HUE046935T2 - Eljárás átmenõ furat szakaszok kialakítására egy vékonyréteges fotovoltaikus eszközben - Google Patents

Eljárás átmenõ furat szakaszok kialakítására egy vékonyréteges fotovoltaikus eszközben

Info

Publication number
HUE046935T2
HUE046935T2 HUE15701852A HUE15701852A HUE046935T2 HU E046935 T2 HUE046935 T2 HU E046935T2 HU E15701852 A HUE15701852 A HU E15701852A HU E15701852 A HUE15701852 A HU E15701852A HU E046935 T2 HUE046935 T2 HU E046935T2
Authority
HU
Hungary
Prior art keywords
thin film
via hole
photovoltaic device
film photovoltaic
forming via
Prior art date
Application number
HUE15701852A
Other languages
English (en)
Inventor
Roger Ziltener
Thomas Netter
Original Assignee
Flisom Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Flisom Ag filed Critical Flisom Ag
Publication of HUE046935T2 publication Critical patent/HUE046935T2/hu

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042PV modules or arrays of single PV cells
    • H01L31/0445PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H01L31/0463PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02366Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • H01L31/03923Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including AIBIIICVI compound materials, e.g. CIS, CIGS
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0749Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/541CuInSe2 material PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
HUE15701852A 2014-01-31 2015-01-26 Eljárás átmenõ furat szakaszok kialakítására egy vékonyréteges fotovoltaikus eszközben HUE046935T2 (hu)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IB2014058708 2014-01-31
EP2014025031 2014-12-31

Publications (1)

Publication Number Publication Date
HUE046935T2 true HUE046935T2 (hu) 2020-03-30

Family

ID=52434916

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE15701852A HUE046935T2 (hu) 2014-01-31 2015-01-26 Eljárás átmenõ furat szakaszok kialakítására egy vékonyréteges fotovoltaikus eszközben

Country Status (8)

Country Link
US (2) US10096731B2 (hu)
EP (1) EP3100307B1 (hu)
KR (1) KR102235190B1 (hu)
CN (1) CN106258012B (hu)
BR (1) BR112016017717B1 (hu)
HU (1) HUE046935T2 (hu)
MY (1) MY179233A (hu)
WO (1) WO2015114498A1 (hu)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10734538B2 (en) 2015-12-15 2020-08-04 Flisom Ag Structuring of a photovoltaic apparatus
US20190013418A1 (en) * 2015-12-15 2019-01-10 Flisom Ag Solar module busbar
WO2017118905A1 (en) 2016-01-06 2017-07-13 Flisom Ag Flexible photovoltaic apparatus
CN107785442A (zh) * 2016-08-31 2018-03-09 北京铂阳顶荣光伏科技有限公司 太阳能薄膜电池及其制备方法
EP3648173B1 (en) * 2018-10-30 2023-05-24 IMEC vzw Thin-film photovoltaic module with integrated electronics and methods for manufacturing thereof
CN111900218B (zh) * 2020-07-10 2023-05-12 唐山科莱鼎光电科技有限公司 用于制备薄膜太阳能电池第二道刻线的方法

Family Cites Families (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4697041A (en) 1985-02-15 1987-09-29 Teijin Limited Integrated solar cells
US4965655A (en) 1987-12-10 1990-10-23 Minnesota Mining And Manufacturing Company Interconnected semiconductor devices
JPH0243776A (ja) 1988-08-03 1990-02-14 Fuji Electric Corp Res & Dev Ltd 薄膜太陽電池の製造方法
JPH02268472A (ja) 1989-04-10 1990-11-02 Showa Shell Sekiyu Kk 光起電力装置およびその製造方法
JPH03124067A (ja) 1989-10-07 1991-05-27 Showa Shell Sekiyu Kk 光起電力装置およびその製造方法
US7732243B2 (en) 1995-05-15 2010-06-08 Daniel Luch Substrate structures for integrated series connected photovoltaic arrays and process of manufacture of such arrays
US6011215A (en) 1997-12-18 2000-01-04 United Solar Systems Corporation Point contact photovoltaic module and method for its manufacture
JPH11312815A (ja) * 1998-04-28 1999-11-09 Matsushita Electric Ind Co Ltd 薄膜太陽電池の製造方法
JP2000124488A (ja) * 1998-10-15 2000-04-28 Matsushita Electric Ind Co Ltd 薄膜太陽電池の製造方法
US7635810B2 (en) 1999-03-30 2009-12-22 Daniel Luch Substrate and collector grid structures for integrated photovoltaic arrays and process of manufacture of such arrays
US6300593B1 (en) 1999-12-07 2001-10-09 First Solar, Llc Apparatus and method for laser scribing a coated substrate
US6372538B1 (en) 2000-03-16 2002-04-16 University Of Delaware Fabrication of thin-film, flexible photovoltaic module
US6559411B2 (en) 2001-08-10 2003-05-06 First Solar, Llc Method and apparatus for laser scribing glass sheet substrate coatings
US7512297B2 (en) 2003-05-02 2009-03-31 John Farah Polymide substrate bonded to other substrate
US7170001B2 (en) 2003-06-26 2007-01-30 Advent Solar, Inc. Fabrication of back-contacted silicon solar cells using thermomigration to create conductive vias
US7649141B2 (en) 2003-06-30 2010-01-19 Advent Solar, Inc. Emitter wrap-through back contact solar cells on thin silicon wafers
US7122398B1 (en) 2004-03-25 2006-10-17 Nanosolar, Inc. Manufacturing of optoelectronic devices
US7276724B2 (en) 2005-01-20 2007-10-02 Nanosolar, Inc. Series interconnected optoelectronic device module assembly
US7838868B2 (en) 2005-01-20 2010-11-23 Nanosolar, Inc. Optoelectronic architecture having compound conducting substrate
US20070186971A1 (en) 2005-01-20 2007-08-16 Nanosolar, Inc. High-efficiency solar cell with insulated vias
JP4681352B2 (ja) 2005-05-24 2011-05-11 本田技研工業株式会社 カルコパイライト型太陽電池
DE102005042072A1 (de) 2005-06-01 2006-12-14 Forschungsverbund Berlin E.V. Verfahren zur Erzeugung von vertikalen elektrischen Kontaktverbindungen in Halbleiterwafern
US9211609B2 (en) * 2005-12-28 2015-12-15 Intel Corporation Laser via drilling apparatus and methods
US20080023065A1 (en) 2006-07-25 2008-01-31 Borden Peter G Thin film photovoltaic module wiring for improved efficiency
US7999174B2 (en) * 2006-10-09 2011-08-16 Solexel, Inc. Solar module structures and assembly methods for three-dimensional thin-film solar cells
TW200840068A (en) 2007-01-22 2008-10-01 Solopower Inc Roll-to-roll integration of thin film solar modules
WO2008157807A2 (en) 2007-06-20 2008-12-24 Ascent Solar Technologies, Inc. Array of monolithically integrated thin film photovoltaic cells and associated methods
WO2009067526A2 (en) 2007-11-19 2009-05-28 Sheats James R High-efficiency, high current solar cell and solar module
US20090145472A1 (en) * 2007-12-10 2009-06-11 Terra Solar Global, Inc. Photovoltaic devices having conductive paths formed through the active photo absorber
KR101368904B1 (ko) 2007-12-31 2014-02-28 주성엔지니어링(주) 박막형 태양전지 및 그 제조방법
US20090229666A1 (en) 2008-03-14 2009-09-17 Jason Stephan Corneille Smoothing a metallic substrate for a solar cell
US20090301543A1 (en) 2008-06-04 2009-12-10 Solexant Corp. Thin film solar cells with monolithic integration and backside contact
CA2731288A1 (en) 2008-06-13 2009-12-17 Solibro Research Ab Selective removal and contacting of thin film solar cells
US20100000589A1 (en) * 2008-07-03 2010-01-07 Amelio Solar, Inc. Photovoltaic devices having conductive paths formed through the active photo absorber
US20110171757A1 (en) 2008-09-22 2011-07-14 Ulvac, Inc. Method of manufacturing photovoltaic cell
WO2010039245A1 (en) 2008-09-30 2010-04-08 Global Solar Energy, Inc. Thin film solar cell string
SE533596C2 (sv) 2008-10-14 2010-11-02 Atricon Ab Förfarande och skivfixtur för montage av byggskivor
JP5180781B2 (ja) * 2008-11-05 2013-04-10 三菱重工業株式会社 光電変換装置の製造方法および光電変換装置
CA2782560A1 (en) 2009-11-30 2011-06-03 Mathew Rekow Method and apparatus for scribing a line in a thin film using a series of laser pulses
US8759664B2 (en) 2009-12-28 2014-06-24 Hanergy Hi-Tech Power (Hk) Limited Thin film solar cell strings
US8263494B2 (en) 2010-01-25 2012-09-11 Stion Corporation Method for improved patterning accuracy for thin film photovoltaic panels
US8928105B2 (en) * 2010-05-28 2015-01-06 Flisom Ag Method and apparatus for thin film module with dotted interconnects and vias
US20130000715A1 (en) 2011-03-28 2013-01-03 Solexel, Inc. Active backplane for thin silicon solar cells
US20120074109A1 (en) 2010-09-29 2012-03-29 General Electric Company Method and system for scribing a multilayer panel
US8329496B2 (en) 2010-10-14 2012-12-11 Miasole Dithered scanned laser beam for scribing solar cell structures
DE102010048522A1 (de) 2010-10-14 2012-04-19 Manz Automation Ag Optisches System mit kaskadierten, verstellbaren Strahlteilern
US8048706B1 (en) 2010-10-14 2011-11-01 Miasole Ablative scribing of solar cell structures
US20120094425A1 (en) 2010-10-14 2012-04-19 Miasole Ablative scribing of solar cell structures
FR2972294B1 (fr) * 2011-03-02 2013-04-26 Commissariat Energie Atomique Procede de gravure chimique selective
WO2012135052A1 (en) 2011-03-25 2012-10-04 Kevin Michael Coakley Foil-based interconnect for rear-contact solar cells
CN103094408B (zh) * 2011-10-31 2016-01-27 香港中文大学 太阳能电池及其制造方法以及太阳能电池图案
US8841157B2 (en) * 2012-01-04 2014-09-23 Esi-Pyrophotonics Lasers Inc Method and structure for using discontinuous laser scribe lines
US20130199606A1 (en) * 2012-02-06 2013-08-08 Applied Materials, Inc. Methods of manufacturing back surface field and metallized contacts on a solar cell device
KR101832230B1 (ko) * 2012-03-05 2018-04-13 엘지전자 주식회사 태양 전지 및 이의 제조 방법
EP2834847B1 (en) * 2012-04-03 2021-06-02 Flisom AG Thin-film photovoltaic device with wavy monolithic interconnects

Also Published As

Publication number Publication date
US10096731B2 (en) 2018-10-09
EP3100307A1 (en) 2016-12-07
US20160359065A1 (en) 2016-12-08
KR102235190B1 (ko) 2021-04-02
WO2015114498A1 (en) 2015-08-06
US20190157482A1 (en) 2019-05-23
MY179233A (en) 2020-11-02
KR20160117470A (ko) 2016-10-10
US10566479B2 (en) 2020-02-18
EP3100307B1 (en) 2019-09-18
BR112016017717A2 (hu) 2017-08-08
CN106258012A (zh) 2016-12-28
CN106258012B (zh) 2018-07-17
BR112016017717B1 (pt) 2022-01-25

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