KR101951871B1 - Connection Rail Module Containing Auxiliary rail for Change of Direction - Google Patents

Abstract

The present invention relates to a connection rail module including an auxiliary rail for direction change, which changes a transfer path for a traveling rail of a semiconductor transfer pallet and minimizes a gap between a connection rail and the traveling rail to prevent shocks and vibration upon a change in a transfer direction so as to improve traveling ability. To this end, according to the present invention, the connection rail module for direction change of a pallet transfer system, which comprises a plurality of traveling rails forming a traveling path of a semiconductor transfer pallet with a rectangular plate shape and having a crossing point, and a plurality of roller units disposed on the lower part of the semiconductor transfer pallet to move along the plurality of traveling rails, comprises: a connection rail rotationally installed to selectively connect the traveling rails disposed in a different direction at a point crossing the plurality of traveling rails; a connection rail fixing unit to fix the connection rail to a frame of the transfer system and to support rotating motion of the connection rail; a rotating driving unit disposed on the lower side of the connection rail to provide a driving force for rotating the connection rail; and a plurality of auxiliary rails having a structure to surround a rotational radius of the connection rail on the upper side of the connection rail fixing unit and disposed on a position adjacent to the plurality of traveling rails, respectively, to adjust a gap formed between the connection rail and the traveling rail.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a connection rail module,

The present invention relates to a connecting rail module for redirecting with auxiliary rails, and more particularly, to a connecting rail module for redirecting a semiconductor (or FPD) conveying pallet, which can switch the conveying path to the running rail, To a connecting rail module for changing direction, which has an auxiliary rail which can improve a running ability by preventing shock and vibration when the feeding direction is changed.

Generally, diffusion, etching, photolithography and cleaning processes are performed to fabricate semiconductor devices (or FPDs). Each of these processes is associated with the previous process and must be transferred to the next process after each process is completed.

A conventional roller-type substrate transfer apparatus includes a plurality of rollers mounted on a plurality of shafts and shafts at equal intervals so as to transfer the substrate, and a diverting unit for transferring the substrate, Unit, and the like. The shaft is rotated by receiving power from a power generating device such as a motor, thereby rotating the roller. The rollers support the substrate by directly contacting the lower surface of the substrate, and transfer the substrate by being rotated by receiving the rotational force of the shaft.

As an example of a technique related to a substrate transfer apparatus using such a roller type diverting unit, "Large-sized substrate transfer system and transferring method thereof" has been proposed in Patent Document 1 described below. In the following Patent Document 2, In the following Patent Document 3, a "substrate transfer device" has been proposed. In the following Patent Document 4, a "transfer system" has been proposed. In the following Patent Document 5, And a substrate processing apparatus using the same.

However, such a conventional diverting unit requires a plurality of rollers, a plurality of transfer frames, a plurality of lift pins, a plurality of driving units, and the like having different sizes in order to load the substrate, . Therefore, there is a disadvantage that the structure and the driving method are very complicated and a long time is required to transport the substrate.

In recent years, in order to solve such a problem, a technique has been proposed in which a plurality of running rails are arranged in a lattice structure and rollers are installed under the substrate to move the substrate along the running rails.

However, in the case of a technique in which a plurality of running rails are arranged in a lattice structure to roll the rollers on the running track in this manner, a gap is generated between the running rails and the connecting rails to be rotated to switch the conveying direction, Shock and vibration are generated to deteriorate the running performance, and also there is a problem in that the contact point between the connecting rail and the running rail is defective and the life of the product is deteriorated.

Accordingly, there is a need for a realistic and applicable technology capable of increasing the lifetime of the traveling rail of the transportation system moving along the traveling rail, and improving the traveling ability while allowing the direction switching at the time of transferring the substrates between the processes.

Korean Registered Patent No. 10-0661907 (Published on Dec. 28, 2006) Korean Patent Registration No. 10-0834734 (Publication Date June 05, 2008) Korean Registered Patent No. 10-1427595 (Publication date August 08, 2014) Korean Patent Publication No. 10-2010-81153 (published on July 14, 2010) Korean Registered Patent No. 10-1367669 (Published March 03, 2014)

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above problems, and it is an object of the present invention to provide a semiconductor (or FPD) conveying pallet capable of switching a conveying path to a running rail while minimizing a gap between a connecting rail and a running rail, The present invention provides a connecting rail module for a direction switching which has an auxiliary rail which can improve a traveling ability by preventing shock and vibration at the time of a turning operation.

The connection rail module for redirecting with an auxiliary rail according to an embodiment of the present invention includes a plurality of traveling units having a grid structure so as to form a traveling path of a semiconductor (or FPD) transporting pallet having a rectangular plate shape, And a roller unit provided at a lower portion of the semiconductor transfer pallet for moving along the plurality of running rails, the connection rail module for redirecting the pallet transporting system comprising: A connecting rail rotatably installed to selectively connect the traveling rails disposed in the other direction at the point; A connecting rail fixing part fixing the connecting rail to a frame of the conveying system and supporting the turning operation of the connecting rail; A rotation driving unit disposed below the connection rail to provide a driving force for rotating the connection rail; And a plurality of guide rails formed at positions adjacent to the plurality of running rails and having a structure that surrounds the turning radius of the connecting rails at an upper side of the connecting rail fixing portions, And a plurality of auxiliary rails.

The auxiliary rail formed on the upper side of the connecting rail fixing portion may be formed at four points having an angle of 90 degrees with respect to the center point when the connecting rail is moved adjacent to the plurality of running rails have.

The connecting rail fixing part includes: a connecting rail; And an auxiliary rail frame integrally supporting four auxiliary rails disposed between the connecting rail and the plurality of running rails.

The guide rail receiving groove having the auxiliary rail according to the embodiment of the present invention includes a guide wheel receiving groove formed on the outer side surface in the longitudinal direction of the connecting rail and having a guide formed at the lower end of the plurality of housing bulkheads constituting the roller unit. The wheel can be accommodated.

In order to prevent the traveling roller constituting the roller unit from being detached from the connecting rail, the connecting rail module for changing direction, which includes the auxiliary rail according to the embodiment of the present invention, And an escape preventing jaw may be provided.

The rotation driving unit includes: a connection rail rotation shaft penetrating through the connection rail fixing portion and coupled to a lower central portion of the connection rail; A rotating bearing housing for supporting a rotating operation of the connecting rail rotating shaft inside the connecting rail fixing portion; A driving motor for transmitting rotational torque to the connecting rail rotating shaft; And a coupling portion coupling the drive shaft of the drive motor and the connection rail rotation shaft.

Wherein the roller unit comprises: a circular unit fixing portion which is fixedly coupled to a lower portion of a base constituting the semiconductor transfer pellet; A roller housing part coupled to the circular unit fixing part by a rotation shaft so as to be rotatable in a direction parallel to the horizontal plane of the base and forming an arcuate accommodation space downward; A traveling roller disposed in the receiving space of the roller housing part and installed to be rotatable in a direction perpendicular to the horizontal plane of the base and to move along an upper surface of the traveling rail; And a plurality of guide wheels coupled to the lower ends of both side surfaces of the roller housing part having the arch shape by a rotation axis and moving along side surfaces of the running rail.

Wherein the roller housing unit constituting the roller unit includes: a circular housing head coupled to a lower portion of the unit fixing portion and having a relatively small size as compared with the unit fixing portion; A housing rotation shaft for coupling the housing head with the center of the unit holding part of the circular shape and supporting the rotation of the housing head; A plurality of housing partitions arranged in the lower vertical direction from both side edges of the housing head to form the arcuate housing space; A traveling roller rotating shaft having both ends thereof coupled to the plurality of housing partitions so as to be rotatable between the plurality of housing partitions; And a guide wheel rotating shaft rotatably coupling the plurality of guide wheels to the lower end surfaces of the plurality of housing partitions.

Wherein the roller unit further comprises a front guide bar formed in a straight bar shape in a lower vertical direction from one end edge of the circular unit fixing part, May be formed continuously in the longitudinal direction.

The front guide bar is disposed in front of the roller unit in the running direction and inserted into auxiliary guide grooves formed on both side walls of the guide rails of the guide rails in a downward direction, can do.

As described above, the present invention minimizes the gap between the connecting rail and the running rail while switching the feeding path to the running rail of the semiconductor feeding pallet, thereby preventing shock and vibration at the time of changing the feeding direction, There is provided an effect of providing a connecting-connection rail module having an auxiliary rail which can be improved.

In addition, the present invention has the effect of increasing work productivity by forming a direction-changing connection rail module at a crossing point of a running rail, facilitating switching of the direction of the semiconductor transfer pellet when transferring a substrate between processes.

Further, the present invention is characterized in that a plurality of auxiliary rails are mounted on the upper side of the connecting rail fixing portion constituting the direction changing connection rail module at a position facing the running rail of the lattice structure on the circumference surrounding the turning radius of the connecting rail The gap between the connecting rail and the running rail can be minimized.

In addition, the present invention has an effect that a front guide bar inserted in a guide groove formed in a running rail is mounted on a roller unit provided below the semiconductor transfer pallet to prevent the roller unit from moving during the running and improve the running performance .

In addition, the present invention has the effect of enhancing the traveling ability and preventing the departing of the traveling vehicle during traveling by mounting the traveling roller and the guide wheel on the roller unit provided at the lower part of the semiconductor transportation pallet for moving along the traveling rail.

Further, according to the present invention, it is possible to remove foreign substances generated on the side surface of the running rail by using a guide wheel which contacts the side surface of the running rail at the time of using for a long time, But it has the effect of extending the life span.

1 and 2 are views for explaining a connection rail module for a direction change with auxiliary rails according to an embodiment of the present invention.
FIGS. 3 to 5 are cross-sectional views for explaining the detail of the directional connection connecting rail module according to the embodiment of the present invention.
FIGS. 6 to 7 are views for explaining a process of changing the direction of a connection rail module for redirecting in the pallet transport system according to the embodiment of the present invention.
8 to 9 are views schematically showing the configuration of the roller unit used in the embodiment of the present invention.
10 to 11 are views for explaining a pallet transporting system and a traveling rail using the roller unit used in the embodiment of the present invention.

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas.

Meanwhile, the meaning of the terms described in the present invention should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It is to be understood that the singular " include " or "have" are to be construed as including the stated feature, number, step, operation, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

In each step, the identification code (e.g., a, b, c, etc.) is used for convenience of explanation, the identification code does not describe the order of each step, Unless otherwise stated, it may occur differently from the stated order. That is, each step may occur in the same order as described, may be performed substantially concurrently, or may be performed in reverse order.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

1 and 2 are views for explaining a connection rail module for a direction change with auxiliary rails according to an embodiment of the present invention, and FIGS. 3 to 5 are views for explaining a connection rail module for a direction switching according to an embodiment of the present invention. And Fig.

10, which will be described later, forms a traveling path of the semiconductor transfer pellet 10 having a rectangular plate shape, and the crossing point And a roller unit (100) provided at a lower portion of the semiconductor transfer pallet (10) and moving along the plurality of running rails (20), wherein the plurality of running rails This is a configuration for changing the direction of the pallet transport system.

Referring to the drawings, a directional connection connecting rail module according to an embodiment of the present invention will be described in detail.

The connecting rail module 200 may include a connecting rail 210, a connecting rail fixing portion 220, a rotation driving portion 230, and an auxiliary rail 221, as shown in the drawing. have.

More specifically, the connecting rail 210 selectively connects driving rails disposed in different directions at a point intersecting the plurality of running rails 20, thereby driving the driving roller 210 constituting the roller unit 100, (130) may be formed to move along the upper surface.

That is, the connecting rail 210 is rotatably installed between the running rails 20 which intersect with each other. The connecting rail 210 includes a semiconductor transfer pellet 10, which has been transferred in the first direction on the running rail 20, When the roller unit 100 described later with reference to Figs. 8 to 9 is positioned at the center of the connecting rail 210, it is necessary to stop the roller unit 100, It is possible to rotate the roller unit 100 by rotating the roller unit 210 in the conveying direction.

The connecting rail fixing part 220 may fix the connecting rail 210 to the frame 1 of the conveying system and support the turning operation of the connecting rail 210. The connecting rail fixing part 220 may be formed of a non- And an auxiliary rail frame 222 capable of integrally supporting the auxiliary rail 221 and the auxiliary rail 221 disposed between the connection rail 210 and the plurality of running rails 20. [

The rotation driving unit 230 may be disposed below the connection rail 210 to provide a driving force for rotating the connection rail 210.

As shown in the drawing, the rotation drive unit 230 includes a connection rail rotation shaft 231 penetrating the connection rail fixing unit 220 and coupled to a lower central portion of the connection rail, A drive motor 233 for transmitting rotation torque to the connection rail rotation shaft 231, and a driving motor 233 for transmitting rotation torque to the connection rail rotation shaft 231, And a coupling portion 234 coupling the driving shaft of the driving shaft 231 with the driving shaft of the connecting rail 231.

In the embodiment of the present invention, the rotation driving unit 230 is driven by a driving motor. However, the connecting rail 210 may be rotated with respect to the connecting rail fixing unit 220, ), Various driving methods including an actuator driving method, an air cylinder method, and a pneumatic driving method for generating rotational power can be applied.

On the other hand, in the transfer system of the semiconductor transfer pellets, when the transfer direction is changed and the transfer direction is desired, a clearance may be formed between the connection rail 210 and the running rail 20 in order to eliminate interference at the time of rotation of the connection rail 210 have.

However, when the clearance is large, the roller unit 100 may be disengaged from the running rail 20, so that the connecting rail fixing portion 220 is positioned between the connecting rail 210 and the running rail 220 The auxiliary rail 221 may be disposed at both ends of the connection rail 210 to minimize the gap.

At this time, the auxiliary rail 221 has a structure that surrounds the turning radius of the connecting rail 210 from above the connecting rail fixing portion 220 in the embodiment of the present invention, and the plurality of driving rails 20 The distance between the connecting rail 210 and the running rail 20 can be adjusted.

As shown in the drawing, the auxiliary rail 221 can be disposed adjacent to the plurality of running rails 20 when the feeding direction is changed, As shown in FIG.

By providing the auxiliary rail 221 for minimizing the gap between the connecting rail 210 and the traveling rail 220 as described above, the gap between the connecting rail 210 and the traveling rail 20 can be easily There is an effect of minimizing.

That is, if there is a clearance between the connecting rail 210 and the running rail 220, a slight sagging occurs in the running rail 20 due to the load when the semiconductor transferring pallet 10 passes over the running rail 20 A shock and vibration are generated when the roller unit 100 moves from the running rail 20 to the connecting rail 210. If the roller unit 100 is severely detached from the connecting rail 210, In the present invention, the auxiliary rail 221 may be formed on the connecting rail fixing part 220 to minimize the gap.

In the embodiment of the present invention, the direction-switching connecting rail module 200 includes a plurality of housing partition walls 123 constituting the roller unit 100 described later with reference to FIGS. 8 to 9, A guide wheel receiving groove 240 may be formed on the outer side of the connecting rail 210 to receive the guide rail receiving groove 140.

In order to prevent the driving roller 130 constituting the roller unit 100 from being separated from the connecting rail 210, the driving roller separating jaw 250 ).

In addition, the running rail 20 includes a foreign matter receiving groove 20a for processing foreign matter falling from the side surface of the running rail 20 and a rail partition 20b for preventing the foreign matter from falling off. 8 to 9 are as follows.

FIGS. 6 to 7 are views for explaining a process of changing the direction of a connection rail module for redirecting in the pallet transport system according to the embodiment of the present invention.

As shown in the drawing, the pallet transporting system according to the embodiment of the present invention includes a connection rail module 200 for switching the direction of the roller unit 100 at a point crossing a plurality of running rails 20 ).

That is, the roller unit 100 is rotated by using the directional connection connecting rail module 200 according to the embodiment of the present invention, and as shown in the figure, the semiconductor unit 100 is horizontally moved in the moving direction of the semiconductor transfer pellet 10 And then can be turned in the vertical direction.

The process of shifting the conveying path by the directional connection connecting rail 200 of the semiconductor conveying pallet 10 according to the embodiment of the present invention will now be described with reference to the drawings.

In the embodiment of the present invention, the pallet transfer system is provided with a plurality of linear motor motors 30 for generating a driving force for transferring the semiconductor transfer pellets 10, and in the same direction as the linear motor motors 30 A plurality of position sensors 41a, 41b may also be provided.

At this time, the linear motor motor 30 may be a linear synchronous motor (LSM) in the embodiment of the present invention, and another linear induction motor may be used as another example.

In the embodiment of the present invention, the driving method of the pallet transporting system using the linear motor motor 30 is such that a coil portion corresponding to a stator of the rotating type synchronous motor is provided on the ground, Is provided on the side of the semiconductor transfer pellet 10 (ground type) and is called a roll stator (long stator) type.

This method is advantageous in weight reduction because the drive control device of the motor is installed on the ground, and has energy efficiency and high propulsion power.

Describing the direction switching operation of the pallet transporting system according to the embodiment of the present invention,

First, when the semiconductor transfer pellet 10 is transferred in the first direction on the running rail 20, the connection of the direction-switching connecting rail module 200 is performed so as to connect between the running rails 20 arranged in the first direction. The rails 210 may be maintained in a rotated state in the same first direction.

Although not shown in the drawing, a controller and a multiplexer (MUX) for controlling the operation of the linear motor motor 30 may be provided in the pallet transfer system. The controller including the controller and the multiplexer can appropriately control the plurality of linear motor motors 30 that generate the driving force for conveying the semiconductor conveying pallet 10 in a predetermined direction without collision.

The control unit analyzes the signals received from the plurality of position sensors 41a and 41b and decelerates the speed of the semiconductor transfer pellet 10 that has been transferred in the first direction And the semiconductor transfer pellet 10 is stopped in the correct position so that the roller unit 100 of the semiconductor transfer pellet 10 is located at the center of the connecting rail 210.

When the roller unit 100 of the semiconductor transfer pallet 10 stops at the center of the connection rail 210, the control unit controls the rotation of the connection rail module 200 using the rotation driving unit 230 The connecting rail 210 may be rotated in the second direction.

At this time, the control unit controls the rotation driving unit 230 so that the connection rail 210 is correctly rotated in the second direction. When the rotation is completed, the roller housing unit 120 of the roller unit 100 is rotated (Not shown), the arrangement angle of the semiconductor transfer pellet 10 can be prevented from being arbitrarily changed due to external vibration, impact, or the like.

In this way, in a state in which the connecting rail 210 of the direction-switching connecting rail module 200 is rotated in the same second direction so as to connect between the running rails 20 arranged in the second direction, the control unit controls the linear motor motor 30 to transfer the semiconductor transfer pellets 10 in the second direction.

8 to 9 are views schematically showing the configuration of the roller unit used in the embodiment of the present invention.

The roller unit 100 used in the embodiment of the present invention includes a unit fixing portion 110, a roller housing portion 120, a traveling roller 130, a front guide bar 300, A wheel 140 may be provided.

More specifically, the unit fixing portion 110 is fixedly coupled to a lower portion of the base 11 constituting the semiconductor transfer pellet 10, and may be formed in a circular shape as shown in FIG.

The roller housing part 120 is rotatably coupled to the circular unit fixing part 110 in a direction parallel to the horizontal plane of the base 11 and is rotatably supported by the circular unit fixing part 110, .

The driving roller 130 is disposed in the receiving space of the roller housing part 120 and is rotatable in a direction perpendicular to the horizontal plane of the base 11 so that the upper surface of the running rail 20 Can move along.

That is, the traveling roller 130 is installed to be rotatable in a direction perpendicular to the rotation direction of the roller housing part 120, and is guided on the traveling rail 20.

In addition, the front guide bar 300 may be formed in the shape of a straight bar in the lower vertical direction at one side edge of the circular unit fixing part 110. At this time, as shown in FIG. 11 Similarly, it is preferable that a guide groove 21 for guiding a traveling path is formed continuously in the longitudinal direction by inserting the front guide bar 300 of the roller unit into the running rail 20.

As shown in the drawing, according to the embodiment of the present invention, the front guide bar 300 includes an auxiliary guide 310 on the left and right sides with respect to the main body as a lower side, Can be inserted into auxiliary guide grooves (22) formed on both side walls of the guide groove (21) of the running rail (20) to prevent the roller unit (100) from coming off during traveling.

The guide wheel 140 is coupled to the lower ends of both side surfaces of the roller housing part 120 having the arch shape and rotates along the side surface of the running rail 20, As shown in FIG.

At this time, if the structure for moving along the side surface of the running rail 20 is added like the guide wheel 140, a stable running structure is completed by the guide wheel 140, so that the driving roller 130 is separated from the running rail And various foreign substances formed on the side surface of the running rail at the time of using for a long time can also be cleaned.

As shown in the drawing, the running rail 20 includes a foreign matter receiving groove (not shown) extending outwardly from both sides of the cross section in the width direction, for receiving foreign matter cleaned by the guide wheel 140 20a and a rail partition 20b for preventing the guide wheels from being separated from each other

9, the roller housing unit 120 includes a housing head 121, a housing rotation shaft 122, a housing partition wall 123, A traveling roller rotating shaft 124, and a guide wheel rotating shaft 125. [

Here, the housing head 121 may be formed in a circular shape having a relatively small size as compared with the unit fixing portion 110, which is coupled to the lower portion of the unit fixing portion 110.

The housing rotation shaft 122 can support the rotation of the housing head 121 by coupling the housing head 121 with the same center below the circular unit fixing part 110. At this time, the housing rotation shaft 122 may be provided with a bearing for rotating the housing head 122.

In addition, the housing partition 123 may be formed in a lower vertical direction from both side edges of the housing head 121 to form the arcuate accommodation space and a plurality of the housing partitions 123 may be formed.

The driving roller rotation shaft 124 may be coupled to the plurality of housing partitions 123 at both ends so that the driving roller 130 can rotate between the plurality of housing partitions 123.

The guide wheel rotating shaft 125 may rotatably couple the plurality of guide wheels 140 to the lower end surfaces of the plurality of housing partitions 123.

In the embodiment of the present invention, although not shown in the drawings, the roller unit 100 may further include a rotation fixing device (not shown) for maintaining the running angle of the roller unit. Such a rotation fixing device is formed by forming a groove in a predetermined portion of the roller housing part 120 of the roller unit 100 and forming a predetermined engaging member having elasticity on the base of the semiconductor transfer pellet 10 adjacent to the roller unit 100 .

That is, by providing such a rotation fixing device, it is possible to prevent the roller unit 100, in which the traveling roller 130 is arranged in a predetermined direction at the time of traveling, from unintentionally rotating even when subjected to external vibration or impact, .

10 to 11 are views for explaining a pallet transporting system and a traveling rail using the roller unit used in the embodiment of the present invention.

As shown in the drawings, the pallet transporting system according to the embodiment of the present invention can include a semiconductor transporting pallet 10, a plurality of running rails 20, a roller unit 100, and a linear motor motor 30 have.

More specifically, the semiconductor transfer pellet 10 is intended for use in a pellet transfer system for transferring substrates between diffusion, etch, photographic and cleaning processes performed to produce semiconductor devices, A plurality of roller units 100 may be provided having a rectangular plate shape and moved along the running rail 20 at a lower portion thereof.

In addition, the plurality of running rails 20 may have a lattice structure to form a traveling path of the semiconductor transfer pallet 10 so as to have intersecting points, and at the intersections, The switching connection rail module 200 can be formed.

As shown in the figure, the running rail 20 includes a guide groove 300 for guiding the traveling path by inserting the front guide bar 300 of the roller unit 100 described above with reference to FIGS. 8 to 9 The auxiliary guide 310 formed on the lower side of the front guide bar 300 can be inserted into both side walls of the inner side surface of the guide groove 22, The guide groove 22 can be formed.

10 to 11 illustrate the foreign matter receiving grooves 20a and the rail clearance 20b of the running rail 20 described above with reference to FIGS. 1 and 9, but the same configurations as those shown in FIGS. 1 and 9 A detailed description thereof will be omitted.

The front guide bar 300 of the roller unit 100 described before the guide groove 21 and the auxiliary guide groove 22 formed in the longitudinal direction of the running rail 20 according to the embodiment of the present invention, The driving roller 130 constituting the roller unit 100 can be prevented from being disengaged from the running rail 100. In addition, since the auxiliary guide 310 is inserted into the roller unit 100, 20, the debris that can be generated when moving on the traveling rail 20 is not left on the traveling rail 20 through the guide groove 21, so that it is easy to improve the traveling ability and maintenance for removing the debris .

The roller unit 100 may be provided at a lower portion of the semiconductor transfer pallet 10 so as to move along the plurality of running rails 20 and rotate along the upper surface of the running rail 20 And a guide wheel 140 rotatably installed along a side surface of the running rail.

The roller unit 100 is fixed to the base 11 of the semiconductor transfer pallet 10 by the unit fixing unit 110 and is fixed to the base 11 via the unit fixing unit 110 And can be rotatably installed.

The linear motor motor 30 generates a driving force for transferring the semiconductor transfer pallet 10 and is disposed in parallel with the running rail 20 having the lattice structure. As shown in the figure, A plurality of the transfer pellets 10 may be arranged in the horizontal direction and the vertical direction with respect to the transfer direction of the transfer pallet 10.

As described above, the present invention minimizes the gap between the connecting rail and the running rail while switching the conveying path to the running rail of the semiconductor conveying pallet, thereby improving the running ability by preventing impact and vibration at the time of changing the conveying direction There is provided an effect of providing a connecting-connection rail module having an auxiliary rail capable of turning.

In addition, the present invention has the effect of increasing work productivity by forming a direction-changing connection rail module at a crossing point of a running rail, facilitating switching of the direction of the semiconductor transfer pellet when transferring a substrate between processes.

Further, the present invention is characterized in that a plurality of auxiliary rails are mounted on the upper side of the connecting rail fixing portion constituting the direction changing connection rail module at a position facing the running rail of the lattice structure on the circumference surrounding the turning radius of the connecting rail The gap between the connecting rail and the running rail can be minimized.

In addition, the present invention has an effect that a front guide bar inserted in a guide groove formed in a running rail is mounted on a roller unit provided below the semiconductor transfer pallet to prevent the roller unit from moving during the running and improve the running performance .

In addition, the present invention has the effect of enhancing the traveling ability and preventing the departing of the traveling vehicle during traveling by mounting the traveling roller and the guide wheel on the roller unit provided at the lower part of the semiconductor transportation pallet for moving along the traveling rail.

Further, according to the present invention, it is possible to remove foreign substances generated on the side surface of the running rail by using a guide wheel which contacts the side surface of the running rail at the time of using for a long time, But it has the effect of extending the life span.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, It is within the scope of the present invention that component changes to such an extent that they can be coped evenly within a range that does not deviate from the scope of the present invention.

1: Frame 10 (11): Semiconductor transfer pallet (base)
20: running rail 21: guide groove
22: Auxiliary guide groove 30: Linear motor motor
100: roller unit 110: unit fixing unit
120: roller housing part 121: housing head
122: housing rotating shaft 123: housing partition wall
124: driving roller rotating shaft 125: guide wheel rotating shaft
130: traveling roller 140: guide wheel
200: connecting rail part 210: connecting rail
220: connecting rail fixing portion 221: auxiliary rail
222: auxiliary rail frame 230: rotation driving part
231: rotating shaft 232: rotating bearing housing
233; Drive motor 234: coupling part
240: guide wheel receiving groove 250:
300: front guide bar 310: auxiliary guide

Claims (10)

A plurality of running rails having a lattice structure so as to form a traveling path of a semiconductor conveying pallet having a rectangular plate shape and having a crossing point and a plurality of rollers disposed at a lower portion of the semiconductor conveying pallet for moving along the plurality of running rails, A connection rail module for redirecting a pallet transport system comprising a unit,
A connecting rail rotatably installed to selectively connect a running rail disposed in a different direction at a point intersecting the plurality of running rails;
A connecting rail fixing part fixing the connecting rail to a frame of the conveying system and supporting the turning operation of the connecting rail;
A rotation driving unit disposed below the connection rail to provide a driving force for rotating the connection rail; And
And a plurality of guide rails formed at positions adjacent to the plurality of running rails and having a structure that surrounds the turning radius of the connecting rails from the upper side of the connecting rail fixing portions and can control a gap formed between the connecting rails and the running rails And an auxiliary rail,
The auxiliary rail formed on the upper side of the connecting rail fixing portion may be formed at four points having an angle of 90 degrees with respect to the center point when the connecting rail is disposed adjacent to the plurality of running rails in the conveying direction conversion. Wherein the auxiliary rail is provided with an auxiliary rail.
delete [2] The apparatus according to claim 1,
Connecting rails; And
And an auxiliary rail frame capable of integrally supporting four auxiliary rails disposed between the connecting rail and the plurality of running rails.
The method of claim 3,
Wherein a guide wheel receiving groove is formed in a longitudinal outer side surface of the connecting rail to receive a guide wheel formed at a lower end of a plurality of housing partitions constituting a roller unit. .
The method of claim 4,
Characterized in that the driving roller detachment preventing jaw is spaced apart from the connection rail by a predetermined distance so as to prevent the driving roller constituting the roller unit from being separated from the connection rail. Rail module.
[2] The apparatus according to claim 1,
A connecting rail rotating shaft penetrating through the connecting rail fixing portion and coupled to a lower central portion of the connecting rail;
A rotating bearing housing for supporting a rotating operation of the connecting rail rotating shaft inside the connecting rail fixing portion;
A driving motor for transmitting rotational torque to the connecting rail rotating shaft; And
And a coupling part coupling the drive shaft of the drive motor and the connection rail rotation shaft.
The image forming apparatus according to claim 1,
A circular unit fixing portion fixedly coupled to a lower portion of the base constituting the semiconductor transfer pellet;
A roller housing part coupled to the circular unit fixing part by a rotation shaft so as to be rotatable in a direction parallel to the horizontal plane of the base and forming an arcuate accommodation space downward;
A traveling roller disposed in the receiving space of the roller housing part and installed to be rotatable in a direction perpendicular to the horizontal plane of the base and to move along an upper surface of the traveling rail; And
And a plurality of guide wheels coupled to the lower ends of both side surfaces of the roller housing part having the arch shape by a rotation axis and moving along side surfaces of the running rail.
8. The image forming apparatus according to claim 7, wherein the roller housing unit constituting the roller unit comprises:
A circular housing head coupled to a lower portion of the unit fixing portion and having a relatively small size as compared with the unit fixing portion;
A housing rotation shaft for coupling the housing head with the center of the unit holding part of the circular shape and supporting the rotation of the housing head;
A plurality of housing partitions arranged in the lower vertical direction from both side edges of the housing head to form the arcuate housing space;
A traveling roller rotating shaft having both ends thereof coupled to the plurality of housing partitions so as to be rotatable between the plurality of housing partitions; And
And a guide wheel rotating shaft rotatably coupling the plurality of guide wheels to the lower end surfaces of the plurality of housing partitions.
The method of claim 8,
Wherein the roller unit further comprises a front guide bar formed in a straight bar shape in a lower vertical direction from one end edge of the circular unit fixing part,
Wherein the guide rails are formed continuously in a longitudinal direction with guide grooves for guiding a traveling path by inserting a front guide bar of the roller unit.
[12] The apparatus of claim 9,
And a plurality of auxiliary guides disposed in front of the roller unit in the running direction and inserted into auxiliary guide grooves formed on both side walls of the guide groove of the running rail downwardly to prevent departure during traveling. Connecting rail module with directional rail.

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