CN102849462A - Device used for conveying substrate - Google Patents
Device used for conveying substrate Download PDFInfo
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- CN102849462A CN102849462A CN201210224161XA CN201210224161A CN102849462A CN 102849462 A CN102849462 A CN 102849462A CN 201210224161X A CN201210224161X A CN 201210224161XA CN 201210224161 A CN201210224161 A CN 201210224161A CN 102849462 A CN102849462 A CN 102849462A
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- pallet
- magnet
- unit
- electromagnet
- substrate
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Abstract
The invention discloses a device used for conveying a substrate. The device used for conveying the substrate includes a vacuum chamber; a tray used for conveying the substrate in the vacuum chamber; an upper conveying unit used for transmitting driving force to the upper part of the tray in a manner of not contacting with the upper end part of the tray; a relative movement allowing unit coupled to the lower end part of the tray and capable of moving relatively to the tray; and a plurality of guide units used for contacting with the relative movement allowing unit and guiding the movement of the tray.
Description
The cross reference of related application
The right that the korean patent application case of filing an application to Korea S Department of Intellectual Property korean patent application case on July 13rd, 10-2011-0065153 number 1 that the application's case is advocated to file an application to Korea S Department of Intellectual Property based on June 30th, 2011 is 10-2011-0069438 number, the content of described korean patent application case is incorporated herein in full with way of reference.
Technical field
The present invention relates to a kind of device for transmitting substrate, more specifically, relate to and a kind ofly can be placed with the pallet of substrate and transmit the device of substrate in vacuum chamber by top, described device comprises the acceleration/deceleration unit for control substrate transfer rate.
Background technology
Generally speaking, for the manufacture of Liquid Crystal Display (liquid crystal display; LCD) device, plasma display (plasma display panel; PDP) device, field-emitter display (field emission display; FED) device, electroluminescent display (electro luminescence display; ELD) device or similarly flat-panel monitor (flat panel display; FPD) most of techniques of device all are that substrate is carried out.
In this kind technique for the manufacture of the flat-panel monitor device, repeatedly repeat depositing operation, photoetching process and etch process, and relate to many other techniques, such as cleaning, bonding, cutting etc.
Therefore, when carrying out every kind of technique, must the loading or unloading substrate.For loading and unloading carried base board, considered to use coaxial type method (in-line type method), in the coaxial type method, pass the pallet that chamber is placed with substrate above vertically transmitting.
Fig. 1 is the cutaway view for the prior device that transmits substrate, and Fig. 2 is the front elevation of Fig. 1.As shown in Figures 1 and 2, the prior device that be used for to transmit substrate comprise chamber 1, above be placed with the pallet 2 of substrate S and contact with the bottom of pallet 2 and to the driving rolls 3 of pallet 2 transmission of drive force.Driving rolls 3 is by electrical motor 4 driven rotary and therefore to pallet 2 transmission of drive force.
Simultaneously, provide the guidance unit 1a and the 2a that guide pallet 2 with magnetic force, fall in order to can prevent the pallet 2 of perpendicular movement.Particularly, pallet permanent magnet 2a is arranged on the upper end of pallet 2, and chamber permanent magnet 1a arranges at chamber 1 interior contiguous pallet permanent magnet 2a.Therefore at this moment, pallet permanent magnet 2a is different from the polarity of chamber permanent magnet 1a, and attracts each other and do not contact, thereby can prevent that pallet 2 from falling when being transmitted.In other words, the prior device that be used for to transmit substrate adopts following method: the bottom of driving rolls 3 and pallet 2 that wherein is arranged in the downside of chamber 1 is in contact with one another, and comes mobile pallet 2 by the rotational force of driving rolls 3.
Yet, be used for to transmit the prior device of substrate, utilize to contact transmission of drive force between the bottom of driving rolls 3 and pallet 2, therefore, the slip between pallet 2 and the driving rolls 3 can cause mismatch.In other words, when transmitting substrate S, pallet 2 may not be in contact with one another in the normal position with driving rolls 3, thereby can increase defective and reduce productive force.
Equally, be used for to transmit the prior device of substrate, pallet 2 is to be transmitted simultaneously with the driving rolls 3 that is used for transmission of drive force is contacted, thereby particle can have harmful effect.
In addition, in the prior device that is used for transmitting substrate, if the acceleration/deceleration speed of pallet 2 raises to reduce production time per piece (tact time) by delivery tray 2 rapidly, the problem cause because sliding between the bottom of driving rolls 3 and pallet 2 then can appear when making pallet 2 acceleration or deceleration, thereby make the time of pallet 2 acceleration/deceleration elongated, this is because the position deviation that pallet 2 is expected certainly, and along with the friction between the bottom of driving rolls 3 and pallet 2 increases and generation foreign matter (that is, particle).
Summary of the invention
One aspect of the present invention provides a kind of device for transmitting substrate, in this device, can not come in contact to the pallet transmission of drive force, even pallet departs from correct position, pallet also can be back to its initial position rapidly, and can prevent from producing when delivery tray particle.
Another aspect of the present invention provides a kind of device for transmitting substrate, in this device, be used for increasing/reducing by electromagnetic force the contiguous described pallet of acceleration/deceleration unit of pallet transfer rate, thereby can increase the transfer rate of pallet and can prevent that foreign matter from producing.
According to an aspect of the present invention, provide a kind of device for transmitting substrate, described device comprises: vacuum chamber; Pallet is used for transmitting described substrate at described vacuum chamber; The top delivery unit is used for not contacting to the top transmission of drive force of described pallet the upper end of described pallet; The unit is allowed in relative motion, and the bottom that is coupled to described pallet also can be with respect to described tray motion; And a plurality of guidance units, be used for contacting the motion that described relative motion is allowed the unit and guided described pallet.
Described relative motion allows that the unit can comprise rotating body, and described rotating body is to be coupled to the relative rotation described pallet.
Described rotating body can comprise: the tray support axle is coupled to the described bottom of described pallet; Swivelling pipe is used for therein accommodating described tray support axle, and has and the contacted outside face of described guidance unit; And bearing, have the inner periphery that is coupled to described tray support axle and the excircle that is coupled to described swivelling pipe.
Described guidance unit can comprise guide roller, described guide roller has guiding surface, described guiding surface has curvature, the diameter of described curvature is along with near the center of described guiding surface and reduce, and the curvature of described swivelling pipe is less than the described curvature of the described guiding surface of described guide roller.
Described guidance unit can comprise guide roller, and described guide roller has guiding surface, and described guiding surface has curvature, and the diameter of described curvature is along with near the center of described guiding surface and reduce.
Described top delivery unit can comprise: the top permanent magnet is arranged on the described upper end of described pallet; And the top electromagnet, contiguous described top permanent magnet and being arranged in the described vacuum chamber.
Described top delivery unit can comprise: the top permanent magnet is arranged on the described upper end of described pallet; And the top electromagnet, contiguous described top permanent magnet and being arranged at outside the described vacuum chamber.
Described device also can comprise mounting groove, the described upper end of the contiguous described pallet of described mounting groove and outside face depression on the outer wall of described vacuum chamber, and described top electromagnet is embedded in and is installed in the described mounting groove.
Described top electromagnet can be removably installed in the described mounting groove.
Described device also can comprise the bottom delivery unit, is used for not contacting described relative motion to the bottom transmission of drive force of described pallet and allows the unit.
Described bottom delivery unit can comprise: the bottom permanent magnet is arranged at described relative motion and allows in the unit; And the bottom electromagnet, contiguous described bottom permanent magnet and being arranged in the described vacuum chamber.
Described bottom delivery unit can comprise: the bottom permanent magnet is arranged at described relative motion and allows in the unit; And the bottom electromagnet, contiguous described bottom permanent magnet and being arranged at outside the described vacuum chamber.
The outer wall of described vacuum chamber can be formed with the protrusion that raises up between each described guidance unit, the described protrusion of described vacuum chamber is provided with the mounting groove from the outside face depression of described protrusion, and described bottom electromagnet can be embedded in and be installed in the described mounting groove.
Described bottom electromagnet can be removably installed in the described mounting groove.
According to an aspect of the present invention, provide a kind of device for transmitting substrate, described device comprises: pallet, be equipped with described substrate and be used for transmitting described substrate; Delivery unit is arranged in the bottom of described pallet and is used for transmitting described pallet; And acceleration/deceleration unit, be close to upper end or the bottom of described pallet, and increase or reduce the transfer rate of described pallet by electromagnetic force.
Described device also can comprise guidance unit, is arranged in the top of described pallet and is used for guiding described pallet.
Described acceleration/deceleration unit can comprise: at least one rotary magnet, and described upper end or the described bottom of contiguous described pallet, and rotatably be arranged on the direction of transfer of described pallet; Turning motor is used for rotating described rotary magnet; And Rotation Controllers, for hand of rotation and the speed of controlling described turning motor.
Described rotary magnet can be in the described bottom of described pallet the contiguous described pallet in cross side place and rotate in the direction that transmits described pallet.
Described rotary magnet can have round-shaped, and wherein the N utmost point and the S utmost point are crisscross arranged along the described circumference of described rotary magnet.
Described acceleration/deceleration unit can comprise: at least one motion magnet, described upper end or the described bottom of contiguous described pallet and be arranged near or away from described pallet; Actuator, be used for driving described motion magnet near or away from described pallet; And driving governor, be used for controlling the operation of described actuator.
Described motion magnet can be in the described bottom of described pallet the contiguous described pallet in cross side place and be arranged near or away from described pallet.
Described acceleration/deceleration unit can comprise: a plurality of static magnet are arranged at specific interval in the described bottom of described pallet; Electromagnet module, contiguous described static magnet and with arranged at certain intervals, and produce magnetic force to increase/to reduce the transfer rate of described pallet by the interaction with described static magnet; And module controller, be used for the supply that control is applied to the electric current of described electromagnetic module, optionally to change the N/S polarity of described electromagnetic module.
Described electromagnet module can comprise: a plurality of iron cores, contiguous described static magnet and and described static magnet between leave predetermined space, and be wound with coil at described iron core; And connecting panel, be used for described a plurality of iron cores are linked into an integrated entity.
Described a plurality of iron core can be arranged by specific interval, and described interval is different from the arrangement pitch of described static magnet.
Described delivery unit can comprise: the pallet lower tracks is coupled to the described bottom of described pallet; And a plurality of driving rollss, in the bottom of described pallet lower tracks, be arranged in contact and be rotated in the described pallet lower tracks.
The described bottom of described pallet lower tracks or described pallet can comprise the high-conductivity metal that is embedded in wherein.
Described guidance unit can comprise: the pallet upper track is configured to ferromagnet and is coupled to the described upper end of described pallet; And the magnetic guiding unit, described pallet upper track is embedded in wherein and has polarity, to produce the magnetic force that is used for promoting in the relative both sides of described pallet upper track described pallet upper track.
As mentioned above, the top delivery unit does not contact the upper end of described pallet to the pallet transmission of drive force, and allow that with the relative motion of the bottom that is coupled to described pallet the guidance unit of unit contacts, and relative motion allows that the unit is coupled to pallet with can be movable relatively, even thereby pallet shakes during transmitting, described pallet also can be back to its initial position rapidly, and can prevent during transmitting that particle from producing.
Equally, be used for increasing/reducing by electromagnetic force the contiguous described pallet of acceleration/deceleration unit of the transfer rate of pallet, thereby can increase the transfer rate of described pallet and can prevent that foreign matter (that is, particle) from producing.
Description of drawings
Read by reference to the accompanying drawings following detailed description the in detail, can more clearly understand exemplary embodiment of the present invention, in the accompanying drawings:
Fig. 1 is the cutaway view for the prior device that transmits substrate;
Fig. 2 is the front elevation of Fig. 1;
Fig. 3 is the cutaway view of the device that is used for the transmission substrate of the first exemplary embodiment according to the present invention;
Fig. 4 is the transparent view that being used among Fig. 3 transmits the device of substrate;
Fig. 5 allows the transparent view of unit for the relative motion that shows Fig. 4;
Fig. 6 be Fig. 3's ' A ' zone enlarged view;
Fig. 7 is installed on the outer transparent view of vacuum chamber for the top electromagnet that shows the device that is used for the transmission substrate of the second exemplary embodiment according to the present invention;
Fig. 8 is installed on the outer view of vacuum chamber for the top electromagnet that is used for key drawing 7;
Fig. 9 is for showing the transparent view of the bottom electromagnet of the device that is used for the transmission substrate of the 3rd exemplary embodiment according to the present invention;
Figure 10 is installed on the outer transparent view of vacuum chamber for the bottom electromagnet that shows the device that is used for the transmission substrate of the 4th exemplary embodiment according to the present invention;
Figure 11 is the schematic elevational view of the device that is used for the transmission substrate of the 5th exemplary embodiment according to the present invention;
Figure 12 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 11;
Figure 13 is the pallet lower tracks of the device that is used for the transmission substrate among Figure 11 and the side-looking enlarged drawing of the contact part between the driving rolls;
Figure 14 is the schematic diagram for the operation of the rotary magnet of explaining Figure 11;
Figure 15 is the view for the alternate exemplary embodiment of the rotary magnet of explaining Figure 14;
Figure 16 is the schematic elevational view of the device that is used for the transmission substrate of the 6th exemplary embodiment according to the present invention;
Figure 17 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 16;
Figure 18 is the lateral plan of Figure 17;
Figure 19 is the schematic elevational view of the device that is used for the transmission substrate of the 7th exemplary embodiment according to the present invention;
Figure 20 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 19;
Figure 21 is the schematic side elevation of the device that is used for the transmission substrate of the 8th exemplary embodiment according to the present invention;
Figure 22 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 21;
Figure 23 is the schematic elevational view of the device that is used for the transmission substrate of the 9th exemplary embodiment according to the present invention; And
Figure 24 is the view for the operation of the acceleration/deceleration unit of the device that is used for the transmission substrate of explaining Figure 23.
The main element description of symbols
1: chamber
1a: chamber permanent magnet
2: pallet
2a: pallet permanent magnet
3: driving rolls
4: electrical motor
S: substrate
T1: the device that is used for transmitting substrate
T2: the device that is used for transmitting substrate
T3: the device that is used for transmitting substrate
T4: the device that is used for transmitting substrate
T5: the device that is used for transmitting substrate
T6: the device that is used for transmitting substrate
T7: the device that is used for transmitting substrate
T8: the device that is used for transmitting substrate
T9: the device that is used for transmitting substrate
10: vacuum chamber
11: protrusion
20: pallet
30: the top delivery unit
30a: top delivery unit
31: the top permanent magnet
33: the top electromagnet
33a: top electromagnet
40: the unit is allowed in relative motion
41: the tray support axle
43: swivelling pipe
45: bearing
51: guide roller
53: guiding surface
60b: bottom delivery unit
63b: bottom electromagnet
63c: bottom electromagnet
H: mounting groove
100: pallet
200: delivery unit
210: the pallet lower tracks
220: driving rolls
230: the roller driving motor
300: acceleration/deceleration unit
310: rotary magnet
320: turning motor
400: guidance unit
410: the pallet upper track
420: the magnetic guiding unit
C: high-conductivity metal
500: acceleration/deceleration unit
510: motion magnet
520: actuator
600: acceleration/deceleration unit
610: static magnet
620: electromagnet module
621: iron core
622: connecting panel
The specific embodiment
Hereinafter with reference to the accompanying drawing that is used for the illustration various embodiments of the present invention, to obtain fully understanding concept of the present invention and advantage thereof.
Hereinafter, will elaborate concept of the present invention by being explained with reference to the drawings various embodiments of the present invention.Ref. No. identical among the figure is indicated identical element.
Fig. 3 is the cutaway view of the device that is used for the transmission substrate of the first exemplary embodiment according to the present invention, Fig. 4 is the transparent view that being used among Fig. 3 transmits the device of substrate, Fig. 5 allows the transparent view of unit for the relative motion that shows Fig. 4, and Fig. 6 is the enlarged view in ' A ' zone of Fig. 3.
Such as Fig. 3 to shown in Figure 6, according to the present invention the device T1 that is used for transmitting substrate of the first exemplary embodiment comprise vacuum chamber 10, be used for vacuum chamber 10 transmit substrate S pallet 20, be used for not contacting to the top transmission of drive force of pallet 20 upper end of pallet 20 top delivery unit 30, be coupled to the bottom of pallet 20 and can allow unit 40 and be used for a plurality of guidance units 50 that the contact relative motion is allowed unit 40 and guided the motion of pallet 20 with respect to the relative motion of pallet 20 motions.
The shape of pallet 20 looks like to have the flat board of narrow width, and is provided with for the section of the laying (not shown) of placing substrate S in the above at a side place.In other words, substrate S vertically is stacked in laying in the section of pallet 20.In this exemplary embodiment, with standing upright state delivery tray 20.Herein, the direction of transfer of pallet 20 refers to the vertical of pallet 20.
Substrate S can comprise the various substrate S for the manufacture of the similar devices such as flat-panel monitor device and liquid crystal display device.Substrate S can comprise semi-conductive wafer.
Simultaneously, relative motion allows that unit 40 is coupled to the bottom of pallet 20.Particularly, relative motion allows that unit 40 is for being coupled to the relative rotation the rotating body of pallet 20.Relative motion allows that unit 40 rotatably is coupled to the bottom of pallet 20.In other words, relative motion allows that unit 40 is with respect to the rotation that vertically (is equivalent to hereinafter the direction of the tray support axle 41 of will set forth) of pallet 20.Relative motion allows that unit 40 is used for preventing that pallet 20 is transmitted, and hereinafter will elaborate it when Width departs from its tram.
Such as Fig. 3 to shown in Figure 6, relative motion allow unit 40 comprise the bottom that is coupled to pallet 20 tray support axle 41, be used for accommodating tray support axle 41 therein and have with the swivelling pipe 43 of guidance unit 50 contacted outside faces and have the inner periphery that is coupled to tray support axle 41 and be coupled to the bearing 45 of the excircle of swivelling pipe 43.
In other words, be coupled to the inner periphery of bearing 45 at the tray support axle 41 that vertically is coupled to the bottom of pallet 20 of pallet 20.At this moment, swivelling pipe 43 is coupled to the excircle of bearing 45, so that swivelling pipe 43 can relatively rotate with respect to tray support axle 41.
The shape of swivelling pipe 43 has and guidance unit 50 contacted excircles as hollow cylinder, and can be coupled to the relative rotation tray support axle 41 by bearing 45.
Simultaneously, to shown in Figure 6, guidance unit 50 can be guide roller 51 such as Fig. 3, and guide roller 51 has guiding surface 53, and guiding surface 53 has curvature, and the diameter of described curvature is along with reducing near the center.A plurality of guide rollers 51 separate with predetermined interval, and are rotatably mounted in the downside place of vacuum chamber 10.The guiding surface 53 of guide roller 51 has predetermined curvature, with the excircle corresponding to swivelling pipe 43.At this moment, the curvature of swivelling pipe 43 can less than the curvature of the guiding surface 53 of guide roller 51, allow that to prevent relative motion unit 40 bootstrap rollers 51 depart from.
Below, will set forth the operation of the device T1 that is used for the transmission substrate in this exemplary embodiment.
When being placed with the pallet 20 of substrate S above transmitting, top delivery unit 30 is to the top transmission of drive force of pallet 20.In other words, if electric current (that is, in stator) in top electromagnet 33 flows, then (that is, in mover) can produce Lorentz force in top permanent magnet 31, and therefore transmits the pallet 20 that is coupled to top permanent magnet 31.
Simultaneously, the relative motion that is coupled to the bottom of pallet 20 allows that unit 40 guides the transmission to pallet 20 in contact guidance roller 51.At this moment, the acceleration/deceleration of the particle on the guiding surface 53 of guide roller 51 or pallet 20 can make pallet 20 in heeling condition but not keep vertically being transmitted.When pallet 20 tilted, relative motion allowed that unit 40 is not positioned at the center of the guiding surface 53 of guide roller 51, and is positioned at the edge of guiding surface 53.In this exemplary embodiment; relative motion allows that unit 40 can be with respect to 41 rotations of tray support axle; therefore; even above-mentioned particle or vibrations make relative motion allow that unit 40 is positioned at the edge of the guiding surface 53 of guide roller 51, relative motion allows that unit 40 also can move to the center by rotation.Therefore, the device T1 that be used for to transmit substrate in this exemplary embodiment, pallet 20 can keep during transmitting in its tram and be transmitted.In other words, even pallet 20 shakes during transmitting, pallet 20 also can be back to its initial position rapidly.Equally, even pallet 20 shakes, can prevent that also particle from producing during transmitting.
In addition, top delivery unit 30 is arranged on the upper end of pallet 20, and is arranged at the bottom of pallet 20 for the guidance unit 50 of guiding pallet 20 motions.Therefore, even pallet 20 is accelerated during transmitting/slows down, the vibration of pallet 20 or shake also and can advantageously alleviate.
Fig. 7 is installed on the outer transparent view of vacuum chamber for the top electromagnet that shows the device that is used for the transmission substrate of the second exemplary embodiment according to the present invention, and Fig. 8 is installed on the outer view of vacuum chamber for the top electromagnet that is used for key drawing 7.
This exemplary embodiment shows except the structure of top delivery unit 30a the equal identical structure of structure of the first exemplary embodiment shown in Figure 6 extremely with Fig. 3, therefore, below will only set forth the structure according to the top delivery unit 30a of this exemplary embodiment.
As shown in Figures 7 and 8, delivery unit 30a in top comprises top permanent magnet 31 on the upper end that is arranged at pallet 20 and adjacent upper portions permanent magnet 31 and is arranged at the outer top electromagnet 33a of vacuum chamber 10.
In other words, the device T2 that is used for transmitting substrate in this exemplary embodiment, top electromagnet 33a are arranged in vacuum chamber 10 atmosphere outward, and this arrangement position with the first exemplary embodiment is opposite.
Particularly, such as Fig. 7 or shown in Figure 8, from the upper end of the contiguous pallet 20 of the mounting groove H of outside face depression and be arranged on the outer wall of vacuum chamber 10, and therefore top electromagnet 33a is embedded in and is installed among the mounting groove H.
Therefore, if top electromagnet 33a is installed on vacuum chamber 10 outer (that is, in the atmosphere), then can prevent from vacuum chamber 10, arc phenomenon occuring.This kind arc phenomenon is the form of vacuum discharge.Vacuum discharge is the electric discharge phenomena that produced under high vacuum state by high potential.Therefore, if top electromagnet 33a places the atmosphere outside the vacuum chamber 10 as this exemplary embodiment, can prevent advantageously that then top electromagnet 33a is exposed to vacuum state, and prevent that therefore electric arc from producing.
Equally, in this exemplary embodiment, top electromagnet 33a is set removably.In other words, electromagnet 33a in top can be attached to the mounting groove H of vacuum chamber 10 and can dismantle from the mounting groove H of vacuum chamber 10.By this kind structure, when top electromagnet 33a et out of order or performance degradation, can advantageously replace easily the top electromagnet 33a outside the vacuum chamber 10.
Fig. 9 is for showing the transparent view of the bottom electromagnet of the device that is used for the transmission substrate of the 3rd exemplary embodiment according to the present invention.
This exemplary embodiment shows except the structure of bottom delivery unit 30b the equal identical structure of structure of the first exemplary embodiment shown in Figure 6 extremely with Fig. 3, therefore, below will only set forth the structure according to the bottom delivery unit 30b of this exemplary embodiment.
As shown in Figure 9, bottom delivery unit 60b does not allow unit 40 to the bottom transmission of drive force of pallet 20 and do not contact relative motion.Specifically, delivery unit 60b in bottom comprises that being arranged at relative motion allows bottom permanent magnet (not shown) in the unit 40 and contiguous described bottom permanent magnet and be arranged at bottom electromagnet 63b in the vacuum chamber 10.Can increase bottom permanent magnet conduct and allow the individual component that unit 40 separates with relative motion, and tray support axle 41 can be formed magnet.In other words, tray support axle 41 is to be made by magnetic material, and as the bottom permanent magnet.Select as another, the bottom permanent magnet can be coupled at the installation direction of tray support axle 41 tray support axle 41.
In this exemplary embodiment, bottom electromagnet 63b is coupled to the inside face of the outer wall of vacuum chamber 10.Bottom electromagnet 63b is arranged between the guide roller 51 separately.Bottom electromagnet 63b is equivalent to stator, and is arranged at relative motion and allows that the bottom permanent magnet in the unit 40 is equivalent to mover.In other words, delivery unit 60b in bottom provides propulsive effort based on Lorentz force and for pallet 20 as above-mentioned top delivery unit 30.
The operation for the device T3 that transmits substrate according to this exemplary embodiment is as follows.Bottom delivery unit 60b is to the bottom transmission of drive force of pallet 20.In other words, top delivery unit 30 is to the top transmission of drive force of pallet 20 and simultaneously to the bottom transmission of drive force of pallet 20, so that pallet 20 can be transmitted more reposefully.Therefore, propulsive effort is to transmit in top and the bottom of pallet 20 simultaneously, so pallet 20 can more easily keep balance based on equilibrium of forces.
Figure 10 is installed on the outer transparent view of vacuum chamber for the bottom electromagnet that shows the device that is used for the transmission substrate of the 4th exemplary embodiment according to the present invention.
This exemplary embodiment shows except the structure of bottom electromagnet 63c and the equal identical structure of the structure of the structure of Fig. 7 and the second exemplary embodiment shown in Figure 8 and the 3rd exemplary embodiment shown in Figure 9, therefore, below will only set forth structure according to the bottom electromagnet 63c of this exemplary embodiment.
In this exemplary embodiment, top delivery unit 30a has the structure identical with the structure of the second exemplary embodiment, and bottom electromagnet 63c is arranged at outside the vacuum chamber 10, and this setting position with the 3rd exemplary embodiment is opposite.
In other words, as shown in figure 10, the outer wall of vacuum chamber 10 is formed with the protrusion that raises up between each guidance unit 50, and the protrusion of vacuum chamber 10 is provided with the mounting groove H from its outside face depression.Bottom electromagnet 63c is embedded in and is installed among the mounting groove H.
In other words, vacuum chamber 10 is formed with and wants to be close to the protrusion 11 that unit 40 is allowed in relative motion between each guide roller 51.The outside face of protrusion 11 is provided with mounting groove H, embeds in mounting groove H and bottom electromagnet 63c is installed, so that bottom electromagnet 63c is arranged at (that is, vacuum chamber 10 is outer) in the atmosphere.Be arranged at the outer bottom electromagnet 63c of vacuum chamber 10 have with above-mentioned the second exemplary embodiment in be arranged at the identical effect of the outer top electromagnet 33a of vacuum chamber 10.
Simultaneously, bottom electromagnet 63c according to this exemplary embodiment removably is set.In other words, bottom electromagnet 63c can be with respect to the mounting groove H dismounting of vacuum chamber 10.By this kind structure, if bottom electromagnet 63c et out of order or performance reduce, then can be easily outer with its replacement at vacuum chamber 10.
Figure 11 is the schematic elevational view of the device that is used for the transmission substrate of the 5th exemplary embodiment according to the present invention, Figure 12 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 11, Figure 13 is the pallet lower tracks of the device that is used for the transmission substrate among Figure 11 and the side-looking enlarged drawing of the contact part between the driving rolls, Figure 14 is the schematic diagram of the operation of rotary magnet that be used for to explain Figure 11, and Figure 15 is the view of the alternate exemplary embodiment of the rotary magnet that is used for explaining Figure 14.
Such as Figure 11 to shown in Figure 15, above the device T5 that is used for transmitting substrate of the 5th exemplary embodiment comprises according to the present invention substrate S is housed and be used for transmitting substrate S pallet 100, be arranged at pallet 100 belows and be used for upper end or the bottom of the delivery unit 200 of delivery tray 100, contiguous pallet 100 and increase/reduce by electromagnetic force pallet 100 transfer rate acceleration/deceleration unit 300 and be arranged at the top of pallet 100 and be used for the guidance unit 400 of guiding pallet 100.
The shape of pallet 100 is as rectangular frame, therefore arranges the fixture unit (not shown) that is used for clamping substrate S along the edge of this rectangular frame so that substrate S can be attached to pallet 100 central part and can be from the central part dismounting of pallet 100.The pallet 100 that substrate S is housed is to transmit with the standing upright state.
In this exemplary embodiment, substrate S can comprise the various substrate S for the manufacture of flat-panel monitor device or similar device and liquid crystal display device.Substrate S can comprise semi-conductive wafer.
With reference to Figure 11 and Figure 12, delivery unit 200 comprises pallet lower tracks 210 and a plurality of driving rolls 220 of the bottom that is coupled to pallet 100, and described a plurality of driving rollss 220 are rotated when being arranged in contact pallet lower tracks 210 below pallet lower tracks 210.
The shape of pallet lower tracks 210 is as cylindrical bar, and it is coupled to bottom and the support tray 100 of pallet 100, so that pallet 100 can contact driving rolls 220 and be transmitted at driving rolls 220.
Simultaneously, as shown in figure 13, high-conductivity metal C is embedded in the pallet lower tracks 210 or in the bottom of pallet 100, thereby increases the intensity of the eddy current that the rotary magnet 310 of the acceleration/deceleration unit 300 of elaboration is induced in pallet lower tracks 210 by institute hereinafter.In this exemplary embodiment, pallet lower tracks 210 comprises corrosion-resistant steel, and high-conductivity metal C comprises copper or aluminium.
Driving rolls 220 is configured to have S. A. and rotates in the direction that transmits substrate, and comprises the groove with certain curvature at its circumferential surface, with the bottom of contact pallet lower tracks 210.Driving rolls 220 with plural form with arranged at certain intervals on the direction of transfer of pallet 100, so that delivery tray 100 stably.Equally, the S. A. of driving rolls 220 can be provided with the roller driving motor 230 for rotary actuation roller 220, and therefore, roller driving motor 230 can produce for the propulsive effort that transmits substrate S.
Next, acceleration/deceleration unit 300 comprises: at least one rotary magnet 310, and the bottom of its contiguous pallet 100 also rotatably is arranged on the direction of transfer of pallet 100; Turning motor 320 is used for rotation rotary magnet 310; And Rotation Controllers 330, for hand of rotation and the speed of control turning motor 320.
The bottom of the contiguous pallets 100 of rotary magnet 310 also rotates up the sender of pallet 100.If rotary magnet 310 rotations then can induce eddy current among the high conductor C in the bottom that is embedded in pallet lower tracks 210 or pallet 100, and therefore generation power are come delivery tray 100.Figure 12 shows that pallet 100 is transmitted by resulting from the eddy current in the pallet lower tracks 210 when rotary magnet 310 rotates therein in a clockwise direction to the right.
On the other hand, when expectation pallet 100 slows down, make rotary magnet 310 with opposite direction rotation, so that pallet 100 can be slowed down by the eddy current of responding in pallet lower tracks 210.
In this exemplary embodiment, the bottom of the contiguous pallets 100 of acceleration/deceleration unit 300 but is not limited in this so that pallet 100 accelerates and slows down.Select as another, the upper end that acceleration/deceleration unit 300 can be close to pallet 100 is accelerated and deceleration pallet 100.
Simultaneously, according to the general permanent magnet of rotary magnet 310 employings of this exemplary embodiment, and has in the heart therein S. A..Therefore, when rotary magnet 310 rotation, can produce eddy current in the lower tracks of pallet 100.Yet the permanent magnet that this kind is general is increasing/is reducing and has large deviation aspect the eddy current that its when rotation responding to, thereby pallet 100 may shake.
With reference to Figure 14, when being positioned at (b) in rotation time, rotary magnet 310 locates and (d) when locating, the eddy current of induction can promptly reduce in pallet lower tracks 210, and locates and (c) when locating, described eddy current can promptly increase when rotary magnet 310 is positioned at (a).Therefore, when making pallet 100 acceleration/deceleration by the rotary magnet 310 with general magnet, pallet 100 may shake.
Therefore, as shown in figure 15, if use and have the round-shaped rotary magnet 310 ' through improvement, and be crisscross arranged along the circumference of rotary magnet 310 at the described N utmost point and the S utmost point of making in round-shaped, then can reduce to result from the deviation of the eddy current in the pallet lower tracks 210, thus shaking of reducing in pallet 100 to produce.
Turning motor 320 is connected to the S. A. of rotary magnet 310, and is provided for rotating the propulsive effort of rotary magnet 310.
Hand of rotation and the speed of Rotation Controllers 330 control turning motors 320, thereby intensity and the direction of the eddy current that capable of regulating induces in pallet lower tracks 210 by rotary magnet 310, and then control is used for making the power of pallet 100 acceleration or decelerations.
Simultaneously, with reference to Figure 11 to Figure 15, guidance unit 400 comprises: pallet upper track 410, and it is configured to ferromagnet and is coupled to the upper end of pallet 100; And magnetic guiding unit 420, it is embedded in pallet upper track 410 wherein and has polarity to produce the magnetic force that is used for promoting in the relative both sides of pallet upper track 410 pallet upper track 410.
Pallet upper track 410 for shape as the ferromagnet of cylindrical bar and be coupled to the upper end of pallet 100.
For this kind structure, as follows for the operation of the device T5 that transmits substrate.
When the pallet 100 of substrate S is equipped with in transmission in process chamber, with standing upright state delivery tray 100, sagging with the central part that prevents substrate S.
Be used for the device T5 of delivery tray 100, guidance unit 400 is arranged on the pallet 100, and guiding pallet 100 falls being transmitted Shi Buhui, and delivery unit 300 is arranged at pallet 100 belows, and in support tray 100 delivery tray 100.
When pallet 100 when quiescence begins or stop when being transmitted, the speed of pallet 100 can promptly increase or reduce, therefore, pallet 100 may can produce particle in the friction that driving rolls 220 slides and produce this moment.
Acceleration/deceleration unit 300 is rotated rotary magnet 310 in the bottom of pallet 100, and therefore produces eddy current in pallet lower tracks 210, so that the eddy current that pallet 100 can pass through to produce is accelerated or slows down.In other words, control intensity and the direction that results from the eddy current in the pallet lower tracks 210 by hand of rotation and the speed of controlling rotary magnets 310 by Rotation Controllers 330, thereby control is used for making the power of pallet 100 acceleration or decelerations.
Therefore, at the device T5 that is used for transmitting substrate according to this exemplary embodiment, be used for increasing and reducing by electromagnetic force the acceleration/deceleration unit 300 contiguous pallets 100 of the transfer rate of pallet 100, thereby can more accurately control the transfer rate of pallet 100.Therefore, can carry out rapidly transmission and arrangement to pallet 100.In addition, increase or reduce the transfer rate of pallet 100 with electromagnetic force, thereby have the foreign matter of preventing produce an effect.
Below, the device T6 that is used for transmitting substrate that sets forth with reference to the accompanying drawings the 6th exemplary embodiment according to the present invention will be with will no longer being given unnecessary details for the identical structure of person described in the device T5 that transmits substrate of the 5th exemplary embodiment according to the present invention.
Figure 16 is the schematic elevational view of the device that is used for the transmission substrate of the 6th exemplary embodiment according to the present invention, and Figure 17 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 16, and Figure 18 is the lateral plan of Figure 17.Herein, in institute's drawings attached of Figure 11 to Figure 18, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.
As shown in the figure, the device T6 that is used for the transmission substrate of the 6th exemplary embodiment comprises acceleration/deceleration unit 300 according to the present invention, and acceleration/deceleration unit 300 comprises: at least one rotary magnet 310, and the bottom of its contiguous pallet 100 also rotatably is arranged on the direction of transfer of pallet 100; Turning motor 320 is used for rotation rotary magnet 310; And Rotation Controllers 330, for hand of rotation and the speed of control turning motor 320.Particularly, contiguous pallet 100 also can rotate up the sender of pallet 100 rotary magnet 310 at the cross side place of the bottom of pallet 100.
In other words, if be difficult to as the 5th exemplary embodiment, will speed up/deceleration unit places the bottom of pallet 100, the cross side of contiguous pallet 100 and place acceleration/deceleration unit and rotary magnet 310 is rotated at cross side as this embodiment then, thus the acceleration/deceleration effect identical with the acceleration/deceleration effect of the 5th exemplary embodiment had.Therefore, can effectively utilize the space and be convenient to designs.
Below, set forth with reference to the accompanying drawings the device T7 that is used for transmitting substrate of the 7th exemplary embodiment according to the present invention, with will no longer being given unnecessary details for the identical structure of person described in the device T5 that transmits substrate and the T6 of the 5th and the 6th exemplary embodiment according to the present invention.
Figure 19 is the schematic elevational view of the device that is used for the transmission substrate of the 7th exemplary embodiment according to the present invention, and Figure 20 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 19.Herein, in institute's drawings attached of Figure 11 to Figure 20, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.
The device T7 that is used for the transmission substrate of the 7th exemplary embodiment comprises according to the present invention: pallet 100, and the above is equipped with substrate S and is used for transmitting substrate S; Delivery unit 200 is arranged at pallet 100 belows and is used for delivery tray 100; Acceleration/deceleration unit 500, upper end or the bottom of contiguous pallet 100 also increases/reduces the transfer rate of pallet 100 by electromagnetic force; And guidance unit 400, be arranged in the top of pallet 100 and be used for guiding pallet 100.
According to the 7th exemplary embodiment of the present invention, acceleration/deceleration unit 500 comprises: at least one motion magnet 510, the bottom of its contiguous pallet 100 and be arranged near or away from pallet 100; Actuator 520, be used for actuation movement magnet 510 near or away from pallet 100; And driving governor, be used for driving the operation of actuator 520.
The bottom of the contiguous pallets 100 of motion magnet 510 is also driven by actuator 520, with near or move away from the direction of pallet lower tracks 210.
When motion magnet 510 moves towards pallet lower tracks 210, can produce eddy current in the pallet lower tracks 210, and therefore produce braking force.On the contrary, when motion magnet 510 when moving away from the direction of pallet lower tracks 210, can be not restricted power limit ground delivery tray 100.
When replacing friction that pallet 100 is stopped with eddy current, have and prevent from when pallet 100 stops, sliding and the effect of generation foreign matter.
As the 5th exemplary embodiment, high-conductivity metal C is embedded in the pallet lower tracks 210 and can increases the intensity of the eddy current of responding in the pallet lower tracks 210.
In this exemplary embodiment, the bottom of motion magnet 510 contiguous pallets 100.Yet, motion magnet 510 can optionally be close to pallet 100 the upper end and near or away from pallet 100, thereby have effect same as described above.
Below, set forth with reference to the accompanying drawings the device T8 that is used for transmitting substrate of the 8th exemplary embodiment according to the present invention, with will no longer being given unnecessary details for the identical structure of person described in the device T5, the T6 that transmit substrate and the T7 of the 5th to the 7th exemplary embodiment according to the present invention.
Figure 21 is the schematic side elevation of the device that is used for the transmission substrate of the 8th exemplary embodiment according to the present invention, and Figure 22 is the view for the operation of the device that is used for the transmission substrate of explaining Figure 21.Herein, in institute's drawings attached of Figure 11 to Figure 21, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.
With reference to Figure 21 and Figure 22, at the device T8 that be used for to transmit substrate according to the 8th exemplary embodiment, acceleration/deceleration unit 500 comprises: at least one motion magnet 510, the bottom of its contiguous pallet 100 and be arranged near or away from pallet 100; Actuator 520, be used for actuation movement magnet 510 near or away from pallet 100; And driving governor, be used for driving the operation of actuator 520.Particularly, the contiguous pallet 100 in the cross side place of motion magnet 510 in the bottom of pallet 100 and be arranged near or away from pallet 100.
In other words, if be difficult to as the 7th exemplary embodiment, will speed up/deceleration unit places the bottom of pallet 100, then as this exemplary embodiment, will speed up/cross side of the contiguous pallet 100 of deceleration unit places, and make motion magnet 510 motion with at the cross side place near or away from pallet, thereby have the acceleration/deceleration effect identical with the acceleration/deceleration effect of the 7th exemplary embodiment.Therefore, can effectively utilize the space and be convenient to designs.
Below, set forth with reference to the accompanying drawings the device T9 that is used for transmitting substrate of according to the present invention the 9th exemplary embodiment, with the 5th to the 8th exemplary embodiment of the concept according to the present invention be used for transmit the structure that the person is identical described in device T5, T6, T7 and the T8 of substrate and will no longer be given unnecessary details.
Figure 23 is the schematic elevational view of the device that be used for to transmit substrate of the 9th exemplary embodiment according to the present invention, and Figure 24 is for being used for explaining the view of operation of acceleration/deceleration unit of device that is used for transmitting substrate of Figure 23.Herein, in institute's drawings attached of Figure 11 to Figure 21, the identical identical element of Ref. No. indication, and optionally the repetitive description thereof will be omitted.
With reference to Figure 23 and Figure 24, comprise according to the device T9 that be used for to transmit substrate of the 9th exemplary embodiment: pallet 100, the above is equipped with substrate S and is used for transmitting substrate S; Delivery unit 200 is arranged at pallet 100 belows and is used for delivery tray 100; Acceleration/deceleration unit 600, the transfer rate that it is close to upper end or the bottom of pallet 100 and increases/reduce pallet 100 by electromagnetic force; And guidance unit 400, be arranged in the top of pallet 100 and be used for guiding pallet 100.
Acceleration/deceleration unit 600 according to the 9th exemplary embodiment comprises: a plurality of static magnet 610, and it is arranged in the bottom of pallet 100 with specific interval; Electromagnet module 620, it is close to static magnet 610 and produces magnetic force to increase/to reduce the transfer rate of pallet 100 with arranged at certain intervals and by the interaction with static magnet 610; And module controller, be used for controlling the supply of the electric current that is applied to electromagnetic module 620 optionally to change the N/S polarity of electromagnetic module 620.
Static magnet 610 with arranged at certain intervals in pallet lower tracks 210 and make the N utmost point and S extremely interlaced.Static magnet 610 is not attaching dividually, but is set to one with the bottom of pallet lower tracks 210 or pallet 100.
Electromagnet module 620 is with arranged at certain intervals and contiguous static magnet 610, and and static magnet 610 between leave predetermined space.The connecting panel 622 that is wound with a plurality of iron cores 621 of coil above electromagnet module 620 comprises and is used for described a plurality of iron cores 621 are linked into an integrated entity.
When electric current flowed in coil, iron core 621 was magnetized and has magnetic pole, and connecting panel 622 links into an integrated entity described a plurality of iron cores 621 and it is supported still.
If the electric current that flows in coil changes direction, then the polarity of iron core 621 also can change.Size and the direction of the electric current that herein, flows in coil are controlled by module controller.In other words, module controller is controlled at size and the direction of the moving electric current of coil midstream, thereby optionally changes polarity and the magnetic force of iron core 621.
With reference to Figure 24, in the bottom of pallet 100 and make the N utmost point and S extremely interlaced, and electromagnet module 620 is arranged in static magnet 610 belows to static magnet 610 with arranged at certain intervals, and and static magnet 610 between leave predetermined space.The iron core 621 of electromagnet module 620 is arranged with specific interval, and described interval is different from the arrangement pitch of static magnet 610.For example, three iron cores 621 are arranged with the interval that wherein is arranged with four static magnet 610.Select as another, even number iron core 621 is arranged with the interval that wherein is arranged with the static magnet 610 of odd number.
The iron core of electromagnet module 620 is sequentially magnetized, so that pallet 100 accelerates and slows down, elaborates it hereinafter with reference to Figure 24.
As among Figure 24 1. shown in, (a) be magnetized to N polarity and (c) be magnetized to S polarity, produce thus the power that attracts static magnet 610, thereby pallet 100 stopped.Next, shown in 2., (b) be magnetized to N polarity and (d) be magnetized to S polarity, in the polarity identical with the polarity of static magnet 610, produce repulsive force thus, and in the polarity different from the polarity of static magnet 610, produce attractive force, thereby pallet 100 is moved right, shown in 3..
Subsequently, as Figure 24 4. shown in, (a) be magnetized to S polarity and (c) be magnetized to N polarity, identical polarity is repelled mutually and different polarity attracts each other, thereby is continued to make pallet 100 motions, shown in 5..
As mentioned above, if the polarity of the iron core 621 of electromagnet module 620 every predetermined time section change continuously, then pallet 100 travels forward.On the contrary, the polarity of iron core 621 is magnetized on the contrary, and pallet 100 moves backward.In other words, for proal pallet 100, pallet 100 is slowed down.
Therefore, the device that is used for transmitting substrate in the exemplary embodiment according to the present invention, can pallet 100 be accelerated and deceleration by non-contact method, thereby can prevent that foreign matter from producing, and can prevent slip between driving rolls 220 and the pallet lower tracks 210, and then carry out quickly acceleration/deceleration and be beneficial to transmission and arrangement to pallet 100.
Although show particularly and set forth concept of the present invention with reference to each exemplary embodiment of the present invention, However, it should be understood that and under the condition of the spirit that does not break away from the claims of enclosing and scope, to make various changes to it in form and details.
Claims (27)
1. device that be used for to transmit substrate, described device comprises:
Vacuum chamber;
Pallet is used for transmitting described substrate at described vacuum chamber;
The top delivery unit is used for not contacting to the top transmission of drive force of described pallet the upper end of described pallet;
The unit is allowed in relative motion, and the bottom that is coupled to described pallet also can be with respect to described tray motion; And
A plurality of guidance units are used for contacting the motion that described relative motion is allowed the unit and guided described pallet.
2. device as claimed in claim 1 is characterized in that, described relative motion allows that the unit comprises rotating body, and described rotating body is coupled to described pallet with the relative rotation.
3. device as claimed in claim 2 is characterized in that, described rotating body comprises:
The tray support axle is coupled to the described bottom of described pallet;
Swivelling pipe is used for therein accommodating described tray support axle, and has and the contacted outside face of described guidance unit; And
Bearing has the inner periphery that is coupled to described tray support axle and the excircle that is coupled to described swivelling pipe.
4. device as claimed in claim 3 is characterized in that, described guidance unit comprises guide roller, and described guide roller has guiding surface, and described guiding surface has curvature, and the diameter of described curvature is along with near the center of described guiding surface and reduce, and
The curvature of described swivelling pipe is less than the described curvature of the described guiding surface of described guide roller.
5. device as claimed in claim 1 is characterized in that, described guidance unit comprises guide roller, and described guide roller has guiding surface, and described guiding surface has curvature, and the diameter of described curvature is along with near the center of described guiding surface and reduce.
6. device as claimed in claim 1 is characterized in that, described top delivery unit comprises:
The top permanent magnet is arranged on the described upper end of described pallet; And
The top electromagnet, contiguous described top permanent magnet and being arranged in the described vacuum chamber.
7. device as claimed in claim 1 is characterized in that, described top delivery unit comprises:
The top permanent magnet is arranged on the described upper end of described pallet; And
The top electromagnet, contiguous described top permanent magnet and being arranged at outside the described vacuum chamber.
8. device as claimed in claim 7 is characterized in that, also comprises mounting groove, the outside face depression of described mounting groove on the outer wall of described vacuum chamber, and the described upper end of the contiguous described pallet of described vacuum chamber,
Described top electromagnet is embedded into and is installed in the described mounting groove.
9. device as claimed in claim 8 is characterized in that, described top electromagnet is removably installed in the described mounting groove.
10. device as claimed in claim 1 is characterized in that, also comprises the bottom delivery unit, is used for not contacting described relative motion to the bottom transmission of drive force of described pallet and allows the unit.
11. device as claimed in claim 10 is characterized in that, described bottom delivery unit comprises:
The bottom permanent magnet is arranged at described relative motion and allows in the unit; And
The bottom electromagnet, contiguous described bottom permanent magnet and being arranged in the described vacuum chamber.
12. device as claimed in claim 10 is characterized in that, described bottom delivery unit comprises:
The bottom permanent magnet is arranged at described relative motion and allows in the unit; And
The bottom electromagnet, contiguous described bottom permanent magnet and being arranged at outside the described vacuum chamber.
13. device as claimed in claim 12, it is characterized in that, the outer wall of described vacuum chamber is formed with the protrusion that raises up between each described guidance unit, the described protrusion of described vacuum chamber is provided with the mounting groove from the outside face depression of described protrusion, and
Described bottom electromagnet is embedded into and is installed in the described mounting groove.
14. device as claimed in claim 13 is characterized in that, described bottom electromagnet is removably installed in the described mounting groove.
15. a device that is used for transmitting substrate, described device comprises:
Pallet is equipped with described substrate and is used for transmitting described substrate;
Delivery unit is arranged in the bottom of described pallet and is used for transmitting described pallet; And
Acceleration/deceleration unit is close to upper end or the bottom of described pallet, and increases or reduce the transfer rate of described pallet by electromagnetic force.
16. device as claimed in claim 15 is characterized in that, also comprises guidance unit, is arranged in the top of described pallet and is used for guiding described pallet.
17. device as claimed in claim 15 is characterized in that, described acceleration/deceleration unit comprises:
At least one rotary magnet, described upper end or the described bottom of contiguous described pallet, and rotatably be arranged on the direction of transfer of described pallet;
Turning motor is used for rotating described rotary magnet; And
Rotation Controllers is for hand of rotation and the speed of controlling described turning motor.
18. device as claimed in claim 17 is characterized in that, the cross side place of described rotary magnet in the described bottom of described pallet is close to described pallet and rotates in the direction that transmits described pallet.
19. device as claimed in claim 17 is characterized in that, described rotary magnet has round-shaped, and wherein the N utmost point and the S utmost point are crisscross arranged along the described circumference of described rotary magnet.
20. device as claimed in claim 15 is characterized in that, described acceleration/deceleration unit comprises:
At least one motion magnet, described upper end or the described bottom of contiguous described pallet and be arranged near or away from described pallet;
Actuator, be used for driving described motion magnet near or away from described pallet; And
Driving governor is used for controlling the operation of described actuator.
21. device as claimed in claim 20 is characterized in that, the contiguous described pallet in the cross side place of described motion magnet in the described bottom of described pallet and be arranged near or away from described pallet.
22. device as claimed in claim 15 is characterized in that, described acceleration/deceleration unit comprises:
A plurality of static magnet are arranged at specific interval in the described bottom of described pallet;
Electromagnet module, contiguous described static magnet and with arranged at certain intervals, and produce magnetic force to increase/to reduce the transfer rate of described pallet by the interaction with described static magnet; And
Module controller, control is applied to the supply of the electric current of described electromagnetic module, and optionally changes the N/S polarity of described electromagnetic module.
23. device as claimed in claim 22 is characterized in that, described electromagnet module comprises:
A plurality of iron cores, contiguous described static magnet and and described static magnet between leave predetermined space, and be wound with coil at described iron core; And
Connecting panel is used for described a plurality of iron cores are linked into an integrated entity.
24. device as claimed in claim 23 is characterized in that, described a plurality of iron cores are arranged with specific interval, and described interval is different from the arrangement pitch of described static magnet.
25. device as claimed in claim 15 is characterized in that, described delivery unit comprises:
The pallet lower tracks is coupled to the described bottom of described pallet; And
A plurality of driving rollss are arranged in contact and are rotated in the described pallet lower tracks in the bottom of described pallet lower tracks.
26. device as claimed in claim 25 is characterized in that, the described bottom of described pallet lower tracks or described pallet comprises the high-conductivity metal that is embedded in wherein.
27. device as claimed in claim 16 is characterized in that, described guidance unit comprises:
The pallet upper track is configured to ferromagnet and is coupled to the described upper end of described pallet; And
The magnetic guiding unit is embedded in described pallet upper track wherein and has polarity, to produce the magnetic force that is used for promoting in the relative both sides of described pallet upper track described pallet upper track.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2011-0065153 | 2011-06-30 | ||
| KR1020110065153A KR101310762B1 (en) | 2011-06-30 | 2011-06-30 | Apparatus for transferring substrates |
| KR1020110069438A KR101318173B1 (en) | 2011-07-13 | 2011-07-13 | Apparatus for transferring substrates |
| KR10-2011-0069438 | 2011-07-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102849462A true CN102849462A (en) | 2013-01-02 |
| CN102849462B CN102849462B (en) | 2015-04-15 |
Family
ID=47396526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210224161.XA Expired - Fee Related CN102849462B (en) | 2011-06-30 | 2012-06-29 | Device used for conveying substrate |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102849462B (en) |
| TW (1) | TWI476139B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103935709A (en) * | 2013-01-18 | 2014-07-23 | 赐福科技股份有限公司 | Carrying device |
| CN105264160A (en) * | 2014-01-27 | 2016-01-20 | 李赛克奥地利有限公司 | Method for conveying insulation glass blanks |
| CN106044243A (en) * | 2016-07-08 | 2016-10-26 | 佛山格尼斯磁悬浮技术有限公司 | Panel vertical conveying device |
| CN109019023A (en) * | 2018-06-29 | 2018-12-18 | 深圳市华星光电半导体显示技术有限公司 | Base plate transfer device and system |
| CN109422079A (en) * | 2017-08-28 | 2019-03-05 | 台达电子工业股份有限公司 | Transportation system |
| CN109863638A (en) * | 2017-07-11 | 2019-06-07 | 株式会社Lg化学 | Fixation device for secondary cell test |
| CN112309929A (en) * | 2019-07-29 | 2021-02-02 | Bns株式会社 | Roller unit having traveling and guiding functions and pallet transfer system using the same |
| CN112452776A (en) * | 2020-11-16 | 2021-03-09 | 史洪扬 | Commodity circulation sorting machine permanent magnetism crawler-type bottom surface drive mechanism and commodity circulation sorting machine |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113330584B (en) * | 2019-01-24 | 2024-04-23 | 株式会社钟化 | Substrate tray for solar cell production and method for producing solar cell |
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| JPH10120171A (en) * | 1996-10-15 | 1998-05-12 | Balzers Ag | Device for conveying base plate in vacuum treatment system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103935709A (en) * | 2013-01-18 | 2014-07-23 | 赐福科技股份有限公司 | Carrying device |
| CN105264160A (en) * | 2014-01-27 | 2016-01-20 | 李赛克奥地利有限公司 | Method for conveying insulation glass blanks |
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| CN106044243B (en) * | 2016-07-08 | 2019-06-04 | 佛山格尼斯磁悬浮技术有限公司 | Panel vertical conveyor |
| CN109863638A (en) * | 2017-07-11 | 2019-06-07 | 株式会社Lg化学 | Fixation device for secondary cell test |
| CN109863638B (en) * | 2017-07-11 | 2022-03-04 | 株式会社Lg化学 | Fixing device for secondary battery test |
| CN109422079A (en) * | 2017-08-28 | 2019-03-05 | 台达电子工业股份有限公司 | Transportation system |
| CN109019023A (en) * | 2018-06-29 | 2018-12-18 | 深圳市华星光电半导体显示技术有限公司 | Base plate transfer device and system |
| CN112309929A (en) * | 2019-07-29 | 2021-02-02 | Bns株式会社 | Roller unit having traveling and guiding functions and pallet transfer system using the same |
| CN112309929B (en) * | 2019-07-29 | 2024-02-20 | Bns株式会社 | Roller unit having traveling and guiding functions and pallet transfer system using the same |
| CN112452776A (en) * | 2020-11-16 | 2021-03-09 | 史洪扬 | Commodity circulation sorting machine permanent magnetism crawler-type bottom surface drive mechanism and commodity circulation sorting machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102849462B (en) | 2015-04-15 |
| TWI476139B (en) | 2015-03-11 |
| TW201300303A (en) | 2013-01-01 |
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