KR101999553B1 - 조명 광학장치, 노광장치, 및 물품의 제조방법 - Google Patents

조명 광학장치, 노광장치, 및 물품의 제조방법 Download PDF

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Publication number
KR101999553B1
KR101999553B1 KR1020150130682A KR20150130682A KR101999553B1 KR 101999553 B1 KR101999553 B1 KR 101999553B1 KR 1020150130682 A KR1020150130682 A KR 1020150130682A KR 20150130682 A KR20150130682 A KR 20150130682A KR 101999553 B1 KR101999553 B1 KR 101999553B1
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KR
South Korea
Prior art keywords
light
optical
face
optical integrator
incident
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KR1020150130682A
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English (en)
Korean (ko)
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KR20160034806A (ko
Inventor
히로미 수다
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캐논 가부시끼가이샤
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0668—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror having non-imaging properties
    • G02B17/0673—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror having non-imaging properties for light condensing, e.g. for use with a light emitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/02—Diffusing elements; Afocal elements
    • G02B5/0205—Diffusing elements; Afocal elements characterised by the diffusing properties
    • G02B5/0252—Diffusing elements; Afocal elements characterised by the diffusing properties using holographic or diffractive means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • H01L21/0274—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
KR1020150130682A 2014-09-22 2015-09-16 조명 광학장치, 노광장치, 및 물품의 제조방법 Active KR101999553B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014192436A JP6053737B2 (ja) 2014-09-22 2014-09-22 照明光学装置、露光装置、および物品の製造方法
JPJP-P-2014-192436 2014-09-22

Publications (2)

Publication Number Publication Date
KR20160034806A KR20160034806A (ko) 2016-03-30
KR101999553B1 true KR101999553B1 (ko) 2019-07-12

Family

ID=55525644

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KR1020150130682A Active KR101999553B1 (ko) 2014-09-22 2015-09-16 조명 광학장치, 노광장치, 및 물품의 제조방법

Country Status (5)

Country Link
US (1) US9733571B2 (https=)
JP (1) JP6053737B2 (https=)
KR (1) KR101999553B1 (https=)
CN (1) CN105446085B (https=)
TW (1) TWI588621B (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6951926B2 (ja) * 2017-06-06 2021-10-20 株式会社オーク製作所 露光装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000353418A (ja) * 1999-06-08 2000-12-19 Canon Inc 照明装置およびそれを用いた投影露光装置
JP2002139844A (ja) * 2000-10-30 2002-05-17 Nikon Corp 露光装置、露光方法、及びデバイス製造方法
JP2003243276A (ja) * 2002-02-13 2003-08-29 Canon Inc 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP2005116831A (ja) 2003-10-08 2005-04-28 Nikon Corp 投影露光装置、露光方法、及びデバイス製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4198583A (en) * 1975-07-31 1980-04-15 General Electric Company Dynamoelectric machine and switch and terminal assembly combination
US4918583A (en) * 1988-04-25 1990-04-17 Nikon Corporation Illuminating optical device
JP2748342B2 (ja) * 1989-12-28 1998-05-06 ウシオ電機株式会社 光照射装置
JP2748343B2 (ja) * 1989-12-28 1998-05-06 ウシオ電機株式会社 光照射装置
JPH0527596A (ja) * 1991-07-18 1993-02-05 Canon Inc 画像形成装置
EP0658811B1 (de) 1993-12-13 1998-06-17 Carl Zeiss Beleuchtungseinrichtung für eine Projektions-Mikrolithographie-Belichtungsanlage
JP2000021765A (ja) * 1998-07-03 2000-01-21 Nikon Corp 照明装置及びそれを用いた投影露光装置
JP2000162707A (ja) * 1998-11-30 2000-06-16 Canon Inc 照明装置及びそれを用いた投影装置
JP2002033271A (ja) * 2000-05-12 2002-01-31 Nikon Corp 投影露光方法、それを用いたデバイス製造方法、及び投影露光装置
US7341369B2 (en) * 2004-10-01 2008-03-11 Cytyc Corporation Isotropic illumination
US7630136B2 (en) 2006-07-18 2009-12-08 Asml Holding N.V. Optical integrators for lithography systems and methods

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000353418A (ja) * 1999-06-08 2000-12-19 Canon Inc 照明装置およびそれを用いた投影露光装置
JP2002139844A (ja) * 2000-10-30 2002-05-17 Nikon Corp 露光装置、露光方法、及びデバイス製造方法
JP2003243276A (ja) * 2002-02-13 2003-08-29 Canon Inc 露光装置、露光方法、及びそれを用いたデバイス製造方法
JP2005116831A (ja) 2003-10-08 2005-04-28 Nikon Corp 投影露光装置、露光方法、及びデバイス製造方法

Also Published As

Publication number Publication date
JP6053737B2 (ja) 2016-12-27
KR20160034806A (ko) 2016-03-30
TW201612653A (en) 2016-04-01
CN105446085A (zh) 2016-03-30
US9733571B2 (en) 2017-08-15
TWI588621B (zh) 2017-06-21
CN105446085B (zh) 2018-05-08
US20160085158A1 (en) 2016-03-24
JP2016063185A (ja) 2016-04-25

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