CN116845013A - Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment - Google Patents
Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment Download PDFInfo
- Publication number
- CN116845013A CN116845013A CN202311056845.8A CN202311056845A CN116845013A CN 116845013 A CN116845013 A CN 116845013A CN 202311056845 A CN202311056845 A CN 202311056845A CN 116845013 A CN116845013 A CN 116845013A
- Authority
- CN
- China
- Prior art keywords
- mechanism ring
- present disclosure
- collection mechanism
- liquid collection
- segment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 44
- 239000004065 semiconductor Substances 0.000 title claims description 9
- 239000007788 liquid Substances 0.000 claims abstract description 90
- 230000007246 mechanism Effects 0.000 claims abstract description 79
- 230000008602 contraction Effects 0.000 description 10
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
Abstract
The present disclosure relates to a fixture for a cleaning apparatus, comprising: a liquid collection mechanism ring configured to collect liquid formed by the cleaning apparatus at the time of cleaning; at least three connectors fixedly connected to the liquid collection mechanism ring, wherein at least one of the at least three connectors includes an adjustment groove and the adjustment groove is disposed along a radial direction of the liquid collection mechanism ring; and a sliding guide provided in the adjustment groove. Among this fixing device, through set up the adjustment tank structure in the connecting piece to can pertinently deal with the expend with heat and contract with cold of liquid collection mechanism ring, thereby can improve the life of liquid collection mechanism ring, and then improve the usability of fixing device for cleaning equipment that this disclosure proposed.
Description
Technical Field
The present disclosure relates to the field of semiconductor manufacturing, and more particularly, to a fixture for a cleaning apparatus and a cleaning apparatus for a semiconductor apparatus.
Background
The current cleaning apparatus for semiconductor devices usually supports the liquid collecting mechanism ring by a cylinder or a motor in cooperation with a screw rod while being lifted and lowered, and is structured by being connected to the liquid collecting mechanism ring by a connecting member, the liquid collected in the liquid collecting mechanism ring is usually corrosive, and the shape of the liquid collecting mechanism ring is changed with the change of the temperature of the collected liquid. Therefore, there is an urgent need for a fixing device for a cleaning apparatus that can accommodate thermal expansion and contraction of a liquid collecting mechanism ring.
Disclosure of Invention
The present disclosure is directed to solving at least one of the above-mentioned problems and disadvantages of the prior art, namely that current liquid collection mechanism rings vary with the temperature of the liquid being collected. To this technical problem, the present disclosure proposes a fixing device for cleaning equipment that can accommodate thermal expansion and contraction of a liquid collection mechanism ring.
Specifically, the first aspect of the present disclosure proposes an embodiment of the present disclosure further proposes a fixture for a washing apparatus, the fixture comprising: a liquid collection mechanism ring configured to collect liquid formed by the cleaning apparatus at the time of cleaning; at least three connectors fixedly connected to the liquid collection mechanism ring, wherein at least one of the at least three connectors includes an adjustment groove and the adjustment groove is disposed along a radial direction of the liquid collection mechanism ring; and a sliding guide provided in the adjustment groove.
In one exemplary embodiment according to the present disclosure, the fixing device further includes: the support piece is fixedly connected with the sliding guide piece.
In an exemplary embodiment according to the present disclosure, the support is provided with a roller at its end remote from the liquid collection mechanism ring.
In one exemplary embodiment according to the present disclosure, the support is integrally formed with the sliding guide.
In one exemplary embodiment according to the present disclosure, the liquid collection mechanism ring is configured in a circular or square shape.
In one exemplary embodiment according to the present disclosure, the fixing device further includes:
at least three fastening screws corresponding to the at least three connectors, the at least three fastening screws being arranged on the liquid collection mechanism ring, wherein the fastening screws have first and second sections of different diameters on a longitudinal axis,
wherein a through hole is provided in the connector, the through hole comprising a first portion corresponding to the diameter of the first segment and a second portion corresponding to the diameter of the second segment.
In one exemplary embodiment according to the present disclosure, the fastening screw includes a third segment disposed between the first segment and the second segment, and wherein a diameter of the third segment is smaller than both a diameter of the first segment and a diameter of the second segment.
In one exemplary embodiment according to the present disclosure, the fixing device further includes:
and the fixing screw is screwed into one of the at least three connecting pieces along the radial direction of the liquid collecting mechanism ring.
In one exemplary embodiment according to the present disclosure, the fastening screw is accommodated in the through hole of the connection member.
Furthermore, one embodiment of the present disclosure provides a cleaning apparatus for a semiconductor device, the cleaning apparatus including the fixture according to one embodiment of the present disclosure.
In summary, in the fixing device for a cleaning apparatus according to the present disclosure, the adjusting groove structure is disposed in the connecting piece, so that the expansion caused by heat and the contraction caused by cold of the liquid collecting mechanism ring can be handled with pertinence, so that the service life of the liquid collecting mechanism ring can be prolonged, and usability of the fixing device for a cleaning apparatus according to the present disclosure is further improved.
Drawings
Features, advantages, and other aspects of embodiments of the disclosure will become more apparent upon reference to the following detailed description, taken in conjunction with the accompanying drawings, wherein several embodiments of the disclosure are shown by way of illustration, and not limitation, in which:
FIG. 1A shows a side view of a set screw 120 according to the present disclosure;
FIG. 1B illustrates a bottom view of a liquid collection mechanism ring 110 in accordance with the present disclosure;
FIG. 1C shows a side view of a liquid collection mechanism ring 110 assembled with a set screw 120 in accordance with the present disclosure;
fig. 2A shows a top view of a connector 130 according to the present disclosure;
FIG. 2B illustrates a side view of a support and a connector coupled together in accordance with the present disclosure;
FIG. 2C illustrates a partial side view of the connector 130 according to the present disclosure;
fig. 2D illustrates a partial top view of the connector 130 according to the present disclosure;
fig. 2E illustrates a partial bottom view of the connector 130 according to the present disclosure; and
fig. 3 shows an assembled view of the fixture 100 for a cleaning apparatus according to the present disclosure.
Detailed Description
The technical solutions of the present disclosure are further specifically described below by way of examples and with reference to the accompanying drawings. In the specification, the same or similar reference numerals denote the same or similar components. The following description of embodiments of the present disclosure with reference to the drawings is intended to illustrate the general inventive concept of the present disclosure and should not be taken as limiting the disclosure.
The terms "comprising," including, "and similar terms used herein should be interpreted as open-ended terms, i.e., including, but not limited to," meaning that other elements may also be included. The term "based on" is based at least in part on. The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment," and so forth.
As previously mentioned, the present disclosure is directed to solving at least one of the above-mentioned problems and disadvantages of the prior art. In summary, the present disclosure is directed to solving at least one of the above-mentioned problems and disadvantages of the prior art, namely that the liquid collection mechanism ring is currently replaced by completely removing the top of the liquid collection chamber. In view of this technical problem, the present disclosure proposes a mounting structure of a liquid collection mechanism ring that can be conveniently realized outside a cleaning apparatus for semiconductor devices, which can enable convenient mounting of the liquid collection mechanism ring and disassembly as may be required.
Specifically, one embodiment of the present disclosure proposes a fixture for a cleaning apparatus, the fixture comprising: a liquid collection mechanism ring configured to collect liquid formed by the cleaning apparatus at the time of cleaning; at least three fastening screws arranged on the liquid collection mechanism ring, wherein the fastening screws have first and second sections of different diameters on a longitudinal axis; and a plurality of connection members corresponding to the fastening screws, the connection members having a through hole provided therein, the through hole including a first portion corresponding to a diameter of the first segment and a second portion corresponding to a diameter of the second segment. Among the fixing devices for cleaning equipment according to the present disclosure, the installation can be realized through the clearance fit between the connecting piece and the fastening screw fixed on the liquid collecting mechanism ring in advance, and the disassembly and assembly are convenient and fast, which greatly improves the disassembly and assembly efficiency of the liquid collecting mechanism ring and reduces the disassembly and assembly difficulty thereof, thereby improving the usability of the fixing devices for cleaning equipment according to the present disclosure.
The fixing device for a washing apparatus according to the present disclosure will be described below with reference to the accompanying drawings. To describe the proposed fastening device according to the present disclosure, first, the manner of connection of the liquid collecting mechanism ring 110 and the fastening screw 120 according to the present disclosure will be described. Here, fig. 1A shows a side view of a fastening screw 120 according to the present disclosure, fig. 1B shows a bottom view of a liquid collection mechanism ring 110 according to the present disclosure, and fig. 1C shows a side view of the liquid collection mechanism ring 110 assembled with the fastening screw 120 according to the present disclosure.
As can be seen from fig. 1A to 1C, for smooth purposes, three sets of threaded holes 111, 112 and 113, for example, are evenly distributed over the liquid collecting mechanism ring 110, each set of threaded holes 111, 112 or 113 comprising, for example, two threaded holes, in each of which a fastening screw 120 can be screwed, a first part of the fastening screw 120, i.e. the head 121, for example, can be screwed into the liquid collecting mechanism ring 110, exposing a middle part 122 and a tail 123, wherein the diameter of the tail 123 is larger than the diameter of the middle part 122. In a specific assembly process, for example, six fastening screws 120 can be screwed into three sets of threaded holes 111, 112, and 113, respectively, and the middle portion 122 and tail portion 123 of the fastening screws 120 are exposed, respectively. Here, it should be understood by those skilled in the art that the fastening screws 120 are screwed into three sets of screw holes 111, 112 and 113, respectively, and the three sets of screw holes 111, 112 and 113 are located at edges of the bottom surface of the liquid collecting mechanism ring 110, respectively. After screwing in the fastening screw 120, a schematic view of the assembly of the liquid collection mechanism ring 110 and the fastening screw 120 is shown in fig. 1C.
After the assembled structure of the liquid collecting mechanism ring 110 and the fastening screw 120 is prepared, it is required to be assembled with the other parts of the washing apparatus. At this time, the cleaning apparatus has a through hole position corresponding to the fastening screw 120, the through hole position of which is shown in fig. 2A. Fig. 2A shows a top view of a connector 130 according to the present disclosure, fig. 2B shows a side view of a support and a connector according to the present disclosure connected together, fig. 2C shows a partial side view of a connector 130 according to the present disclosure, fig. 2D shows a partial top view of a connector 130 according to the present disclosure, and fig. 2E shows a partial bottom view of a connector 130 according to the present disclosure.
As can be seen in fig. 2A, there is a through hole in the upwardly facing portion of the connector 130, which includes a first portion (e.g., the diameter of the left hand small circular portion of fig. 2D) corresponding to the diameter of the first segment (e.g., the diameter of the middle portion 122) and a second portion (e.g., the diameter of the right hand large circular portion of fig. 2D) corresponding to the diameter of the second segment (e.g., the diameter of the tail portion 123). Thus, at assembly, the tail 123 can pass through the large round portion, and then after passing through the middle 122 can be rotated clockwise from the top into the small round portion, thereby achieving fastening. To further optimize the fastening effect, a portion 124 having a smaller diameter than both the middle portion 122 and the tail portion 123 can be provided between the middle portion 122 and the tail portion 123, the diameter of which can correspond to the diameter of the left small round portion, for example, so that the liquid collecting mechanism ring 110 does not move up and down after fastening. In this way, the liquid collection mechanism ring can be firmly secured to the connector without shifting.
After the liquid collecting mechanism ring 110 is fixed to the connection member 130 via the fastening screw 120, in order to prevent the liquid collecting mechanism ring from turning around or loosening therefrom, so that the liquid collecting mechanism ring can be firmly fixed with the connection member without being offset, the fixing device further includes: a set screw (not shown) that is screwed into one of the plurality of connectors in a radial direction of the liquid collection mechanism ring 110, for example, through a lateral screw hole 133 shown in fig. 2C. When disassembly is required, the set screw is first unscrewed and then the liquid collection mechanism ring 110 can be separated from the connector.
Since the liquid collected by the liquid collecting mechanism ring 110 is usually a high-temperature liquid, the liquid collecting mechanism ring 110 may expand with heat and contract with cold, so that the liquid collecting mechanism ring 110 needs to adapt to the shape and size change caused by such expansion with heat and contraction with cold. To this end, the connection piece further comprises an adjustment groove 134, which adjustment groove 134 is arranged in the radial direction of the liquid collection mechanism ring 110. In such a way that the portion connected to the connection piece can be adjusted in position in the radial direction along the adjustment groove 134, the influence of thermal expansion and contraction of the liquid collecting mechanism ring 110 can be accommodated.
Furthermore, in order to enable the part connected to the connecting piece to be slidingly connected to the connecting piece by means of the sliding guide, and thus to enable the part connected to the connecting piece to be position-adjusted in the radial direction along the adjustment groove relative to the liquid collecting mechanism ring, the fixing device further comprises a sliding guide, which is arranged in the adjustment groove.
Furthermore, to support the liquid collection mechanism ring 110, the fixture further comprises: and the supporting piece 140, wherein the supporting piece 140 is fixedly connected with the sliding guide piece. In this way, the above-mentioned part connected to the connection piece can comprise the support piece 140 here, so that the support piece 140 can be adjusted in its radial position along the adjustment groove relative to the liquid collecting mechanism ring 110.
Preferably, in one exemplary embodiment according to the present disclosure, the support is provided with a roller 141 at an end thereof remote from the liquid collecting mechanism ring. Further preferably, in one exemplary embodiment according to the present disclosure, the fastening screw is accommodated in the through hole of the connection member. More preferably, in an exemplary embodiment according to the present disclosure, the liquid collection mechanism ring 110 is configured in a circular shape or a square shape.
Fig. 3 shows an assembled view of the fixture 100 for a cleaning apparatus according to the present disclosure.
In summary, in the fixing device for a cleaning apparatus according to the above embodiment of the disclosure, the connection piece and the fastening screw pre-fixed on the liquid collecting mechanism ring are in clearance fit, so that the assembly and disassembly are relatively convenient and quick, which greatly improves the assembly and disassembly efficiency of the liquid collecting mechanism ring and reduces the assembly and disassembly difficulty thereof, thereby improving the usability of the fixing device for a cleaning apparatus according to the disclosure.
The embodiment designs a fixing structure convenient to detach, and then adds a structure of an adjusting groove adapting to thermal expansion and cold contraction on the basis of the fixing structure. However, those skilled in the art should understand that the adjusting slot structure may be designed first, so as to solve the problem of thermal expansion and contraction, and then add the fixing structure on this basis, so as to solve the technical problem of difficult disassembly.
That is, the connector in the prior art cannot cope with the volume change of the liquid collecting mechanism ring 110 caused by expansion with heat and contraction with cold, thereby causing damage to the liquid collecting mechanism ring 110. In order to cope with the influence of the stress caused by the expansion with heat and the contraction with cold, the inventors of the present disclosure conceived to provide the regulating groove in the connector, as shown in fig. 2E of the present application, the regulating groove 140 along the radial direction of the liquid collecting mechanism ring 110 is provided in the connector 130. At this time, if the liquid collecting mechanism ring 110 is volumetrically expanded, the position of the support 140 can be unchanged, and then the position of the support 140 in the adjustment groove 134 may be moved in the radial center direction with respect to the edge of the liquid collecting mechanism ring 110.
In addition, in order to further facilitate the assembly and disassembly of the liquid collecting mechanism ring 110, the above-described quick-release structure, that is, the above-described structure of the fixing device for the cleaning apparatus, can also be provided. The fixing device for the cleaning apparatus has been described in detail above with reference to the accompanying drawings, and thus will not be described in detail herein.
In summary, one embodiment of the present disclosure also proposes a fixture for a cleaning apparatus, the fixture comprising: a liquid collection mechanism ring configured to collect liquid formed by the cleaning apparatus at the time of cleaning; at least three connectors fixedly connected to the liquid collection mechanism ring, wherein at least one of the at least three connectors includes an adjustment groove and the adjustment groove is disposed along a radial direction of the liquid collection mechanism ring; and a sliding guide provided in the adjustment groove.
In one exemplary embodiment according to the present disclosure, the fixing device further includes: the support piece is fixedly connected with the sliding guide piece.
In an exemplary embodiment according to the present disclosure, the support is provided with a roller at its end remote from the liquid collection mechanism ring.
In one exemplary embodiment according to the present disclosure, the support is integrally formed with the sliding guide.
In one exemplary embodiment according to the present disclosure, the liquid collection mechanism ring is configured in a circular or square shape.
In one exemplary embodiment according to the present disclosure, the fixing device further includes:
at least three fastening screws corresponding to the at least three connectors, the at least three fastening screws being arranged on the liquid collection mechanism ring, wherein the fastening screws have first and second sections of different diameters on a longitudinal axis,
wherein a through hole is provided in the connector, the through hole comprising a first portion corresponding to the diameter of the first segment and a second portion corresponding to the diameter of the second segment.
In one exemplary embodiment according to the present disclosure, the fastening screw includes a third segment disposed between the first segment and the second segment, and wherein a diameter of the third segment is smaller than both a diameter of the first segment and a diameter of the second segment.
In one exemplary embodiment according to the present disclosure, the fixing device further includes:
and the fixing screw is screwed into one of the at least three connecting pieces along the radial direction of the liquid collecting mechanism ring.
In one exemplary embodiment according to the present disclosure, the fastening screw is accommodated in the through hole of the connection member.
Furthermore, one embodiment of the present disclosure provides a cleaning apparatus for a semiconductor device, the cleaning apparatus including the fixture according to one embodiment of the present disclosure.
In summary, in the fixing device for a cleaning apparatus according to an embodiment of the present disclosure, the adjusting groove structure is disposed in the connecting piece, so that the thermal expansion and the cold contraction of the liquid collecting mechanism ring 110 can be purposefully handled, and the service life of the liquid collecting mechanism ring 110 can be improved, thereby improving the usability of the fixing device for a cleaning apparatus according to the present disclosure.
The above is merely an optional embodiment of the present disclosure, and is not intended to limit the embodiments of the present disclosure, and various modifications and variations may be possible to the embodiments of the present disclosure for those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present disclosure are intended to be included within the scope of the embodiments of the present disclosure.
Although embodiments of the present disclosure have been described with reference to a number of specific embodiments, it should be understood that embodiments of the present disclosure are not limited to the specific embodiments disclosed. The embodiments of the disclosure are intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
Claims (10)
1. A fixture for a cleaning apparatus, the fixture comprising:
a liquid collection mechanism ring configured to collect liquid formed by the cleaning apparatus at the time of cleaning;
at least three connectors fixedly connected to the liquid collection mechanism ring, wherein at least one of the at least three connectors includes an adjustment groove and the adjustment groove is disposed along a radial direction of the liquid collection mechanism ring; and
and a sliding guide provided in the adjustment groove.
2. The fixture of claim 1, wherein the fixture further comprises:
the support piece is fixedly connected with the sliding guide piece.
3. A fixture according to claim 2, wherein the support member is provided with rollers at its end remote from the liquid collection mechanism ring.
4. The fixation device of claim 2, wherein the support is integrally formed with the sliding guide.
5. The fixture of claim 1, wherein the liquid collection mechanism ring is configured as a circle or square.
6. The fixture of claim 1, wherein the fixture further comprises:
at least three fastening screws corresponding to the at least three connectors, the at least three fastening screws being arranged on the liquid collection mechanism ring, wherein the fastening screws have first and second sections of different diameters on a longitudinal axis,
wherein a through hole is provided in the connector, the through hole comprising a first portion corresponding to the diameter of the first segment and a second portion corresponding to the diameter of the second segment.
7. The fixation device of claim 6, wherein the fastening screw comprises a third segment disposed between the first segment and the second segment, and wherein a diameter of the third segment is smaller than a diameter of both the first segment and the second segment.
8. The fixation device of claim 6 or 7, further comprising:
and the fixing screw is screwed into one of the at least three connecting pieces along the radial direction of the liquid collecting mechanism ring.
9. The fixation device of claim 8, wherein the binding screw is received in the through hole of the connector.
10. A cleaning apparatus for semiconductor devices, characterized in that the cleaning apparatus comprises a fixture according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311056845.8A CN116845013A (en) | 2023-08-21 | 2023-08-21 | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311056845.8A CN116845013A (en) | 2023-08-21 | 2023-08-21 | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116845013A true CN116845013A (en) | 2023-10-03 |
Family
ID=88165418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311056845.8A Pending CN116845013A (en) | 2023-08-21 | 2023-08-21 | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116845013A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103270579A (en) * | 2010-12-21 | 2013-08-28 | 佳能安内华股份有限公司 | Substrate heat treatment apparatus |
| CN205081101U (en) * | 2015-11-16 | 2016-03-09 | 弘塑科技股份有限公司 | Fluid collection device of board is rinsed in rotatory etching |
| CN209430577U (en) * | 2018-12-10 | 2019-09-24 | 四川天一科技股份有限公司 | A kind of structure for preventing screw from falling |
| CN217895796U (en) * | 2022-07-26 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Semiconductor process chamber |
-
2023
- 2023-08-21 CN CN202311056845.8A patent/CN116845013A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103270579A (en) * | 2010-12-21 | 2013-08-28 | 佳能安内华股份有限公司 | Substrate heat treatment apparatus |
| CN205081101U (en) * | 2015-11-16 | 2016-03-09 | 弘塑科技股份有限公司 | Fluid collection device of board is rinsed in rotatory etching |
| CN209430577U (en) * | 2018-12-10 | 2019-09-24 | 四川天一科技股份有限公司 | A kind of structure for preventing screw from falling |
| CN217895796U (en) * | 2022-07-26 | 2022-11-25 | 北京北方华创微电子装备有限公司 | Semiconductor process chamber |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1861476B (en) | Front derailleur with variable attachment to a bicycle frame | |
| US20100288897A1 (en) | Adjustable pole mount | |
| JP2006233969A (en) | Device for adjusting centering of ring for synchronizing control of turning vane in turbo machine | |
| KR100386735B1 (en) | Device for fastening turbochargers | |
| CN116845013A (en) | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment | |
| CN103606762A (en) | Conductor connecting clamp and installation method thereof | |
| CN117012678A (en) | Fixing device for cleaning equipment and cleaning equipment for semiconductor equipment | |
| CN103009306A (en) | Optical fiber fixing device | |
| EP0051851A1 (en) | Sunbeam concentrating and collecting apparatus | |
| CN112912594B (en) | Annular assembly for a turbomachine | |
| CN110815099B (en) | Precision optical instrument and mounting and positioning mechanism thereof | |
| CN111074252B (en) | Galvanizing equipment | |
| CN211046298U (en) | Tower machine automatically controlled cabinet cable angle adjusting device that is qualified for next round of competitions | |
| US7106594B2 (en) | Simplified mounting configuration that applies pressure force to one central location | |
| CN209812188U (en) | Device for mounting bolt gasket | |
| CN210005755U (en) | kinds of optical cable clamp | |
| CN104385215A (en) | Tool and method for detaching oil seal from automobile engine | |
| JP2010216164A (en) | Solar battery device and implement for mounting the same on roof | |
| CN220043697U (en) | Heating device | |
| CN218059890U (en) | Connecting device for bridge assembly for bridge engineering | |
| CN220527596U (en) | Cable fixing device and cable device | |
| CN218875201U (en) | Positioning jig | |
| CN219143884U (en) | Voltage equalizing cover for high-voltage equipment | |
| CN220518042U (en) | Quick installation, disassembly and adjustment device for contact net positioning ring component | |
| CN116759350B (en) | Quick-release device for wafer cavity cover |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |