SG11201604779XA - Method for producing a block copolymer film on a substrate - Google Patents

Method for producing a block copolymer film on a substrate

Info

Publication number
SG11201604779XA
SG11201604779XA SG11201604779XA SG11201604779XA SG11201604779XA SG 11201604779X A SG11201604779X A SG 11201604779XA SG 11201604779X A SG11201604779X A SG 11201604779XA SG 11201604779X A SG11201604779X A SG 11201604779XA SG 11201604779X A SG11201604779X A SG 11201604779XA
Authority
SG
Singapore
Prior art keywords
producing
substrate
block copolymer
copolymer film
film
Prior art date
Application number
SG11201604779XA
Inventor
Guillaume Fleury
Christophe Navarro
Georges Hadziioannou
Celia Nicolet
Xavier Chevalier
Chrystilla Reboul
Véronica Castillo
Gilles Pecastaings
Original Assignee
Arkema France
Univ Bordeaux
Inst Polytechnique Bordeaux
Centre Nat Rech Scient
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Arkema France, Univ Bordeaux, Inst Polytechnique Bordeaux, Centre Nat Rech Scient filed Critical Arkema France
Publication of SG11201604779XA publication Critical patent/SG11201604779XA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D187/00Coating compositions based on unspecified macromolecular compounds, obtained otherwise than by polymerisation reactions only involving unsaturated carbon-to-carbon bonds
    • C09D187/005Block or graft polymers not provided for in groups C09D101/00 - C09D185/04
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J9/00Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
    • C08J9/26Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof by elimination of a solid phase from a macromolecular composition or article, e.g. leaching out
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J31/00Catalysts comprising hydrides, coordination complexes or organic compounds
    • B01J31/02Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides
    • B01J31/06Catalysts comprising hydrides, coordination complexes or organic compounds containing organic compounds or metal hydrides containing polymers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F293/00Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule
    • C08F293/005Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D153/00Coating compositions based on block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Coating compositions based on derivatives of such polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147Film patterning
    • B81C2201/0149Forming nanoscale microstructures using auto-arranging or self-assembling material
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2438/00Living radical polymerisation
    • C08F2438/02Stable Free Radical Polymerisation [SFRP]; Nitroxide Mediated Polymerisation [NMP] for, e.g. using 2,2,6,6-tetramethylpiperidine-1-oxyl [TEMPO]
SG11201604779XA 2013-12-13 2014-12-10 Method for producing a block copolymer film on a substrate SG11201604779XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1362585A FR3014876B1 (en) 2013-12-13 2013-12-13 METHOD FOR PRODUCING A BLOCK COPOLYMER FILM ON A SUBSTRATE
PCT/FR2014/053254 WO2015086991A1 (en) 2013-12-13 2014-12-10 Method for producing a block copolymer film on a substrate

Publications (1)

Publication Number Publication Date
SG11201604779XA true SG11201604779XA (en) 2016-07-28

Family

ID=50179786

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201604779XA SG11201604779XA (en) 2013-12-13 2014-12-10 Method for producing a block copolymer film on a substrate

Country Status (9)

Country Link
US (1) US20160319158A1 (en)
EP (1) EP3080198A1 (en)
JP (1) JP6373998B2 (en)
KR (1) KR20160098378A (en)
CN (1) CN106029759B (en)
FR (1) FR3014876B1 (en)
SG (1) SG11201604779XA (en)
TW (1) TWI557166B (en)
WO (1) WO2015086991A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012151482A2 (en) 2011-05-04 2012-11-08 Cornell University Multiblock copolymer films, methods of making same, and uses thereof
CN109310955B (en) 2016-04-28 2022-08-30 特拉波尔技术公司 Charged homoporous materials for electrostatic separations
EP3541500B1 (en) 2016-11-17 2021-12-08 Shethji, Jayraj K. Isoporous self-assembled block copolymer films containing high molecular weight hydrophilic additives and methods of making the same
SG11201907674WA (en) 2017-02-22 2019-09-27 Terapore Tech Inc Ligand bound mbp membranes, uses and method of manufacturing
MX2019013534A (en) 2017-05-12 2020-02-10 Terapore Tech Inc Chemically resistant fluorinated multiblock polymer structures, methods of manufacturing and use.
CN111032200A (en) * 2017-07-25 2020-04-17 特拉波雷技术有限公司 Porous materials from complex block copolymer architectures
KR102146538B1 (en) * 2017-11-07 2020-08-20 주식회사 엘지화학 Polymer composition
FR3075800B1 (en) * 2017-12-21 2020-10-09 Arkema France ANTI-STICK COATS FOR TRANSFER PRINTING PROCESSES
KR20200130387A (en) 2018-03-12 2020-11-18 테라포어 테크놀로지스, 인코포레이티드 Isophorus mesoporous asymmetric block copolymer materials with macrovoids and method for preparing the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7407554B2 (en) * 2005-04-12 2008-08-05 International Business Machines Corporation Development or removal of block copolymer or PMMA-b-S-based resist using polar supercritical solvent
US9028859B2 (en) * 2006-07-07 2015-05-12 Advanced Cardiovascular Systems, Inc. Phase-separated block copolymer coatings for implantable medical devices
US7763319B2 (en) * 2008-01-11 2010-07-27 International Business Machines Corporation Method of controlling orientation of domains in block copolymer films
EP2442839B1 (en) 2009-04-09 2017-10-04 The University of Queensland Block copolymer blends
FR2974094A1 (en) * 2011-04-15 2012-10-19 Arkema France PROCESS FOR PREPARING SURFACES
US8513356B1 (en) * 2012-02-10 2013-08-20 Dow Global Technologies Llc Diblock copolymer blend composition
JP6228932B2 (en) * 2012-02-10 2017-11-08 ボード・オブ・リージエンツ,ザ・ユニバーシテイ・オブ・テキサス・システム Polylactic acid / silicon-containing block copolymer for nanolithography
JP5934565B2 (en) * 2012-04-20 2016-06-15 東京応化工業株式会社 Pattern reduction method and composition

Also Published As

Publication number Publication date
JP2017502123A (en) 2017-01-19
CN106029759A (en) 2016-10-12
FR3014876B1 (en) 2017-03-31
CN106029759B (en) 2019-08-16
KR20160098378A (en) 2016-08-18
FR3014876A1 (en) 2015-06-19
EP3080198A1 (en) 2016-10-19
US20160319158A1 (en) 2016-11-03
JP6373998B2 (en) 2018-08-15
TW201538578A (en) 2015-10-16
TWI557166B (en) 2016-11-11
WO2015086991A1 (en) 2015-06-18

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