极激光加工装置
WO2013026463A1 (en) Laser scribing process
TW201440125A (zh) 用於形成金屬矽化物層之方法
Gupta Laser-induced surface modification for photovoltaic device applications
Liu et al. Advanced Laser Technologies for Efficient Crystalline Silicon Solar Cells
Kuk Laser Scribing for CIGS Solar Module Fabrication
Patel et al. Why Pulse Duration Matters in Photovoltaics: Shorter Pulses for More Robust, Higher Quality Laser Scribes
Petsch et al. Laser micromachining of organic LEDs

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant