TW201716155A - Liquid collection apparatus for spin etcher - Google Patents

Abstract

The present invention provides a liquid collection apparatus for a spin etcher, which is utilized to collect fluid splashing from a surface of a substrate. The liquid collection apparatus includes a plurality of collection units and driving devices. The collection units are disposed around the substrate. The driving devices are respectively coupled to the collection units and utilized to independently control the lifting of each collection unit so that the collection units can collect different fluid respectively for overcoming the problem of non-synchronization in lifting devices employing a plurality of pneumatic cylinders in the prior art.

Description

Rotary etching cleaning machine fluid collecting device

The present invention relates to a fluid collection device, and more particularly to a fluid collection device suitable for use in a rotary etch cleaning machine of a substrate.

In a semiconductor wafer, a display substrate, a solar substrate, an LED substrate, or the like, it is necessary to process the substrate, for example, a process of supplying a processing liquid (for example, a chemical or deionized water) to the surface of the substrate, and cleaning. In the substrate processing, subsequent processing such as collection, drainage, and recovery of the used treatment liquid must be performed by a fluid processing device. However, the waste liquid generated by the etching process is mostly a toxic liquid and must be handled with care. Therefore, how to collect and even recycle and reuse different waste liquids is an important issue.

The conventional rotary etching cleaning machine can refer to Taiwan's new patent No. M505052U, which discloses that a stage is provided in the rotary etching tank for carrying and fixing the wafer, and the rotating shaft below the stage can be rotated at a high speed, and the etching liquid is from above. The liquid supply unit flows down. The fluid collection device employs a collection ring module including a plurality of collection rings to collect different liquids, and when the shaft rotates at a high speed, the waste liquid can be centrifugally thrown toward the collection ring. The collection rings must be driven by an external lifting mechanism (such as a lifting pneumatic cylinder) to move relative to each other. In the case of different liquid collections, a particular collection ring can be raised and lowered in advance so that the liquid is discharged through the discharge tubes below each collection ring along the guidance of each collection ring.

However, in order to drive a lifting and lowering of the collecting ring, a plurality of lifting pneumatic cylinders are generally arranged around the collecting ring to smoothly control the lifting and lowering of the collecting ring, but also because a plurality of pneumatic cylinders are used, if a certain pneumatic cylinder is not synchronized, The system may generate an alarm and stop, which may cause the etching liquid to excessively erode the substrate and need to scrap the substrate, or reduce the equipment capacity due to the shutdown repair, resulting in an increase in production cost and a decrease in product yield.

In view of the above, in order to improve the reliability of the fluid collection device, it is an object of the present invention to provide a fluid collection device for a rotary etching cleaning machine that overcomes the use of multiple devices in the prior art by transmitting a drive device corresponding to each collection ring. The pneumatic cylinder lifts a collecting ring and easily causes the lifting members to be out of synchronization.

To achieve the above object, the present invention provides a fluid collection device for a rotary etch cleaning machine for collecting fluid splashed by a substrate surface, the fluid collection device comprising a plurality of collection units and a plurality of driving devices. The collection unit rings are disposed around the substrate. The driving devices are respectively connected to the collecting units for independently controlling the lifting and lowering of the respective collecting units, so that the collecting units can respectively collect different fluids, wherein the number of the driving devices is equal to the number of the collecting units.

In a preferred embodiment, the collection units include a plurality of collection rings that are radially disposed.

In a preferred embodiment, each of the driving devices includes a coupling mechanism for stably driving the lifting and lowering of the collecting ring to prevent the lifting members from being out of synchronization. Specifically, the connecting mechanism is coupled to one of the first contact and the second contact on the outer circumference of the collecting ring.

In the preferred embodiment, the first contact and the second contact are in the collecting ring An arc is defined on the outer circumference, and the arc is between π/2 and π.

In the preferred embodiment, the collecting ring includes a reinforcing member connected to the first contact and the second contact on the outer periphery.

In another preferred embodiment, the coupling mechanism includes a support member coupled to the first contact and the second contact, the support member being disposed at a bottom of the outer circumference of the collection ring.

In a preferred embodiment, the driving device includes a slide rail, and the connecting mechanism includes a loop arm connected to the slide rail for linear movement, the loop arm having a first end point and a second end point.

In the preferred embodiment, the connecting mechanism further includes: a first top post coupled to the first end of the hoop arm; and a second top post coupled to the second end of the hoop arm a first suspension post coupled to the first contact of the collection ring; a second suspension post coupled to the second contact of the collection ring; a first locking member for locking And the first top post and the first hanging post; and a second locking member for locking the second top post and the second hanging post.

In the preferred embodiment, the first locking member and the second locking member have at least one horizontal adjusting screw for finely adjusting the level of the collecting ring.

Compared with the prior art, the fluid collecting device of the present invention connects the collecting rings one-to-one through the driving device, thereby overcoming the conventional problem of using a plurality of pneumatic cylinders to be out of synchronization. In addition, in order to enhance the horizontal stability of the collecting ring during lifting, the first contact and the second contact on the outer circumference of the collecting ring are used as the lifting fulcrum of the lifting arm of the connecting mechanism of the present invention, and can be smoothly and smoothly performed. Lifting.

The above and other objects, features, and advantages of the present invention will become more apparent and understood.

10‧‧‧Substrate

11‧‧‧ stage

12‧‧‧ shaft

20‧‧‧Collection unit

21‧‧‧Draining tube

22‧‧‧Collection ring

23‧‧‧ outer periphery

24‧‧‧First contact

25‧‧‧second contact

30‧‧‧ drive

31‧‧‧Slide rails

32‧‧‧Linked institutions

33‧‧‧ hoop arm

34‧‧‧ drive source

37‧‧‧Support

50‧‧‧ pillar

100‧‧‧Rotary Etching Washing Machine

120‧‧‧Fluid collecting device

222‧‧‧First collection ring

224‧‧‧Second collection ring

225‧‧‧Reinforcement

332‧‧‧ first endpoint

333‧‧‧second endpoint

334‧‧‧First pillar

335‧‧‧second top pillar

336‧‧‧The first hanging column

337‧‧‧Second hanging column

338‧‧‧First lock

339‧‧‧Second locks

340‧‧‧Horizontal adjustment screw

342‧‧‧First lock block

344‧‧‧Second lock

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view showing a rotary etching cleaning machine in accordance with a preferred embodiment of the present invention.

Figure 2 is a perspective view of the fluid collection device of the preferred embodiment.

Figure 3 is a schematic cross-sectional view showing the first fluid collected by the fluid collection device of the present embodiment.

Figure 4 is a schematic cross-sectional view of the fluid collection device of the present embodiment when the second fluid is collected.

Figure 5 is a perspective view of the fluid collection device corresponding to Figure 3.

Figure 6 is a top plan view of the fluid collection device of the present embodiment.

The present invention has been described in detail with reference to the preferred embodiments in the

Referring to FIG. 1 and FIG. 2, FIG. 1 is a schematic cross-sectional view of a rotary etching cleaning machine according to a preferred embodiment of the present invention, and FIG. 2 is a perspective view of the fluid collecting device of the preferred embodiment. As shown, the fluid collection device 120 of the rotary etch cleaning machine 100 of the present embodiment is used to collect fluid splashed by the surface of a substrate 10. In detail, the rotary etch cleaning machine 100 is provided with a stage 11 , and a rotating shaft 12 is disposed under the stage 11 to carry and rotate the substrate 10 , wherein the substrate 10 can be a semiconductor wafer, a display substrate, a solar substrate, LED substrate, etc. The fluid collection device 120 includes a plurality of collection units 20 and a plurality of drive devices 30.

The collecting unit 20 is disposed around the substrate 10. In detail, the collecting unit 20 includes a plurality of collecting rings 22 connected to the bottom of the collecting ring 22, and the collecting rings 22 are sequentially arranged. In the embodiment, the collecting ring 22 includes a first collecting ring 222 and a second collecting ring 224. The first collecting ring 222 and the second collecting ring 224 are concentric rings, wherein the outer collecting ring 224 is located outside. The first collection ring 222 on the side may also be referred to as a door ring. When the fluid collection device 120 of the present embodiment is in the state of FIG. 1, the substrate 10 is exposed outside the collection unit 20, and the substrate 10 can be loaded or unloaded at this time. . It is worth mentioning that the collecting unit 20 of the present invention may be in the form of a ring or a tube, and may be outwardly added depending on the type of fluid collected, such as three collecting rings or four collecting rings.

Please refer to FIG. 3 to FIG. 4 . FIG. 3 is a schematic cross-sectional view of the fluid collection device 120 of the present embodiment when collecting the first fluid, and FIG. 4 is a cross section of the fluid collection device 120 of the present embodiment when the second fluid is collected. schematic diagram. As shown in FIG. 3, the first collection ring 222 rises and the first collection ring 222 collects the first fluid. As shown in FIG. 4, when the second collection ring 224 also rises, the second collection ring 224 collects the second fluid. The drive unit 30 that drives the collection unit 20 will be described in detail below.

As shown in FIG. 2, the driving devices 30 are respectively connected to the collecting units 20 (ie, the first collecting ring 222 and the second collecting ring 224) for independently controlling the lifting of each collecting unit 20, so that the collecting is performed. Units 20 can each collect different fluids, wherein the number of such drive devices 30 is equal to the number of collection units 20. In this embodiment, the number of collection units 20 is two, and the number of drive units 30 is also two. The principle of operation of the drive unit 30 will be described in detail below.

As shown in Fig. 5, Fig. 5 is a perspective view of the fluid collecting device 120 corresponding to Fig. 3. In Fig. 5, the driving device 30 drives the first collecting ring 222 to rise. As shown, each drive unit 30 includes a linkage mechanism 32 and a drive source 34 for driving the linkage mechanism 32. For example, the driving source 34 includes a linear reciprocating driving source such as a pneumatic cylinder, a hydraulic cylinder, a linear motor, etc. In the present embodiment, a pneumatic cylinder is taken as an example, but the invention is not limited thereto. The connecting mechanism 32 is used to stably lift the lifting and lowering of the collecting ring 22.

Please refer to FIG. 6. FIG. 6 is a plan view of the fluid collection device 120 of the present embodiment. schematic diagram. Specifically, the connecting mechanism 32 is coupled to one of the first contact 24 and the second contact 25 on the outer periphery 23 of the collecting ring 22 . In the drawing, the first contact 24 and the second contact 25 of the first collecting ring 222 and the second collecting ring 224 are respectively illustrated. It should be noted that the first contact 24 and the second contact 25 are not located on the bolt in the figure, and the drawing only shows the relative position on the outer circumference 23. Specifically, the first contact 24 and the second contact 25 define an arc on the outer circumference 23 of the collecting ring 22, and the arc is between π/2 and π, that is, 90 degrees to 180 degrees. . In this embodiment, as shown, the first contact 24 and the second contact 25 of the first collection ring 222 define a curvature r1, and the first contact 24 and the second contact 25 of the second collection ring 224 The arc r2 is defined, and the arc r1 of the first collecting ring 222 is greater than the arc r2 of the second collecting ring 224.

As shown in FIG. 2 and FIG. 6, in order to enhance the stability of the lifting and lowering of the collecting ring 22, the collecting ring 22 further includes a first connecting portion 24 and a second contact 25 on the outer peripheral edge 23. Reinforcing member 225. In this embodiment, the reinforcing member 225 is disposed on the outer periphery 23 of the first collecting ring 222. As shown in FIG. 2 and FIG. 5, the connection mechanism 32 may further include a support member 37 connected to the first contact 24 and the second contact 25, and the support member 37 is disposed on the support member 37. The bottom of the outer periphery 23 of the ring 22 is collected. In this embodiment, the support member 37 is used to support the second collection ring 224 to stabilize the lifting of the second collection ring 224.

The specific structure of the connecting mechanism 32 of this embodiment will be described below. As shown in FIG. 5, the driving device 30 includes a sliding rail 31. The connecting mechanism 32 includes a circular arm 33 connected to the sliding rail 31 for linear movement. The embracing arm 33 has a first end point 332 and A second endpoint 333. In this embodiment, both the slide rail 31 driving the first collecting ring 222 and the sliding rail 31 driving the second collecting ring 224 are disposed on both sides of a strut 50, and the corresponding driving source 34 is also disposed on the strut 50. On both sides, to save space under the collection unit 20. Please refer to Figure 2 together, here to connect first For example, the connecting mechanism 32 of the collecting ring 222 further includes a first top post 334, a second top post 335, a first hanging post 336, a second hanging post 337, a first locking member 338 and a second locking. Piece 339. Specifically, the first top post 334 is coupled to the first end point 332 of the hoop arm 33; the second top post 335 is coupled to the second end point 333 of the hoop arm 33; the first suspension post 336 is coupled The first contact 24 of the collecting ring 22; the second suspension post 337 is coupled to the second contact 25 of the collecting ring 22; the first locking member 338 is used for locking the first top post 334 and The first suspension post 336 is configured to lock the second top post 335 and the second suspension post 337. It should be noted that the connection mechanism 32 connecting the second collection ring 224 is the same as the above, and details are not described herein.

As shown in FIGS. 2 and 5, the first locking member 338 and the second locking member 339 have at least one horizontal adjusting screw 340 for finely adjusting the level of the collecting ring 22. In detail, the first locking member 338 and the second locking member 339 each have a staggered first locking block 342 and a second locking block 344. The first locking block 342 and the second locking block 344 are respectively bolted to the first/second top posts 334 and 335 and the first/second hanging posts 336 and 337, and after the horizontal adjusting screw 340 is adjusted horizontally, The two interlocking first locking blocks 342 and the second locking block 344 are combined by bolts to complete the fixing of the connecting mechanism 32. It should be noted that the specific structure of the above-mentioned connecting mechanism 32 is only one embodiment. In other embodiments, the connecting mechanism may also be disposed above the collecting unit 20 without occupying the space below the collecting unit 20.

In summary, the fluid collection device 120 of the present invention connects the collection rings 22 one-to-one through the drive device 30, thereby overcoming the conventional problem of using a plurality of pneumatic cylinders to have the lifting members out of synchronization. In addition, in order to enhance the horizontality of the single driving device 30 for driving the collecting ring 22 to rise and lower, the first contact 24 and the second contact 25 on the outer peripheral edge 23 of the collecting ring 22 are passed through the embracing arm 33 of the connecting mechanism 32 of the present invention. As a lifting point, it can be lifted smoothly and smoothly. As can be seen from the above, The invention can greatly improve the reliability of the operation of the fluid collection device, thereby reducing the probability of equipment shutdown and waste generation.

Although the present invention has been disclosed above in the preferred embodiments, it is not intended to limit the invention. Various changes and modifications may be made without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

21‧‧‧Draining tube

30‧‧‧ drive

33‧‧‧ hoop arm

37‧‧‧Support

120‧‧‧Fluid collecting device

222‧‧‧First collection ring

224‧‧‧Second collection ring

225‧‧‧Reinforcement

332‧‧‧ first endpoint

333‧‧‧second endpoint

334‧‧‧First pillar

335‧‧‧second top pillar

340‧‧‧Horizontal adjustment screw

342‧‧‧First lock block

344‧‧‧Second lock

Claims (10)

A fluid collecting device for rotating a etch cleaning machine for collecting fluid splashed by a surface of a substrate, comprising: a plurality of collecting units disposed around the substrate; and a plurality of driving devices respectively connected to the collecting units For independently controlling the lifting and lowering of each collecting unit, so that the collecting units can each collect different fluids, wherein the number of the driving devices is equal to the number of the collecting units. The fluid collection device of claim 1, wherein the collection units comprise a plurality of collection rings, the collection rings being radially disposed. The fluid collection device of claim 2, wherein each of the driving devices comprises a coupling mechanism for driving the lifting and lowering of the collecting ring. The fluid collection device of claim 3, wherein the coupling mechanism is coupled to one of the first contact and the second contact on the outer circumference of the collection ring. The fluid collection device of claim 4, wherein the first contact and the second contact define an arc on the outer circumference of the collection ring, the curvature being between π/2 and π. The fluid collection device of claim 4, wherein the collection ring comprises a reinforcement member on the outer periphery that is coupled to the first contact and the second contact. The fluid collection device of claim 4, wherein the coupling mechanism comprises a support member coupled to the first contact and the second contact, the support member being disposed at a bottom of the outer circumference of the collection ring . The fluid collection device of claim 4, wherein the driving device comprises a slide rail, the connection mechanism comprising a loop arm connected to the slide rail for linear movement, the loop arm having a first end point And a second endpoint. The fluid collecting device of claim 8, wherein the connecting mechanism further comprises: a first top post coupled to the first end of the hoop arm; and a second top post coupled to the a second end of the circumscribing arm; a first suspension post coupled to the first contact of the collection ring; a second suspension post coupled to the second contact of the collection ring; a locking member for locking the first top post and the first hanging post; and a second locking member for locking the second top post and the second hanging post. The fluid collection device of claim 8, wherein the first closure member and the second closure member have at least one horizontal adjustment screw for fine-tuning the level of the collection ring.