CN205488057U - Cyclic annular liquid collection device - Google Patents
Cyclic annular liquid collection device Download PDFInfo
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- CN205488057U CN205488057U CN201620127169.8U CN201620127169U CN205488057U CN 205488057 U CN205488057 U CN 205488057U CN 201620127169 U CN201620127169 U CN 201620127169U CN 205488057 U CN205488057 U CN 205488057U
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- Prior art keywords
- collecting board
- liquid
- collection device
- liquid collection
- annular liquid
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Abstract
The utility model discloses a cyclic annular liquid collection device, it contains annular shell, a plurality of liquid collecting board, a plurality of soft folding layer and a plurality of collecting board extension bracket. A plurality of liquid collecting boaries are installed in annular shell. A plurality of soft folding layer install respectively between a plurality of liquid collecting boaries to reaching a plurality of collecting board extension bracket and connecting respectively in a plurality of liquid collecting boaries that correspond, with the height that changes the liquid collecting board respectively, one of them presents the state of upholding to make soft folding layer, in order to carry out liquor recovery. Therefore, the utility model discloses a cyclic annular liquid collection device can avoid retrieving liquid mutual contamination.
Description
Technical field
This utility model relates to a kind of annular liquid collection device, and particularly to the ring of a kind of soft materials
Shape fluid collection device.
Background technology
In recent years, due to being showing improvement or progress day by day of semiconductor technology, integrated circuit is used in the quantity of electronic equipment
More and more, function is the most from strength to strength.Etching technique is used among semiconductor technology the most widely.
Traditionally, etching technique can be roughly divided into Wet-type etching and dry-etching.For different materials
And characteristic size, maker selects different etching modes.Wet-type etching is former mainly by chemical reaction
Reason, uses chemical etching liquor not react with the layer to be etched, and is dissolved.Therefore, wet type
Etching has the advantage of low process costs.
Wet-type etching uses different chemical liquids to carry out the etching of semi-conducting material.In order to reclaim various not
With chemical liquid, and clean on semi-conducting material the deionized water (DI needed for chemical residue liquid
Water), simple open type single-wafer Wet-type etching machine uses multiple collecting tanks of differing heights traditionally,
To collect different liquid at various height, to reduce the situation of the pollution of chemical liquid.
Therefore, the collection space of liquid collection trough how is improved, it is to avoid the mutual pollution of chemical liquid,
For the ardent hope of the manufacturer of the production firm of quasiconductor and semiconductor production equipment.
Utility model content
In view of this, the purpose of this utility model is to provide a kind of annular liquid collection device, can keep away
Exempt from withdrawal liquid mutually to pollute.
One embodiment of this utility model content relates to a kind of annular liquid collection device, and it comprises ring
Shape shell, multiple liquid collecting boaries are installed in annular outer cover, and multiple soft foldable layers are respectively arranged in many
Between individual liquid collecting board, and multiple collecting board extending bracket is connected to multiple liquid receipts of correspondence
Collection plate, to change the height of multiple liquid collecting board respectively, one of them presents extension to make soft foldable layer
State is to carry out liquids recovery.
In certain embodiments, annular outer cover also comprises lifter fluting, props up so that multiple collecting board extends
Frame is slotted via lifter, is stretched out by inside annular outer cover.
In certain embodiments, annular liquid collection device also includes collecting board lowering or hoisting gear, Yi Jiduo
Individual collecting board vertical lift device connects multiple collecting board extending brackets of correspondence respectively, to change multiple liquid
The height of collecting board.
In certain embodiments, collecting board lowering or hoisting gear is hydraulic pressure collecting board lowering or hoisting gear, air pressure collecting board
Lowering or hoisting gear or motor collecting board lowering or hoisting gear.
In certain embodiments, at least one of which liquid collecting board can upwards raise and exceed annular outer cover
Height, e.g. liquid collecting board top cover.
In certain embodiments, annular liquid collection device also comprises multiple relief port, and it is respectively arranged in
Corresponding multiple liquid collecting boaries, to discharge the liquid of recovery to external recycling device.
In certain embodiments, liquid collecting board by Inside To Outside with downward-sloping, with utilize gravity will
The liquid reclaimed is expelled to external recycling device.
In certain embodiments, annular liquid collection device also includes main exhaust device and multiple air bleeding valves,
Multiple air bleeding valves are respectively arranged in multiple liquid collecting boaries of correspondence, so that waste gas to be discharged annular liquid collection
Device.
In certain embodiments, annular liquid collection device also comprises gap air bleeding valve, and it is installed on annular
Shell, to discharge ring-type fluid collection device by the waste gas between multiple liquid collecting boaries and annular outer cover.
In certain embodiments, annular liquid collection device is installed in Wet-type etching board, Wet-type etching
The rotating disk of board is positioned in annular liquid collection device, to place base material thereon, carries out Wet-type etching.
In sum, the annular liquid collection device in this utility model can utilize closing of soft foldable layer
Close and stretch, under stretched condition, improving the openings of sizes between liquid collecting board, increase liquids recovery
Efficiency and stability.The liquid acquisition layer can opened due to utilization and close, it is possible to effectively
Withdrawal liquid, and avoid mutually polluting.The height of annular liquid collection device collecting board can fill higher than base material
Carry and the height of unloading position, also increase the efficiency of equipment operation, and can increase further and open between collecting board
The size of mouth, further improves stability and the efficiency of annular liquid collection device.
Accompanying drawing explanation
For above and other purpose of the present utility model, feature, advantage can be become apparent with embodiment,
Being described as follows of institute's accompanying drawings:
Fig. 1 is according to a kind of annular liquid collection device depicted in some embodiments of this utility model
Schematic side view.
Fig. 2 is another according to a kind of annular liquid collection device depicted in some embodiments of this utility model
The schematic side view in one direction.
Fig. 3 is the portion according to a kind of annular liquid collection device depicted in some embodiments of this utility model
Divide schematic top plan view.
Fig. 4 is the portion according to a kind of annular liquid collection device depicted in some embodiments of this utility model
Divide schematic side view.
Detailed description of the invention
It is hereafter to coordinate institute's accompanying drawings to be described in detail for embodiment, but the embodiment provided not is used
To limit the scope that this utility model is contained, and the description of structure operation is not used to limit the suitable of its execution
Sequence, any structure reconfigured by element, produced the device with impartial effect, be all this practicality
Novel contained scope.It addition, graphic the most for the purpose of description, and not according to life size map.For
Making to readily appreciate, in the description below, similar elements or similar components will illustrate with identical symbology.
It addition, the word (terms) used in full piece description and claim, in addition to having and indicating especially,
Be generally of each word use in this area, in the content of this utility model with in special content
Usually meaning.Some in order to describe word of the present utility model by lower or the other places of this description discuss,
To provide those skilled in the art about guiding extra in description of the present utility model.
About used herein first, second ... etc., censure order or the meaning of cis-position the most especially
Thinking, be also not used to limit this utility model, it is only used to the unit that difference describes with constructed term
Part or operation.
Secondly, the word used in this article comprises, includes, has, contains etc., is opening
The term of property, i.e. mean including but not limited to.
Fig. 1 is according to a kind of annular liquid collection device depicted in some embodiments of this utility model
Schematic side view.As shown in FIG., when carrying out Wet-type etching, the base material 160 such as wafer is placed in rotating disk 110
On, liquid supplying apparatus 130 can provide the chemical liquid of etching, just to carry out this base material 160
Face 162 and/or the chemical etching of reverse side 164.It is said that in general, base material 160 be circular semiconductor substrates or
Other suitable materials.
Rotating shaft 120 one end is provided with motor apparatus 150, and the other end of rotating shaft 120 then connects rotating disk 110,
To rotate base material 160 around axle center A.Owing to base material 160 rotates when etching or cleaning, base material
Chemical liquid or the cleaning liquid on 160 surfaces will be thrown to the annular liquid collection device 300 in outside, by
Annular liquid collection device 300 can carry out the recovery of chemical liquid and cleaning liquid.While etching,
For making different classes of liquid to reclaim disaggregatedly, to avoid mutually polluting.Rotating disk 110 meeting
Move up and down, so that the height of the base material 160 that be mounted thereon is raised and lowered, and utilize different liquid
Collecting layer carries out the recovery of different classes of liquid.
Annular liquid collection device 300 of the present utility model utilizes soft foldable layer, can will be currently in use
The soft foldable layer of collecting layer trail, to present stretched condition.Other untapped collecting layers soft
Matter foldable layer is then in stitching state so that other untapped collecting layers are in closed state, effectively
Increase the A/F of collecting layer in use.Therefore, annular liquid collection device of the present utility model
300, it is possible not only to prevent withdrawal liquid splash from being caused the phase between different withdrawal liquid to other collecting layers
Pollute mutually, it is also possible to effectively increase the efficiency of recovery.
Annular liquid collection device 300 of the present utility model includes multiple liquid acquisition layer, e.g. schemes
First liquid collecting layer 210 depicted in, second liquid collecting layer the 220, the 3rd liquid acquisition layer 230
And the 4th liquid acquisition layer 240.Each liquid acquisition layer is by liquid collecting board and soft foldable layer institute group
Conjunction forms.As a example by four layers of liquid acquisition layer in Fig. 1, first liquid collecting layer 210 is by first liquid
Collecting board 610, second liquid collecting board 620 are constituted with the first soft foldable layer 510.Second liquid is received
Collection layer 220 is by second liquid collecting board the 620, the 3rd liquid collecting board 630 and the second soft foldable layer 520
Constituted.3rd liquid acquisition layer 230 by the 3rd liquid collecting board the 630, the 4th liquid collecting board 640 with
3rd soft foldable layer 530 is constituted.4th liquid acquisition layer 240 by the 4th liquid collecting board 640,
Five liquid collecting boaries 650 are constituted with the 4th soft foldable layer 540.
When deployed, as a example by the 4th liquid acquisition layer 240, the 5th liquid collecting board 650 is raised above,
4th soft foldable layer 540 presents stretched condition, by ectocentral part the 5th liquid collecting board 650 with
4th liquid collecting board 640 is separated from each other, to form ring-type opening.And by liquid supplying apparatus 130
Supplied the liquid at base material 160, first at the front 162 of base material 160 and/or reverse side 164, lost
Carve or clean.Then, by the spinning force of rotating disk 110, liquid is thrown toward outside.Now, due to
4th soft foldable layer 540 presents stretched condition, collects at the 5th liquid collecting board 650 and the 4th liquid
The ring-type opening formed between plate 640 provides a bigger extended distance, it is possible to effectively
Ground withdrawal liquid.Additionally, other liquid acquisition layer, first liquid collecting layer 210, second liquid are collected
Layer 220 and the 3rd liquid acquisition layer 230, because being in closely sealed state, then can be effectively prevented recovered liquid
Body splash is to inside it, it is to avoid the mutual pollution between different withdrawal liquid.
As a example by first liquid collecting layer 210, during closedown, second liquid collecting board 620 covers first
On liquid collecting board 610, now the first soft foldable layer 510 is laminated together, and by ectocentral
Part, second liquid collecting board 620 is the most closely sealed with first liquid collecting board 610, therefore is effectively prevented from
The entrance of withdrawal liquid, it also avoid liquid and first liquid collection that the 4th liquid acquisition layer 240 reclaims
The liquid that layer 210 reclaims mutually pollutes.Simultaneously as effectively turned off other collecting layer, this reality
The liquid acquisition layer being currently in use can also be effectively increased with novel annular liquid collection device 300,
The extended distance of such as the 4th liquid acquisition layer 240 in figure.
Refer to Fig. 3 and Fig. 4, Fig. 3 is according to a kind of ring depicted in some embodiments of this utility model simultaneously
The partial top schematic diagram of shape fluid collection device, Fig. 4 is then according to some embodiments of this utility model
The part schematic side view of depicted a kind of annular liquid collection device.
The outside of liquid collecting board is also equipped with at least one collecting board extending bracket, it is therefore preferable to 2 to 3
Individual collecting board extending bracket, to coordinate collecting board lowering or hoisting gear 140 to adjust the height of liquid collecting board.One
For as, lowermost first liquid collecting board 610 can install collecting board lowering or hoisting gear, other
Second liquid collecting board the 620, the 3rd liquid collecting board the 630, the 4th liquid collecting board 640 and the 5th
Liquid collecting board 650 is the most preferably respectively provided with first collecting board extending bracket the 710, second collecting board and prolongs
Stretch support the 720, the 3rd collecting board extending bracket 730 and the 4th collecting board extending bracket 740.Collecting board
Lowering or hoisting gear 140 also comprises the first collecting board vertical lift device 142 and is connected to the first collecting board extending bracket
710, to lift second liquid collecting board 620, the second collecting board vertical lift device 144 is connected to the second receipts
Collection plate extending bracket 720, to lift the 3rd liquid collecting board 630, the 3rd collecting board vertical lift device 146
Being connected to the 3rd collecting board extending bracket 730, to lift the 4th liquid collecting board 640, and the 4th collects
Plate vertical lift device 148 is connected to the 4th collecting board extending bracket 740, to lift the 5th liquid collecting board
650。
Wherein, collecting board lowering or hoisting gear 140 can be motor, pneumatic shuttle or hydraulic means, with basis
Requirement drive collecting board vertical lift device moves up or down to suitably height, and by collecting board opening
At a suitable position and height, carry out the recovery of liquid.
In order to coordinate moving up and down of collecting board extending bracket, annular liquid collection device 300 ring-type outside
Shell 310 is additionally provided with multiple lifter fluting 170, so that collecting board extending bracket is worn by ring-shaped shell 310
Go out, and connect the collecting board vertical lift device of correspondence, and offer moves up and down required space.
Annular liquid collection device 300 of the present utility model also utilize the 4th collecting board extending bracket 740 with
Lift the 5th liquid collecting board 650.In certain embodiments, the 5th liquid collecting board 650 can be liquid
Collecting board top cover, its top only needing to cover ring-type fluid collection device 300, to stop the liquid reclaimed
Leaked by top.And it is noted that, the 5th liquid can be collected by the 4th collecting board extending bracket 740
Plate 650 ramps up the height 420 that the top one of up to ring-shaped shell 310 is predetermined.From the opposing party always,
5th liquid collecting board 650 is also above the apparent height 410 of base material 160.Therefore, the 5th liquid collecting board
650 are possible not only to effectively ensure that the organic efficiency of withdrawal liquid, and owing to the position of now base material 160 is
It is in and loads and the position of unloading, namely base material 160 can be carried out by mechanical arm in the position of this height
Load or unloading.
When annular liquid collection device 300 of the present utility model utilizes the 4th collecting board vertical lift device 148
By the 4th collecting board extending bracket 740 and the height of the 5th liquid collecting board 650 (liquid collecting board top cover)
After extending upwardly to the top of ring-shaped shell 310, base material 160 can rise to be carried out herein or etch.
Now, after cleaning completes, base material 160 need not change height again, it is only necessary to reduces the 5th liquid collecting board
The height of 650 (liquid collecting board top covers), i.e. may utilize mechanical arm and directly carries out the unloading of base material 160,
With the loading of next base material, the time needed for semiconductor production, and then accelerated semiconductor are effectively saved it
The efficiency produced.
Therefore, it is however generally that, highly 420 more than height 410, so that base material 160 is higher than ring-shaped shell
The height of 310.
Refer to Fig. 2, Fig. 2 is according to a kind of annular liquid depicted in some embodiments of this utility model simultaneously
The schematic side view of the other direction of collection device, in order to illustrate that annular liquid of the present utility model collects dress
The air bleeding valve put and the configuration of relief port.As shown in FIG., each liquid collecting board is configured with at least one
Relief port, withdrawal liquid to be discharged via relief port, and can be carried out back by external recycling device further
Receive.
Liquid collecting board has a little gradient, about 0 degree to 20 degree, the most downward-sloping, and let out
Head piece is then installed on the position of the close lower section in outside, so that liquid may utilize the relation of gravity, automatically flows
To relief port.Wherein, liquid collecting board inner and outer also has upwardly extending liquid shelves wall, so that
The liquid entering liquid collecting board only can be discharged by relief port, without by leaking elsewhere.
First relief port 332 is installed on the position close to lower section, the outside of first liquid collecting board 610, and
Second relief port 334 is then installed on the position close to lower section, the outside of second liquid collecting board 620, and the 3rd
Relief port 336 is installed on the position close to lower section, the outside of the 3rd liquid collecting board 630, the 4th relief port
338 positions close to lower section, the outside being installed on the 4th liquid collecting board 640.
In addition, the exhaust apparatus that annular liquid collection device 300 also has, to be produced during by operation
Raw waste gas is discharged.As shown in FIG., exhaust apparatus comprises main exhaust device 320, and multiple air bleeding valves connect
In main exhaust device 320 and corresponding liquid collecting board, e.g. first row air valve 342, second exhaust
Valve the 344, the 3rd air bleeding valve 346 and the 4th air bleeding valve 348 connect respectively first liquid collecting board 610,
Second liquid collecting board the 620, the 3rd liquid collecting board 630 and the 4th liquid collecting board 640, to be used for
Waste gas in each liquid collecting board is discharged.
Exhaust apparatus also includes gap air bleeding valve 340, and its one end is installed on ring-shaped shell 310, the other end
Then being connected to main exhaust device 320, it is used for discharging the waste gas between ring-shaped shell 310 and liquid collecting board.
It is said that in general, gap air bleeding valve 340 maintains long time running, and first row air valve 342, second row air valve
344, the 3rd air bleeding valve 346 and the 4th air bleeding valve 348 then visual corresponding liquid collecting board be opened into
During row liquids recovery, just open air bleeding valve, to keep maximum exhaust effect.
In sum, the annular liquid collection device in this utility model can utilize soft foldable layer stretching
Under the state of opening, improve the openings of sizes between liquid collecting board, increase efficiency and the stability of liquids recovery.
The liquid acquisition layer that utilization can be opened and close can also withdrawal liquid effectively, and avoid mutually polluting.
The height of collecting board can increase the efficiency of equipment operation higher than the height of base material loaded with unloading position,
The size of opening between collecting board can also be increased, more effectively improve the steady of annular liquid collection device
Qualitative and efficiency.
Although this utility model is open as above with embodiment, so it is not limited to this practicality newly
Type, any those skilled in the art, without departing from spirit and scope of the present utility model, each when making
Planting variation and retouching, protection domain the most of the present utility model is when being as the criterion depending on as defined in claim.
Claims (10)
1. an annular liquid collection device, it is characterised in that described annular liquid collection device comprises:
Annular outer cover；
Multiple liquid collecting boaries, it is installed in described annular outer cover；
Multiple soft foldable layers, it is respectively arranged between the plurality of liquid collecting board；And
Multiple collecting board extending brackets, it is connected to the plurality of liquid collecting board of correspondence, to divide
Not changing the height of the plurality of liquid collecting board, one of them presents and stretches to make the plurality of soft foldable layer
The state of opening, to carry out liquids recovery.
2. annular liquid collection device as claimed in claim 1, it is characterised in that described annular outer cover
Also comprise lifter fluting, so that the plurality of collecting board extending bracket is slotted via described lifter, by
Stretch out inside described annular outer cover.
3. annular liquid collection device as claimed in claim 2, it is characterised in that described annular liquid
Collection device also comprises collecting board lowering or hoisting gear, and multiple collecting board vertical lift device connects correspondence respectively
The plurality of collecting board extending bracket, to change the height of the plurality of liquid collecting board.
4. annular liquid collection device as claimed in claim 3, it is characterised in that above-mentioned collecting board
Lowering or hoisting gear is hydraulic pressure collecting board lowering or hoisting gear, air pressure collecting board lowering or hoisting gear or motor collecting board lifting dress
Put.
5. annular liquid collection device as claimed in claim 4, it is characterised in that at least one of which
Described liquid collecting board can upwards raise and exceed the height of described annular outer cover.
6. annular liquid collection device as claimed in claim 5, it is characterised in that described annular liquid
Collection device also comprises multiple relief port, and it is respectively arranged in the plurality of liquid collecting board of correspondence, with
The described liquid reclaimed is discharged to external recycling device.
7. annular liquid collection device as claimed in claim 6, it is characterised in that the plurality of liquid
Collecting board with downward-sloping, is expelled to described outside recovery with the described liquid by recovery by Inside To Outside
Device.
8. annular liquid collection device as claimed in claim 7, it is characterised in that described annular liquid
Collection device also comprises main exhaust device and multiple air bleeding valves, and the plurality of air bleeding valve is respectively arranged in correspondence
The plurality of liquid collecting board, waste gas to be discharged described annular liquid collection device.
9. annular liquid collection device as claimed in claim 8, it is characterised in that described annular liquid
Collection device also comprises gap air bleeding valve, and it is installed on described annular outer cover, to be received by the plurality of liquid
Waste gas between collection plate and described annular outer cover discharges described annular liquid collection device.
10. annular liquid collection device as claimed in claim 9, it is characterised in that described annular liquid
Collection device also comprises rotating disk, and it is positioned in described annular liquid collection device, to place base material thereon,
Carry out Wet-type etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620127169.8U CN205488057U (en) | 2016-02-18 | 2016-02-18 | Cyclic annular liquid collection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620127169.8U CN205488057U (en) | 2016-02-18 | 2016-02-18 | Cyclic annular liquid collection device |
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| Publication Number | Publication Date |
|---|---|
| CN205488057U true CN205488057U (en) | 2016-08-17 |
Family
ID=56677611
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620127169.8U Withdrawn - After Issue CN205488057U (en) | 2016-02-18 | 2016-02-18 | Cyclic annular liquid collection device |
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| CN (1) | CN205488057U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107093567A (en) * | 2016-02-18 | 2017-08-25 | 顶程国际股份有限公司 | Annular liquid collection device |
-
2016
- 2016-02-18 CN CN201620127169.8U patent/CN205488057U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107093567A (en) * | 2016-02-18 | 2017-08-25 | 顶程国际股份有限公司 | Annular liquid collection device |
| CN107093567B (en) * | 2016-02-18 | 2019-08-06 | 顶程国际股份有限公司 | Annular liquid collection device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160817 Effective date of abandoning: 20190806 |