KR101982833B1 - Glass test device with work table deflection adjustment - Google Patents

Abstract

The present invention relates to a technique for adjusting the deflection of the edge of a work table in a glass test device on which a glass for a thin film transistor (TFT) process is placed during a liquid crystal display (LCD) production process. The present invention preliminarily measures the horizontality of the work table on which the large-sized glass is placed, maps the current height by position, and then, based on the mapped current height, moves independently and vertically at the lower edge of the work table, so as to adjust the edge of the work table sagging downward, compared to the central part of the work table, by lifting up the edge of the work table. According to the present invention, a plurality of deflection adjustment units arranged at the lower edge of the work table can easily adjust the horizontality of the work table by simply lifting or lowering the edge of the work table while moving in the vertical direction corresponding to a precise monitoring result for the horizontality of the work table.

Description

Technical Field [0001] The present invention relates to a glass test apparatus having a work table deflection correcting function,

The present invention is a technique for correcting the sagging of the edge of a work table in a glass inspection apparatus in which a glass for a TFT (Thin Film Transistor) process is placed during a production process of an LCD (Liquid Crystal Display).

More specifically, the present invention preliminarily measures the horizontality of a work table on which a large-area glass is placed, maps the current height to the top of the work table on the basis of the current height, The edge of the work table is lifted up and corrected by the movement of the work table in the downward direction relative to the central portion of the work table as the workpiece moves independently from the bottom in the vertical direction.

Generally, during TFT (Thin Film Transistor) manufacturing process of an LCD (Liquid Crystal Display) process, electric field inspection (OST) and optical inspection (AOI) are applied to a lead glass.

In such a TFT process, progress is made after the glass sheet is fixed on a work table. In order to perform an accurate process, a precise horizontal state of the work table supporting the glass sheet must be accompanied.

In general, the primary glass is going to become larger (G6, G7, G8, G8.5, G9, G10, G10.5), so that the work table supporting the large primary glass is larger than the glass There is anger.

However, as the work table becomes larger, it becomes increasingly difficult to set the level of the work table.

In addition, the edges of the work table are sagged slightly downward due to the enlargement of the work table. The leading glass placed on the upper surface of the sagging work table is also curved in accordance with the downward deflection of the work table, Which interferes with the process.

At this time, it is necessary to perform upward correction by lifting up the edge of the work table which is leaning downward. For this purpose, it is necessary to know which part of the edge of the work table is downward.

A technique capable of solving the problems of the related art as described above is desired by correcting the portion of the work table that is slung downward by lifting the portion to the original position in consideration of the degree of sagging.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a glass inspection apparatus equipped with a work table deflection correcting function capable of accurately monitoring which part of the edge of a work table is deflected .

It is also an object of the present invention to provide a glass inspection apparatus having a work table deflection correcting function capable of correcting and correcting again the original position in consideration of the degree of sagging with respect to a portion of the work table, .

According to an aspect of the present invention, there is provided a glass inspection apparatus provided with a work table deflection correcting function, comprising: a work table (100) having an upper surface formed in a flat plate shape so that an inspection glass is seated; A rotation unit (200) disposed at the bottom center of the work table and rotating the work table in a horizontal state; A base 300 disposed at an outer side of the work table and supporting the movement of the work table and the rotation unit; A plurality of deflection correcting units (400) for correcting a downward deflection of the work table corresponding to the vertical upper portion of the work table in accordance with the movement in the vertical direction while being independently arranged at a plurality of positions corresponding to the lower edges of the work table; At least one displacement sensor (500) for sensing a current height for a plurality of positions on an upper surface of the work table; Height mapping means (600) for mapping the current height of the plurality of positions of the work table measured by the at least one displacement sensor by area; And a drive control unit (700) for controlling individual operations for each sag correction unit based on the current height of each area mapped by the height mapping unit so that deflection of the work table edge is corrected.

Here, the drive control unit 700 includes a sag correction unit at a position that indicates a relatively low height from a current height of a plurality of positions of the work table mapped by the height mapping unit among a plurality of sag correction units (hereinafter, Quot;) and to control the operation of the target correction unit such that the upper portion of the identified target correction unit moves a predetermined distance upward.

When the work table is rotated by the rotation unit, air is blown toward the lower surface of the work table in a state where the work table is disposed at a plurality of positions adjacent to the rotation unit at the lower portion of the work table. A plurality of air bearings 110 for supporting the air bearings 110; And an air supply unit that supplies air of a predetermined pressure to the plurality of air bearings.

On the other hand, the sag correction unit 400 includes a vertical stroke unit 410 for supporting the downward deflection of the work table in contact with the lower surface of the work table; A vertical movement block 420 which moves in the vertical direction while being connected to a lower portion of the upper and lower stroke units; A horizontal movement block 430 for adjusting the height of the vertical movement block by vertically moving the vertical movement block upward or downward according to the movement in the horizontal direction while being connected to the lower portion of the vertical movement block; And a driving motor 440 for transmitting the driving force to the horizontal moving block such that the horizontal moving block moves in the horizontal direction.

At this time, since the connecting portions of the horizontal moving block and the vertical moving block are inclined at an angle to each other, when the horizontal moving block horizontally moves so that a high portion of the inclined faces of the horizontally moving block moves to a lower one of the inclined faces of the vertical moving block, The block is configured to move in the vertical direction and the vertical moving block moves in the vertical direction when the horizontal moving block horizontally moves such that the lower one of the inclined faces of the horizontal moving block moves to a higher one of the inclined faces of the vertical moving block .

On the other hand, the sag correction unit 400 is mounted obliquely on the inclined surface of the horizontal moving block facing the inclined surface of the vertical moving block, and when the horizontal moving block horizontally moves, the inclined surfaces of the vertical moving blocks face each other (451, 452) for guiding the sliding movement of the first and second guide rollers

The sag correction unit 400 includes a base block 461 for supporting a horizontally moving block positioned on its upper surface in a state of being disposed below the horizontally moving block; The other end of the driving motor is connected to the driving motor. The other end of the driving motor is arranged to pass through the horizontal moving block. The driving motor is driven for horizontal movement of the horizontal moving block for vertical movement of the vertical moving block, A screw member 462 horizontally moving the horizontally moving block along the horizontal moving block; Screw mounting blocks 471 and 472 which are respectively mounted on the upper surfaces of the base blocks corresponding to both side portions of the horizontal moving block so as to penetrate the horizontal moving block through the screw members and guide the rotation of the screw members in place; And one or more horizontal movement cross roller members 481 and 482 for guiding the sliding movement of the horizontal movement block in the horizontal direction while being disposed on the upper surface of the base block corresponding to the lower portion of the horizontal movement block.

Further, the sag correction unit 400 is a unit that guides the vertically moving block in the vertical direction while moving in the vertical direction in association with the motion of the vertical moving block while being supported by an outer housing adjacent to the side wall of the vertical moving block The vertical movement cross roller members 491 and 492 can be further provided.

The present invention has the advantage of accurately monitoring the downward deflection of the edge of the work table due to the presence of the displacement sensor and height mapping means.

In addition, the present invention has the advantage of correcting the portion of the work table, which is sagged downward from the edge of the work table due to the sag correction unit and the drive control unit, .

Further, the present invention is characterized in that a plurality of sag correction correcting units are arranged at the lower edge of the work table, and in response to the precise monitoring result of the level of the work table, only the operation of lifting or lowering the edge of the work table, It shows the advantage of easy adjustment of the horizontal level of the table.

Further, since the present invention has a plurality of cross roller members, the upper and lower stroke units can be effectively raised and lowered in a narrow space through the ball screw.

1 is an exemplary view showing a part of the configuration of a glass inspection apparatus according to the present invention,
2 is a diagram showing a state in which a sag correction unit, a displacement sensor, a height mapping unit, and a drive control unit are shown in FIG. 1;
3 is an exemplary view of a current height map of a work table generated through the height mapping means of the present invention,
4 is an illustration showing a sag correction unit in the present invention,
5 is a perspective view in which the vertical stroke unit and the vertical movement cross roller member are separated from each other in FIG. 4,
6 is a perspective view in which vertical moving blocks are separated in FIG. 5,
FIG. 7 is a side view of the cross roller member for vertical movement in FIG. 4,
FIG. 8 is an illustration showing a state in which the vertical moving block moves in the vertical direction in accordance with the advancement of the horizontal moving block in FIG. 7;
FIG. 9 is an exemplary diagram showing a state in which the vertical moving block moves in the downward direction in accordance with the backward movement of the horizontal moving block in FIG. 8;

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIG. 2 is a view showing a state in which a sag correction unit, a displacement sensor, a height mapping unit, and a drive control unit are shown in FIG. 1; FIG. Fig.

A glass inspection apparatus having a work table deflection correcting function according to the present invention includes a work table 100, an air bearing 110, an air supply unit (not shown), a rotation And may include a unit 200, a base 300, a sag correction unit 400, a displacement sensor 500, a height mapping unit 600, and a drive control unit 700.

The work table 100 may be formed in a flat plate shape having its top surface so that a glass for inspection (not shown) is seated.

The air bearing 110 is arranged at a plurality of positions adjacent to the rotation unit 200 at the lower portion of the work table 100 as shown in FIGS. 1 and 2 And supports the work table 100 in a noncontact manner when the work table 100 is rotated by the rotation unit 200 as the air is blown toward the upper surface toward the lower surface.

The air supply unit (not shown) may be separately provided to supply a predetermined pressure of air to the plurality of air bearings 110.

The rotating unit 200 is disposed in the lower center of the work table 100 as shown in FIGS. 1 and 2, and rotates the work table 100 in a horizontal state.

When the work table 100 is rotated in the horizontal state by the operation of the rotation unit 200 as described above, inspection means (not shown) for moving the upper portion of the work table 100 are placed on the upper surface of the work table 100 The inspection process can be performed on the glass (not shown).

The base 300 is disposed at the outer periphery of the work table 100 as shown in FIG. 1 and FIG. 2, and supports the movement of the work table 100 and the rotation unit 200. Here, the base 300 is called a so-called stone quartz made of stone and stably supports the movement of the work table 100 and the operation of the rotation unit 200.

A plurality of sag correction units 400 are independently arranged at a plurality of positions corresponding to the lower edges of the lower portion of the work table 100 as shown in FIGS. 1 and 2, The downward deflection of the work table 100 corresponding to the vertical portion is corrected.

A specific configuration of each sag correction unit 400 individually disposed at the lower edge of the work table 100 will be described in detail below with reference to FIG. 4 through FIG. 7.

The displacement sensor 500 senses the current height for a plurality of positions including the edge of the work table 100 on the upper surface of the work table 100, respectively.

To this end, the displacement sensor 500 preferably moves from point to point on the x axis in a state of being mounted on a gantry (not shown) moving in the y axis at the top of the work table 100, Lt; RTI ID = 0.0 > 100 < / RTI >

At this time, the displacement sensor 500 may preferably be a laser displacement sensor which measures the time for which the irradiated laser beam is reflected after irradiating the upper surface of the work table 100 with a laser beam.

The height mapping means 600 maps the height of the work table 100 on the top surface of the work table 100 based on the current height of the work table 100 measured by the displacement sensor 500 on the top surface of the work table 100, The height of the work table 100 corresponding to the horizontal level of the work table 100 can be mapped.

At this time, the drive controller 700 controls each sag correction unit 400 based on the current height of each of the areas of the work table 100 mapped by the height mapping unit 600 so that deflection of the edge of the work table 100 is corrected So that the individual operations can be controlled.

More specifically, the drive control unit 700 determines the positions of the plurality of sag correction units 400, which are relatively lower from the current height of the plurality of positions of the work table 100 mapped by the height mapping unit 600, (Hereinafter referred to as a "target correction unit") of the target correction unit and controls the operation of the target correction unit such that the upper portion of the identified target correction unit moves a predetermined distance in the upward direction.

3 is an exemplary view of a current height map of the work table generated through the height mapping means of the present invention.

When the height of the height measuring means 600 is measured on a plurality of predetermined positions in the inspection glass (not shown) on which the displacement sensor 500 is mounted on the upper surface of the work table 100, The current height for each area corresponding to a plurality of positions of the work table 100 corresponding to the horizontal degree of the work table 100, that is, the surface height for each area, can be mapped as shown in, for example, FIG.

3), which is the surface height of the work table 100, for example, mapped by the height mapping means 600 so that the deflection of the edge of the work table 100 is corrected, It is possible to control the individual operations for each sag correction unit 400. [

Specifically, the drive control section 700 controls the upper portion of the sag correction unit 401 located at the right edge and the upper portion of the sag correction unit 404 located at the lower right in the " vertical displacement value map example " (E.g., 0.00003, 0.00004) in the direction of the sag correction unit 401, 404, respectively.

Here, the operation of the sag correction unit 401 is precisely controlled so that the upper portion of the sag correction unit 401 located at the right ridge moves upward by a predetermined distance (for example, 0.00003), and the sag correction unit 401 It is the role of the drive control unit 700 to precisely control the operation of the sag correction unit 404 so that the upper portion of the sagittal correction unit 404 moves a predetermined distance (e.g., 0.00004) upward.

As described above, the upper portion of the sag correction unit 401 positioned at the right edge of the sag correction unit 404 located at the right turn and the upper portion of the sag correction unit 404 located at the lower right of the sag in the "example of the vertical displacement value map" (For example, 0.00003, 0.00004) in the direction of FIG. 3, the displacement value in [FIG. 3] will eventually show the same vertical displacement value (for example, 0.50000) in all the areas.

[Figure 4] is an exemplary view showing a sag correction unit in the present invention, [Figure 5] is a perspective view in which a vertical stroke unit and a vertical movement cross roller member are separated in [Figure 4] FIG. 7 is a side view of the vertical movement block shown in FIG. 4, with the vertical movement cross roller member removed. FIG.

Referring to FIGS. 4 to 7, the sag correction unit 400 includes a vertical stroke unit 410, a vertical movement block 420, a horizontal movement block 430, a drive motor 440, The cross roller members 451 and 452, the base block 461, the screw fixing blocks 471 and 472, the screw member 462, the horizontal movement cross roller members 481 and 482, and the vertical movement cross roller members 491 and 492 .

The upper and lower stroke units 410 support the downward deflection of the work table in direct contact with the lower surface of the work table. To this end, the upper and lower stroke unit 410 may preferably include a support plate 411 and a support pin 412.

The support plate 411 is mounted on the upper surface of the vertical movement block 420 as shown in FIGS. 4 to 7, and eventually moves finely in the vertical direction in conjunction with the vertical movement of the vertical movement block 420.

The support pins 412 are protruded upwardly in a state of being mounted on the upper surface of the support plate 411 so as to support the support plate 411 in the up and down direction in association with the movement of the support plate 411 in the up- And moves the current position of the work table in the vertical direction while being in contact with the lower surface of the work table as it moves.

The vertical movement block 420 moves up and down in a state connected to the lower portion of the upper and lower stroke units 410 as shown in FIGS. In this manner, the vertical movement block 420 moves the vertical stroke unit 410, which is seated on its upper surface, in the vertical direction in accordance with the vertical movement block 420 itself.

The horizontal movement block 430 may be configured to move the vertical movement block 420 upward in accordance with the movement in the horizontal direction while being connected to the lower portion of the vertical movement block 420 as shown in FIGS. 4 to 7 The lowering of the vertical movement block 420 can be adjusted.

Here, the connection portion between the horizontal movement block 430 and the vertical movement block 420 may be formed to be inclined at an angle to each other, as shown in FIG.

As a result, when the horizontal moving block 430 moves horizontally such that a high portion of the inclined surfaces of the horizontal moving block 430 moves to a lower one of the inclined surfaces of the vertical moving block 420, .

At this time, in accordance with the vertical movement of the vertical movement block 420, the vertical stroke unit 410 moves in the vertical direction to raise the corresponding position of the work table.

When the horizontal moving block 430 horizontally moves so that a lower portion of the inclined surfaces of the horizontal moving block 430 moves to a higher one of the inclined surfaces of the vertical moving block 420, Lt; / RTI >

At this time, the vertical stroke unit 410 is moved in the vertical downward direction according to the vertical movement of the vertical movement block 420 to lower the corresponding position of the work table.

The driving motor 440 transmits driving force to the horizontal moving block 430 so that the horizontal moving block 430 moves horizontally as the screw driving force of the screw member 462 is transmitted to the screw member 462. [

The inclined moving cross roller members 451 and 452 can be mounted diagonally on the inclined surfaces of the horizontal moving block 430 facing the inclined surfaces of the vertical moving block 420 as shown in FIG.

In detail, one inclined-motion cross roller member 451 includes a bar-shaped moving roller a 451a integrally mounted on a lower surface of the vertical moving block 420 as shown in FIG. 6, and a horizontal moving block 430 451b which are integrally mounted on the upper surface of the moving roller a '451b.

Another inclined movement cross roller member 452 is also mounted on the lower surface of the vertical movement block 420 as shown in FIG. 6, and a bar-shaped movement roller a 452a and a horizontal movement block 430, 452b, which are integrally mounted on the upper surface of the moving roller a '452b.

As a result, the at least one tilting movement cross roller members 451 and 452 move in a state in which the inclined surfaces of the vertical movement block 420 are opposed to each other at an inclined surface of the horizontal movement block 430 when horizontally moving the horizontal movement block 430 .

At this time, when the horizontal moving block 430 is horizontally moved, the vertical moving block 420, which slides through the inclined moving cross roller members 451 and 452 in conjunction with the horizontal moving, moves vertically up and down.

Here, in order to vertically move the vertical movement block 420 vertically in conjunction with the horizontal movement of the horizontal movement block 430, the vertical movement block 420 should also assist the vertical movement cross roller members 491 and 492.

The base block 461 may be disposed in the form of a plate at a lower portion of the horizontal movement block 430 as shown in FIGS. 4 to 7, and includes a horizontal movement block 430 positioned on its upper surface, (Not shown).

The other end of the screw member 462 may be arranged to pass through the horizontal movement block 430 while one end of the screw member 462 is connected to the driving motor 440 as shown in FIG. 4 to FIG.

At this time, the screw member 462 is disposed in a state of passing through at least one screw mounting block 471 and 472 as shown in FIGS. 4 to 7, so that the screw member 462 can be supported rotatably by the screw blocks 471 and 472 have.

As a result, the screw member 462 rotates in accordance with the driving of the driving motor 440 and horizontally moves the horizontal moving block 430 along the longitudinal direction of the screw member 462. Accordingly, the screw member 462 vertically moves the vertical moving block 420 vertically Direction.

The screw mounting blocks 471 and 472 are formed so that screw members 462 passing through the horizontal moving block 430 penetrate through the horizontal moving block 430 as shown in FIGS. 4 to 7 Guides the rotation of the screw member 462 in a state of being mounted on the upper surface of the base block 461, respectively.

The horizontal movement cross roller members 481 and 482 may be mounted on the upper surface of the base block 461 corresponding to the lower portion of the horizontal movement block 430 as shown in FIG.

In detail, one horizontal movement cross roller member 481 includes a bar fixing roller A 481a integrally mounted on the upper surface of the base block 461 and a horizontal movement block 430, And the movable rollers A (481b) integrally mounted on the lower surface of the movable rollers A (481b) cross-slide.

Another cross roller member 482 for horizontal movement is also provided with a bar fixing roller A 482a and a horizontal movement block 430 integrally mounted on the upper surface of the base block 461 as shown in Fig. The movable rollers A (482b) which are integrally mounted on the lower surface of the movable rollers (482a, 482b) are cross-sliding.

As a result, at least one horizontal movement cross roller member 481, 482 guides the sliding movement in which the horizontal movement block 430 moves in the horizontal direction.

The vertical movement cross roller members 491 and 492 are supported on the outer housing adjacent to the side wall of the vertical movement block 420 as shown in FIGS. 4 to 7 So as to move in the vertical direction.

In detail, the single vertical-movement cross roller member 491 includes a fixing roller B 491a fixed to an outer housing (not shown) as shown in FIGS. 4 to 7 and a fixing roller B 491a The moving rollers B 491b moving vertically in the vertical direction can be cross-slid relative to each other.

Here, the moving roller B 491b moving vertically in the vertical direction can preferably be connected to the support plate 411. [ Accordingly, the vertical movement block 420, which is integrally connected to the support plate 411, can move in the vertical direction in conjunction with the horizontal movement of the horizontal movement block 430.

Another cross roller member 492 for vertical motion is also provided with a fixing roller B 492a fixed to an outer housing (not shown) as shown in Figs. 4 to 7 and a fixing roller B 492a The movable rollers B (492b) moving vertically in the vertical direction can be configured to cross slide relative to each other.

Here, the moving roller B (492b) moving in the vertical direction may preferably be connected to the support plate (411). Accordingly, the vertical movement block 420, which is integrally connected to the support plate 411, can move in the vertical direction in conjunction with the horizontal movement of the horizontal movement block 430.

As a result, one or more vertical-movement cross roller members 491 and 492 can guide the vertical movement of the vertical movement block 420 in the vertical direction.

FIG. 8 is an exemplary view showing a state in which the vertical moving block moves in the vertical direction in accordance with the advancement of the horizontal moving block in FIG. 7, and FIG. 9 is a view In which the vertical movement block moves in the vertical downward direction.

8, when the horizontal moving block 430 moves horizontally such that a high portion of the inclined surfaces of the horizontal moving block 430 moves to a lower one of the inclined surfaces of the vertical moving block 420, 420 and the upper and lower stroke units 410 move in the vertical direction to lift the corresponding position of the work table corresponding to the support pins 412 of the upper and lower stroke units 410.

In order for the vertical movement block 420 and the upper and lower stroke units 410 to move in the vertical direction from the horizontal movement of the horizontal movement block 430, the sliding operation of the inclination movement cross roller members 451 and 452 is also required, The operation of the cross roller members 491 and 492 is required.

For example, the fixing roller B (491a, 492a) of the vertical movement cloth roller members 491, 492 stops the horizontal movement and the vertical movement cloth roller members 491, The moving rollers B 491b and 492b guide the movement in the vertical direction.

At this time, the force of the horizontal movement block 430 in the horizontal direction is converted into the vertical force of the vertical movement block 420 by the inclined movement cross roller members 451 and 452.

9, when the horizontal moving block 430 horizontally moves so that the lower one of the inclined surfaces of the horizontal moving block 430 moves to a higher one of the inclined surfaces of the vertical moving block 420, 420 and the upper and lower stroke units 410 move downward and eventually lower the corresponding position of the work table corresponding to the support pins 412 of the upper and lower stroke units.

In this case also, the sliding motion of the inclined-motion cross roller members 451 and 452 is also required for the vertical movement block 420 and the vertical stroke unit 410 to move in the downward direction from the horizontal movement of the horizontal movement block 430 It is only necessary to operate the vertical movement cross roller members 491 and 492. [

For example, the fixing roller B (491a, 492a) of the vertical movement cloth roller members 491, 492 stops the horizontal movement and the vertical movement cloth roller members 491, The movement rollers B 491b and 492b guide the movement in the vertical direction.

At this time, the force of the horizontal movement block 430 in the horizontal direction is converted into the force in the vertical direction of the vertical movement block 420 by the inclined movement cross roller members 451 and 452.

100: Work table
110: Air bearing
200: rotation unit
300: Base
400: sag compensation unit
410: upper and lower stroke unit
411: Support plate
412: Support pin
420: vertical movement block
430: horizontal movement block
440: drive motor
451, 452: a cross roller member for tilting movement
451a: moving roller a
451b: a moving roller a '
452a: moving roller a
452b: a moving roller a '
461: base block
462: screw member
471, 472: Screw mounting block
481, 482: Cross roller member for horizontal movement
481a: Fixing roller A
481b: moving roller A
482a: Fixing roller A
482b: moving roller A
491, 492: Cross roller member for vertical movement
491a: Fixing roller B
491b: Motion Roller B
492a: Fixing roller B
492b: Motion Roller B
500: displacement sensor
600: Height mapping means
700:

Claims (8)

A work table (100) in which an upper surface thereof is formed in a flat plate shape so that a glass for inspection can be seated;
A rotating unit (200) disposed at a lower center of the work table and rotating the work table in a horizontal state;
A base 300 disposed at an outer periphery of the work table and supporting the movement of the work table and the rotation unit;
A plurality of deflection correcting units (400) for correcting the downward deflection of the work table corresponding to the vertical portion of the work table in accordance with the movement in the vertical direction while being independently arranged at a plurality of positions corresponding to the lower edges of the work table;
At least one displacement sensor (500) for sensing a current height for a plurality of positions on an upper surface of the work table;
Height mapping means (600) for mapping the current height of the plurality of positions of the work table measured by the one or more displacement sensors, by region;
A drive control unit (700) for controlling individual operations for each deflection correcting unit based on the current height of each area mapped by the height mapping unit so that deflection of the worktable edge is corrected;
And,
The sag correction unit (400)
A driving motor 440;
A base block 461;
A horizontal moving block 430 slid in a horizontal direction by a driving force transmitted from the driving motor in a state of being disposed on the upper surface of the base block and having an inclined surface whose top surface is inclined along its sliding horizontal direction;
The horizontal moving block is provided with a sloped surface inclined to its lower surface so as to abut the sloped surface of the horizontal moving block. The sloped surface of the horizontally moving block is slidably engaged with the inclined surface of the horizontal moving block, A vertically moving block 420 which moves upward or descends in an upward direction;
A vertical stroke unit (410) supporting the downward deflection of the work table in a state of being vertically moved in conjunction with the vertical movement of the vertical movement block while being connected to the upper part of the vertical movement block and being in contact with the lower surface of the work table;
A screw member (462) disposed at one end of the horizontal moving block and connected to the driving motor, the other end of the screw member (462) passing through the horizontal moving block and rotating according to driving of the driving motor to horizontally move the horizontal moving block along its longitudinal direction;
A fixing roller A (481a, 482a) formed in a bar shape along the sliding direction of the horizontal moving block and mounted on the upper surface of the base block corresponding to both sides of the lower moving block, And a moving roller A (481b, 482b) mounted on the lower surface of the horizontally moving block so as to be slidable relative to each other, so that the horizontal moving cross roller member 481 , 482);
A moving roller a (451a, 452a) which is bar-shaped along the direction in which the inclined surfaces of the horizontal moving block and the vertical moving block abut against each other and is mounted on both sides of the inclined surfaces of the vertical moving block, (451b, 452b) mounted on both sides of the inclined surfaces of the horizontal moving block so as to be cross-slid with the moving roller (a), so that inclined movement guiding inclined sliding between the horizontal moving block and the vertical moving block Cross roller members 451 and 452;
A moving roller B (491b, 492b) mounted on both side walls of the vertical moving block corresponding to the position of the fixing roller A along the direction of raising or lowering the vertical moving block, (491a, 492a) mounted on an inner wall of an outer housing adjacent to each of the moving rollers (B) so as to slide in a crosswise direction, A vertical movement cross roller member (491, 492) for guiding the rise or fall of the block;
And a work table deflection correcting function.
The method according to claim 1,
The drive control unit 700,
(Hereinafter referred to as a target correction unit) at a position that indicates a relatively low height from a current height of a plurality of positions of the work table mapped by the height mapping unit among the plurality of deflection correction units And controls the operation of the target correction unit so that the upper portion of the target correction unit identified moves in the upward direction by a predetermined distance.
The method of claim 2,
Wherein the air blowing unit is configured to blow air in an upward direction toward a lower surface of the work table in a state where the work table is disposed at a plurality of positions adjacent to the rotation unit at a lower portion of the work table, A plurality of air bearings (110) for supporting the table in a noncontact manner;
An air supply unit for supplying air of a predetermined pressure to the plurality of air bearings;
Further comprising a work table deflection correcting function.
delete delete delete The method of claim 3,
The sag correction unit (400)
A screw mounting block (471, 472) mounted on the upper surface of the base block corresponding to both side portions of the horizontal moving block so as to penetrate the screw member penetrating through the horizontal moving block and guiding the screw member to rotate in place;
Further comprising a work table deflection correcting function. delete

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