CN112309929A - Roller unit having traveling and guiding functions and pallet transfer system using the same - Google Patents

Roller unit having traveling and guiding functions and pallet transfer system using the same Download PDF

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Publication number
CN112309929A
CN112309929A CN202010084861.8A CN202010084861A CN112309929A CN 112309929 A CN112309929 A CN 112309929A CN 202010084861 A CN202010084861 A CN 202010084861A CN 112309929 A CN112309929 A CN 112309929A
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CN
China
Prior art keywords
rail
caster
roller
tray
traveling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202010084861.8A
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Chinese (zh)
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CN112309929B (en
Inventor
吴珖根
河在福
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hns Co ltd
BNS Co Ltd
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Hns Co ltd
BNS Co Ltd
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Publication of CN112309929A publication Critical patent/CN112309929A/en
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Publication of CN112309929B publication Critical patent/CN112309929B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a roller unit having a traveling and guiding function, the roller unit having the traveling and guiding function being connected to a tray for transferring a substrate, the roller unit having a guide roller attached to be inclined with respect to a horizontal plane, the roller unit being capable of preventing the guide roller from being separated from a traveling rail and stably traveling while traveling along the traveling rail having an inclined end surface, the roller unit having the traveling and guiding function comprising: a rotating unit rotatably mounted to a base of the tray; a caster block connected to the rotating unit by a connecting member, the caster block having an end surface portion inclined downward to the left and right sides; and a plurality of guide rollers coupled to left and right inclined end surfaces of the caster block. Therefore, the roller unit having the traveling and guiding functions according to the present invention has the structure having the traveling and guiding functions at the same time, and thus has an effect of preventing the roller unit from being separated from the traveling rail while the roller unit is stably traveling.

Description

Roller unit having traveling and guiding functions and pallet transfer system using the same
Technical Field
The present invention relates to a roller unit having a traveling and guiding function in a tray transfer system and a tray transfer system using the same, and more particularly, to a roller unit having a traveling and guiding function and a tray transfer system using the same, in which the roller unit is connected to a tray for transferring a substrate between processes, the roller unit includes a guide roller attached to be inclined with respect to a horizontal plane, and the roller unit prevents the guide roller from being detached from a traveling rail having an inclined end surface during traveling along the traveling rail, thereby enabling stable traveling.
Background
Generally, diffusion, etching, photolithography, cleaning processes, and the like are performed to manufacture a semiconductor device. Each of these steps is connected to the previous step, and after each step is completed, the process is transferred to the next step.
A conventional roller type substrate transfer apparatus includes a plurality of shafts (flaps), a plurality of rollers (rollers) fixedly mounted on the shafts at regular intervals, a transfer unit (deflecting) for switching a transfer direction of a substrate, and the like, and transfers the substrate. The shaft receives transmission power from a power generation device such as a motor and the like to rotate, thereby rotating the roller. The roller directly contacts with the lower part of the substrate, supports the substrate, and receives the rotary force of the transmission shaft to rotate, thereby transferring the substrate.
As an example of a related art of a substrate transfer device using such a roller transfer device, patent document 1 below proposes a "large substrate transfer system and a transfer method thereof", patent document 2 below proposes a "substrate transfer device", patent document 3 below proposes a "substrate transfer device", patent document 4 below proposes a "transfer system", and patent document 5 below proposes a "substrate transfer device and a substrate processing apparatus using the same".
However, such a conventional transfer apparatus includes a plurality of rollers or a plurality of transfer frames having different sizes, a plurality of lift pins, and a plurality of driving units in order to load a substrate from the outside, move vertically and horizontally, and change the direction. Therefore, there are disadvantages in that the structure and driving method thereof are very complicated and it takes a long time to transfer the substrate.
In addition, there is a disadvantage that the substrate is damaged or flawed due to impact and vibration generated in the process of supporting and transferring the substrate by the roller of the transferring device being lifted.
In order to solve the above problems, korean patent No. 10-1960679 of patent document 6, which was filed by the present applicant and was granted, was proposed.
Fig. 1 is a perspective view of a tray transfer system according to the related art, fig. 2A is a perspective view of a roller unit according to the related art, and fig. 2B is a sectional view showing the roller unit and a travel rail according to the related art.
As shown in fig. 1, 2A and 2B, a pallet transfer system 1 according to korean patent No. 10-1960679, which is a prior art, includes: a tray 10 to which a roller unit 15 is attached to the tray 10; and a running rail 16, wherein the running rail 16 is disposed on the frame 20 so that the pallet 10 can run.
According to the prior art, as shown in fig. 2A and 2B, a running roller 15-1 of a roller unit 15 runs along an upper flat surface 16-1 of a running rail 16 in a rotating manner, and on this basis, in order to maintain a stable running structure, a rail partition wall 16-3 is provided so that a guide wheel 15-2 of the roller unit 15 runs along a side wall surface 16-2 of the running rail 16 in a rotating manner, preventing the guide wheel 15-2 from being detached, and includes a foreign matter receiving groove 15-4 for receiving foreign matters which are cleaned and dropped by means of the guide wheel 15-2 of the roller unit 15.
However, in the above-described conventional art, the guide wheels 15-2 of the roller unit 15 are disposed between the side wall surfaces 16-2 of the running rails 16 and the rail partition walls 16-3, and in such a structure, the gap causes the distance S to fluctuate, which causes vibration and noise.
That is, when the roller unit 15 of the related art is attached to and travels, the spaced distance S is generated due to the gap between the guide wheels 15-2 of the roller unit 15 and the travel rail, not only foreign substances are generated in the gap space, but also the tray 10 itself is shaken to the left and right, noise is generated due to vibration, and a separation process of lifting the entire tray 10 to the upper side and then lowering the tray occurs when an inspection is performed by a specific inspection equipment during transportation, and in this case, there is a problem that interference occurs between the roller unit 15 and the travel rail 16, and the like.
Documents of the prior art
Patent document
Patent document 1: korean granted patent publication No. 10-0661907 (publication date 2006, 12 and 28)
Patent document 2: korean granted patent publication No. 10-0834734 (publication date 2008, 06 month 05)
Patent document 3: korean granted patent publication No. 10-1427595 (publication date 2014, 08 months and 08 days)
Patent document 4: korean laid-open patent publication No. 10-2010-81153 (publication No. 14/07/2010)
Patent document 5: korean granted patent publication No. 10-1367669 (publication date 2014 03 month 03 day)
Patent document 6: korean granted patent publication No. 10-1960679 (publication date 2019, 03, 21)
Disclosure of Invention
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a roller unit having a traveling and guiding function, in which a roller unit attached to a pallet can be naturally mounted on an inclined end surface of a traveling rail, thereby preventing a gap or interference in space.
Further, the roller unit according to the present invention is configured to have both a traveling function and a guide function by the guide rollers attached to the left and right inclined end surfaces of the caster block.
Further, according to the present invention, it is an object of the present invention to provide a pallet transfer system in which a flat caster pad as a lower end portion of a caster block of a roller unit and a rail pad of a travel rail are formed by inserting a smooth material having a small friction, so that when the roller unit including a guide roller is dropped downward due to wear or damage of the travel roller of the guide roller, an end surface of the caster pad of the caster block and an end surface of the rail pad of the travel rail are gently brought into close contact with each other and travel, thereby minimizing resistance generated by the contact between the end surfaces.
The roller unit having a traveling and guiding function according to the present invention to achieve the above object is connected to a tray for transferring a substrate, and includes: a rotating unit rotatably mounted to a base of the tray; a caster block coupled to the rotating unit by a coupling member, the caster block having an inclined end surface portion on a lower left-right side; a plurality of guide rollers coupled to left and right inclined end surfaces of the caster block; the rotation unit includes: a base fixing part coupled to a base of the tray; a rotating housing inserted with a bearing for rotating the caster block at a lower portion of the base fixing part; the caster block includes: the caster casing is a main body part of the caster block; a caster inclined portion formed with an end surface portion having an inclination angle downward to the left and right sides; a caster pad formed as a flat end surface portion as a lower surface of the caster block; and a caster shaft coupled to the rotation housing into which the bearing is inserted, for rotating the caster block; the guide roller includes: a running roller formed in a cylindrical shape, coated with a rubber wheel of a polyurethane material in contact with the running rail and the connecting rail portion; and a roller shaft as a rotating medium member connected to a caster inclined portion of the caster block, the roller shaft including a bearing inside the travel roller, the roller shaft being in close contact with the bearing and rotating with the caster block as a medium; the guide rollers of the roller unit are coupled to the left and right inclined end surfaces of the caster block so that the left and right sides of the guide rollers alternate with each other.
The device is characterized in that the guide rollers are combined with a horizontal plane by keeping an inclination angle of 1-89 degrees.
The present invention provides a tray transfer system using a roller unit having a traveling and guiding function, which transfers a tray on which various components and substrates for assembly, inspection, and the like are mounted in an automated process of a manufacturer or the like, the tray transfer system including: a pallet in a shape of a quadrangular plate material, the pallet being used for transferring components and substrates between processes; a plurality of roller units provided at a lower portion of the tray, and including: a rotating unit rotatably mounted to a base of the tray; a caster block connected to the rotating unit by a connecting member, the caster block having an inclined end surface portion on a lower left-right side; a plurality of guide rollers coupled to left and right inclined end surfaces of the caster block; a plurality of running rails arranged in a lattice structure on a frame of the tray transfer system to have crossing points for guiding a running path and movement of the roller units provided on the tray; a connection rail portion disposed between the running rails disposed perpendicular to the running rails on which the roller units of the pallet run, in order to change a transfer path of the pallet during transfer in a right-angle direction and maintain running continuity with the running rails; a track turning module serving as a direction conversion medium device for vertically rotating a direction of a connection track part on which the roller unit of the tray is placed;
characterized in that, the rotation unit of the roller unit includes: a base fixing part coupled to a base of the tray; a rotary housing in which a bearing for rotating the caster block is inserted at a lower portion of the base fixing portion; the caster block of the roller unit includes: the caster casing is a main body part of the caster block; a caster inclined portion formed with an end surface portion having an inclination angle downward to the left and right sides; a caster pad formed as a flat end surface portion as a lower surface of the caster block; and a caster shaft coupled to a rotary case into which the bearing is inserted, for rotating the caster block; the guide roller of the guide unit includes: a running roller formed in a cylindrical shape, coated with a rubber wheel of a polyurethane material in contact with the running rail and the connecting rail portion; and a roller shaft as a rotating medium member connected to a caster inclined portion of the caster block, the roller shaft including a bearing inside the travel roller, the roller shaft being in close contact with the bearing and rotating with the caster block as a medium; the guide rollers of the roller unit are coupled to the left and right inclined end surfaces of the caster block so that the left and right sides of the guide rollers alternate with each other.
The pallet transfer system using a roller unit having traveling and guiding functions is characterized in that the guide rollers are combined with a horizontal plane while maintaining an inclination angle of 1 DEG to 89 deg.
The present invention provides a pallet transfer system using a roller unit having a traveling and guiding function, wherein the traveling rail includes: a flat rail pad as an upper end face; a rail inclined portion which is an end surface portion inclined downward to the left and right sides of the rail pad, is formed with an inclination angle of ≤ 1 ° -89 ° with respect to a horizontal plane, and is used for the guide rollers to travel; a foreign matter receiving portion extended from the rail inclined portion and configured as a groove portion.
The tray transfer system using the roller unit having the traveling and guiding functions according to the present invention is characterized in that the traveling rollers of the guide rollers are mounted on a rail inclined portion inclined downward to the left and right sides of the traveling rail, a caster pad end surface formed as a flat end surface portion as a lower surface of the caster block is mounted on a flat rail pad end surface as an upper end surface of the traveling rail in a surface contact manner, and the tray is transferred.
The pallet transfer system using the roller unit having the traveling and guiding functions according to the present invention is characterized in that the connection rail part includes a rotary base, a connection rail, and a limit part, and the rotary base is additionally provided with the connection rail and the limit part of the connection rail part, and the position of the connection rail part is rotated by the rotation of the rail turning module; the connecting rail includes a flat connecting pad as an upper face and a guide rail formed with end face portions inclined to the left and right sides of the connecting pad.
The pallet transfer system using a roller unit having a traveling and guiding function according to the present invention is characterized in that the track turning module includes: a rotating shaft disposed below the connection rail part to transmit a driving force for rotating the connection rail part, the rotating shaft including a shaft and an O-ring that transmit a rotational driving force to a rotation base of the connection rail part; a frame part, which is provided with a bearing on the inner space of the center part and is installed in a manner of supporting the shaft rod of the rotating shaft, so that the rotating plate connected with the rail part can rotate, and the outer side of the frame part comprises a frame shell formed by four side plates; a rotary drive portion, the rotary drive portion comprising: a rotary cylinder that transmits a rotary torque to the rotary shaft; a driving shaft protruding toward an upper portion of the rotary cylinder and connected to a shaft of the rotary shaft; a mounting portion for coupling the rotary cylinder to a frame case of the frame portion; and a speed adjusting section that controls a rotation speed of the rotary cylinder.
The tray transfer system of the present invention has the roller unit having both the traveling and guiding functions, and thus has the effect of preventing the roller unit from being separated from the traveling rail while stably traveling.
Further, according to the present invention, since the traveling rollers of the guide rollers travel on the inclined end surfaces of the traveling rail, the traveling rollers of the guide rollers, which are disposed to be inclined to the left and right sides of the caster block, travel and guide while surrounding the inclined end surfaces of the traveling rail due to the weight of the transfer material loaded on the pallet, and thus there is an effect that vibration, noise, and the like are not generated.
The tray transfer system of the present invention has the effect of not generating a gap or interference in space, etc. since the roller units attached to the tray can be naturally mounted on the inclined end surface of the travel rail.
Further, according to the present invention, since the flat caster pad and the rail pad of the running rail, which are the lower end portions of the caster blocks, of the roller unit are formed by inserting a smooth material having a small friction, when the roller unit including the guide roller is sagged downward due to wear or damage of the running roller of the guide roller, the end surface of the caster pad of the caster block and the end surface of the rail pad of the running rail are gently brought into close contact with each other and run, and thus there is an effect that resistance generated by the contact of the end surfaces can be minimized.
In addition, according to the invention, the structure of the guide roller and the running track is simplified, the manufacturing unit price is saved, the structure is simplified, the tray moves smoothly, and the effect of improving the durability is achieved by the reliable structure.
Drawings
Fig. 1 is a perspective view of a general prior art pallet transfer system.
Fig. 2A is a perspective view of a roller unit of the related art.
Fig. 2B is a cross-sectional view showing a roller unit and a travel rail according to the prior art.
Fig. 3 is a perspective view showing that the tray is disposed on the track turning module for direction change in the tray transfer system of the present invention.
Fig. 4 is a diagram showing a physical diagram of the pallet transfer system of the present invention.
Fig. 5 is a perspective view showing a state in which the roller unit of the present invention is attached to a tray.
Fig. 6 is a perspective view showing a state where the tray of the present invention is separated from the roller unit.
Fig. 7 is an exploded view of a roller unit according to an embodiment of the present invention.
Fig. 8 is a side sectional view of the roller unit of the present invention.
Fig. 9 is another side sectional view of the roller unit of the present invention.
Fig. 10 is a plan view of the roller unit of the present invention.
Fig. 11 is a view showing a state in which the roller unit of the present invention is attached to the base of the tray.
Fig. 12 is a front view of the roller unit coupled to the tray of the present invention.
Fig. 13 is a sectional view of the roller unit of the present invention mounted on the running rail.
Fig. 14A is an upper side perspective view of the tray for direction change separated from the rail turn module in the tray transfer system of the present invention.
Fig. 14B is a lower side perspective view of the tray for direction change separated from the rail turn module in the tray transfer system of the present invention.
Fig. 15A is an upper side perspective view of the roller unit for direction change separated from the running rail and the rail turning module in the pallet transfer system of the present invention.
Fig. 15B is a lower side perspective view of the roller unit for direction change separated from the running rail and the rail turning module in the pallet transfer system of the present invention.
Fig. 16 is a perspective view of a travel rail, a connecting rail portion, and a rail turning module for direction change in the pallet transfer system of the present invention.
Fig. 17 is an enlarged perspective view showing a connection state of the running rail, the connection rail portion, and the rail turning module for direction change in the tray transfer system of the present invention.
Fig. 18 is a perspective view of the travel rail for direction change, the connection rail portion, and the rail turning module in the tray transfer system of the present invention, in which the connection rail portion is separated in a connected state.
Fig. 19 is a perspective view of a rail turn module in the pallet transfer system of the present invention.
Fig. 20 is a separated perspective view showing a connection state of the roller unit for direction change with the connection rail portion and the rail turn module in the tray transfer system of the present invention.
Fig. 21 is a side sectional view of the rail turn module in the pallet transfer system of the present invention.
Fig. 22 is another side sectional view of the track steering module in the pallet transfer system of the present invention.
Fig. 23A is a plan view showing a state where the tray in the tray transfer system is transferred in the first direction.
Fig. 23B is a plan view showing a state where the tray in the tray transfer system is transferred in the second direction.
Description of the reference numerals
1: pallet transfer system
10: tray 11: base seat
15: the roller unit 16: running track
20: frame structure
100: the roller unit 110: rotary unit
111: base fixing portion 112: rotary casing
113-1: bearing 113-2: bearing assembly
120: caster block
121: the caster housing 122: caster inclined part
123: caster pad 124: caster axle
130. 130-1, 130-2, 130-3, 130-4: guide roller
131: the travel roller 132: roller shaft
200: running track
210: track pad 220: inclined part of rail
230: foreign matter receiving portion 240: track connecting part
300: connecting rail part
310: rotating the base 320: connecting rail
321: connection pad 322: guide rail
330: limiting part
400: rail steering module
410: rotating shaft
411: shaft lever 412: o-shaped ring
420: frame part
421: the frame housing 422: bearing assembly
423: bearing 424: frame connecting part
430: rotary driving part
431: a rotary cylinder 432: drive shaft
433: mounting portion 434: speed adjusting part
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, and the description related to the present invention is merely exemplary for structural and functional purposes, and thus the scope of the present invention should not be construed as limited by the embodiments described below. That is, the embodiments may be variously modified and may have various forms, and therefore, the scope of the claims of the present invention should be understood to include equivalents that can realize technical ideas.
On the other hand, the meaning of the terms described in the present invention should be understood as follows. The terms "first", "second", and the like are used to distinguish one constituent element from another constituent element, and the scope of the claims should not be limited by these terms. For example, a first component may be named a second component, and similarly, a second component may also be named a first component.
When a certain component is referred to as being "connected" to another component, it is to be understood that the component may be directly connected to the other component or may have another component interposed therebetween. Conversely, when a component is referred to as being "directly connected" to another component, it is understood that no other component exists therebetween. On the other hand, different expressions of relationships between constituent elements, that is, "between" and "between" or "adjacent" and "directly adjacent" should be similarly explained.
The term "comprising" or "having" is intended to specify the presence of stated features, steps, acts, elements, components or groups thereof, and is not intended to preclude the presence or addition of one or more other features or elements, steps, acts, elements, components or groups thereof, unless the context clearly indicates otherwise.
In each step, an identifier (e.g., a, b, c, etc.) is used for convenience of description, and the identifier does not describe the order of each step, and each step may occur in an order different from the described order as long as the specific order is not explicitly described in the context. That is, the steps may be performed in the same order as described, may be performed substantially simultaneously, or may be performed in the reverse order.
All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs, unless otherwise defined. Terms of dictionary definitions generally used should be construed to have meanings consistent with the context of the relevant art, and should not be interpreted excessively or excessively as having formal meanings unless explicitly defined in the present invention.
An embodiment of the configuration of a roller unit having a traveling and guiding function and a pallet transfer system using the same according to the present invention will be described below with reference to the accompanying drawings.
Fig. 3 is a perspective view showing a tray arranged on a track turning module for direction change in the tray transfer system of the present invention, and fig. 4 is a view showing a real view of the tray transfer system of the present invention.
As shown in fig. 3 and 4, a tray transfer system 1 according to the present invention is a system for transferring a tray 10, on which various components and substrates for assembly, inspection, and the like are mounted, to another process after one process is completed in an automated process of a manufacturer or the like, and includes: a tray 10, wherein the tray 10 is used for transferring substrates between processes; a plurality of roller units 100, the plurality of roller units 100 being provided at a lower portion of the tray 10; a plurality of running rails 200, the running rails 200 being disposed on the frame 20 of the tray transfer system 1 to guide the movement of the roller units 100; and a connection rail portion 300, the connection rail portion 300 being disposed between the running rails 200 disposed perpendicular to the running rails 200 on which the roller units 100 of the pallet 10 run, in order to change a transfer path of the pallet 10 in a transfer process in a right-angle direction, and to maintain running continuity with the running rails; and a track turning module 400, the track turning module 400 serving as a direction conversion medium device for vertically rotating the direction of the connection track part 300 on which the roller unit 100 is mounted.
The tray 10 is a member that performs a function of loading and transferring a component such as a substrate thereon, and includes a plurality of roller units 100 at a lower portion thereof, and the roller units 100 include guide rollers 130 that guide on a travel rail 200.
Fig. 5 is a perspective view showing a state in which a roller unit of the present invention is attached to a tray, fig. 6 is a perspective view showing a state in which the tray of the present invention is separated from the roller unit, fig. 7 is an exploded view of the roller unit according to one embodiment of the present invention, fig. 8 is a side sectional view of the roller unit of the present invention, fig. 9 is another side sectional view of the roller unit of the present invention, fig. 10 is a plan view of the roller unit of the present invention, fig. 11 is a view showing a state in which the roller unit of the present invention is attached to a base of the tray, and fig. 12 is a front view of the roller unit of the present invention attached to the tray.
As shown in the drawings, an embodiment of a roller unit having a traveling and guiding function and a pallet transfer system using the same according to an embodiment of the present invention will be described.
As shown in fig. 5 and 6, a plurality of roller units 100 having a traveling and guiding function according to an embodiment of the present invention are attached to transfer a pallet 10, 4 roller units are provided in a quadrangular structure under a quadrangular base 11 of the pallet 10, and are fixedly mounted via a coupling member such that the pallet 10 is guided along a traveling rail 200, travels, and is transferred.
As shown in fig. 7 to 12, a roller unit 100 having a traveling and guiding function according to an embodiment of the present invention includes a rotation unit 110, a caster block 120, and a guide roller 130.
More specifically, the rotation unit 110 of the roller unit 100 is fixedly coupled to the base 11 of the tray 10, and rotatably supports the base 11 of the tray 10.
The rotating unit 110 may include a base fixing portion 111 as a rotating member required for the rotation movement, as shown in fig. 7 and 8, and the base fixing portion 111 may be coupled to the base 11 of the tray 10; a swivel case 112 for swiveling the caster block 120 is provided at a lower portion of the base fixing portion 111, and bearings 113-1 and 113-2 are provided inside the swivel case.
As shown in fig. 7 and 8, the caster block 120 may include: a caster case 121 as a main body portion; a caster inclined portion 122 formed with an end surface portion having an inclination angle along a lower left and right side of the caster inclined portion 122; a caster pad 123, as a lower surface of the caster block 130, the caster pad 123 being extended in the caster inclined portion 122 to be formed as a flat surface; and a caster shaft 124, wherein the caster shaft 124 connects the caster housing 121 to bearings 113-1 and 113-2 inserted into the rotation housing 112 of the rotation unit 110, and is a rotation medium device for rotating the caster block 120 as a whole.
More specifically, in a state where the head of the lower portion of the caster shaft 124 is inserted into the internal space of the caster housing 121, the caster shaft 124 penetrates the center portion of the bearings 113-1 and 113-2 inserted into the rotation housing 112 of the rotation unit 110 in the upward direction and penetrates the base fixing portion 111, and the upper portion of the caster shaft 124 is fixedly coupled to the upper portion of the base fixing portion 111 by a coupling member, so that the caster block 120 can be maintained in a rotatable state.
The caster inclined portions 122 of the caster blocks 120 inclined to the left and right side surfaces are formed to be inclined inward of the lower sides of the left and right sides of the caster housing 121, and the lower end bottom surfaces extending from the caster inclined portions 122 on the left and right sides are flat surfaces to form caster pads 123. The caster shaft 124 is a rotation medium member that connects the caster case 121 to the rotation unit 110 and rotates the caster case.
At this time, the caster shaft 124 is connected to the swivel unit 110 to perform a swivel operation so that the caster block 120 can swivel with respect to the base 11 of the tray 10 using the swivel unit 110 as a medium.
That is, the caster shaft 124 is a rotating member that penetrates the bearings 113-1 and 113-2 provided in the rotating case 112 from the base fixing portion 111 and connects the caster block 120, and the caster block 120 is connected by the caster shaft 124 so that the caster block 120 rotates with respect to the base 11 of the tray 10 with the rotating unit 110 as a medium.
As shown in fig. 8 to 12, a plurality of guide rollers 130 are attached to the left and right caster inclined portions 122 of the caster block 120. That is, in order to maintain an ideal traveling state, it is preferable that 2 or more guide rollers 130 are attached to both the left and right sides of the caster inclined portion 122.
Preferably, as shown in fig. 9 to 12, in order to maintain more desirable traveling, a plurality of guide rollers 130 may be coupled to both left and right sides of the caster inclined portion 122 to be staggered with each other.
The guide roller 130, which is used to perform a guide and roll function on the running rail 200, may include: a running roller 131, the running roller 131 being formed in a cylindrical shape, a rubber wheel of a urethane material being coated on the guide roller 130 so as to be in contact with the running rail 200 or a later-described connection rail portion 300; and a roller shaft 132, wherein the roller shaft 132 is a rotating medium member connected to the caster inclined portion 122 of the caster block 120, a bearing is provided inside the travel roller 131, and the roller shaft 132 is in close contact with the bearing and rotates with the caster block 120 as a medium.
As shown in fig. 8, 11 and 12, the guide roller 130 according to the present invention is attached to the inclined end surfaces of the left and right caster inclined portions 122 of the caster block 120, and is thus formed to be inclined.
As shown in fig. 8, the guide roller 130 is attached to the inclined caster inclined portion 122 of the caster block 120 while maintaining an inclination angle of ≤ 1 ° to ≤ 89 ° with respect to a horizontal plane.
The guide roller 130 maintains an optimum angle required for optimum travel, preferably ≤ 25 °.
As shown in fig. 9 to 12, the guide rollers 130 may be arranged in parallel with each other, or 2 or more guide rollers 130-1, 130-2, 130-3, and 130-4 may be alternately arranged and attached to the left and right inclined surfaces of the caster inclined portion 122 in order to maintain a desired traveling.
The running end surface of the running roller 131 of the guide roller 130 is preferably formed below the horizontal end surface of the flat caster pad 123 on the bottom surface of the caster block 120, and is placed on a rail inclined portion 220 inclined to the left and right of the running rail 200, which will be described later, so as to maintain a normal running state.
According to the prior art, when the roller unit 15 of the prior art is attached to the pallet 10 of the pallet transfer system 1 to travel, the gap between the roller unit 15 and the travel rail 16 causes the separation distance S, which not only generates foreign substances in the gap space, but also causes the pallet 10 itself to shake left and right, which generates noise due to vibration, and when the inspection is performed by a specific inspection device during the transfer, a separation process of lifting the entire pallet 10 to the upper portion and then lowering the pallet occurs, and in this case, there is a problem such as interference between the roller unit 15 and the travel rail 16.
In the tray transfer system 1 according to the present invention, even if a separation process of lifting the entire tray 10 to the upper side and then lowering the tray is not performed during the transfer by a specific inspection device, the guide roller 130 can be naturally placed on the upper surface of the inclined rail inclined portion 220 inclined on the left and right sides of the travel rail 200 because the inclined surface of the caster block 120 of the roller unit 100 attached to the tray 10 is formed as the inclined surface of the left and right caster inclined portions 122, and thus, a gap or interference in space does not occur, and the continuity of travel can be maintained.
According to the related art, the roller unit 15 is a structure in which the travel roller 16 is separated from the guide roller 17, but the roller unit 100 of the present invention is a structure in which the travel function and the guide function are simultaneously performed.
Further, according to the present invention, in the case where the roller unit 100 including the guide roller 130 is sagged downward due to wear or damage of the running roller 131 of the guide roller 130, etc., in the flat caster pad 123 which is the lower end portion of the caster block 120 of the roller unit 100, a smooth material having a small friction is inserted into the end surface portion of the caster pad 123, so that the end surface of the caster pad 123 of the caster block 120 and the end surface of the rail pad 210 of the running rail 200 are gently adhered to each other and run, and thus the end surfaces are prevented from contacting each other and causing resistance.
The caster block 120 preferably has a flat caster pad 123 formed at a lower end thereof, but may be formed in any shape without being limited to a shape without forming the caster pad 123.
Fig. 13 is a sectional view of the roller unit of the present invention mounted on the running rail.
As shown in the drawings, according to the present invention, the traveling rail 200 formed by a plurality of intersections of the pallet transfer system 1 is a member having traveling and guiding functions, is fixed to the frame 20 forming the support structure of the pallet transfer system 1, and functions to guide the movement of the roller unit 100.
The running rail 200 may include a flat rail pad 210 as an upper end surface, a rail inclined portion 220 inclined downward to the left and right sides of the rail pad 210, and a foreign matter receiving portion 230 extended from the rail inclined portion 220 and formed of a groove portion, as a structure formed symmetrically to the caster block 120, and may further include a rail coupling portion 240, and the rail coupling portion 240 may be coupled to another member through a coupling member, the rail coupling portion 240 having an opening formed at a lower end portion thereof to fix the running rail 200.
The flat end surface of the rail pad 210 is formed to correspond to the end surface of the caster pad 123 of the caster block 120 and to be symmetrical so as to be in soft sliding contact, and when the roller unit 100 including the guide roller 130 is sagged downward due to wear or damage of the running roller 131 of the guide roller 130, a smooth material having a small friction is inserted, so that the end surface of the caster pad 123 of the caster block 120 and the end surface of the rail pad 210 of the running rail 200 are in soft surface contact with each other and run, thereby preventing resistance from being generated due to the contact between the end surfaces.
The rail inclined portion 220 is contacted by the running roller 131 of the guide roller 130 of the roller unit 100, and performs running and guiding functions.
As shown in fig. 13, the inclination angle of the rail inclined portion 220 is formed so as to maintain an inclination angle of ≤ 1 ° to ≤ 89 ° with respect to the horizontal plane.
The inclination angle of the inclined rail portion 220 is preferably formed at ≤ 25 ° while maintaining an optimum angle required for optimum travel.
As shown in fig. 2 of the related art, in the conventional case, the surface contacted by the running roller 16 and the surface contacted by the guide wheel 17 are differently divided from each other, but according to the present invention, the guide roller 130 performs both the running function and the guiding function, and thus the surface contacted by the running roller 131 is a track structure which only runs along the track inclined part 220, and simultaneously performs both the running and guiding functions.
The foreign matter receiving part 230 is formed at the left and right sides of the travel rail 200, and collects various foreign matters and the like generated by the travel roller 131 of the guide roller 130 rolling along the rail inclined part 220.
The rail coupling portion 240 is coupled to a frame coupling portion 424 formed in a frame portion 420 of a rail turn module 400, which will be described later, via a coupling member, and is fixed to the frame portion 420 of the rail turn module 400.
According to the present invention, in the case where the roller unit 100 including the guide roller 130 is suspended downward due to wear or damage of the running roller 131 of the guide roller 130, like the flat caster pad 123 corresponding to the flat rail pad 210 as the upper end surface of the running rail 200, the end surface of the caster pad 123 of the caster block 120 and the end surface of the rail pad 210 of the running rail 200 are brought into close contact with each other in a surface contact manner and travel softly, and resistance caused by the contact of the end surfaces can be prevented, in the case where the roller unit 100 including the guide roller 130 is dropped downward due to the wear or damage of the running roller 131 of the guide roller 130.
Further, the flat rail pad 210, which is the upper end surface of the travel rail 200, is preferably formed like the flat caster pad 123 of the caster block 120, but may be formed in any shape without forming the rail pad 210.
The following describes the structure of the connecting rail portion and the rail turning module according to the present invention.
Fig. 14A is an upper side perspective view in which a tray for direction change is separated from a rail turn module in a tray transfer system of the present invention, fig. 14B is a lower side perspective view in which the tray is separated from the rail turn module for direction change in the tray transfer system of the present invention, fig. 15A is an upper side perspective view in which a roller unit for direction change is separated from a running rail and a rail turn module in the tray transfer system of the present invention, fig. 15B is a lower side perspective view in which a roller unit for direction change is separated from a running rail and a rail turn module in the tray transfer system of the present invention, fig. 16 is a perspective view of a running rail, a connecting rail portion, and a rail turn module for direction change in the tray transfer system of the present invention, fig. 17 is an enlarged perspective view showing a connection state of the running rail, the connecting rail portion, and the rail turn module for direction change in the tray transfer system of the present invention, fig. 18 is a perspective view of a travel rail, a connection rail portion, and a rail turn module for direction change in the tray transfer system of the present invention in a connected state, in which the connection rail portion is separated, fig. 19 is a perspective view of the rail turn module in the tray transfer system of the present invention, fig. 20 is a separated perspective view showing a connected state of a roller unit for direction change, the connection rail portion, and the rail turn module in the tray transfer system of the present invention, fig. 21 is a side sectional view of the rail turn module for direction change in the tray transfer system of the present invention, and fig. 22 is another side sectional view of the rail turn module for direction change in the tray transfer system of the present invention.
As shown in the drawing, the track turning module 400 according to the present invention is disposed between the running tracks 200 disposed perpendicular to the running tracks 200 on which the roller units 100 of the pallet 10 run, in order to change the transfer path of the pallet 10 in the transfer process by the pallet transfer system 1 in the right-angle direction.
In this case, in order to change the transfer path of the pallet 10 in the transfer process in the right-angle direction, a track structure having the same shape as the running track 200 is provided, and in order to maintain the running continuity, a connection track portion 300 disposed between the running tracks 200 disposed perpendicular to the running tracks 200 on which the roller units 100 of the pallet 10 run is formed to be disposed between the roller units 100 and the track turning module 400.
That is, as shown in fig. 14A and 14B, in order to switch the direction of the pallet 10 during the transfer, if the pallet 10 is uniformly positioned on the upper portion of the track turning module 400 disposed at 4 of the rectangular grid structure, the roller unit 100 attached to the pallet 10 is placed on the connection track portion 300 positioned on the upper portion of the track turning module 400.
Therefore, as described above, in a state where the roller unit 100, the connection rail portion 300 on which the roller unit 100 is mounted, and the track turning module 400 as a direction conversion medium means for vertically rotating the direction of the travel path are vertically arranged in a line, the position of the connection rail portion 300 is changed by the rotating operation of the track turning module 400, and the roller unit 100 mounted on the upper portion of the connection rail portion 300 is simultaneously rotated, so that the roller unit 100 performs the transfer process in the second direction after the direction of the running roller 131 of the guide roller 130 of the roller unit 100 is positioned in the second direction which is the vertical direction converted by 90 ° from the first direction in which the roller unit 100 has traveled.
That is, as shown in fig. 23A and 23B, when it is necessary to transfer the tray 10 transferred in the first direction on the travel rail 200 along another travel rail 200 disposed in the second direction (orthogonal direction), the connection rail portion 300 is rotated after the tray 10 is stopped at the stop position (in this case, the roller unit 100 of the tray 10 is located at the central portion of the connection rail portion 300), and the guide rollers 130 and the roller units 100 connected to the caster blocks 120 are simultaneously rotated together so as to be able to travel in the second direction, so that the connection rail portion 300 is rotatably mounted between the travel rails 200 so as to selectively connect the travel rails 200.
The structure of the connection rail part 300 is produced as shown in fig. 15 to 18, and is formed in almost the same structure as the running rail. Comprises a rotary base 310, a connecting rail 320 and a limiting part 330.
The rotary base 310 is attached with a connection rail 320 and a stopper 330 of the connection rail 300, and the position of the connection rail 300 is rotated by the rotation of the rail steering module 400.
The connection rail 320 is formed almost the same as the running rail 200 in structure, and the connection rail 320 may be formed to include a flat connection pad 321 as an upper surface, and a guide rail 322 inclined to the left and right sides of the connection pad 321
The connection pads 321 are formed symmetrically with the end surfaces of the caster pads 123 of the caster blocks 120 as flat end surfaces so as to be in soft sliding contact, and when the roller unit 100 including the guide rollers 130 is sagged downward due to wear or damage of the running rollers 131 of the guide rollers 130, a smooth material having a small friction is inserted so that the end surfaces of the caster pads 123 of the caster blocks 120 and the end surfaces of the connection pads 321 of the connection rails 320 are closely attached to each other and smoothly run, thereby having an effect of preventing resistance which may occur when the end surfaces are in contact with each other.
The guide rail 322 performs a traveling and guiding function as a surface on which the traveling roller 131 of the guide roller 130 of the roller unit 100 travels while contacting.
At this time, the inclination angle of the guide rail 322 is formed to maintain an inclination angle of 1 ° to 89 ° with respect to the level of the connection pad 321.
The angle of inclination of the guide rail 322 is preferably formed to be ≤ 25 ° while maintaining an optimal angle required for optimal traveling.
According to the present invention, in the case where the roller unit 100 including the guide roller 130 is downwardly drooped due to wear or damage of the running roller 131 of the guide roller 130 like the flat caster pad 123 corresponding to the flat connection pad 321 as the upper end surface of the connection rail 320, which is the lower end portion of the caster block 120 of the roller unit 100, a smooth material having a small friction is inserted into the end surface portion of the connection pad 321, so that the end surface of the caster pad 123 of the caster block 120 and the end surface of the connection pad 321 of the connection rail 300 are gently adhered to each other and travel, thereby having an effect of minimizing resistance which may occur due to the contact of the end surfaces with each other.
In addition, as in the case of the flat caster pad 123 of the caster block 120, a flat connection pad 321 is preferably formed as an upper end surface of the connection rail 320, but the connection pad 321 may not be formed and may be formed in any shape.
The stopper 330 of the connection rail 300 is formed at a predetermined interval to the outside of the connection rail 320 in order to prevent the running roller 131 of the guide roller 130 of the roller unit 100 mounted on the connection rail 300 from being separated from the connection rail 300, and is attached to the upper portion of the swivel base 310 by means of a coupling member.
As shown in fig. 18 to 22, the track-steering module 400 according to the present invention is disposed at a lower portion of the coupling rail part 300 to transmit a driving force for rotating the coupling rail part 300, and includes a rotating shaft 410, a frame part 420, and a rotation driving part 430.
More specifically, as shown in fig. 15A and 15B, and fig. 19 and 20, the rotation shaft 410 penetrates the frame part 420, is coupled to the rotation driving part 430, and can transmit a rotational driving force to the rotation base 310 of the coupling rail part 300 coupled to the upper surface of the rotation shaft 410, thereby rotating the coupling rail part 300 in the entire direction.
The rotation shaft 410 includes a shaft 411 coupled to the rotation base 310 of the connection rail portion 300 and an O-ring 412.
The shaft 411 may have an upper portion connected to the rotating base 310, a center portion penetrating through the bearings 422 and 423 provided in the frame portion 420, and a lower portion connected to the driving shaft 432 provided in the rotation driving portion 430, and an O-ring 412 may be provided between the shaft and the bearings 422 and 423 to facilitate the rotation operation.
The frame part 420 may be mounted with bearings 422 and 423 in a central inner space and a shaft 411 supporting the rotation shaft 410 so that the rotation plate 310 connected to the rail part 300 can rotate, the frame part 420 may include a frame housing 421 formed of a four-sided plate at an outer side thereof, and a frame coupling part 424 formed of a plurality of grooves may be formed at each side of the four-sided plate at the outer side of the frame part 420.
The bearings 422 and 423 are disposed in an inner space of the frame case 421 as a rotary medium device, and support and rotate the shaft 410, and the shaft 410 penetrates a center portion of the bearings, and an upper portion thereof is connected to the rotary base 310 and a lower portion thereof is connected to the driving shaft portion 432.
The frame part 420 is a member for coupling and fixing the track turning module 400 of the present invention to the running track 200 of the tray transfer system 1, and a frame coupling part 424 formed with a plurality of groove parts is formed on the four-sided board of the frame part 420 as the frame housing 421, and the running tracks 200 connected to four sides of each of the four-sided board are coupled to each other by the frame coupling part 424.
That is, the rail coupling portion 240 formed to be open at the lower portion of the travel rail 200 and the plurality of frame coupling portions 424 formed to be groove portions on the four side plates as the frame case 421 of the frame portion 420 are aligned with each other and are fixedly coupled to each other by coupling members.
The rotation driving unit 430 includes a rotation cylinder 431 for transmitting a rotation torque to the rotation shaft 410, a driving shaft 432 protruding above the rotation cylinder 431 and connected to the shaft 411 of the rotation shaft 410, a mounting unit 433 for coupling the rotation cylinder 431 to the frame housing 421 of the frame unit 420, and a speed adjusting unit 434 for controlling a rotation speed of the rotation cylinder 431.
The rotating cylinder 431 is one of actuators generally used in various technical fields as a component for rotating the driving shaft 432 by compressed air, and has an advantage that a large torque can be easily obtained.
The rotary cylinder 431 includes a speed adjusting unit 434, and is capable of adjusting the rotation angle of the drive shaft 432, and the rotary cylinder 431 is coupled and fixed to the frame case 421 via the mounting unit 433.
As shown in fig. 19 to 22, the driving shaft 432 of the rotation driving part 430 is coupled to a lower portion of the shaft 411, and the shaft 411 directly connects a lower end portion of the rotating base 310 to the driving shaft 432, so that a rotational force is transmitted from the driving shaft 432 to the rotating base 310 of the coupling rail part 300.
The following describes a process of switching a transfer path of a pallet by means of the track turning module of the present invention.
Fig. 23A is a plan view showing a state in which the tray in the tray transfer system is transferred in the first direction, and fig. 23B is a plan view showing a state in which the tray in the tray transfer system is transferred in the second direction.
In the tray transfer system 1 of the present invention, a plurality of linear motors 600 for generating a driving force required to transfer the tray 10 are provided, and a plurality of position sensors 700 are provided along the same direction as the linear motors 600.
As shown in fig. 23A, when the tray 10 is transferred in the first direction on the running rails 200, the connection rail portion 300 of the rail turn module 400 is maintained in a state of being rotated in the first direction so as to be connected between the running rails 200 arranged in the first direction.
In the tray transfer system 1, a controller and a Multiplexer (MUX) (not shown) for controlling the operation of the linear motor 600 are provided. A control unit (not shown) including such a controller and a multiplexer is connected to the plurality of linear motors 600 generating the driving force and appropriately controls the linear motors in order to transfer the tray 10 in a predetermined direction without collision.
When the transfer path of the tray 10 needs to be changed, the control part analyzes signals received from the plurality of position sensors 700, decelerates the tray 10 transferred in the first direction, stops the tray 10 at the stop position, and positions the roller unit 100 of the tray 10 at the center of the connection rail part 300.
At this time, the guide roller 130 is coupled to the inclined caster inclined portion 122 of the caster block of the roller unit 100, and if the guide roller 130 provided in the roller unit 100 of the tray 10 is stopped on the guide rail 322 of the connection rail 320 positioned at the center of the connection rail portion 300, the control portion drives the rotary cylinder 431 of the rotation driving portion 430 of the rail steering module 400 to rotate the connection rail portion 300 in the second direction.
At this time, the control unit controls the rotation cylinder 431 of the rotation driving unit 430 such that the connection rail unit 300 is accurately rotated in the second direction, and after the rotation is completed, the traveling rollers 131 of the guide rollers 130 coupled to the caster blocks 120 of the roller unit 100 maintain the second direction.
As shown in fig. 23B, the connection rail portion 300 of the rail turn module 400 rotates in the second direction to connect the running rails 200 arranged in the second direction, and in this state, the control portion controls the linear motor 600 to transfer the tray 10 in the second direction.
The present invention has been described specifically with reference to the above embodiments, but the present invention is not limited to the above embodiments, and various modifications and variations can be made without departing from the spirit and scope of the present invention. Therefore, such modifications or revisions should be construed as being included in the scope of the claims of the present invention.

Claims (12)

1. A roller unit having a traveling and guiding function, which is connected to a tray for transferring a substrate, is characterized by comprising:
a rotating unit rotatably mounted to a base of the tray,
a caster block connected to the rotating unit by a connecting member, the caster block having an inclined end surface portion at a lower left and right side,
a plurality of guide rollers coupled to left and right inclined end surfaces of the caster block;
the rotation unit includes:
a base fixing portion connected to the base of the tray,
a rotating housing in which a bearing for rotating the caster block is inserted at a lower portion of the base fixing portion;
the caster block includes:
a caster case which is a main body portion of the caster block,
a caster inclined portion formed with an end surface portion having an inclination angle downward to the left and right sides,
a caster pad formed as a flat end surface portion as a lower surface of the caster block, an
A caster shaft coupled to the rotation housing into which the bearing is inserted, for rotating the caster block;
the guide roller includes:
a running roller which is formed in a cylindrical shape, a rubber wheel coated with a polyurethane material in contact with the running rail and the connecting rail portion, and
a roller shaft serving as a rotation medium member connected to a caster inclined portion of the caster block, the roller shaft including a bearing in the travel roller, the roller shaft being in close contact with the bearing and rotating with the caster block as a medium;
the guide rollers are coupled to the left and right inclined end surfaces of the caster block so that the left and right sides of the caster block are staggered.
2. The roller unit with traveling and guiding functions according to claim 1,
the guide rollers are combined by keeping the inclination angle of 1-89 degrees on the basis of a horizontal plane.
3. The roller unit with traveling and guiding functions according to claim 1,
guide rollers of the roller units attached to the tray are placed on the travel rails in a surface contact manner to move the tray.
4. The roller unit with traveling and guiding functions according to claim 3,
the running track includes:
a plurality of rail pads as an upper end surface, the rail pads being flat and formed to intersect with each other in a tray transfer system for transferring a substrate; a rail inclined portion inclined downward to the left and right sides of the rail pad; a foreign matter receiving portion extending from the rail inclined portion and including a groove portion.
5. The roller unit with traveling and guiding functions according to claim 4,
the inclination angle of the track inclined part is formed by keeping an inclination angle of 1-89 degrees relative to a horizontal plane.
6. The roller unit with traveling and guiding functions according to claim 4,
the guide roller is mounted on a rail inclined portion inclined downward to the left and right sides of the travel rail, a caster pad end surface formed as a flat end surface portion as a lower surface of the caster block, and a flat rail pad end surface as an upper end surface of the travel rail in a surface contact manner, and transfers the tray.
7. A tray transfer system using a roller unit having a traveling and guiding function, for transferring a tray on which various components and substrates for assembly and inspection are mounted in an automated process of a manufacturer, the tray transfer system comprising:
a tray in the shape of a quadrangular plate material for transferring components and substrates between processes,
a plurality of roller units provided at a lower portion of the tray, the roller units including a swivel unit rotatably mounted on a base of the tray, caster blocks coupled to the swivel unit via coupling members and having inclined end surface portions at left and right lower portions, and guide rollers coupled to the left and right inclined end surface portions of the caster blocks,
a plurality of running rails arranged in a grid structure on a frame of the tray transfer system to have crossing points for guiding a running path and movement of the roller units arranged on the tray,
a connecting rail part which is arranged between the running rails which are arranged vertically to the running rails on which the roller units of the pallet run so as to maintain running continuity with the running rails in order to change the transfer path of the pallet in the transfer process in the right-angle direction,
a track turning module serving as a direction conversion medium device for vertically rotating the direction of a connection track part on which the roller unit of the tray is placed;
the rotation unit includes:
a base fixing portion connected to the base of the tray,
a rotating housing in which a bearing for rotating the caster block is inserted into a lower portion of the base fixing portion;
the caster block includes:
a caster case which is a main body portion of the caster block,
a caster inclined portion formed with an end surface portion having an inclination angle downward to the left and right sides,
a caster pad formed as a flat end surface portion as a lower surface of the caster block, an
A caster shaft coupled to a rotation housing in which the bearing is inserted, for rotating the caster block;
the guide roller includes:
a running roller formed in a cylindrical shape, a rubber wheel coated with a polyurethane material in contact with the running rail and the connecting rail portion, and
a roller shaft serving as a rotation medium member connected to a caster inclined portion of the caster block, the roller shaft including a bearing in the travel roller, the roller shaft being in close contact with the bearing and rotating with the caster block as a medium;
the guide rollers are coupled to the left and right inclined end surfaces of the caster block so that the left and right sides of the caster block are staggered.
8. The pallet transfer system using the roller unit having the traveling and guiding function according to claim 7,
the guide rollers are combined by keeping the inclination angle of 1-89 degrees on the basis of a horizontal plane.
9. The pallet transfer system using the roller unit having the traveling and guiding function according to claim 7,
the running track includes:
a flat rail pad as an upper end face; a rail inclined portion which is an end surface portion inclined downward to the left and right sides of the rail pad, is formed with an inclination angle of ≤ 1 ° -89 ° with respect to a horizontal plane, and is used for the guide rollers to travel; a foreign matter receiving portion extended from the rail inclined portion and configured as a groove portion.
10. The pallet transfer system using the roller unit having the traveling and guiding function according to claim 9,
the running rollers of the guide rollers are disposed on a rail inclined portion inclined downward to the left and right sides of the running rail, and are used as the lower surface of the caster block, a caster pad end surface formed by a flat end surface portion is disposed on a flat rail pad end surface used as the upper end surface of the running rail in a surface contact manner, and the tray is transferred.
11. The pallet transfer system using the roller unit having the traveling and guiding function according to claim 7,
the connecting track part comprises a rotating base, a connecting track and a limiting part, the connecting track and the limiting part of the connecting track part are additionally arranged on the rotating base, and the position of the connecting track part is rotated by means of the rotating action of the track steering module; the connecting rail includes a flat connecting pad as an upper face and a guide rail formed with end face portions inclined to the left and right sides of the connecting pad.
12. The pallet transfer system using the roller unit having the traveling and guiding function according to claim 7,
the track steering module includes:
a rotating shaft disposed below the connection rail part to transmit a driving force for rotating the connection rail part, the rotating shaft including a shaft and an O-ring that transmit a rotational driving force to a rotation base of the connection rail part;
a frame part, which is provided with a bearing on the inner space of the center part and is installed in a manner of supporting the shaft rod of the rotating shaft, so that the rotating plate connected with the rail part can rotate, and the outer side of the frame part comprises a frame shell formed by four side plates;
a rotary drive portion, the rotary drive portion comprising: a rotary cylinder that transmits a rotary torque to the rotary shaft; a driving shaft protruding toward an upper portion of the rotary cylinder and connected to a shaft of the rotary shaft; a mounting portion for coupling the rotary cylinder to a frame case of the frame portion; and a speed adjusting section that controls a rotation speed of the rotary cylinder.
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