CN213813317U - High-precision test equipment - Google Patents
High-precision test equipment Download PDFInfo
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- CN213813317U CN213813317U CN202022281060.9U CN202022281060U CN213813317U CN 213813317 U CN213813317 U CN 213813317U CN 202022281060 U CN202022281060 U CN 202022281060U CN 213813317 U CN213813317 U CN 213813317U
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- seat
- screw rod
- test
- direction screw
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Abstract
The utility model discloses a high accuracy test equipment, including the support that has the upper substrate, install test seat and the imaging module of movable mounting in the test seat top on the upper substrate, be located the test seat outside install one by the rotatory Y of motor drive to the lead screw on the upper surface of upper substrate, install one by the rotatory X of motor drive to the lead screw on the sliding seat, the upper surface of upper substrate is located the test seat and keeps away from Y and installs one and Y to lead screw parallel arrangement's guide rail to the outside of lead screw, the one end lower surface and the Y of sliding seat are connected to the lead screw connecting plate, Y includes the base plate and the curb plate that upwards extends from the base plate both ends to the lead screw connecting plate, imaging module includes supporting seat and camera lens, the light source of installing on the supporting seat of being connected to the lead screw connecting plate with X. The utility model discloses both guaranteed that the sliding seat removes the stability of in-process, the precision of assurance test along the Y direction, can effectively prolong the life of device again.
Description
Technical Field
The utility model relates to a semiconductor test technical field especially relates to high accuracy test equipment.
Background
The semiconductor test includes cp (circuit probe) test, which is also called wafer test, and is the first step of the next packaging test of semiconductor devices, and aims to select out the bad chips in the wafer. Generally, a wafer refers to a silicon wafer used for manufacturing integrated circuits, and after all integrated circuits on the wafer are manufactured, the wafer includes a plurality of chips. Due to the nature of the production design or the material itself, the produced wafer may contain defective chips in addition to normal chips.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a high accuracy test equipment, this high accuracy test equipment had both guaranteed that the sliding seat removes the stability of in-process, the precision of assurance test along the Y direction, can effectively prolong the life of device again.
In order to achieve the above purpose, the utility model adopts the technical scheme that: a high-precision test device comprises a support with an upper substrate, a test seat arranged on the upper substrate and an imaging module movably arranged above the test seat, wherein the test seat is arranged on the upper surface of the upper substrate;
a Y-direction screw rod driven by a motor to rotate is arranged on the upper surface of the upper base plate positioned outside the test seat, a Y-direction screw rod connecting plate is connected to a nut sleeved on the Y-direction screw rod, and a movable seat is arranged on the Y-direction screw rod connecting plate and can move along the Y direction along with the Y-direction screw rod connecting plate;
the movable seat is provided with an X-direction screw rod driven by a motor to rotate, and the imaging module is connected with a nut sleeved on the X-direction screw rod through an X-direction screw rod connecting plate, so that the imaging module can move along the X direction;
a guide rail parallel to the Y-direction screw rod is arranged on the upper surface of the upper base plate and on the outer side of the test seat far away from the Y-direction screw rod, the lower surface of one end of the movable seat is connected with a Y-direction screw rod connecting plate, and the lower surface of the other end of the movable seat is in sliding fit with the guide rail through a sliding block, so that the sliding block can move along the Y direction;
the Y-direction lead screw connecting plate comprises a base plate and side plates extending upwards from two ends of the base plate, the base plate is connected with a nut on the Y-direction lead screw, and the two side plates are respectively fixed with the lower surface of the movable seat;
the imaging module comprises a supporting seat connected with the X-direction lead screw connecting plate, and a lens and a light source which are arranged on the supporting seat, wherein the light source is arranged below one end, close to the test seat, of the lens, and one end, far away from the test seat, of the lens is provided with a camera.
The further improved scheme in the technical scheme is as follows:
1. in the above scheme, the support seat is an L-shaped support seat, the lower surface of the L-shaped support seat is connected with the X-direction lead screw connecting plate, and the lens and the light source are mounted on the side surface of the L-shaped support seat.
2. In the above scheme, the camera is a CCD camera.
3. In the above scheme, the lens is a telecentric lens.
4. In the above scheme, the light source is an annular light source.
Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage:
1. the utility model discloses high accuracy test equipment, it is through the mode of formation of image, can realize the multi-parameter test to different size wafers, and easy operation, test accuracy is high, test stability is good; in addition, a guide rail which is parallel to the Y-direction screw rod is arranged on the upper surface of the upper substrate and is positioned on the outer side of the test seat far away from the Y-direction screw rod, the lower surface of one end of the movable seat is connected with a connecting plate of the Y-direction screw rod, the lower surface of the other end of the movable seat is in sliding fit with the guide rail through a sliding block, so that the sliding block can move along the Y direction, and through the arrangement of the guide rail which is parallel to the Y-direction screw rod, the stability of the movable seat in the moving process along the Y direction is ensured, the test precision is ensured, and the service life of the device can be effectively prolonged; further, its Y includes the base plate to the feed screw connecting plate and from the curb plate that base plate both ends upwards extended, the base plate is connected with Y to the nut on the lead screw, two the curb plate respectively with the lower fixed surface of sliding seat, through the setting of two curb plates, further improved the stability of being connected between sliding seat and the driver part, and then guarantee the precision and the test stability of test.
2. The utility model discloses high accuracy test equipment, its imaging module include with X to the supporting seat that the lead screw connecting plate is connected with install camera lens, the light source on the supporting seat, the light source is installed in the below that the camera lens is close to test seat one end, the camera lens is kept away from one of test seat and is served and install a camera, has guaranteed the definition and the precision of formation of image, and then guarantees the precision to the wafer test.
Drawings
FIG. 1 is a schematic structural diagram of the high-precision testing apparatus of the present invention;
FIG. 2 is a schematic diagram of the internal structure of the high-precision testing device of the present invention;
FIG. 3 is a schematic diagram of the internal structure of the high-precision testing apparatus of the present invention;
FIG. 4 is a schematic view of a partial structure of the high-precision testing apparatus of the present invention;
fig. 5 is the utility model discloses high accuracy test equipment's local structure sketch map two.
In the above drawings: 1. an upper substrate; 3. a support; 4. a test seat; 5. an imaging module; 61. a Y-direction screw rod; 62. a Y-direction lead screw connecting plate; 621. a substrate; 622. a side plate; 7. a movable seat; 81. an X-direction screw rod; 82. an X-direction lead screw connecting plate; 9. a slider; 13. a supporting seat; 14. a lens; 15. a light source; 16. a camera.
Detailed Description
Example 1: a high-precision test device comprises a bracket 3 with an upper substrate 1, a test seat 4 arranged on the upper substrate 1 and an imaging module 5 movably arranged above the test seat 4, wherein the test seat 4 is arranged on the upper surface of the upper substrate 1;
a Y-direction screw rod 61 driven by a motor to rotate is arranged on the upper surface of the upper substrate 1 positioned outside the test seat 4, a Y-direction screw rod connecting plate 62 is connected to a nut sleeved on the Y-direction screw rod 61, and a movable seat 7 is arranged on the Y-direction screw rod connecting plate 62 and can move along the Y direction along with the Y-direction screw rod connecting plate 62;
an X-direction screw rod 81 driven by a motor to rotate is installed on the movable seat 7, and the imaging module 5 is connected with a nut sleeved on the X-direction screw rod 81 through an X-direction screw rod connecting plate 82, so that the imaging module 5 can move along the X direction;
a guide rail parallel to the Y-direction screw rod 61 is installed on the upper surface of the upper substrate 1 and on the outer side of the test seat 4 far away from the Y-direction screw rod 61, the lower surface of one end of the movable seat 7 is connected with a Y-direction screw rod connecting plate 62, and the lower surface of the other end of the movable seat 7 is in sliding fit with the guide rail through a sliding block 9, so that the sliding block 9 can move along the Y direction;
the Y-direction screw rod connecting plate 62 comprises a base plate 621 and side plates 622 extending upwards from two ends of the base plate 621, the base plate 621 is connected with the nuts on the Y-direction screw rod 61, and the two side plates 622 are respectively fixed with the lower surface of the movable seat 7;
the imaging module 5 comprises a supporting seat 13 connected with the X-direction lead screw connecting plate 82, and a lens 14 and a light source 15 which are installed on the supporting seat 13, wherein the light source 15 is installed below one end, close to the test seat 4, of the lens 14, and a camera 16 is installed at one end, far away from the test seat 4, of the lens 14.
The support base 13 is an L-shaped support base, the lower surface of which is connected to the X-direction lead screw connection plate 82, and the lens 14 and the light source 15 are mounted on the side surface of the L-shaped support base.
Example 2: a high-precision test device comprises a bracket 3 with an upper substrate 1, a test seat 4 arranged on the upper substrate 1 and an imaging module 5 movably arranged above the test seat 4, wherein the test seat 4 is arranged on the upper surface of the upper substrate 1;
a Y-direction screw rod 61 driven by a motor to rotate is arranged on the upper surface of the upper substrate 1 positioned outside the test seat 4, a Y-direction screw rod connecting plate 62 is connected to a nut sleeved on the Y-direction screw rod 61, and a movable seat 7 is arranged on the Y-direction screw rod connecting plate 62 and can move along the Y direction along with the Y-direction screw rod connecting plate 62;
an X-direction screw rod 81 driven by a motor to rotate is installed on the movable seat 7, and the imaging module 5 is connected with a nut sleeved on the X-direction screw rod 81 through an X-direction screw rod connecting plate 82, so that the imaging module 5 can move along the X direction;
a guide rail parallel to the Y-direction screw rod 61 is installed on the upper surface of the upper substrate 1 and on the outer side of the test seat 4 far away from the Y-direction screw rod 61, the lower surface of one end of the movable seat 7 is connected with a Y-direction screw rod connecting plate 62, and the lower surface of the other end of the movable seat 7 is in sliding fit with the guide rail through a sliding block 9, so that the sliding block 9 can move along the Y direction;
the Y-direction screw rod connecting plate 62 comprises a base plate 621 and side plates 622 extending upwards from two ends of the base plate 621, the base plate 621 is connected with the nuts on the Y-direction screw rod 61, and the two side plates 622 are respectively fixed with the lower surface of the movable seat 7;
the imaging module 5 comprises a supporting seat 13 connected with the X-direction lead screw connecting plate 82, and a lens 14 and a light source 15 which are installed on the supporting seat 13, wherein the light source 15 is installed below one end, close to the test seat 4, of the lens 14, and a camera 16 is installed at one end, far away from the test seat 4, of the lens 14.
The camera 16 is a CCD camera; the lens 14 is a telecentric lens; the light source 15 is a ring light source.
When the high-precision testing equipment is adopted, multi-parameter testing on wafers with different sizes can be realized in an imaging mode, and the high-precision testing equipment is simple to operate, high in testing precision and good in testing stability; in addition, through the arrangement of the guide rail parallel to the Y-direction screw rod, the stability of the movable seat in the moving process along the Y direction and the testing precision are ensured, and the service life of the device can be effectively prolonged;
furthermore, the stability of connection between the movable seat and the driving part is further improved through the arrangement of the two side plates, so that the testing precision and the testing stability are further ensured; in addition, the definition and the precision of imaging are ensured, and the precision of wafer testing is further ensured.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.
Claims (5)
1. A high accuracy test equipment which characterized in that: the device comprises a bracket (3) with an upper substrate (1), a test seat (4) arranged on the upper substrate (1) and an imaging module (5) movably arranged above the test seat (4), wherein the test seat (4) is arranged on the upper surface of the upper substrate (1);
a Y-direction screw rod (61) driven by a motor to rotate is mounted on the upper surface of the upper base plate (1) positioned on the outer side of the test seat (4), a Y-direction screw rod connecting plate (62) is connected to a nut sleeved on the Y-direction screw rod (61), and a movable seat (7) is mounted on the Y-direction screw rod connecting plate (62) and can move along the Y direction along with the Y-direction screw rod connecting plate (62);
an X-direction screw rod (81) driven by a motor to rotate is mounted on the movable seat (7), and the imaging module (5) is connected with a nut sleeved on the X-direction screw rod (81) through an X-direction screw rod connecting plate (82) so that the imaging module (5) can move along the X direction;
a guide rail parallel to the Y-direction screw rod (61) is installed on the outer side, away from the Y-direction screw rod (61), of the upper surface of the upper substrate (1) and located on the test seat (4), the lower surface of one end of the movable seat (7) is connected with the Y-direction screw rod connecting plate (62), and the lower surface of the other end of the movable seat (7) is in sliding fit with the guide rail through a sliding block (9), so that the sliding block (9) can move along the Y direction;
the Y-direction screw rod connecting plate (62) comprises a base plate (621) and side plates (622) extending upwards from two ends of the base plate (621), the base plate (621) is connected with nuts on the Y-direction screw rod (61), and the two side plates (622) are respectively fixed with the lower surface of the movable seat (7);
imaging module (5) include with X to supporting seat (13) that lead screw connecting plate (82) are connected with install camera lens (14), light source (15) on supporting seat (13), light source (15) are installed in camera lens (14) and are close to the below of test seat (4) one end, camera (16) are installed to one of test seat (4) is kept away from in camera lens (14).
2. The high precision test apparatus of claim 1, wherein: the support seat (13) is an L-shaped support seat, the lower surface of the L-shaped support seat is connected with an X-direction screw rod connecting plate (82), and the lens (14) and the light source (15) are installed on the side surface of the L-shaped support seat.
3. The high precision test apparatus of claim 1, wherein: the camera (16) is a CCD camera.
4. The high precision test apparatus of claim 1, wherein: the lens (14) is a telecentric lens.
5. The high precision test apparatus of claim 1, wherein: the light source (15) is an annular light source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022281060.9U CN213813317U (en) | 2020-10-14 | 2020-10-14 | High-precision test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022281060.9U CN213813317U (en) | 2020-10-14 | 2020-10-14 | High-precision test equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213813317U true CN213813317U (en) | 2021-07-27 |
Family
ID=76957944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022281060.9U Active CN213813317U (en) | 2020-10-14 | 2020-10-14 | High-precision test equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213813317U (en) |
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2020
- 2020-10-14 CN CN202022281060.9U patent/CN213813317U/en active Active
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