KR102169295B1 - Autoclave Apparatus for Defoamation - Google Patents

Abstract

The present invention is a lower fixing chamber for supporting a substrate to which a film is attached; An upper fixing chamber disposed to be spaced upward from the lower fixing chamber; A fixing part coupled to the lower fixing chamber and the upper fixing chamber so that the lower fixing chamber and the upper fixing chamber are fixed; An opening/closing part for opening and closing a defoaming space disposed between the lower fixing chamber and the upper fixing chamber based on the vertical direction; And it relates to a degassing autoclave device comprising a lifting unit for lifting the opening and closing portion so as to move between the opening and closing portion sealing the defoaming space and an open position for opening the defoaming space.

Description

Autoclave Apparatus for Defoamation {Autoclave Apparatus for Defoamation}

The present invention relates to an autoclave device for defoaming for removing air bubbles between a substrate and a film.

In general, displays such as liquid crystal display (LCD), organic light emitting diodes (OLED), plasma display panels (PDP), electrophoretic displays (EPD), etc. Devices, solar cells, and the like are manufactured through various processes. This manufacturing process includes a film attachment process in which a film is attached to a substrate. For example, a liquid crystal display device may be manufactured through a film attaching process of attaching a polarizing film to a substrate.

When such a film attaching process is completed, a defoaming process is performed to remove air bubbles existing between the substrate and the film. In performing such a defoaming process, an autoclave device for defoaming is used. The degassing autoclave apparatus removes air bubbles between the substrate and the film by maintaining the substrate to which the film is attached through the film attaching process at high temperature and high pressure for a predetermined period of time.

1 is a schematic side cross-sectional view of an autoclave apparatus for defoaming according to the prior art.

Referring to FIG. 1, the autoclave device 100 for defoaming according to the prior art includes an elevation chamber 110 and an elevation unit 120.

The lifting chamber 110 supports the substrate 200 to which the film is attached. The lifting chamber 110 is disposed between the upper body 130 and the lower body 140 in the vertical direction. The substrate 200 to which the film is attached is inserted into the defoaming groove 111 formed in the lifting chamber 110 and supported by the lifting chamber 110. The defoaming groove 111 is formed on the upper surface of the lifting chamber 110. The upper surface of the lifting chamber 110 is a surface facing the upper body 130.

The elevating unit 120 is to elevate the elevating chamber 110. When the lifting unit 120 lowers the lifting chamber 110, the lifting chamber 110 is spaced apart from the upper body 130. In this state, the substrate 200 to which the film is attached is transported to be supported by the lifting chamber 110. After that, when the lifting unit 120 raises the lifting chamber 110, the lifting chamber 110 comes into contact with the upper body 130. Accordingly, a defoaming process for the substrate 200 to which the film is attached is performed while the defoaming groove 111 is sealed. When the lifting unit 120 lowers the lifting chamber 110 after the defoaming process is completed, the substrate 200 on which the defoaming step is completed is transported to be separated from the lifting chamber 110.

Here, in the process of performing the defoaming process, the internal pressure of the defoaming groove 111 increases, and the internal pressure acts in a direction in which the lifting chamber 110 is lowered. When the lifting chamber 110 descends due to the internal pressure, the sealing of the defoaming groove 111 is released, so that the quality of the substrate 200 on which the defoaming process is completed is deteriorated.

In order to prevent this, the autoclave device 100 for defoaming according to the prior art has a separate component for reinforcing the supporting force for the lifting chamber 110 so as to withstand the internal pressure acting on the lifting chamber 110. There is a problem in that a separate component must be provided that is coupled to the lifting unit 120 or supports the lifting chamber 110 separately from the lifting unit 120.

The present invention has been conceived to solve the above-described requirements, and is to provide an autoclave device for degassing that can prevent the quality of the substrate on which the degassing process is deteriorated due to internal pressure during the degassing process. .

In order to solve the problems as described above, the present invention may include the following configuration.

An autoclave device for defoaming according to the present invention includes a lower fixing chamber for supporting a substrate to which a film is attached; An upper fixing chamber disposed to be spaced upward from the lower fixing chamber; A fixing part coupled to the lower fixing chamber and the upper fixing chamber so that the lower fixing chamber and the upper fixing chamber are fixed; An opening/closing part for opening and closing a defoaming space disposed between the lower fixing chamber and the upper fixing chamber based on the vertical direction; And an elevating part for raising and lowering the opening/closing part so that the opening/closing part moves between a closed position sealing the defoaming space and an open position for opening the defoaming space.

According to the present invention, the following effects can be achieved.

The present invention may be implemented in a structure in which the lower fixing chamber and the upper fixing chamber can withstand even if the internal pressure increases during the degassing process. Accordingly, the present invention can improve the quality of the substrate on which the defoaming process is completed by implementing a stable process environment for the defoaming process.

The present invention can implement a stable process environment for the degassing process without a separate component for withstanding the internal pressure increased during the degassing process. Accordingly, the present invention can reduce the number of components and increase the period of maintenance work, thereby reducing operating costs.

In the present invention, since a process and time for operating a separate component to withstand an increased internal pressure during the degassing process can be omitted, the process time taken until the degassing process is completed can be shortened. Accordingly, the present invention can increase the productivity of the substrate on which the degassing process is completed by increasing the operation rate.

1 is a schematic side cross-sectional view of an autoclave device for defoaming according to the prior art
2 is a schematic perspective view of an autoclave device for defoaming according to the present invention
3 and 4 are schematic side cross-sectional views showing the autoclave device for defoaming according to the present invention based on line II of FIG. 2
5 is a schematic plan sectional view showing the autoclave device for defoaming according to the present invention based on the line II-II of FIG. 3
6 to 9 are schematic side cross-sectional views showing enlarged portions A of FIG. 3 in the degassing autoclave apparatus according to the first embodiment of the present invention;
10 to 13 are schematic side cross-sectional views showing an enlarged portion B of FIG. 4 in the degassing autoclave apparatus according to the first embodiment of the present invention;
14 is a schematic side view showing a modified embodiment in which the support member is detachably coupled in the degassing autoclave device according to the first embodiment of the present invention shown in FIG. 6
15 is a schematic side view showing a modified embodiment in which the support member is detachably coupled in the degassing autoclave device according to the first embodiment of the present invention shown in FIG. 10
16 and 17 are schematic side cross-sectional views showing an autoclave device for defoaming according to a second embodiment of the present invention based on line II of FIG. 2

Hereinafter, embodiments of an autoclave device for defoaming according to the present invention will be described in detail with reference to the accompanying drawings.

2 to 4, the degassing autoclave device 1 according to the present invention includes a liquid crystal display (LCD), an organic light emitting display (OLED), a plasma display panel (PDP), and an electrophoretic display device (EPD). ), such as display devices, solar cells, and lighting devices. The autoclave apparatus 1 for defoaming according to the present invention performs a defoaming step of removing air bubbles existing between a substrate and a film attached to each other in the above manufacturing step. For example, in the case of a manufacturing process for manufacturing a liquid crystal display device, the degassing autoclave device 1 according to the present invention can remove bubbles existing between a substrate and a polarizing film attached to each other.

To this end, the degassing autoclave device 1 according to the present invention includes a lower fixing chamber 2 for supporting the substrate 200 to which a film is attached, and an upper portion spaced upwardly from the lower fixing chamber 2. A fixed chamber (3), a fixed portion (4) for fixing the lower fixed chamber (2) and the upper fixed chamber (3), an opening and closing portion (5) for opening and closing the defoaming space (10), and the opening and closing portion (5) It includes an elevating unit 6 for elevating and descending.

The defoaming space 10 is disposed between the lower fixing chamber 2 and the upper fixing chamber 3 based on the vertical direction (Z-axis direction). As shown in FIG. 3, when the opening/closing part 5 is located in a closed position, the opening/closing part 5 may seal the defoaming space 10. In this state, the defoaming process is performed on the substrate 200 to which the film is attached in the defoaming space 10. As shown in FIG. 4, when the opening/closing part 5 is located in an open position, the opening/closing part 5 may open the defoaming space 10. In this state, an unloading process of unloading the film-attached substrate 200 from the defoaming space 10, and a loading process of loading the film-attached substrate 200 into the defoaming space 10 are performed. .

As described above, in the degassing autoclave device 1 according to the present invention, in the state in which both the lower process chamber 2 and the upper fixing chamber 3 are fixed by the fixing part 4, the opening and closing part It is implemented to open and close the defoaming space 10 using (5). Accordingly, the degassing autoclave device 1 according to the present invention reduces the internal pressure of the defoaming space 10 to the lower fixed chamber even if the internal pressure of the defoaming space 10 increases during the defoaming process. (2) and the upper fixing chamber (3) is implemented in a structure that can withstand firmly. This is because both the lower fixing chamber 2 and the upper fixing chamber 2 do not rise and fall, and are implemented in a fixed structure.

Therefore, the degassing autoclave device 1 according to the present invention can achieve the following effects.

In the degassing autoclave device 1 according to the present invention, even if the internal pressure of the defoaming space 10 increases during the defoaming process, the lower fixing chamber 2 and the upper fixing chamber 3 are rigid. It can be implemented in a structure that can withstand a lot. Accordingly, the autoclave apparatus 1 for defoaming according to the present invention can improve the quality of the substrate 200 on which the defoaming step has been completed by implementing a stable process environment for the defoaming step.

The degassing autoclave device 1 according to the present invention can realize a stable process environment for the defoaming process without a separate component for withstanding the internal pressure of the defoaming space 10 that increases during the defoaming process. have. Therefore, the degassing autoclave device 1 according to the present invention can reduce the number of components and increase the period of maintenance work, thereby reducing operating costs.

In the degassing autoclave device 1 according to the present invention, the process and time of operating a separate component for withstanding the internal pressure of the degassing space 10 that increases during the degassing process can be omitted. The process time taken until the degassing process is completed can be shortened. Accordingly, the degassing autoclave apparatus 1 according to the present invention can increase productivity of the substrate 200 on which the degassing process is completed by increasing the operation rate.

Hereinafter, the lower fixing chamber 2, the upper fixing chamber 3, the fixing part 4, the opening/closing part 5, and the lifting part 6 will be described in detail with reference to the accompanying drawings.

2 to 4, the lower fixing chamber 2 supports the substrate 200 to which the film is attached. Based on the vertical direction (Z-axis direction), the lower fixing chamber 2 is disposed at a position spaced downward from the upper fixing chamber 3. Based on the vertical direction (Z-axis direction), the lower fixing chamber 2 may be disposed below the defoaming space 10.

A mounting mechanism 21 for supporting the substrate 200 to which the film is attached may be installed in the lower fixing chamber 2. The seating mechanism 21 may be disposed above the lower fixing chamber 2 in the defoaming space 10. When the substrate 200 to which the film is attached is seated on the upper surface of the seating mechanism 21, the degassing process may be performed. The mounting mechanism 21 may be implemented as a conveyor, but is not limited thereto, and may be implemented in a structure capable of supporting the substrate 200 to which the film is attached in various ways, such as a support pin.

A heating member (not shown) for heating the substrate 200 to which the film is attached may be installed in the mounting mechanism 21. The heating member may heat the substrate 200 to which the film is attached while generating heat as power is supplied. The heating member may be installed in the lower fixing chamber 2. In this case, the heating member may heat the substrate 200 to which the film is attached by heating the defoaming space 10. The degassing autoclave device 1 according to the present invention can omit a separate component for enduring the internal pressure of the defoaming space 10 that increases in the process of performing the defoaming process, so a space for installing the component There is no need to secure the lower fixing chamber (2). Accordingly, the degassing autoclave device 1 according to the present invention can uniformly install the heating member in the lower fixing chamber 2, so that the substrate 200 to which the film is attached is brought to a uniform temperature. Can be heated. Accordingly, the autoclave apparatus 1 for defoaming according to the present invention can further improve the quality of the substrate 200 on which the defoaming process is completed.

2 to 4, the upper fixing chamber 3 is disposed to be spaced upward from the lower fixing chamber 2. Based on the vertical direction (Z-axis direction), the upper fixing chamber 3 may be disposed above the defoaming space 10.

A gas supply unit (not shown) for supplying gas to the defoaming space 10 may be installed in the upper fixing chamber 3. As shown in FIG. 3, in a state in which the opening and closing part 5 closes the defoaming space 10, the gas supply part supplies gas to the defoaming space 10 to reduce the internal pressure of the defoaming space 10. Can increase. Accordingly, a degassing process in which air bubbles existing between the film and the substrate 200 are improved may be performed. The gas supply unit may be installed in the lower fixing chamber 2. The gas supply unit may be installed in at least one of the upper fixing chamber 3 and the lower fixing chamber 2. The heating member may be installed in the upper fixing chamber 3. The heating member may be installed in at least one of the upper fixing chamber 3 and the lower fixing chamber 2.

2 to 4, the fixing part 4 fixes the lower fixing chamber 2 and the upper fixing chamber 3. Due to the fixing part 4, the lower fixing chamber 2 and the upper fixing chamber 3 modes have a fixed structure that does not rise or fall during the degassing process, the loading process, and the unloading process. Is implemented. Accordingly, even if the internal pressure of the defoaming space 10 increases during the degassing process, the lower fixing chamber 2 and the upper fixing chamber 3 firmly maintain the internal pressure of the defoaming space 10. It is implemented in a structure that can be endured.

The fixing part 4 may be coupled to the lower fixing chamber 2 and the upper fixing chamber 3. The fixing part 4 is the lower fixing chamber 2 so that the distance between the lower fixing chamber 2 and the upper fixing chamber 3 is not changed and remains the same based on the vertical direction (Z-axis direction). ) And the upper fixing chamber 3 may be fixed. The fixing part 4 may be coupled to the lower fixing chamber 2 and the upper fixing chamber 3 outside the defoaming space 10. For example, the fixing part 4 may be coupled to each of a side surface of the lower fixing chamber 2 and a side surface of the upper fixing chamber 3. The fixing part 4 may be coupled to the lower fixing chamber 2 and the upper fixing chamber 3 using fastening means such as bolts.

The autoclave apparatus 1 for defoaming according to the present invention may include a plurality of the fixing parts 4. In this case, the fixing parts 4 may be coupled to the lower fixing chamber 2 and the upper fixing chamber 3 at positions spaced apart from each other. Accordingly, the degassing autoclave device 1 according to the present invention can further enhance the fixing force for the lower fixing chamber 2 and the upper fixing chamber 2.

Referring to FIGS. 2 to 5, the opening and closing part 5 opens and closes the defoaming space 10. As shown in FIG. 3, when the opening and closing part 5 is located in the closed position, the opening and closing part 5 may seal the defoaming space 10. In this state, the defoaming process may be performed. As shown in FIG. 4, when the opening/closing part 5 is located in the open position, the opening/closing part 5 may open the removing space 10. In this state, the loading process and the unloading process can be performed. Therefore, the degassing autoclave device 1 according to the present invention uses the opening and closing part 5 even if both the lower fixing chamber 2 and the upper fixing chamber 3 are implemented in a fixed structure without raising or lowering. Thus, the defoaming process, the loading process, and the unloading process may be implemented.

The opening/closing part 5 may include a plurality of opening/closing members 51 (shown in FIG. 5) for sealing the defoaming space 10. The opening and closing members 51 may be coupled to be connected to each other so as to surround the defoaming space 10 in the closed position. The opening and closing members 51 are arranged to surround the sides of the defoaming space 10 in the closed position, so that gas existing inside the defoaming space 10 can be prevented from leaking to the outside. In this case, when the lower fixing chamber 2 is disposed below the defoaming space 10 and the upper fixing chamber 3 is disposed above the defoaming space 10, the defoaming space 10 The opening and closing members 51 may be disposed on the sides. Therefore, when the opening and closing members 51 are located in the closed position, the defoaming space 10 is sealed by the lower fixing chamber 2, the upper fixing chamber 3, and the opening and closing members 51. Can be. When the opening and closing members 51 are located in the open position, sides of the defoaming space 10 may be opened. Accordingly, the loading process and the unloading process may be performed through the open sides of the defoaming space 10.

The opening and closing part 5 includes a first opening/closing member 51a (shown in FIG. 5), a second opening/closing member 51b (shown in FIG. 5), a third opening/closing member 51c (shown in FIG. 5), and It may include four opening and closing members 51d (shown in FIG. 5).

The first opening and closing member 51a covers the first side of the defoaming space 10 (in the direction of the arrow D1, shown in FIG. 5) in the closed position. Accordingly, the first opening and closing member 51a may seal the first side (in the direction of arrow D1) of the defoaming space 10 in the closed position. The first opening and closing member 51a may open a first side (direction of arrow D1) of the defoaming space 10 in the open position.

The second opening and closing member 51b covers the second side of the defoaming space 10 (in the direction of arrow D2, shown in FIG. 5) in the closed position. Accordingly, the second opening and closing member 51b may seal the second side (in the direction of arrow D2) of the defoaming space 10 in the closed position. The second opening and closing member 51b may open a second side (direction of arrow D2) of the defoaming space 10 in the open position. The second opening and closing member 51b may be disposed to be opposite to the first opening and closing member 51a. In this case, the second side (direction of arrow D2) and the first side (direction of arrow D1) may be opposite to each other.

The third opening and closing member 51c covers the third side of the defoaming space 10 (in the direction of the arrow D3, shown in FIG. 5) in the closed position. Accordingly, the third opening and closing member 51c may seal the third side of the defoaming space 10 (in the direction of arrow D3) in the closed position. The third opening and closing member 51c may open a third side (direction of arrow D3) of the defoaming space 10 in the open position. The third opening and closing member 51c may be coupled to each of the first opening and closing member 51a and the second opening and closing member 51b.

The fourth opening and closing member 51d covers the fourth side of the defoaming space 10 (in the direction of arrow D4, shown in FIG. 5) in the closed position. Accordingly, the fourth opening and closing member 51d may seal the fourth side (in the direction of arrow D4) of the defoaming space 10 in the closed position. The fourth opening and closing member 51d may open a fourth side (direction of arrow D4) of the defoaming space 10 in the open position. The fourth opening and closing member 51d may be coupled to each of the first opening and closing member 51a and the second opening and closing member 51b. Based on the first opening and closing member 51a and the second opening and closing member 51b, the fourth opening and closing member 51d and the third opening and closing member 51c may be disposed opposite to each other. In this case, the fourth opening and closing member 51d may be disposed to face the third opening and closing member 51c. In this case, the fourth side (direction of arrow D4) and the third side (direction of arrow D3) may be opposite to each other.

In this way, the fourth opening and closing member 51d, the third opening and closing member 51c, the second opening and closing member 51b, and the first opening and closing member 51a are coupled to be connected to each other, thereby forming a closed ring. Can be achieved. Accordingly, the fourth opening and closing member (51d), the third opening and closing member (51c), the second opening and closing member (51b), and the first opening and closing member (51a) is the defoaming space (10) in the closed position By being arranged to surround the degassing space 10 can be sealed. In this case, when the internal pressure of the defoaming space 10 increases, each of the first opening and closing member 51a and the second opening and closing member 51b facing each other has a first internal pressure P1 (shown in FIG. 5) and The second internal pressures P2 (shown in FIG. 5) act in opposite directions. Each of the third opening and closing member 51c and the fourth opening and closing member 51d facing each other has a third internal pressure (P3, shown in FIG. 5) and a fourth internal pressure (P4, shown in FIG. 5) opposite to each other. Acts in the direction of being. Accordingly, in the degassing autoclave device 1 according to the present invention, the first internal pressure P1 and the second internal pressure P2 cancel each other, and the third internal pressure P3 and the fourth internal pressure are Since the pressures P4 may cancel each other, it is implemented so that the defoaming space 10 can be tightly sealed. The fourth opening/closing member 51d, the third opening/closing member 51c, the second opening/closing member 51b, and the first opening/closing member 51a are connected to each other so as to form a rectangular ring with an empty inside. Can be combined.

The fourth opening and closing member 51d, the third opening and closing member 51c, the second opening and closing member 51b, and the first opening and closing member 51a are coupled to be connected to each other using a fastening means such as a bolt. I can. The fourth opening and closing member 51d, the third opening and closing member 51c, the second opening and closing member 51b, and the first opening and closing member 51a may be integrally formed.

2 to 5, the lifting part 6 lifts the opening/closing part 5 so that the opening/closing part 5 moves between the closed position and the open position. The opening and closing part 5 may be coupled to the elevating part 6. The lifting part 6 may be coupled to the lower fixing chamber 2 or the upper fixing chamber 3.

The elevating part 6 is a cylinder method using a hydraulic cylinder or a pneumatic cylinder, a ball screw method using a ball screw and a ball nut, etc., a rack gear and a pinion gear. Through the rack and pinion method using a lamp, a belt method using pulleys and belts, a linear motor method using coils and permanent magnets, and a cam method using a cam, etc. The opening and closing part 5 can be raised and lowered.

The autoclave apparatus 1 for defoaming according to the present invention may include a plurality of the lifting parts 6. The elevating parts 6 may be disposed at positions spaced apart from each other. The lifting parts 6 are coupled to different parts of the opening and closing part 5, so that the opening and closing part 5 can be raised and lowered. Accordingly, the degassing autoclave device 1 according to the present invention can reduce the degree of occurrence of inclination of the opening/closing unit 5 in the process of raising and lowering the opening/closing unit 5.

2 to 7, the autoclave device 1 for defoaming according to the present invention may include a sealing portion 7 (shown in FIG. 6).

The sealing part 7 is in contact with the opening and closing part 5 located in the closed position to seal the defoaming space 10. As shown in FIG. 7, when the opening and closing portion 5 is located in the open position, the sealing portion 7 may be spaced apart from the opening and closing portion 5. As shown in FIG. 6, when the opening/closing part 5 is located in the closed position, the sealing part 7 may contact the opening/closing part 5 to seal the defoaming space 10. In this case, the sealing portion 7 may be pressed by the opening and closing portion 5. Therefore, the degassing autoclave device 1 according to the present invention further enhances the sealing force for the defoaming space 10 by using the sealing part 7 when the opening and closing part 5 is located in the sealed position. I can. The sealing portion 7 may be formed of a material that can be stretched. For example, the sealing portion 7 may be formed of rubber or the like. The sealing part 7 may be implemented as an O-Ring.

Here, the degassing autoclave device 1 according to the present invention is largely in two embodiments according to the direction in which the lifting part 6 moves the opening and closing part 5 so that the opening and closing part 5 is located in the sealed position. It may include. Hereinafter, these embodiments will be sequentially described with reference to the accompanying drawings.

<First Example>

3 to 13, in the degassing autoclave device 1 according to the first embodiment of the present invention, the lifting part 6 lowers the opening and closing part 5 to be located in the sealed position, and the The lifting part 6 may be implemented in an embodiment in which the opening/closing part 5 is raised and positioned in the open position. A detailed look at this first embodiment is as follows.

3 and 4, in the degassing autoclave device 1 according to the first embodiment of the present invention, the lifting part 6 may be coupled to the upper fixing chamber 3. The upper fixing chamber 3 may be formed with an upper installation groove 30 into which the lifting part 6 is inserted. The elevating part 6 may be coupled to the upper fixing chamber 3 so as to be inserted into the upper installation groove 30. As shown in FIG. 3, the lifting part 6 may lower the opening/closing part 5 to be positioned in the closed position. As shown in FIG. 4, the lifting part 6 can be positioned in the open position by raising the opening/closing part 5.

6 and 7, in the degassing autoclave device 1 according to the first embodiment of the present invention, an insertion groove 22 (shown in FIG. 7) is formed in the lower fixing chamber 2 Can be. As shown in Figure 6, when the lifting part 6 lowers the opening and closing part 5 and is positioned in the closed position, the opening and closing part 5 is inserted into the insertion groove 22 (shown in FIG. 7). I can. Accordingly, the lower fixing chamber 2 may support the opening/closing part 5 inserted into the insertion groove 22 in the closed position. Accordingly, the opening and closing part 5 can be firmly maintained in a state in which the defoaming space 10 is sealed in the closed position. As shown in FIG. 7, when the lifting part 6 raises the opening/closing part 5 and is positioned in the open position, the opening/closing part 5 may be separated from the insertion groove 22.

The insertion groove 22 may be formed as a groove formed at a predetermined depth on the upper surface of the lower fixing chamber 2. The insertion groove 22 may be formed in a shape corresponding to a lower portion of the opening/closing part 5. When the opening and closing part 5 is formed in the shape of a square ring with an empty inside, the insertion groove 22 may be formed as a groove in the shape of a square ring. A part of the opening and closing part 5 may be inserted into the insertion groove 22.

6 and 7, in the degassing autoclave apparatus 1 according to the first embodiment of the present invention, the sealing portion 7 may include a lower sealing member 71.

The lower sealing member 71 seals a gap between the opening and closing part 5 and the lower fixing chamber 2 located in the sealed position. As shown in Fig. 6, when the lifting part 6 lowers the opening and closing part 5 and is positioned in the sealed position, the lower sealing member 71 is formed with the opening and closing part 5 and the lower fixing chamber 2 It can be located between. Accordingly, the lower sealing member 71 may seal the gap between the opening/closing part 5 and the lower fixing chamber 2, thereby sealing the defoaming space 10. As shown in FIG. 7, when the lifting part 6 raises the opening/closing part 5 and is positioned in the open position, the opening/closing part 5 may be spaced apart from the lower sealing member 71.

The lower sealing member 71 may be formed in a shape corresponding to the lower portion of the opening/closing part 5. When the opening/closing part 5 is formed in a rectangular ring shape with an empty inside, the lower sealing member 71 may be formed in a rectangular ring shape. The lower sealing member 71 may be inserted into the insertion groove 22. Accordingly, when the opening/closing part 5 descends and is inserted into the insertion groove 22, the opening/closing part 5 may contact the lower sealing member 71 within the insertion groove 22. Although not shown, the lower sealing member 71 may be inserted into another groove formed in the lower fixing chamber 2 other than the insertion groove 22. In this case, the lower sealing member 71 may be coupled to the lower fixing chamber 2 so that a part of the lower sealing member 71 protrudes upward from the lower fixing chamber 2.

8 and 9, the degassing autoclave apparatus 1 according to the first embodiment of the present invention may include a support portion 8 coupled to the lower fixing chamber 2.

The support portion 8 may be disposed between the opening and closing portion 5 located in the closed position and the lower fixing chamber 2 to support the opening and closing portion 5 located in the closed position. Accordingly, when the internal pressure of the defoaming space 10 acts on the opening and closing part 5 in the outer direction (the direction of the OD arrow) of the defoaming space 10, the support part 8 is in the inner direction (the ID arrow) Direction) by supporting the opening and closing portion 5, the sealing force of the opening and closing portion 5 may be further strengthened. The inward direction (direction of the ID arrow) is a direction opposite to the outward direction (direction of the OD arrow).

When the support portion 8 is provided, the opening and closing portion 5 may include a support groove 52 (shown in FIG. 9). When the lifting part 6 lowers the opening/closing part 5 and is positioned in the closed position, the support part 8 may be inserted into the support groove 52. Accordingly, the support portion 8 can be inserted into the support groove 52 to firmly support the opening and closing portion 5 located in the sealed position. As shown in FIG. 9, when the lifting part 6 raises the opening/closing part 5 and is positioned in the open position, the support part 8 may be separated from the support groove 52.

The support portion 8 may be coupled to the lower fixing chamber 2 to be inserted into the insertion groove 22 (shown in FIG. 9). In this case, the support portion 8 may be inserted into the insertion groove 22 so that a part of the support portion 8 protrudes upward from the lower fixing chamber 2. Accordingly, in the autoclave device 1 for defoaming according to the first embodiment of the present invention, the support portion 8 is inserted into the support groove 52 to increase the support area supporting the opening and closing portion 5. , It is possible to further strengthen the support for the opening and closing portion (5). When the lower sealing member 71 is inserted into the insertion groove 22, a partition member 23 for partitioning the insertion groove 22 may be formed in the lower fixing chamber 2. In this case, the lower sealing member 71 may be located in the inner direction (in the direction of the ID arrow) with respect to the partition member 23. The support portion 8 may be located in the outer direction (direction of an OD arrow) with respect to the partition member 23.

The autoclave device 1 for defoaming according to the first embodiment of the present invention may include a plurality of support portions 8. The support portions 8 may be disposed at positions spaced apart from each other and may be coupled to the lower fixing chamber 2. In this case, the opening/closing part 5 may include a plurality of support grooves 52 disposed at positions spaced apart from each other. When the opening and closing part 5 is located in the closed position, the support parts 8 may be inserted into each of the support grooves 52. Accordingly, the support portions 8 support different portions of the opening and closing portions 5 located in the closed position, thereby supporting the opening and closing portions 5 with a stronger supporting force.

6 to 8, in the degassing autoclave apparatus 1 according to the first embodiment of the present invention, the sealing portion 7 may include an upper sealing member 72. The upper sealing member 72 seals a gap between the opening and closing part 5 and the upper fixing chamber 3 located in the sealed position. As shown in FIGS. 6 and 8, when the lifting part 6 lowers the opening and closing part 5 and is positioned in the sealed position, the upper sealing member 72 comprises the opening and closing part 5 and the upper fixing chamber. (3) It can be located between. Accordingly, the upper sealing member 72 may seal the gap between the opening/closing part 5 and the upper fixing chamber 3, thereby sealing the defoaming space 10. 7 and 9, when the lifting part 6 raises the opening/closing part 5 and is positioned in the open position, the opening/closing part 5 may be spaced apart from the upper sealing member 72. .

The upper sealing member 72 may be formed in a shape corresponding to the inner surface of the opening/closing part 5. The inner surface of the opening/closing part 5 is a surface facing the inner direction (in the direction of the ID arrow). When the opening/closing part 5 is formed in a rectangular ring shape with an empty inside, the upper sealing member 72 may be formed in a rectangular ring shape. The upper sealing member 72 may be coupled to the upper fixing chamber 3 so as to protrude laterally from the side surface of the upper fixing chamber 3. Accordingly, the upper sealing member 72 can be compressed by the opening and closing portion 5 located in the closed position. Accordingly, the sealing force may be further strengthened against the gap between the opening/closing part 5 and the upper fixing chamber 3. A groove into which a part of the upper sealing member 72 is inserted may be formed on a side of the upper fixing chamber 3.

Referring to FIGS. 10 and 11, the degassing autoclave device 1 according to the first embodiment of the present invention may be implemented to reduce wear and the like on the upper sealing member 72.

To this end, the opening and closing part 5 may include a separation groove 53 and a pressing member 54.

The spacing groove 53 is the upper sealing member 72 is inserted in the open position. The spacing groove 53 may be formed on the inner surface of the opening and closing part 5. A portion in which the spacing groove 53 is formed on the inner surface of the opening/closing part 5 may be formed to have a thinner thickness than other portions.

The pressing member 54 presses the upper sealing member 72 in the sealed position. The pressing member 54 may be disposed above the spacing groove 53. Accordingly, in the process of lowering the opening/closing part 5 from the open position to the closed position, until the pressing member 54 contacts the upper sealing member 72, the upper sealing member 72 is It is disposed so as to be inserted into the spaced groove 53 so as to be spaced apart from the opening and closing part 5. In addition, when the pressing member 54 is spaced apart from the upper sealing member 72 in the process of ascending the opening and closing part 5 from the closed position to the open position, the upper sealing member 72 is separated from the separation groove ( It is disposed so as to be inserted into 53) can be spaced apart from the opening and closing part (5).

Therefore, in the autoclave device 1 for defoaming according to the first embodiment of the present invention, the upper sealing member 72 and the opening and closing part ( 5) It is possible to reduce the distance and time between contact. Accordingly, the degassing autoclave device 1 according to the first embodiment of the present invention reduces wear and the like on the upper sealing member 72, thereby reducing the service life and maintenance of the upper sealing member 72 The cycle of work can be increased.

The pressing member 54 may include a pressing surface 541. The pressing surface 541 may be formed to be inclined to increase a pressing force for pressing the upper sealing member 72 as the opening/closing part 5 moves from the open position to the closed position. As shown in FIG. 11, when the opening/closing part 5 is further lowered while the pressing surface 541 is in contact with the upper sealing member 72, the upper sealing member 72 becomes the pressing surface 541 This can be gradually compressed by the inclined surface. Accordingly, the pressing surface 541 may be implemented to further reduce wear and the like for the upper sealing member 72. When the pressing member 54 is located above the spacing groove 53, the pressing surface 541 may be formed to be inclined so as to protrude in the inward direction (in the direction of the ID arrow) as it extends upward.

Here, the upper fixing chamber 3 includes a first support protrusion 3a supporting the upper side of the upper sealing member 72, and a second support protrusion 3b supporting the lower side of the upper sealing member 72. It may include. Based on the vertical direction (Z-axis direction), the upper sealing member 72 may be disposed between the first support protrusion 3a and the second support protrusion 3b. The first support protrusion 3a may be formed to protrude shorter toward the outer direction (the OD arrow direction) than the second support protrusion 3b. Accordingly, in the autoclave device 1 for defoaming according to the present invention, since the pressing member 54 can further protrude in the inward direction (in the direction of the ID arrow), the length of the pressing surface 541 can be further increased. have. Therefore, in the autoclave device 1 for defoaming according to the present invention, the pressing surface 541 may be formed to be inclined so that the pressing force for pressing the upper sealing member 72 is increased more gradually, so that the upper sealing member 72 ) Can further reduce wear and so on. In addition, since the autoclave device 1 for defoaming according to the present invention can increase the contact area between the pressing surface 541 and the upper sealing member 72, the sealing force for the defoaming space 10 can be further strengthened. have.

Referring to FIG. 12, the autoclave apparatus 1 for defoaming according to the first embodiment of the present invention may include a protruding member 55.

The protruding member 55 protrudes from the opening/closing part 5 in the inward direction (in the direction of the ID arrow). The inward direction (in the direction of the ID arrow) may be the same direction as the direction from the opening and closing part 5 located in the sealed position toward the defoaming space 10. When the opening/closing part 5 is located in the closed position, the protruding member 55 may contact the upper sealing member 72. The opening/closing part 5 and the protruding member 55 may be integrally formed.

The upper fixing chamber 3 may include a support member 31 protruding outwardly (in the direction of an ID arrow). The support member 31 may correspond to a part of the upper fixing chamber 3. The support member 31 may be located under the protruding member 55. The upper sealing member 72 may be coupled to the upper surface of the support member 31. Accordingly, the upper sealing member 72 may be disposed between the protruding member 55 and the support member 31 based on the vertical direction (Z-axis direction). The upper sealing member 72 may be coupled to the support member 31 so as to protrude upward from the upper surface of the support member 31.

As shown in FIG. 12, when the lifting part 6 raises the opening/closing part 5 and is positioned in the open position, the protruding member 55 is an upper sealing member 72 coupled to the support member 31. It can be placed in a position spaced upward from ). In this state, when the lifting part 6 lowers the opening/closing part 5 and is positioned in the sealed position, the protruding member 55 will contact the upper sealing member 72 coupled to the support member 31. I can. Accordingly, the upper sealing member 72 may seal the gap between the protruding member 55 and the support member 31, thereby sealing the defoaming space 10.

In this way, in the process of raising and lowering the opening/closing part 5 between the open position and the closed position, the upper sealing member 72 is implemented so that it does not directly contact the opening/closing part 5 do. The upper sealing member 72 may contact the protruding member 55 only when the opening and closing part 5 is positioned in the sealed position. Accordingly, the degassing autoclave device 1 according to the first embodiment of the present invention may be implemented to further reduce wear and the like for the upper sealing member 72.

Referring to FIG. 13, in the autoclave device 1 for defoaming according to the first embodiment of the present invention, the support member 31 may be implemented to be coupled to the upper fixing chamber 3. In this case, unlike the embodiment shown in FIG. 12, after the support member 31 and the upper fixing chamber 3 are separately manufactured, the support member 31 is coupled to the upper fixing chamber 3 It can be implemented in a structure that is.

The support member 31 may be disposed below the upper fixing chamber 3. The support member 31 may be implemented to protrude further in the outer direction (in the direction of the ID arrow) compared to the upper fixing chamber 3.

The support member 31 may be detachably coupled to the upper fixing chamber 3. Accordingly, in the autoclave device 1 for defoaming according to the first embodiment of the present invention, when maintenance work such as replacement or repair of the upper sealing member 72 is required, the support member 31 is By being separated from the upper fixing chamber 3, it can be implemented to improve the ease of maintenance work for the upper sealing member 72. Meanwhile, since the upper sealing member 72 and the protruding member 55 are the same as those described in the embodiment shown in FIG. 12, detailed descriptions thereof will be omitted.

As shown in Fig. 14, even in the embodiment in which the upper sealing member 72 is in contact with the inner surface of the opening and closing part 5, the support member 31 may be detachably coupled to the upper fixing chamber 3 I can. As shown in FIG. 15, even in an embodiment in which the upper sealing member 72 is in contact with the pressing surface 541 of the opening and closing part 5, the support member 31 is separated from the upper fixing chamber 3 It can be combined as much as possible.

In this way, when the support member 31 is detachably coupled to the upper fixing chamber 3, the support member 31 supports the lower surface of the upper sealing member 72 so that the upper fixing chamber 3 Can be detachably coupled to. Accordingly, in the degassing autoclave device 1 according to the first embodiment of the present invention, when the support member 31 is separated from the upper fixing chamber 3, the upper sealing member 72 is separated from the upper fixing chamber. Since it is implemented in a structure that can be easily separated from (3), it is possible to improve the ease of maintenance work for the upper sealing member 72.

<Second Example>

16 and 17, in the degassing autoclave device 1 according to the second embodiment of the present invention, the lifting part 6 raises the opening/closing part 5 to be positioned in the closed position, and the The lifting part 6 may be implemented in an embodiment in which the opening and closing part 5 is lowered and positioned in the open position.

In the autoclave device 1 for defoaming according to the second embodiment of the present invention, the lifting part 6 may be coupled to the lower fixing chamber 2. The lower fixing chamber 2 may have a lower installation groove 20 into which the elevating part 6 is inserted. The elevating part 6 may be coupled to the lower fixing chamber 2 so as to be inserted into the lower installation groove 20. As shown in FIG. 16, the lifting part 6 may be positioned in the closed position by raising the opening/closing part 5. As shown in FIG. 17, the lifting part 6 may be positioned in the open position by lowering the opening/closing part 5.

Although not shown, the autoclave device for defoaming according to the second embodiment of the present invention includes the insertion groove 22, the sealing portion 7, the support portion 8, and the separation shown in FIGS. 6 to 15 It may include a groove 53, the pressing member 54, the protruding member 55, and the support member 31. These configurations are implemented in the upper fixing chamber (3) is implemented in the lower fixing chamber (2), and the implementation in the lower fixing chamber (2) is implemented in the upper fixing chamber (3). Only different, as described in the degassing autoclave apparatus 1 according to the first embodiment of the present invention, a detailed description will be omitted.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions, modifications, and changes are possible within the scope of the technical spirit of the present invention. It will be obvious to those who have the knowledge of.

1: degassing autoclave device 2: lower fixing chamber
3: upper fixing chamber 4: fixing part
5: opening and closing part 6: lifting part
7: sealing part 8: support part
51: opening and closing member 52: support groove
53: separation groove 54: pressing member
55: protruding member 71: lower sealing member
72: upper sealing member 200: substrate

Claims (16)

A lower fixing chamber for supporting the substrate to which the film is attached;
An upper fixing chamber disposed to be spaced upward from the lower fixing chamber;
A fixing part coupled to the lower fixing chamber and the upper fixing chamber so that the lower fixing chamber and the upper fixing chamber are fixed;
An opening/closing part for opening and closing a defoaming space disposed between the lower fixing chamber and the upper fixing chamber based on the vertical direction; And
The opening and closing part includes a lifting part for raising and lowering the opening and closing part so as to move between a closed position for sealing the defoaming space and an open position for opening the defoaming space,
The opening and closing portion includes a plurality of opening and closing members for sealing the defoaming space, wherein the opening and closing members are coupled to each other to surround the defoaming space or integrally formed in the closed position,
Among the opening and closing members, the first opening and closing member and the second opening and closing member are disposed to face each other, and as the internal pressure of the defoaming space increases, the first internal pressure and the first internal pressure acting on the first opening and closing member The second internal pressure acting on the two opening and closing members is positioned in the closed position by the elevating part so that the second internal pressures acting in opposite directions and offset each other,
Among the opening and closing members, the third opening and closing member and the fourth opening and closing member are disposed to face each other, and as the internal pressure of the defoaming space increases, the third internal pressure and the third internal pressure acting on the third opening and closing member 4. An autoclave device for defoaming, characterized in that the fourth internal pressures acting on the four opening and closing members act in opposite directions and are offset from each other by the lifting unit and positioned in the closed position. The method of claim 1, wherein the opening and closing part
The first opening and closing member covers the first side of the defoaming space in the sealed position,
The second opening and closing member covers a second side of the defoaming space opposite to the first side of the defoaming space in the closed position,
The third opening and closing member is connected to each of the first opening and closing member and the second opening and closing member, and covers a third side of the defoaming space in the sealed position,
The fourth opening and closing member is connected to each of the first opening and closing member and the second opening and closing member, characterized in that to cover the fourth side of the defoaming space opposite to the third side of the defoaming space in the closed position Autoclave device for defoaming. delete delete The method of claim 1,
The elevating part is placed in the closed position by lowering the opening and closing part, and is positioned in the open position by raising the opening and closing part,
The lower fixing chamber is formed with an insertion groove into which the opening and closing part located in the sealed position is inserted,
The lower fixing chamber is a degassing autoclave device, characterized in that for supporting the opening and closing portion inserted into the insertion groove in the closed position. The method of claim 5,
It includes a sealing part that is in contact with the opening and closing part located in the sealed position to seal the defoaming space,
The sealing portion includes a lower sealing member inserted into the insertion groove,
The opening and closing part is inserted into the insertion groove at the closed position and is in contact with the lower sealing member. The method of claim 1,
Including a support portion coupled to the lower fixing chamber,
The opening and closing part includes a support groove into which the support part is inserted in the closed position,
The support portion is disposed between the opening and closing portion located in the closed position and the lower fixing chamber to support the opening and closing portion located in the closed position. The method of claim 7,
A plurality of support portions are coupled to the lower fixing chamber,
The support portions are disposed at positions spaced apart from each other,
The opening and closing part includes a plurality of support grooves disposed at positions spaced apart from each other,
The support portions are degassing autoclave device, characterized in that supporting different portions of the opening and closing portion located in the closed position. The method of claim 1,
It includes a sealing part that is in contact with the opening and closing part located in the sealed position to seal the defoaming space,
The sealing part is coupled to the upper fixing chamber to seal the gap between the opening and closing part located in the closed position and the upper fixing chamber, and the opening and closing part located in the closed position and the lower fixing chamber coupled to the lower fixing chamber. Degassing autoclave device comprising a lower sealing member to seal the space. The method of claim 9,
The opening and closing portion includes a spaced groove into which the upper sealing member is inserted in the open position, and a pressing member for pressing the upper sealing member in the closed position,
The upper sealing member is spaced apart from the opening and closing portion by being disposed to be inserted into the spacing groove when the opening and closing portion is located in the open position,
The pressing member includes a pressing surface formed inclined to increase a pressing force for pressing the upper sealing member as the opening and closing part moves from the open position to the closed position. The method of claim 10,
The upper fixing chamber includes a first supporting protrusion supporting an upper side of the upper sealing member, and a second supporting protrusion supporting a lower side of the upper sealing member,
The first support protrusion is a degassing autoclave device, characterized in that the outwardly protruding from the defoaming space toward the opening and closing portion located in the closed position shorter than the second support protrusion. The method of claim 9,
And a protruding member protruding from the opening and closing portion in an inward direction toward the defoaming space in the opening and closing portion located in the sealed position,
The upper fixing chamber includes a support member protruding in an outward direction opposite to the inward direction,
The support member is disposed to be located under the protruding member,
The upper sealing member is a degassing autoclave device, characterized in that coupled to the upper surface of the support member so as to be pressed against the protruding member as the opening and closing portion is positioned in the closed position. The method of claim 9,
A protruding member protruding from the opening and closing portion in an inward direction toward the defoaming space at the opening and closing portion located in the closed position, and a support member coupled to the upper fixing chamber so as to protrude outwardly opposite to the inward direction,
The support member is coupled to the upper fixing chamber so as to be located under the protruding member,
The upper sealing member is a degassing autoclave device, characterized in that coupled to the upper surface of the support member so as to be pressed against the protruding member as the opening and closing portion is positioned in the closed position. The method of claim 13,
The support member is a degassing autoclave device, characterized in that the detachably coupled to the upper fixing chamber. The method of claim 1,
An upper sealing member coupled to the upper fixing chamber to seal a gap between the opening and closing portion located in the closed position and the upper fixing chamber; And
And a support member detachably coupled to the upper fixing chamber to support a lower surface of the upper sealing member. The method of claim 1,
The elevating portion is coupled to the lower fixing chamber to raise the opening and closing portion to be positioned in the closed position and lower the opening and closing portion to be positioned in the open position.

Images