KR102166160B1 - Apparatus for collecting fluid - Google Patents

Abstract

The fluid collection apparatus of the present invention includes a substrate stage, a collection unit, and a drive assembly. The substrate stage is used to fix and rotate the substrate, and the collection unit surrounds the substrate stage to collect the fluid of the substrate. The drive assembly is connected to the collection unit and used to elevate the collection unit, and the drive assembly includes a transmission shaft, a power member connected to the transmission shaft, and a transmission shaft and a first lifting support member connected to the collection unit. The transmission shaft has a long axis, the power member drives the transmission shaft to rotate about the long axis, and rotation of the transmission shaft about the long axis drives the first lifting support member to lift the collection unit.

Description

Fluid collection device {APPARATUS FOR COLLECTING FLUID}

The present invention relates to equipment used in wet processes, and in particular to a device capable of collecting fluid after use.

Equipment currently used in the semiconductor wet process, for example, etching equipment and cleaning equipment typically include a waste liquid collection device to collect the used etching liquid and cleaning liquid. Currently some wet process equipment also has a rotatable worktable, and the waste liquid collection device includes a collection ring. A substrate, for example a wafer, may be fixed to the worktable and also rotates as the worktable rotates. The collection ring can be raised and lowered in a vertical direction to surround the workbench. In this way, it is possible to sprinkle the substrate and the liquid on the worktable (eg, etchant and cleaning liquid) into the collection ring with the centrifugal force generated on the worktable during rotation. Also, one collecting ring is typically connected to two power sources, such as a pneumatic cylinder or a motor. In other words, the lifting of one collecting ring is typically controlled by two power sources.

The fluid collection device provided by the present invention includes a transmission shaft and a collection unit used to collect fluid, and the fluid collection device raises and lowers the collection unit using the rotation of the transmission shaft.

The fluid collection apparatus provided by the present invention includes a substrate stage, a collection unit, and a drive assembly. The substrate stage is used to fix and rotate the substrate, and the collection unit surrounds the substrate stage to collect the fluid of the substrate. The drive assembly is connected to the collection unit and used to elevate the collection unit, and the drive assembly includes a transmission shaft, a power member connected to the transmission shaft, and a transmission shaft and a first lifting support member connected to the collection unit. The transmission shaft has a long axis, the power member drives the transmission shaft to rotate about the long axis, and rotation of the transmission shaft about the long axis drives the first lifting support member to lift the collection unit.

In one embodiment of the present invention, the drive assembly further includes a second lifting support member. The first lifting support member and the second lifting support member are installed at both ends of the transmission shaft, respectively, and both are connected to the collection unit.

In one embodiment of the present invention, the fluid collection device further includes a plurality of collection units and a plurality of drive assemblies, and the plurality of drive assemblies are each connected to a plurality of collection units, and each drive assembly includes a collection unit connected thereto. Driven so that the collecting unit connected thereto is raised and lowered, and thus the plurality of collecting units respectively raise and lower. The quantity of drive assemblies is equal to the quantity of collection units.

In one embodiment of the present invention, a plurality of transmission shafts of a plurality of drive assemblies are parallel to each other.

In one embodiment of the present invention, each collecting unit has a ring shape, and the plurality of collecting units are arranged concentrically. The plurality of drive assemblies further include a plurality of transmission shafts, a plurality of first lifting support members, and a plurality of second lifting support members, and the plurality of transmission shafts have different lengths, and one of the first lifting support members And one of the second lifting support members are installed at both ends of the same transmission shaft.

In one embodiment of the present invention, the transmission shaft is disposed horizontally under the substrate stage.

In one embodiment of the present invention, the first lifting support member includes a vertical lifting rod and a connecting rod. Both ends of the vertical lifting rod are connected to the bottom surface of the collecting unit and one end of the connecting rod, and the other end of the connecting rod is fixed to the transmission shaft, and the connecting rod is rotated by the transmission shaft rotating around the long axis, and the connecting rod rotates. The rod drives the vertical lifting rod to raise and lower the collecting unit.

In an embodiment of the present invention, the power member and the first lifting support member are separated from each other, and are respectively fixed to different positions of the transmission shaft.

In one embodiment of the present invention, the power member is installed below the substrate stage and around the substrate stage.

In one embodiment of the present invention, the power member is installed horizontally under the substrate stage.

Since the lifting of the collecting unit of the present invention is realized by driving the transmission shaft and the first lifting support member with one power member, the collecting unit can have a synchronized lifting power.

By using the driving of the power member, the transmission shaft can rotate around the long axis, and at the same time, the first lifting support member can be driven to lift the collection unit. More desirably, the fluid collection device can drive one collection unit with only one power member using the transmission shaft. Compared with the existing waste liquid collection device, the fluid collection device of the present invention can raise and lower all the collection units with a smaller number of power members, so the present invention can reduce the number of power members, and thus installation of power members You can reduce the cost.

The technical matters of the present invention have been briefly described above. The technical means of the present invention will be described in more detail, and the present invention will be further described by the following examples and drawings so that those skilled in the art can practice the present invention according to the contents of this specification, and easily understand the features and advantages of the present invention It will be described in detail.

1A is a cross-sectional view showing a fluid collection device according to an embodiment of the present invention.
1B is a three-dimensional view showing the fluid collection device of FIG. 1A.
1C is a side view showing an operating state of the fluid collection device of FIG. 1A.
1D is a side view showing an operating state of the fluid collection device of FIG. 1A.
2A is a partial cross-sectional view showing a fluid collection device according to another embodiment of the present invention.
2B is a partial perspective view showing the fluid collection device of FIG. 2A.

1A is a cross-sectional view showing a fluid collection device according to an embodiment of the present invention. Referring to FIG. 1A, the fluid collection device 100 includes a substrate stage 102. The substrate stage 102 is used to place the substrate 5, and the substrate 5 may be a wafer, for example, a silicon wafer used to manufacture an integrated circuit or a solar panel, or a light emitting diode. It may be a sapphire or gallium arsenide wafer used for manufacturing. Alternatively, the substrate 5 may be a glass substrate used to manufacture a liquid crystal display. The substrate stage 102 is used to fix and rotate the substrate 5, and the substrate stage 102 can fix the substrate 5 by electrostatic adsorption, vacuum adsorption, or mechanical contact methods.

Referring to FIG. 1A as an embodiment, the substrate stage 102 includes a mounting portion 102a and a rotation shaft 102b, the rotation shaft 102b is connected to the mounting portion 102a, and the substrate 5 is a mounting portion 102a. ) Can be placed on top. The rotation shaft 102b may be connected to a rotation mechanism (not shown), and the rotation mechanism may include a motor and a transmission, and the transmission unit is, for example, among gears, chains, belts and pulleys. It may contain at least one. When the motor is driven, mechanical energy generated by the motor is transmitted to the rotating shaft 102b through the electric unit to rotate the rotating shaft 102b. In this way, the rotating shaft 102b can rotate the substrate 5 by rotating the mounting portion 102a.

The fluid collection device 100 may be used in an etching machine or a cleaning machine (not shown), the etching machine and the cleaning machine may include a fluid supply device (not shown), and the fluid supply device is a nozzle Can have A nozzle is disposed above the substrate stage 102 to allow a fluid (e.g., being an etchant or cleaning liquid) to flow from the nozzle to the upper surface of the substrate 5, thus performing a wet etching process or a cleaning process. Since the substrate stage 102 can rotate the substrate 5 and the rotating substrate 5 can generate a centrifugal force, the centrifugal force will sprinkle the substrate 5 and the fluid located on the substrate stage 102 outside. I can.

1B is a three-dimensional view showing the fluid collection device of FIG. 1A, and FIG. 1A is a cross-sectional view taken along line 1B-1B of FIG. 1B. 1A and 1B, the fluid collection device 100 further includes a collection unit 104. The collection unit 104 has a ring shape, and the collection unit 104 surrounds the substrate stage 102. For example, the shape of the collection unit 104 may be the same or similar to the shape of the tire. When the substrate 5 rotates, the substrate 5 and the fluid located on the substrate stage 102 can be sprinkled with the collection unit 104. As such, the collection unit 104 can be used to collect the fluid of the substrate stage 102 and the substrate 5.

The fluid collection device 100 further includes a drive assembly 106. The drive assembly 106 may be connected to the collection unit 104 to raise and lower the collection unit 104. Specifically, the drive assembly 106 includes a transmission shaft 101 and a power member 103 connected to the transmission shaft 101. The transmission shaft 101 rotates around the major axis 101a and is horizontally disposed under the substrate stage 102. Accordingly, the long axis 101a of the transmission shaft 101 substantially extends along a horizontal plane. The power member 103 may drive the transmission shaft 101 to rotate about the long shaft 101a, and the transmission shaft 101 rotates about the long shaft 101a. Specifically, the power member 103 may include a power source 103c and a crank 105, and the power source 103c is pivotally connected to the crank 105 so that the crank 105 is a power source. Rotate against (103c).

1A and 1B, the power source 103c may be a pneumatic cylinder, and a cylinder 103b and a push rod 103a inserted into the cylinder 103b are provided. It includes, and the end of the push rod (103a) is pivotally connected to the crank (105), so the crank (105) can rotate relative to the push rod (103a). One end of the crank 105 is pivotally connected to the push rod 103a, but the other end of the crank 105 is fixed to the transmission shaft 101. Therefore, when the crank 105 rotates about the long shaft 101a, the transmission shaft 101 also rotates about the long shaft 101a.

It should be noted that in other embodiments, the power member 103 may be implemented by other means. For example, the power source 103c may be changed to a hydraulic cylinder (eg, a hydraulic cylinder) or a motor. Alternatively, the power member 103 may include a motor and a transmission unit, and the transmission unit may be any combination of a gear, a pulley, a chain, and a belt. For example, the surface of the transmission shaft 101 may have a plurality of teeth that engage with the gear, and the power member 103 includes a motor and a gear, and the gear of the power member 103 The teeth of the transmission shaft and 101 are engaged with each other. Therefore, when the motor of the power member 103 is operated, the rotating gear can rotate the transmission shaft 101 by driving it using teeth. Thus, the power member 103 is not limited to elements as shown in Figs. 1A and 1B.

The drive assembly 106 further includes a first lifting support member 107. The first lifting support member 107 is connected to the transmission shaft 101 and the collection unit 104. Rotation of the transmission shaft 101 about the long shaft 101a can transmit the power of the power member 103, and transmits the power to the first elevation support member 107 so that the first elevation support member 107 To raise or lower the collecting unit 104. That is, the power generated by the power member 103 is transmitted to the first lifting support member 107 through the rotation of the transmission shaft 101, thereby operating the first lifting support member 107 to operate the collection unit 104. Rise or fall. The first lifting support member 107 includes a vertical lifting rod 109 and a connecting rod 111. Both ends of the vertical lifting rod 109 are connected to the lower surface of the collecting unit 104 and one end of the connecting rod 111, respectively, and the vertical lifting rod 109 is pivotally connected to the connecting rod 111. The other end of the connecting rod 111 is fixed to the transmission shaft 101 and rotates the connecting rod 111 with the transmission shaft 101 rotating around the long axis 101a, and the rotating connecting rod 111 is vertically elevated. The rod 109 is driven to raise or lower the collecting unit 104.

Referring to FIG. 1B, the fluid collection device 100 may further include a guide member 119, and the guide member 119 has at least one guide hole (not shown in FIG. 1B ). The vertical lifting rod 109 is inserted into the guide hole and passes through the guide member 119. Since the vertical lifting rod 109 and the guide hole are formed with a loose fit, the vertical lifting rod 109 can move with respect to the guide member 119. The guide member 119 can guide the moving direction of the vertical lifting rod 109, the vertical lifting rod 109 only moves up and down, and the moving direction of the vertical lifting rod 109 is shifted, so that the collection unit 104 ) Can avoid being overturned.

In the embodiment of the present invention, the power member 103 and the first lifting support member 107 are separated from each other, and are fixedly installed at different positions of the transmission shaft 101, respectively. When a fluid (e.g., etchant, cleaning solution or gas) flows down from the collection unit 104 along the vertical lifting rod 109, the fluid may flow to the connecting rod 111 below, but the power member ( 103). Therefore, since the fluid leaked from the collection unit 104 is difficult to flow to the connecting rod 111, the power member 103 is less likely to be damaged by the leaked fluid.

1C to 1D are side views showing an operating state of the fluid collection device of FIG. 1A. 1C and 1D, the power member 103 may be horizontally disposed under the substrate stage 102 and around the substrate stage 102. In other words, the power source 103c can be placed horizontally under the substrate stage 102, thus allowing the push rod 103a to move in a substantially horizontal direction. In this way, during the driving period of the power source 103c, for example, in the process of expanding and contracting the push rod 103a, the height of the power member 103 is basically unchanged, and thus the fluid collection device 100 is relatively It makes it possible to maintain a low overall height and helps to improve space utilization.

Referring to FIG. 1C, for example, when the push rod 103a of the power member 103 extends long, the collection unit 104 is located at an initial level. Referring to FIG. 1D, when the push rod 103a of the power member 103 is retracted, the crank 105 is driven by the push rod 103a and rotates about the long axis 101a (see FIG. 1B). . Since the crank 105 is fixed to the transmission shaft 101, the rotating crank 105 can rotate the transmission shaft 101, so that the transmission shaft 101 rotates around the long axis 101a. . 1D, the transmission shaft 101 rotates in a counterclockwise direction. Since one end of the connecting rod 111 is fixed to the transmission shaft 101, the connecting rod 111 can also be driven by the transmission shaft 101 to rotate around the long axis 101a. Accordingly, the rotating connection rod 111 drives the vertical lifting rod 109 to raise the vertical lifting rod 109, and raises the collection unit 104 by the vertical lifting rod 109. As such, the collection unit 104 may be raised to a height at which fluid collection can proceed.

Referring to FIG. 1C, when the push rod 103a contracted with the same purlin is extended again, the transmission shaft 101 driven by the push rod 103a rotates again. 1C, the transmission shaft 101 rotates in a clockwise direction. The rotating transmission shaft 101 drives the connecting rod 111 again so that the connecting rod 111 rotates, thus lowering the vertical lifting rod 109 by the connecting rod 111, for example, initial Try to return to height. More preferably, the raising and lowering of one collecting unit 104 can be achieved by driving the transmission shaft 101 with only one power member 103. Compared with the existing waste liquid collecting device, the fluid collecting device 10 can raise and lower the collection unit 104 with a smaller amount of the power member 103.

The interaction relationship between the expansion and contraction of the push rod 103a of the power member 103 and the elevation of the collection unit 104 is only one embodiment, and is not limited thereto, and the interaction relationship is according to the arrangement position design. can be changed. For example, in the embodiment shown in FIGS. 1C and 1D, the power source 103c is disposed on the left side of the crank 105, but in another embodiment, the power source 103c is on the right side of the crank 105. It can also be placed. In this way, when the push rod 103a of the power member 103 extends long, the collection unit 104 is raised. When the push rod 103a of the power member 103 contracts, the collecting unit 104 descends.

Referring back to FIG. 1B, the driving assembly 106 further includes a second lifting support member 113. The first lifting support member 107 and the second lifting support member 113 are installed at both ends of the transmission shaft 101, respectively, and both are connected to the collection unit 104. As shown in FIG. 1B, the structures of both the first lifting support member 107 and the second lifting support member 113 may be the same or similar. For example, the second lifting support member 113 also includes a vertical lifting rod 109 and a connecting rod 121. Both the first lifting support member 107 and the second lifting support member 113 may be located on the same diameter of the collecting unit 104 or may be adjacent to the diameter of one of the collecting units 104. In addition, the first lifting support member 107 and the second lifting support member 113 may simultaneously raise and lower the collection unit 104 by the operation of one power member 103. In this way, since the first lifting support member 107 and the second lifting support member 113 can raise and lower the collection unit 104 peacefully, it is possible to reduce accidents in which the collection unit 104 is overturned.

2A is a partial cross-sectional view showing a fluid collection device according to another embodiment of the present invention, and FIG. 2B is a partial three-dimensional view showing the fluid collection device of FIG. 2A. 2A and 2B, as in the above-described embodiment, the fluid collection device 200 according to the present embodiment is similar to the fluid collection device 100 according to the above-described embodiment. Specifically, both the fluid collection devices 100 and 200 include the same components as the substrate stage 102. However, unlike the fluid collection device 100 according to the above-described embodiment, the fluid collection device 200 includes a plurality of collection units 104, a plurality of drive assemblies 106, a plurality of first lifting support members 107, and It includes a plurality of second lifting support member (113). The plurality of first lifting support members 107 are concentrated at the same end of the plurality of transmission shafts 101, and the plurality of second lifting support members 113 are concentrated at the other ends of the plurality of transmission shafts 101. . As shown in FIG. 2B, one of the first lifting support members 107 and one of the second lifting support members 113 are installed at both ends of the same transmission shaft 101, respectively.

The plurality of collection units 104 are different from each other. Specifically, the sizes (eg, outer diameters) of the plurality of collection units 104 are different, and the plurality of collection units 104 may be arranged in a concentric circle. A plurality of drive assemblies 106 are each connected to a plurality of collection units 104, and each drive assembly 106 drives a collection unit 104 connected thereto, so that the collection unit 104 connected thereto rises and falls. Thus, the plurality of collection units 104 are respectively raised and lowered. The quantity 106 of drive assemblies is equal to the quantity of collection units 104. 2A and 2B as an example, the number of collection units 104 included in the fluid collection device 200 is three, and the number of drive assemblies 106 is also three.

Since the plurality of collection units 104 have different sizes, the plurality of transmission shafts 101 have different lengths, and the corresponding collection units 104 are respectively raised and lowered by the transmission of the plurality of transmission shafts 101. However, in other embodiments, since the plurality of transmission shafts 101 may have the same length, the lengths of the transmission shafts 101 are not limited to each other. The plurality of transmission shafts 101 are parallel to each other and lie flat on a horizontal plane, that is, the long axes of the plurality of transmission shafts 101 (not shown in Figs. 2A and 2B) extend substantially along a horizontal plane. All of the plurality of power members 103 may be disposed under the substrate stage 102, and the power members 103 of each drive assembly 106 have a first lifting support member 107 and a second lifting support corresponding thereto. Separated from the member 113 from each other, the fluid leaked from the collection unit 104 prevents damage to the plurality of power members 103.

The fluid collection device 200 may further include a plurality of support plates 115. As an embodiment, referring to FIG. 2B, the number of support plates 115 included in the fluid collection device 200 is two, and each support plate 115 may have a plurality of through holes 115a. Each support plate 115 is located between one of the power member 103 and one of the lifting support member (for example, the first lifting support member 107 or the second lifting support member 113), , The two support plates 115 are disposed to face each other. A plurality of transmission shafts 101 parallel to each other can pass through each of the plurality of through holes 115a, and the plurality of transmission shafts 101 and the plurality of through holes 115a are formed by loose fitting, so that the transmission shaft (101) is allowed to rotate freely in the through hole (115a).

2B, the fluid collection device 200 may further include at least one guide member 119, and the fluid collection device 200 illustrated in FIG. 2B includes a pair of guide members 119 do. Each guide member 119 has a plurality of guide holes 119a. The vertical lifting rods 109 included in the plurality of first lifting support members 107 and the plurality of second lifting support members 113 are parallel to each other and penetrate each of the plurality of guide holes 119a, and each vertical lifting rod The 109 can move up and down relative to the guide member 119. Therefore, each guide member 119 can guide the moving direction of the vertical lifting rod 109, the vertical lifting rod 109 only moves up and down, and the moving direction of the vertical lifting rod 109 is shifted, so that the collection unit (104) can avoid overturning.

As described above, the present invention drives the lifting support member (for example, the first lifting support member) by rotating the transmission shaft using the drive of the power member to raise and lower the collection unit. Therefore, it is possible to drive the collection unit up and down with only one power member using the transmission shaft. Compared with the existing waste liquid collection device, the fluid collection device of the present invention can raise and lower all the collection units with a smaller number of power members, so the present invention can reduce the number of power members, and thus installation of power members You can reduce the cost.

In addition, in the existing waste liquid collecting apparatus, since one recovery ring is normally controlled by two power sources, it is necessary to control the two power sources to operate synchronously in order to stably raise and lower the recovery ring. Otherwise, the collection ring will tend to overturn if the two power sources are not running synchronously. However, in this embodiment, since one power member drives the lifting and lowering of one collection unit, in the fluid collection device including a plurality of power members, it is controlled whether or not the plurality of power members operate synchronously. You do not have to do. Therefore, compared with the conventional waste liquid collecting device, since it is not necessary to control a plurality of power members to operate synchronously, the operation and operation of the fluid collecting device of the present invention are simpler than that of the conventional waste liquid collecting device.

The substrate mentioned in the present invention may be in the form of a substrate, a stage, a wafer, a chip, or the like, and the shape may be circular or square, but is not limited thereto. In addition, the fluid collection device of the present invention is used for wet processing (etching, cleaning, drying, etc.) of a substrate, for example, wet processing of a single substrate, wet processing of a plurality of substrates, metal etching under soldering of a single square chip, and thin film wafers. Although it can be used for supporting/peeling, bonding/peeling process, silicon carbide recycled wafer, recycled silicon wafer, etc., it is not limited thereto.

The above-described embodiments are only examples of the present invention, and are not intended to limit the present invention. Although the present invention is disclosed by the above-described embodiments, the above-described embodiments are not intended to limit the present invention. A person skilled in the art will change and improve the embodiments of the present invention through the above methods and technical matters disclosed within the scope not departing from the gist of the present invention, thereby making the embodiments substantially the same as those of the above embodiments. Can be obtained. Simple modifications, equivalent changes and modifications to the above embodiments according to the technical substance of the present invention within the scope not departing from the gist of the present invention are all included in the scope of the present invention.

100: fluid collection device, 101: transmission shaft
102: substrate stage 103: power member
104: collection unit 106: drive assembly
107: first lifting support member

Claims (10)

A fluid collection device comprising a substrate stage, a collection unit, and a drive assembly,
The substrate stage is used to fix and rotate the substrate,
The collection unit surrounds the substrate stage to collect the fluid of the substrate,
The drive assembly is connected to the collection unit and used to elevate the collection unit, and the drive assembly includes a transmission shaft, a power member, and a first elevating support member,
The transmission shaft rotates around the long axis,
The power member is connected to the transmission shaft, and is used to drive the transmission shaft to rotate around a long axis,
The first lifting support member is connected to the transmission shaft and the collection unit, the rotation of the transmission shaft about the long axis drives the first lifting support member to lift the collection unit,
The drive assembly further includes a second lifting support member, wherein the first lifting support member and the second lifting support member are respectively installed at both ends of the transmission shaft, and both are connected to the collection unit. Fluid collection device. delete The method of claim 1,
The fluid collection device further includes a plurality of the collection units and a plurality of the drive assemblies, each of the plurality of drive assemblies being connected to a plurality of the collection units, and each of the drive assemblies driving the collection units connected thereto And each of the plurality of collection units ascending and descending, and the quantity of the drive assembly is the same as the quantity of the collection unit. The method of claim 3,
A fluid collection device, characterized in that a plurality of transmission shafts of the plurality of drive assemblies are parallel to each other. The method of claim 3,
Each of the collection units has a ring shape, a plurality of the collection units are arranged in a concentric circle, and the plurality of the drive assemblies includes a plurality of the transmission shafts, a plurality of the first lifting support members, a plurality of the second lifting support members It further includes, wherein the plurality of transmission shafts have different lengths, and one of the first lifting support members and one of the second lifting support members are installed at both ends of the same transmission shaft. Fluid collection device, characterized in that. The method of claim 1,
The transmission shaft is a fluid collection device, characterized in that disposed horizontally under the substrate stage. The method of claim 6,
The first lifting support member includes a vertical lifting rod and a connection rod, both ends of the vertical lifting rod are connected to a lower surface of the collection unit and one end of the connection rod, respectively, and the other end of the connection rod is the transmission shaft The fluid collection device, characterized in that fixed to, rotating the connection rod with the transmission shaft rotating about the long axis, the rotating connection rod drives the vertical lifting rod to lift the collection unit. The method of claim 1,
The fluid collection device, wherein the power member and the first lifting support member are respectively fixed to different positions of the transmission shaft. The method of claim 8,
The fluid collection device, wherein the power member is installed below the substrate stage and around the substrate stage. The method of claim 8,
The fluid collection device, characterized in that the power member is installed horizontally under the substrate stage.

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