KR102040979B1 - Automation apparatus for calibraion of 3d measuring apparatus - Google Patents

Abstract

The present invention relates to a calibration automation device of a 3D measuring equipment for measuring a three-dimensional shape and, specifically, to a calibration automation device of a 3D measuring equipment wherein a measuring error of the 3D measuring equipment is corrected by automatically measuring an error of a measuring probe of the 3D measuring equipment measuring a shape of an object to be inspected by using a jig which automatically adjusts an inclination (inclination angle). The present invention comprises: a measuring probe; an X-axis, Y-axis, and Z-axis transfer part for transferring the measuring probe to the X-axis, the Y-axis, and the Z-axis respectively; and a shelf in which the object to be inspected having the three-dimensional shape of various structures to be measured is mounted.

Description

Calibration Automation Device for 3D Measuring Equipment {AUTOMATION APPARATUS FOR CALIBRAION OF 3D MEASURING APPARATUS}

The present invention relates to a calibration automation device for a 3D measurement device for measuring a three-dimensional shape, and more particularly, to a measurement probe of a 3D measurement device for measuring the shape of an inspection object using a jig for automatically adjusting a tilt (inclined angle). The present invention relates to a calibration automation device for 3D measurement equipment that automatically measures errors and corrects measurement errors of the 3D measurement equipment.

In recent years, due to rapid technological development, micro-machining is required in all industries, and as the shape of processing also changes from a simple two-dimensional pattern to a complex three-dimensional shape, a technique for measuring (measuring) three-dimensional micro shapes is required. Importance is on the rise.

3D measuring equipment that measures three-dimensional fine shape is a three-dimensional measuring equipment that measures all the X, Y and Z axes, unlike the existing 2D measuring equipment that measures only the X and Y axes. The contact method for measuring the shape of the inspection object, the non-contact method for measuring without contact, and the mixing method in which the non-contact method and the contact method are combined are known.

Such 3D measuring equipment is widely used in various industrial fields, and before performing the measurement work on the inspected object, the work of correcting the origin of the measurement probe is performed as a part to reduce the error of the measured value. That is, the measurement error of the 3D measurement equipment is corrected by measuring the error of the measurement probe before measuring the inspected object using the 3D measurement equipment.

However, in the 3D measurement apparatus according to the prior art, a method of compensating an error of a measurement probe is performed by an operator directly at a certain angle in order to measure an error of a spatial coordinate while simply contacting the measurement probe with a contact block of the reference machine. As the measurement is made by the inclined arrangement method, the operator has to manually adjust the angle of the reference machine, and thus, there is a limitation in obtaining high accuracy and a cumbersome work.

KR 10-2011-0060041 A, 2011. 06. 08. KR 10-2008-0111653 A, December 24, 2008. KR 10-2005-0043611 A, May 11, 2005

Therefore, the present invention has been proposed to solve the problems of the prior art, by automatically measuring and correcting the error of the measurement probe of the 3D measurement equipment for measuring the shape of the inspection object using a jig for automatically adjusting the inclination angle The aim is to provide a calibration automation device for 3D measurement equipment that can improve the convenience of work.

According to an aspect of the present invention, there is provided a measuring probe, an X-axis, a Y-axis, and a Z-axis feeder for transferring the measuring probe to X, Y, and Z axes, respectively, and various structures to be measured. In the calibration automation device of the 3D measurement equipment comprising a shelf having a three-dimensional object of the three, the holding device, the upper end of the shelf and the one end is hinged and rotatably coupled to one end of the fixing stand An end of the jig including a tilting unit configured to pivot up and down the hinge coupled to the fixed base to move up and down from the fixed base, and a tilt adjusting unit for elevating the other end of the rotating base to adjust the tilt angle of the rotating table; A plurality of contact blocks disposed on an upper side of the pivot table and provided with reference marks of the measurement probes installed and contacted with the main body so as to correspond to the intervals of the plurality of scales displayed on the main body; Reference machine to be; And controlling the tilt adjustment unit to automatically adjust the tilt angle of the reference machine by elevating the tilting table to a predetermined height, and corresponding to the tilt angle of the reference machine, the spatial coordinates measured by the 3D measuring apparatus through the measurement probe. And a manager terminal for measuring a measurement error of the measurement probe by comparing the reference coordinates of the measurement probes provided through the reference device with each other.

Preferably, the inclination adjustment portion is one end is coupled to the bottom portion of the pivot, the support is slidably coupled along the longitudinal direction of the pivot; A fixing block coupled to the other end of the support and rotatably coupled to the fixing stand; And a driving motor for rotating the fixing block to slide the support along the longitudinal direction of the pivot, thereby adjusting the inclination of the pivot by elevating the other end of the pivot.

Preferably, the inclination adjustment portion cylinder body is installed on the fixed base; And it may be characterized in that it comprises a cylinder rod that is raised and lowered from the cylinder body, the upper end is fixed to the bottom surface portion of the other end of the rotating table.

Preferably, the jig is provided with a plurality of position sensors, the shelf is provided with a reference table facing the position sensor, the position sensor is installed on the fixture to be aligned with the contact block in the X-axis and Y-axis direction The X and Y axes of the contact block are measured and provided to the manager terminal based on the reference band, and the manager terminal is based on the X and Y axes of the contact block measured from the position sensor. And a reference coordinate of the Y axis, and the calculated X and Y axis reference coordinates of the measurement probe and the Z axis reference coordinates of the measurement probe provided through the reference device, measured by the 3D measuring device, and the space of the measurement probe. The error of the measuring probe may be measured by comparing the coordinates with each other.

As described above, according to the present invention, by using a jig that automatically adjusts the tilt angle, the error of the measurement probe of the 3D measurement equipment for measuring the shape of the inspection object is automatically measured and corrected compared to the prior art and work Convenience can be improved.

1 is a view illustrating a calibration automation device for 3D measurement equipment according to an embodiment of the present invention.
Figure 2 is a side view of the calibration automation device of the 3D metrology equipment shown in FIG.
3 is a view for explaining the inclination adjustment unit according to the present invention shown in FIG.
FIG. 4 is a diagram illustrating an operation characteristic of the tilt adjuster illustrated in FIG. 3. FIG.
5 is a view illustrating a tilt adjustment unit according to another example of the present invention.
6 is a conceptual diagram illustrating a calibration automation device for 3D measurement equipment according to another embodiment of the present invention.

Advantages and features of the present invention, and methods for achieving them will be apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms.

In this specification, the embodiments are provided so that the disclosure of the present invention may be completed and the scope of the present invention may be completely provided to those skilled in the art. And the present invention is only defined by the scope of the claims. Thus, in some embodiments, well known components, well known operations and well known techniques are not described in detail in order to avoid obscuring the present invention.

Also, like reference numerals refer to like elements throughout. In addition, the terms used (discussed) herein are for the purpose of describing the embodiments are not intended to limit the invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. In addition, components and operations referred to as 'includes (or includes)' do not exclude the presence or addition of one or more other components and operations.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used in a sense that can be commonly understood by those skilled in the art. In addition, the terms defined in the commonly used dictionary are not ideally or excessively interpreted unless they are defined.

Hereinafter, technical features of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view illustrating a state in which a calibration automation device is placed on a shelf to explain a calibration automation device of a 3D measurement device according to an exemplary embodiment of the present invention.

Referring to Figure 1, the calibration automation device 10 of the 3D measurement equipment according to an embodiment of the present invention by measuring the error of the measurement probe 23a of the 3D measurement equipment 20 for measuring the shape of the three-dimensional inspection object For the purpose of correction, the measurement probe 23a is moved to the set moving coordinate, and then the spatial coordinates of the actual measuring probe 23a are automatically measured, compared with the set moving coordinate, and the error thereof is determined to determine the measurement probe 23a. Correct the error.

The 3D measuring device 20 is, for example, a small 3D measuring device having a half-gantry structure that is transported on the same line along the X axis and the Y axis as shown in FIG. 1. X-axis, Y-axis, and Z-axis transfer unit 21, 22, 23 to transfer to the Y-axis and Z-axis, respectively, and a shelf 24 on which the inspected object having various three-dimensional shapes to be measured are placed.

FIG. 2 is a side view of the calibration automation device of the 3D measurement apparatus illustrated in FIG. 1.

2, the calibration automation device 10 of the 3D measurement equipment according to an embodiment of the present invention is placed on the jig 11, the upper side of the jig 11 and the measurement probe (3) A reference 12 that provides a reference for measuring the spatial coordinates X, Y, Z of 23a).

The jig 11 is a fixing stand 111 is placed on the upper part of the shelf 24, one end portion is rotatably coupled to one end of the fixing stand 111, and the rotating table 112 is placed on the upper base 12 is placed. And an inclination adjustment unit 113 that receives the set inclination and adjusts the inclination of the pivot 112 by elevating the other side of the pivot 112 to correspond to the inclination.

As shown in FIG. 2, the reference device 12 provides a reference coordinate for measuring the spatial coordinates X, Y, and Z of the measurement probe 23a of the 3D measuring apparatus 20, A main body 121 placed on one side of the upper part and marked with a predetermined interval, and a plurality of contact blocks 122 installed on the upper part of the main body 121 in correspondence with the interval of the graduation and contacting the measurement probe 23a with each other. do.

FIG. 3 is a view illustrating a tilt adjustment unit according to the present invention shown in FIG. 2.

Referring to FIG. 3, the inclination adjustment unit 113 may include a support 113a having one end coupled to the bottom of the pivot 112 and slidably coupled along the longitudinal direction of the pivot 112, and a support 113a. The other end of the fixed block 113b is coupled and rotatably coupled to the fixed base 111 and the fixed block 113b to rotate the support 113a along the longitudinal direction of the rotating table 112 by rotating the rotating table And a drive motor 113c for adjusting the inclination of 112.

FIG. 4 is a view illustrating an operation characteristic of the tilt adjuster illustrated in FIG. 3, and is a view of the calibration automation device of the 3D measurement equipment viewed from the side.

3 and 4, the guide groove 112a is formed in the longitudinal direction of the bottom surface of the pivot table 112 such that the support 113a slides along the bottom surface of the pivot table 112.

As shown in FIG. 2, in the method of measuring the spatial coordinates of the measuring probe 23a, the reference table 12 makes contact with the measuring probe 23a at a first angle (for example, when the tilt is 0 °). The spatial coordinates of the measuring probe 23a measured by the measuring probe 23a in the state where the tilt of the pivot 112 is in contact with the block 122 are measured, and the measured spatial coordinates and the first angle are measured. By comparing the reference coordinates of the reference group 12 in the mutual measurement of the error of the measurement probe (23a).

In addition, the driving motor 113c is driven to incline the pivot 112 at a predetermined second angle, and then the measurement probe 23a is brought into contact with the contact block 122 of the reference device 12 again. The spatial coordinate of the measurement probe 23a measured through 23a), that is, the spatial coordinate of the measurement probe 23a at the second angle is measured. Thereafter, the measured spatial coordinates and the reference coordinates of the reference machine 12 at the second angle are compared with each other to measure an error of the measurement probe 23a.

The drive motor 113c includes a speed reducer for finely adjusting the tilt of the rotation table 112, and the drive motor 113c receives a control signal from the manager terminal 1 and drives the drive signal.

The manager terminal 1 transmits a control signal to the driving motor 113c to control the operation of the driving motor 113c. At this time, the manager terminal 1 transmits a control signal corresponding to the slope previously registered in the database to the driving motor 113c to control the operation of the driving motor 113c.

The manager terminal 1 receives the spatial coordinates at the first and second angles measured by the measuring probe 23a from the 3D measuring apparatus 20 and corresponds to the reference coordinates of the reference device 12 in correspondence with each angle in the database. (Or previously registered normal spatial coordinates) are compared with each other to measure the error of the measurement probe 23a.

5 is a view illustrating a tilt adjusting unit according to another example of the present invention.

Referring to FIG. 5, the tilt adjusting unit 213 according to another example of the present invention may be an electric cylinder. That is, the inclination adjustment part 213 includes the cylinder main body 213a installed in the fixing stand 111, and the cylinder rod 213b which protrudes up and down from the cylinder main body 213a.

The tilt adjusting unit 213 operates in accordance with the control signal of the manager terminal 1 similarly to the tilt adjusting unit 113 according to an example. That is, according to the control signal provided from the manager terminal 1, the cylinder rod 213b is raised upward through the cylinder body 213a, so that the angle of the reference base 12 placed on the pivot table 112, that is, the inclination angle To the set angle.

The inclination adjustment unit 213 may control the height at which the cylinder rod 213b is raised in response to the voltage magnitude (width) of the control signal provided from the manager terminal 1. That is, the height of the cylinder rod 213b is sequentially increased according to the voltage level of the control signal, thereby adjusting the angle of the reference unit 12 by raising the other side of the pivoting table 112.

FIG. 6 is a conceptual diagram briefly illustrating a calibration automation device of a 3D measuring apparatus according to another embodiment of the present invention.

As shown in FIG. 6, the jig 11, for example, the fixing base 111, is provided with position sensors 13 at regular intervals on both sides in the longitudinal direction and at both sides in the width direction, and the position sensor on the shelf 24. The reference table 25 is provided to face 13. The position sensor 13 measures the X-axis and Y-axis coordinates of the contact block 122 of the reference unit 12 based on the reference table 25 and provides the same to the manager terminal 1.

The position sensor 13 is installed on the fixing member 111 to be aligned in the X-axis and Y-axis directions with the contact block 122 to which the measuring probe 23a is in contact. The manager terminal 1 calculates reference coordinates of the X and Y axes of the measurement probe 23a based on the X and Y axis coordinates of the contact block 122 measured by the position sensor 13, and the measurement thus calculated. The reference coordinates of the X-axis and Y-axis of the probe 23a and the Z-axis reference coordinate provided through the reference device 12 are compared with each other and the spatial coordinates of the measurement probe 23a actually measured by the 3D measurement equipment are measured. ) Error can be measured.

As described above, the technical spirit of the present invention has been described in detail in the preferred embodiments, but the above-described preferred embodiments are for the purpose of description and not of limitation. As such, those skilled in the art may understand that various embodiments are possible through the combination of the embodiments of the present invention within the scope of the technical idea of the present invention.

1: administrator terminal
10: automation device
11: jig
12: reference machine
13: position sensor
20: 3D measuring equipment
21: X axis transfer part
22: Y axis feeder
23: Z axis feed section
24: shelf
25: reference frame
23a: measuring probe
111: holder
112: meeting
113,213: Tilt adjustment part
113a: support
113b: fixed block
113c: Drive motor
121: main body
122: contact block
213a: cylinder body
213b: Cylinder Rod

Claims (4)

delete A measurement probe, an X-axis, a Y-axis, and a Z-axis transfer unit for transferring the measurement probe to the X-axis, the Y-axis, and the Z-axis, respectively, and a shelf having an object to be inspected having a three-dimensional shape having various structures to be measured. In the calibration automation device of a half-gantry structure of 3D measurement equipment,
A pivot mounted on the upper part of the shelf and one end of which is hinged rotatably to one end of the stator, and the other end pivots up and down about the hinge coupled to the stator to move up and down from the stator; A jig including an inclination adjustment unit configured to elevate the other end of the pivot table to adjust an inclination angle of the pivot table;
A plurality of contact blocks disposed on an upper side of the pivot table and provided with reference marks of the measurement probes installed and contacted with the main body so as to correspond to the intervals of the plurality of scales displayed on the main body; Reference machine to be; And
The tilt adjustment unit is controlled to raise and lower the pivot table to a predetermined height to automatically adjust the inclination angle of the reference unit, corresponding to the spatial coordinates measured by the 3D measurement device through the measurement probe in response to the inclination angle of the reference unit. And a manager terminal for measuring a measurement error of the measurement probe by comparing the reference coordinates of the measurement probes provided through the reference device.
The inclination adjustment unit,
One end portion is coupled to the bottom portion of the pivot table, the support is slidably coupled along the longitudinal direction of the pivot table, the bottom portion of the pivot table is formed with a guide groove in the longitudinal direction so that the support slides along the bottom surface of the pivot table- ;
A fixing block coupled to the other end of the support and rotatably coupled to the fixing stand; And
A drive motor driven by receiving a control signal from the manager terminal and rotating the fixing block to slide the support along the longitudinal direction of the pivot, thereby elevating the other end of the pivot to adjust the tilt of the pivot. The drive motor includes a speed reducer for finely adjusting the tilt of the pivot table.
Measuring the spatial coordinates of the measuring probe in a state where the tilt of the pivot table is a first angle, and comparing the measured spatial coordinates and the reference coordinates of the reference machine at the first angle to measure the error of the measuring probe and,
After driving the driving motor to tilt the pivot table at a second angle, the measuring probe is contacted with the plurality of contact blocks of the reference unit again to measure the spatial coordinates of the measuring probe at the second angle. Then, the calibration automation device of the 3D metrology equipment, characterized in that for measuring the error of the measurement probe by comparing the measured spatial coordinates and the reference coordinates of the reference machine at the second angle.
A measurement probe, an X-axis, a Y-axis, and a Z-axis transfer unit for transferring the measurement probe to the X-axis, the Y-axis, and the Z-axis, respectively, and a shelf on which an object having a three-dimensional shape having various structures to be measured is placed. In the calibration automation device of the half gantry structure 3D measurement equipment,
A pivot mounted on the upper part of the shelf and one end of which is hinged rotatably to one end of the stator, and the other end pivots up and down about the hinge coupled to the stator to move up and down from the stator; A jig including an inclination adjustment unit configured to elevate the other end of the pivot table to adjust an inclination angle of the pivot table;
A plurality of contact blocks disposed on an upper side of the pivot table and provided with reference marks of the measurement probes installed and contacted with the main body so as to correspond to the intervals of the plurality of scales displayed on the main body; Reference machine to be; And
The tilt adjustment unit is controlled to raise and lower the pivot table to a predetermined height to automatically adjust the inclination angle of the reference unit, corresponding to the spatial coordinates measured by the 3D measurement device through the measurement probe in response to the inclination angle of the reference unit. And a manager terminal for measuring a measurement error of the measurement probe by comparing the reference coordinates of the measurement probes provided through the reference machine with each other.
The inclination adjustment unit,
A cylinder body installed on the fixing base; And
It is indented in the vertical direction from the cylinder body, the upper end includes a cylinder rod fixed to the bottom surface of the other end of the rotating table
3D measurement, characterized in that to increase the height in which the cylinder rod is raised in accordance with the voltage level of the control signal provided from the manager terminal, thereby increasing the other side of the rotating table to adjust the angle of the reference machine Equipment for calibration automation of equipment.
A measurement probe, an X-axis, a Y-axis, and a Z-axis transfer unit for transferring the measurement probe to the X-axis, the Y-axis, and the Z-axis, respectively, and a shelf on which an object having a three-dimensional shape having various structures to be measured is placed. In the calibration automation device of the half gantry structure 3D measurement equipment,
A pivot mounted on the upper part of the shelf and one end of which is hinged rotatably to one end of the stator, and the other end pivots up and down about the hinge coupled to the stator to move up and down from the stator; A jig including an inclination adjustment unit configured to elevate the other end of the pivot table to adjust an inclination angle of the pivot table;
A plurality of contact blocks disposed on an upper side of the pivot table and provided with reference marks of the measurement probes installed and contacted with the main body so as to correspond to the intervals of the plurality of scales displayed on the main body; Reference machine to be; And
The tilt adjustment unit is controlled to raise and lower the pivot table to a predetermined height to automatically adjust the inclination angle of the reference unit, corresponding to the spatial coordinates measured by the 3D measurement device through the measurement probe in response to the inclination angle of the reference unit. And a manager terminal for measuring a measurement error of the measurement probe by comparing the reference coordinates of the measurement probes provided through the reference machine with each other.
A plurality of position sensors are installed at one side in the longitudinal direction and at both sides in the width direction at fixed intervals of the jig, and a reference table is installed on the shelf opposite to the position sensor. It is installed on the fixing unit to be aligned with the contact block in the Y-axis direction to measure the X-axis and Y-axis of the contact block on the basis of the reference base to provide to the manager terminal, the manager terminal is measured by the position sensor The reference coordinates of the X and Y axes of the measurement probe are calculated based on the X and Y axes of the contact block, and the calculated X and Y axes of the measurement probe and the Z axis reference of the measurement probe provided through the reference device are calculated. Comparing the coordinates with the spatial coordinates of the measurement probe measured by the 3D measurement equipment to measure the error of the measurement probe Calibration automation device of 3D measurement equipment, characterized in that.

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