CN212392216U - Exchange formula expands membrane wafer device - Google Patents
Exchange formula expands membrane wafer device Download PDFInfo
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- CN212392216U CN212392216U CN202021204972.XU CN202021204972U CN212392216U CN 212392216 U CN212392216 U CN 212392216U CN 202021204972 U CN202021204972 U CN 202021204972U CN 212392216 U CN212392216 U CN 212392216U
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Abstract
The utility model discloses an interchangeable film expanding wafer device, which comprises a female ring, wherein the female ring is arranged on a bracket; the screw rods are vertically arranged on the female ring, and sliding blocks are arranged on the screw rods; the lifting ring is arranged on the sliding block; the lifting motor is arranged on the female ring; the rotating motor is arranged on the female ring, and a rotating shaft of the rotating motor is provided with a second gear; the rotating inner ring is arranged on the female ring through a bearing; the synchronous gear is installed at the bottom end of the rotating inner ring and is connected with the second gear through a synchronous belt; the lifting bottom plate is connected with the rotating inner ring through a guide pin; the cover plate is arranged on the ascending bottom plate through a cushion block; and the jacking ring is fixed and connected with the rotary inner ring through a screw. The utility model discloses can realize the rotation of the arbitrary angle of IC chip to realize going up and down, practice thrift the cost.
Description
Technical Field
The utility model relates to a semiconductor package field especially relates to an exchange formula expands membrane wafer device.
Background
With the development of semiconductor packaging technology. Wafers produce the base material of semiconductor chips. Wafer attachment rings require a bright and clean surface. The existing crystal-membered ring device is generally to fix the prophase membrane expansion of the wafer ring, such as the common 4-inch 6-inch and 8-inch circular crystal-membered ring. And then the fixed Wafer ring is placed on a Wafer carrier. The Wafer carrier can realize certain angular rotation.
In the existing crystal-membered ring device, the clamping functions of film expanding and crystal-membered ring are mostly realized separately, and when the inclination angle of an IC chip on the crystal-membered ring is too large, automatic calibration cannot be realized. The existing crystal-membered ring device has simple structural design, can meet the requirements of low-end markets and has high cost.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an exchange formula expands membrane wafer device will expand the membrane and integrate to one set of device with clamping, the rotation function of brilliant ring, realizes that same device satisfies multiple functions simultaneously, practices thrift the cost.
In order to solve the technical problem, the utility model provides an interchangeable film expansion wafer device, which comprises a bracket;
the female ring is arranged on the bracket;
the screw rods are vertically arranged on the female ring, and sliding blocks are arranged on the screw rods;
the lifting ring is arranged on the sliding block;
the lifting motor is arranged on the female ring;
the bottom end of the screw rod and a rotating shaft of the lifting motor are respectively provided with a first gear, and the first gears are connected through a synchronous belt; the rotating shaft of the lifting motor rotates, and the screw rod is driven to rotate through the synchronous belt and the first gear, so that the lifting ring can ascend or descend along the screw rod;
the rotating motor is arranged on the female ring, and a rotating shaft of the rotating motor is provided with a second gear;
the rotating inner ring is arranged on the female ring through a bearing;
the synchronous gear is installed at the bottom end of the rotating inner ring and is connected with the second gear through a synchronous belt;
the lifting bottom plate is connected with the rotating inner ring through a guide pin;
the cover plate is arranged on the ascending bottom plate through a cushion block; and
the jacking ring is fixed and connected with the rotating inner ring through a screw;
the rotating shaft of the rotating motor rotates, and the synchronous wheel is driven to rotate through the synchronous belt and the second gear, so that synchronous rotation of the rotating inner ring, the lifting bottom plate, the jacking ring and the cover plate is realized.
Preferably, dust covers are respectively arranged outside the rotating motor and the lifting motor.
As a preferred scheme, the synchronous belt pre-pressing tensioning device further comprises a tensioning wheel used for pre-pressing and tensioning the synchronous belt, and the tensioning wheel is installed on the female ring.
Preferably, the number of the screw rods is 4, and the screw rods are uniformly distributed on the female ring.
Preferably, the clamping head is provided with a limiting device.
Preferably, the screw rod is provided with a limiting device.
The utility model discloses following beneficial effect has:
the utility model discloses an interchangeable expands membrane wafer device drives the lead screw through hold-in range and first gear and rotates through setting up elevator motor and lead screw, realizes that the lift ring rises or descends along the lead screw to set up rotating electrical machines, rotatory inner circle and rising bottom plate, through driving the synchronizing wheel through hold-in range and second gear and rotate, realize rotatory inner circle, rising bottom plate, jacking circle and apron synchronous revolution; clamping and rotating functions of the film expanding and the crystal-membered ring are integrated on one device, so that the same device can simultaneously meet multiple functions, the cost is saved, the jacking ring and the cover plate can be replaced to adapt to the crystal-membered rings with different sizes, and the cost is further saved.
Drawings
Fig. 1 is a schematic structural diagram of an interchangeable film expansion wafer device according to an embodiment of the present invention;
fig. 2 is a cross-sectional view of an interchangeable film-expanding wafer apparatus according to an embodiment of the present invention.
Reference numerals: 1. a female ring; 2. a screw rod; 3. a lifting ring; 4. a lifting motor; 5. a first gear; 6. a synchronous belt; 7. a rotating electric machine; 8. rotating the inner ring; 9. a synchronizing gear; 10. raising the base plate; 11. a cover plate; 12. jacking rings; 13. a support; 14. and a cushion block.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Referring to fig. 1 and 2, the interchangeable membrane expansion wafer apparatus in the preferred embodiment of the present invention includes: a bracket 13;
the female ring 1 is mounted on the bracket 13;
the screw rods 2 are vertically arranged on the female ring 1, and sliding blocks are arranged on the screw rods 2;
the lifting ring 3 is arranged on the sliding block;
the lifting motor 4 is arranged on the female ring 1;
the bottom end of the screw rod 2 and a rotating shaft of the lifting motor 4 are respectively provided with a first gear 5, and the first gears 5 are connected through a synchronous belt 6; the rotating shaft of the lifting motor 4 rotates, and the screw rod 2 is driven to rotate through the synchronous belt 6 and the first gear 5, so that the lifting ring 3 can ascend or descend along the screw rod 2;
the rotating motor 7 is installed on the female ring 1, and a second gear is arranged on a rotating shaft of the rotating motor 7;
the rotating inner ring 8 is mounted on the female ring 1 through a bearing;
the synchronous gear 9 is arranged at the bottom end of the rotating inner ring 8, and the synchronous gear 9 is connected with the second gear through the synchronous belt 6;
the lifting bottom plate 10 is connected with the rotating inner ring 8 through a guide pin;
the cover plate 11 is installed on the ascending bottom plate 10 through a cushion block 14; and
the jacking ring 12 is connected with the rotating inner ring 8 through screw fixation;
the rotating shaft of the rotating motor 7 rotates, and the synchronous wheel is driven to rotate through the synchronous belt 6 and the second gear, so that the synchronous rotation of the rotating inner ring 8, the lifting bottom plate 10, the lifting ring 12 and the cover plate 11 is realized.
Specifically, the utility model discloses the interchangeable expands membrane wafer device of preferred embodiment drives lead screw 2 through hold-in range 6 and first gear 5 and rotates through setting up elevator motor 4 and lead screw 2, realizes that lift ring 3 rises or descends along lead screw 2 to set up rotating electrical machines 7, rotatory inner circle 8 and rising bottom plate 10, through drive the synchronizing wheel through hold-in range 6 and second gear and rotate, realize rotatory inner circle 8, rising bottom plate 10, jacking circle 12 and apron 11 synchronous revolution; clamping and rotating functions of the film expanding and the crystal-form ring are integrated on one device, so that the same device can simultaneously meet multiple functions, the cost is saved, the jacking ring 12 and the cover plate 11 can be replaced to adapt to the crystal-form ring with different sizes, and the cost is further saved.
In the preferred embodiment of the present invention, the rotating electric machine 7 and the lifting motor 4 are respectively provided with a dust cover.
The utility model discloses in the preferred embodiment, still including being used for carrying out the pre-compaction to hold-in range 6 and rising the tight pulley that rises, the tight pulley that rises is installed on female ring 1.
In the preferred embodiment of the present invention, the screw rods 2 are provided with 4 screw rods, and are uniformly distributed on the female ring 1.
In the preferred embodiment of the utility model, be provided with stop device on the centre gripping head.
In the preferred embodiment of the present invention, the screw rod 2 is provided with a limiting device.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and replacements can be made without departing from the technical principle of the present invention, and these modifications and replacements should also be regarded as the protection scope of the present invention.
Claims (5)
1. An interchangeable film expansion wafer device is characterized by comprising a bracket;
the female ring is arranged on the bracket;
the screw rods are vertically arranged on the female ring, and sliding blocks are arranged on the screw rods;
the lifting ring is arranged on the sliding block;
the lifting motor is arranged on the female ring;
the bottom end of the screw rod and a rotating shaft of the lifting motor are respectively provided with a first gear, and the first gears are connected through a synchronous belt; the rotating shaft of the lifting motor rotates, and the screw rod is driven to rotate through the synchronous belt and the first gear, so that the lifting ring can ascend or descend along the screw rod;
the rotating motor is arranged on the female ring, and a rotating shaft of the rotating motor is provided with a second gear;
the rotating inner ring is arranged on the female ring through a bearing;
the synchronous gear is installed at the bottom end of the rotating inner ring and is connected with the second gear through a synchronous belt;
the lifting bottom plate is connected with the rotating inner ring through a guide pin;
the cover plate is arranged on the ascending bottom plate through a cushion block; and
the jacking ring is fixed and connected with the rotating inner ring through a screw;
the rotating shaft of the rotating motor rotates, and the synchronous wheel is driven to rotate through the synchronous belt and the second gear, so that synchronous rotation of the rotating inner ring, the lifting bottom plate, the jacking ring and the cover plate is realized.
2. The interchangeable membrane expansion wafer device according to claim 1, wherein dust covers are respectively disposed outside the rotating motor and the lifting motor.
3. The interchangeable film expanding wafer device according to claim 1, further comprising a tension wheel for pre-pressing and tensioning the synchronous belt, wherein the tension wheel is mounted on the female ring.
4. The interchangeable membrane expansion wafer device according to claim 1, wherein the number of the lead screws is 4, and the lead screws are uniformly distributed on the mother ring.
5. The interchangeable membrane expansion wafer device according to claim 1, wherein a limiting device is disposed on the screw rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021204972.XU CN212392216U (en) | 2020-06-28 | 2020-06-28 | Exchange formula expands membrane wafer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021204972.XU CN212392216U (en) | 2020-06-28 | 2020-06-28 | Exchange formula expands membrane wafer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212392216U true CN212392216U (en) | 2021-01-22 |
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ID=74255697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021204972.XU Active CN212392216U (en) | 2020-06-28 | 2020-06-28 | Exchange formula expands membrane wafer device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212392216U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113764311A (en) * | 2021-08-30 | 2021-12-07 | 大连佳峰自动化股份有限公司 | Corner platform mechanism |
-
2020
- 2020-06-28 CN CN202021204972.XU patent/CN212392216U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113764311A (en) * | 2021-08-30 | 2021-12-07 | 大连佳峰自动化股份有限公司 | Corner platform mechanism |
| CN113764311B (en) * | 2021-08-30 | 2024-02-02 | 大连佳峰自动化股份有限公司 | Corner platform mechanism |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: C6, 2nd Floor, Building D, Huilongda Industrial Park, Shilong Community, Shiyan Street, Baoan District, Shenzhen, Guangdong 518000 Patentee after: Jingchuang (Shenzhen) Equipment Co.,Ltd. Address before: 518100 5th floor, unit 2, Jintuo hi tech center, No.8, zhulongtian North Road, Shuitian community, Shiyan street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Jintuo microelectronics equipment Co.,Ltd. |
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| CP03 | Change of name, title or address |