CN205081101U - Fluid collection device of board is rinsed in rotatory etching - Google Patents
Fluid collection device of board is rinsed in rotatory etching Download PDFInfo
- Publication number
- CN205081101U CN205081101U CN201520910388.9U CN201520910388U CN205081101U CN 205081101 U CN205081101 U CN 205081101U CN 201520910388 U CN201520910388 U CN 201520910388U CN 205081101 U CN205081101 U CN 205081101U
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- collecting ring
- collection device
- fluid collection
- contact
- collector unit
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Abstract
The utility model provides a fluid collection device of board is rinsed in rotatory etching for the fluid that the collection is splashed by a substrate surface, fluid collection device includes a plurality of collector units and a plurality of drive arrangement. A plurality of collector units ring is located around the base plate. A plurality of drive arrangement connect respectively in a plurality of collector units for the lift of each collector unit of independent control makes different fluids can be collected separately to a plurality of collector units, wherein a plurality of drive arrangement's quantity equals the quantity of a plurality of collector units has been overcome a plurality of pneumatic cylinders of current adoption and has been had lift component non -synchronous problem.
Description
[technical field]
The utility model relates to a kind of fluid collection device, particularly a kind of fluid collection device being applicable to the spin etch cleaning machine of substrate.
[background technology]
In the technique of semiconductor crystal wafer, display base plate, solar base plate, LED-baseplate etc., all need to process substrate, such as the handling procedures such as treatment fluid (such as chemicals or deionized water etc.) etches, cleaning are supplied to the surface of substrate, and in described processing substrate, then must carry out collecting for used treatment fluid by fluid processing unit, discharge opeing, the subsequent treatment such as recovery.But the waste liquid that etching process produces mostly is toxic liquid, must exercise due diligence.Therefore, how collecting the different waste liquid of even recycling is an important topic.
Existing spin etch cleaning machine can with reference to TaiWan, China new patent M505052U, it discloses and in spin etch groove, is provided with a microscope carrier in order to carrying and fixing wafer, rotating shaft below microscope carrier can High Rotation Speed, and etching solution is then flowed down by the fluid supply unit of top.Fluid collection device its adopt the collecting ring module comprising multiple collecting ring to collect different liquid, when rotating shaft High Rotation Speed, can by waste liquid centrifugal to collecting ring.Described multiple collecting ring must utilize outside elevating mechanism (such as lifting air cylinder pressure) to drive relatively to carry out lifting start.When carrying out different liquids and collecting, specific collection ring can be elevated in advance, the guiding of each described collecting ring of liquid runs down is discharged by the discharging tube below each described collecting ring.
But; in order to drive a collecting ring lifting; generally multiple lifting air cylinder pressure is set around collecting ring to control the lifting of collecting ring stably; but also because adopting multiple pneumatic cylinder; asynchronous if any doing of a certain pneumatic cylinder, namely system may produce alarm and shut down, and then causes etching solution to corrode undue substrate and need scrap described substrate; or reduce equipment capacity because shutting down maintenance, cause production cost to improve and product yield decline.
[utility model content]
In view of this, in order to the reliability of lifting fluid gathering-device, the purpose of this utility model is the fluid collection device providing a kind of spin etch cleaning machine, it, through the corresponding drive unit of each collecting ring, overcomes in prior art and adopts multiple pneumatic cylinder to be elevated a collecting ring and easily cause the nonsynchronous problem of lift component.
For reaching above-mentioned purpose, the fluid collection device of the spin etch cleaning machine that the utility model provides is for collecting the fluid splashed by a substrate surface, and described fluid collection device comprises multiple collector unit and multiple drive unit.Described multiple collector unit is located on around described substrate.Described multiple drive unit is connected to described multiple collector unit, for the independent lifting controlling each collector unit, make described multiple collector unit can collect different fluids separately, the quantity of wherein said multiple drive unit equals the quantity of described multiple collector unit.
In a preferred embodiment, described multiple collector unit comprises multiple collecting ring, and described multiple collecting ring is sequentially radial to be arranged.
In a preferred embodiment, each drive unit comprises connect mechanism, and described bindiny mechanism is used for the lifting stably driving described collecting ring, avoids lift component asynchronous.Particularly, described connect mechanism is coupled to the first contact in the outer peripheral edges of described collecting ring and the second contact.
In this preferred embodiment, described first contact and described second contact define a radian in the described outer peripheral edges of described collecting ring, described radian between pi/2 to π.
In this preferred embodiment, described collecting ring comprises the stiffener being connected to described first contact and described second contact be positioned in described outer peripheral edges.
In another preferred embodiment, described connect mechanism comprises the strutting piece being connected to described first contact and described second contact, and described strutting piece is arranged at the bottom of the described outer peripheral edges of described collecting ring.
In a preferred embodiment, described drive unit comprises a slide rail, described bindiny mechanism comprise be connected to described slide rail does Linear-moving encircle arm, described in encircle arm there is the first end points and the second end points.
In this preferred embodiment, described connect mechanism also comprises: the first fore-set, encircles described first end points of arm described in being coupled to; Second fore-set, encircles described second end points of arm described in being coupled to; First davit, is coupled to described first contact of described collecting ring; Second davit, is coupled to described second contact of described collecting ring; First closure, for sealed described first fore-set and described first davit; And second closure, for sealed described second fore-set and described second davit.
In this preferred embodiment, described first closure and described second closure have at least one adjusted leveling screws, for finely tuning the level of described collecting ring.
Compared to prior art, fluid collection device of the present utility model, it connects described multiple collecting ring one to one through drive unit, and overcomes the multiple pneumatic cylinder of existing employing and have nonsynchronous problem.In addition, the horizontal stability of collecting ring during in order to strengthen lifting, encircles arm to the first contact in described collecting ring outer peripheral edges and the second contact fulcrum as lifting through connect mechanism of the present utility model, and can be elevated stably smoothly.
For the above and other object of the utility model, feature and advantage can be become apparent, coordinate institute's accompanying drawings, be described in detail below:
[accompanying drawing explanation]
Fig. 1 is the generalized section of the spin etch cleaning machine of one of the utility model preferred embodiment;
The schematic perspective view of Fig. 2 fluid collection device of preferred embodiment for this reason;
Generalized section when Fig. 3 is the fluid collection device collection first fluid of the present embodiment;
Generalized section when Fig. 4 is the fluid collection device collection second fluid of the present embodiment;
Fig. 5 is the three-dimensional view of the fluid collection device of corresponding diagram 3;
Fig. 6 is the schematic top plan view of the fluid collection device of the present embodiment.
[embodiment]
Several preferred embodiment of the present utility model is described in detail by institute's accompanying drawings and explanation below, different graphic in, identical component symbol represents same or analogous element.
Please refer to Fig. 1 and Fig. 2, Fig. 1 is the generalized section of the spin etch cleaning machine of one of the utility model preferred embodiment, the schematic perspective view of Fig. 2 fluid collection device of preferred embodiment for this reason.As shown in the figure, the fluid collection device 120 of the spin etch cleaning machine 100 of the present embodiment is for collecting the fluid splashed by substrate 10 surface.Specifically, spin etch cleaning machine 100 is provided with a microscope carrier 11, is then connected with a rotating shaft 12 below microscope carrier 11, can carry and rotary plate 10, and wherein said substrate 10 can be semiconductor crystal wafer, display base plate, solar base plate, LED-baseplate etc.Described fluid collection device 120 comprises multiple collector unit 20 and multiple drive unit 30.
Described multiple collector unit 20 is located on described substrate 10 around, specifically, described multiple collector unit 20 comprises multiple collecting ring 22 and is connected with drainage pipe 21 bottom collecting ring 22, described multiple collecting ring 22 is sequentially radial to be arranged, in this embodiment, it is concentric annular that described multiple collecting ring 22 comprises the first collecting ring 222 and the second collecting ring 224, first collecting ring 222 and the second collecting ring 224, and the first collecting ring 222 being wherein positioned at outside also can be described as knocker.The fluid collection device 120 of the present embodiment is when the state of Fig. 1, and described substrate 10 is exposed to outside whole collector unit 20, now can load or unload substrate 10.It is worth mentioning that, collector unit 20 of the present utility model can be the form such as ring-type or tubulose, and visual collected type of fluid is outwards set up, as three collecting rings or four collecting rings etc.
Please refer to Fig. 3 to Fig. 4, Fig. 3 is the fluid collection device 120 of the present embodiment generalized section when collecting first fluid, and Fig. 4 is the fluid collection device 120 of the present embodiment generalized section when collecting second fluid.As shown in Figure 3, the first collecting ring 222 rises, and collects first fluid by the first collecting ring 222.As shown in Figure 4, when the second collecting ring 224 also rises, and second fluid is collected by the second collecting ring 224.The drive unit 30 driving collector unit 20 will be described in detail below.
As shown in Figure 2, described multiple drive unit 30 is connected to described multiple collector unit 20 (i.e. the first collecting ring 222 and the second collecting ring 224), for the independent lifting controlling each collector unit 20, make described multiple collector unit 20 can collect different fluids separately, the quantity of wherein said multiple drive unit 30 equals the quantity of described multiple collector unit 20.In this embodiment, the quantity of collector unit 20 is two, and the quantity of drive unit 30 is also two.Below by describe in detail drive unit 30 do principle.
As shown in Figure 5, Fig. 5 is the three-dimensional view of the fluid collection device 120 of corresponding diagram 3, and in Figure 5, drive unit 30 drives the first collecting ring 222 to rise.As shown in the figure, each drive unit 30 comprises a connect mechanism 32 and drive source 34, drive source 34 with for driving connect mechanism 32.For example, drive source 34 comprises pneumatic cylinder, oil hydraulic cylinder, linear motor etc. and linearly comes and goes drive source, and for pneumatic cylinder in the present embodiment, only the utility model is not limited thereto.Described bindiny mechanism 32 is for stably driving the lifting of described collecting ring 22.
Please refer to Fig. 6, Fig. 6 is the schematic top plan view of the fluid collection device 120 of the present embodiment.Particularly, described connect mechanism 32 one of to be coupled in the outer peripheral edges 23 of described collecting ring 22 first contact 24 and one second contact 25.In graphic, show the first contact 24 and the second contact 25 of the first collecting ring 222 and the second collecting ring 224 respectively.It is noted that the first contact 24 and the second contact 25 are not positioned on bolt in graphic, the graphic relative position only shown in outer peripheral edges 23.Specifically, described first contact 24 and described second contact 25 define a radian in the described outer peripheral edges 23 of described collecting ring 22, described radian between pi/2 to π, namely 90 degree to 180 degree.In this embodiment, as shown in the figure, first contact 24 of the first collecting ring 222 and the second contact 25 define radian r1, and the first contact 24 of the second collecting ring 224 and the second contact 25 define radian r2, and the radian r1 of the first collecting ring 222 is greater than the radian r2 of the second collecting ring 224.
As shown in Figures 2 and 6, in order to strengthen the stability that collecting ring 22 is elevated, described collecting ring 22 also comprises the stiffener 225 being connected to described first contact 24 and described second contact 25 be positioned in described outer peripheral edges 23.In this embodiment, stiffener 225 is located in the outer peripheral edges 23 of the first collecting ring 222.As shown in figures 2 and 5, in addition, described connect mechanism 32 also can comprise the strutting piece 37 being connected to described first contact 24 and described second contact 25, and described strutting piece 37 is arranged at the bottom of the described outer peripheral edges 23 of described collecting ring 22.In this embodiment, strutting piece 37 for supporting the second collecting ring 224, with the lifting of firm second collecting ring 224.
The concrete structure of the bindiny mechanism 32 of this embodiment is below described.As shown in Figure 5, described drive unit 30 comprises a slide rail 31, and described bindiny mechanism 32 comprises being connected to described slide rail 31 does one of Linear-moving encircles arm 33, described in encircle arm 33 there is one first end points 332 and one second end points 333.In this embodiment, the slide rail 31 driving the first collecting ring 222 and the both sides driving both slide rails 31 of the second collecting ring 224 to be arranged on a pillar 50, the drive source 34 of its correspondence is also arranged on the both sides of pillar 50, to save the space under collector unit 20.Please with reference to Fig. 2, at this to connect the connect mechanism 32 of the first collecting ring 222, connect mechanism 32 also comprises the first fore-set 334, second fore-set 335, first davit 336, second davit 337, first closure 338 and the second closure 339.Particularly, the first fore-set 334 be coupled to described in encircle described first end points 332 of arm 33; Described second end points 333 of arm 33 is encircled described in second fore-set 335 is coupled to; First davit 336 is coupled to described first contact 24 of described collecting ring 22; Second davit 337 is coupled to described second contact 25 of described collecting ring 22; First closure 338 is for sealed described first fore-set 334 and described first davit 336; Second closure 339 is for sealed described second fore-set 335 and described second davit 337.It is noted that the connect mechanism 32 connecting the second collecting ring 224 is same as described above, this is not repeated.
As shown in figures 2 and 5, described first closure 338 and described second closure 339 have at least one adjusted leveling screws 340, and adjusted leveling screws 340 is for finely tuning the level of described collecting ring 22.Specifically, the first closure 338 and described second closure 339 respectively have the first staggered locking block 342 and the second locking block 344.First locking block 342 and the second locking block 344 are combined in the first/the second fore-set 334,335 and the first/the second davit 336,337 through bolt lock respectively, after adjusted leveling screws 340 adjustment level, the first locking block 342 and the second locking blocks 344 just interlocked in conjunction with two by bolt, and then complete the fixing of connect mechanism 32.It is noted that the concrete structure of above-mentioned connect mechanism 32 is only an embodiment, in other embodiments, connect mechanism also can be arranged on the top of collector unit 20 and the space do not taken below collector unit 20.
In sum, fluid collection device 120 of the present utility model connects described multiple collecting ring 22 one to one through drive unit 30, and overcomes the multiple pneumatic cylinder of existing employing and have the nonsynchronous problem of lift component.In addition, in order to strengthen horizontality when single drive unit 30 drives collecting ring 22 to be elevated, encircle arm 33 to the first contact 24 in described collecting ring 22 outer peripheral edges 23 and the second contact 25 fulcrum as lifting through connect mechanism 32 of the present utility model, and can be elevated stably smoothly.As from the foregoing, the reliability significantly can improving fluid collection device running of the present utility model, and then the probability reducing equipment downtime and generation waste material.
Although the utility model discloses as above with preferred embodiment; but above preferred embodiment is also not used to limit the utility model; those of ordinary skill in the art; not departing from spirit and scope of the present utility model; all can do various change and retouching, the scope that therefore protection range of the present utility model defines with claim is as the criterion.
Claims (10)
1. a fluid collection device for spin etch cleaning machine, for collecting the fluid splashed by a substrate surface, is characterized in that, comprise:
Multiple collector unit, is located on around described substrate; And
Multiple drive unit, be connected to described multiple collector unit, for the independent lifting controlling each collector unit, make described multiple collector unit can collect different fluids separately, the quantity of wherein said multiple drive unit equals the quantity of described multiple collector unit.
2. fluid collection device according to claim 1, is characterized in that, described multiple collector unit comprises multiple collecting ring, and described multiple collecting ring is sequentially radial to be arranged.
3. fluid collection device according to claim 2, is characterized in that, each drive unit comprises connect mechanism, and described bindiny mechanism is for driving the lifting of described collecting ring.
4. fluid collection device according to claim 3, is characterized in that, described connect mechanism is coupled to the first contact in the outer peripheral edges of described collecting ring and the second contact.
5. fluid collection device according to claim 4, is characterized in that, described first contact and described second contact define a radian in the described outer peripheral edges of described collecting ring, described radian between pi/2 to π.
6. fluid collection device according to claim 4, is characterized in that, described collecting ring comprises the stiffener being connected to described first contact and described second contact be positioned in described outer peripheral edges.
7. fluid collection device according to claim 4, is characterized in that, described connect mechanism comprises the strutting piece being connected to described first contact and described second contact, and described strutting piece is arranged at the bottom of the described outer peripheral edges of described collecting ring.
8. fluid collection device according to claim 4, is characterized in that, described drive unit comprises a slide rail, described bindiny mechanism comprise be connected to described slide rail does Linear-moving encircle arm, described in encircle arm there is the first end points and the second end points.
9. fluid collection device according to claim 8, is characterized in that, described connect mechanism also comprises:
First fore-set, encircles described first end points of arm described in being coupled to;
Second fore-set, encircles described second end points of arm described in being coupled to;
First davit, is coupled to described first contact of described collecting ring;
Second davit, is coupled to described second contact of described collecting ring;
First closure, for sealed described first fore-set and described first davit; And
Second closure, for sealed described second fore-set and described second davit.
10. fluid collection device according to claim 8, is characterized in that, described first closure and described second closure have at least one adjusted leveling screws, for finely tuning the level of described collecting ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520910388.9U CN205081101U (en) | 2015-11-16 | 2015-11-16 | Fluid collection device of board is rinsed in rotatory etching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520910388.9U CN205081101U (en) | 2015-11-16 | 2015-11-16 | Fluid collection device of board is rinsed in rotatory etching |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205081101U true CN205081101U (en) | 2016-03-09 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520910388.9U Withdrawn - After Issue CN205081101U (en) | 2015-11-16 | 2015-11-16 | Fluid collection device of board is rinsed in rotatory etching |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205081101U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106711060A (en) * | 2015-11-16 | 2017-05-24 | 弘塑科技股份有限公司 | Fluid collection device of rotary etching and cleaning machine |
| CN110640623A (en) * | 2019-09-27 | 2020-01-03 | 武汉新芯集成电路制造有限公司 | Splash guard and chemical mechanical polishing machine |
| CN116845013A (en) * | 2023-08-21 | 2023-10-03 | 上海普达特半导体设备有限公司 | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment |
-
2015
- 2015-11-16 CN CN201520910388.9U patent/CN205081101U/en not_active Withdrawn - After Issue
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106711060A (en) * | 2015-11-16 | 2017-05-24 | 弘塑科技股份有限公司 | Fluid collection device of rotary etching and cleaning machine |
| CN106711060B (en) * | 2015-11-16 | 2019-07-26 | 弘塑科技股份有限公司 | The fluid collection device of spin etch cleaning machine |
| CN110640623A (en) * | 2019-09-27 | 2020-01-03 | 武汉新芯集成电路制造有限公司 | Splash guard and chemical mechanical polishing machine |
| CN116845013A (en) * | 2023-08-21 | 2023-10-03 | 上海普达特半导体设备有限公司 | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment |
| CN116845013B (en) * | 2023-08-21 | 2024-05-03 | 上海普达特半导体设备有限公司 | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160309 Effective date of abandoning: 20190726 |