CN207193387U - A kind of base plate transmission device and magnetron sputtering apparatus - Google Patents
A kind of base plate transmission device and magnetron sputtering apparatus Download PDFInfo
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- CN207193387U CN207193387U CN201721235059.4U CN201721235059U CN207193387U CN 207193387 U CN207193387 U CN 207193387U CN 201721235059 U CN201721235059 U CN 201721235059U CN 207193387 U CN207193387 U CN 207193387U
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- magnet
- guide rail
- loading frame
- base plate
- transmission device
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Abstract
The utility model discloses a kind of base plate transmission device and magnetron sputtering apparatus, is related to magnetron sputtering technique field, substrate yield is influenceed on substrate invents to solve the problems, such as that molecule caused by roller friction can adsorb in the prior art.A kind of base plate transmission device of the utility model, including the loading frame, pedestal and magnetic levitation system for bearing substrate, guide rail is provided with the pedestal, the magnetic levitation system includes the first magnet assembly for being arranged on the loading frame and the second magnet assembly being arranged in the guide rail, and the magnetic field interaction of the magnetic field of first magnet assembly and second magnet assembly is so that the loading frame suspends and moved along the guide rail.Base plate transmission device of the present utility model is used for board transport to setting position.
Description
Technical field
Magnetron sputtering technique field is the utility model is related to, more particularly to a kind of base plate transmission device and magnetron sputtering are set
It is standby.
Background technology
Display panel production process, it is necessary to using plurality of devices, such as magnetron sputtering apparatus, pass through magnetron sputtering mode
Various metal films, deielectric-coating, semiconductor film, thin magnetic film etc. are prepared on substrate (such as glass substrate).
Fig. 1~3 are the structural representation of glass substrate conveying device in prior art magnetron sputtering apparatus, including loading frame
01 and the roll wheel assembly 02 of the lower section of loading frame 01 is arranged on, glass substrate 010, the bottom of loading frame 01 are equiped with the loading frame 01
Slide rail 011 can coordinate with roll wheel assembly 02, by roll wheel assembly 02 roller rolling drive loading frame 01 move.
Because the relative movement of roll wheel assembly 02 and slide rail 011 is realized by rolling friction, in motion process, can rub
Wipe and produce small particle (such as roll wheel assembly 02 and slide rail 011 are stainless steel, and friction produces metallic particles), molecule is inhaled
It is attached on the glass substrate, so as to reduce the yield of the thin film transistor (TFT) array on glass substrate.
Utility model content
Embodiment of the present utility model provides a kind of base plate transmission device and magnetron sputtering apparatus, can solve in the prior art
Molecule caused by roller friction can be adsorbed substrate yield is influenceed on substrate the problem of.
To reach above-mentioned purpose, embodiment of the present utility model adopts the following technical scheme that：
A kind of base plate transmission device, including loading frame, pedestal and magnetic levitation system for bearing substrate, in the pedestal
Provided with guide rail, the magnetic levitation system includes the first magnet assembly being arranged on the loading frame and is arranged in the guide rail
The second magnet assembly, the magnetic field interaction of the magnetic field of first magnet assembly and second magnet assembly is so that described
Loading frame suspends and moved along the guide rail.
The utility model embodiment also discloses a kind of magnetron sputtering apparatus, including the substrate biography described in above-mentioned technical proposal
Defeated device.
The utility model embodiment provide base plate transmission device and magnetron sputtering apparatus, including can bearing substrate loading
Frame, pedestal and magnetic levitation system, because the first magnet assembly in magnetic levitation system is arranged on loading frame, the second magnetic group
Part is arranged in guide rail, passes through the magnetic field interaction between the first magnet assembly and the second magnet assembly, you can make loading frame
Suspend and moved along guide rail.Because during aforesaid substrate is transmitted, loading frame is not in contact with pedestal, no mechanical friction, nothing
Contact wear, it can avoid producing the problem of molecule influences thin film transistor (TFT) array in board transport process, so as to improve base
The yield of plate.
Brief description of the drawings
, below will be to embodiment in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, drawings in the following description are only
It is some embodiments of the utility model, for those of ordinary skill in the art, is not paying the premise of creative work
Under, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is one of structural representation of glass substrate conveying device in magnetron sputtering apparatus in the prior art；
Fig. 2 is two of the structural representation of glass substrate conveying device in magnetron sputtering apparatus in the prior art；
Fig. 3 is three of the structural representation of glass substrate conveying device in magnetron sputtering apparatus in the prior art；
Fig. 4 is the structural representation of the utility model embodiment base plate transmission device；
Fig. 5 is one of structural representation of pedestal in the utility model embodiment base plate transmission device；
Fig. 6 is two of the structural representation of pedestal in the utility model embodiment base plate transmission device；
Fig. 7 is the structural representation that magnetic part is arranged on loading frame bottom in the utility model embodiment base plate transmission device
Figure；
Fig. 8 is the structural representation that magnetic part is arranged on loading frame both sides in the utility model embodiment base plate transmission device
Figure；
Fig. 9 is the structure that driving guiding electromagnet is arranged on guide rail both sides in the utility model embodiment base plate transmission device
One of schematic diagram；
Figure 10 is the knot that driving guiding electromagnet is arranged on guide rail both sides in the utility model embodiment base plate transmission device
The two of structure schematic diagram.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
In description of the present utility model, it is to be understood that term " " center ", " on ", " under ", "front", "rear",
The orientation or position relationship of the instruction such as "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " is based on accompanying drawing institutes
The orientation or position relationship shown, it is for only for ease of description the utility model and simplifies description, rather than indicates or imply and be signified
Device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this practicality
New limitation.
Reference picture 4~6, the base plate transmission device of the utility model embodiment, including loading frame 1, pedestal 2 and magnetic suspension dress
Put 3, wherein, loading frame 1 is used for bearing substrate, is provided with guide rail 21 in pedestal 2, magnetic levitation system 3 include the first magnet assembly with
Second magnet assembly, the first magnet assembly are arranged on loading frame 1, and the second magnet assembly is arranged in guide rail 21, the first magnetic
The magnetic field interaction of the magnetic field of component and the second magnet assembly is so that loading frame 1 suspends and moved along guide rail 21.
The base plate transmission device that the utility model embodiment provides, including can the loading frame 1 of bearing substrate, pedestal 2 and
Magnetic levitation system 3, because the first magnet assembly in magnetic levitation system 3 is arranged on loading frame 1, the second magnet assembly is arranged on
In guide rail 21, pass through the magnetic field interaction between the first magnet assembly and the second magnet assembly, you can make loading frame 1 suspend and
Moved along guide rail 21.Because during aforesaid substrate is transmitted, loading frame 1 is not in contact with pedestal 2, no mechanical friction, nothing connects
Touch abrasion, can avoid producing molecule in glass substrate transmitting procedure and the problem of influence thin film transistor (TFT) array, so as to carry
The yield of high substrate.
The structure of above-mentioned loading frame 1 is varied, the utility model embodiment by loading frame 1 be glass loading frame exemplified by,
Including the loading frame 11 for fixed substrate, the lower end of loading frame 11 is provided with multiple support columns 12, in addition to above-mentioned guide rail
The adaptable slide rail 13 of 21 shape sizes, support column 12 are fixed on slide rail 13 vertically, as shown in Figure 4.
Alternatively, the first magnet assembly includes the magnetic part 31 for being arranged on the bottom of loading frame 1, and the second magnet assembly includes more
Individual magnet unit 32, bearing of trend distribution of multiple magnet units 32 along guide rail 21.The magnet unit 32 includes support magnet 321
With driving guidance magnets 322, magnetic force can be produced to support loading frame 1 to be suspended in guide rail between magnet 321 and magnetic part 31 by supporting
On 21.Certainly, above-mentioned support magnet 321 and driving guidance magnets 322 can also use same magnet, and its control is more complicated.
Magnetic force between support magnet 321 and magnetic part 31 can be to attract each other, be mutually exclusive or attract each other and mutually
Repel, the upper edge that will such as support magnet 321 to be arranged on the both sides of guide rail 21, magnetic part 31 is also respectively the two of the bottom of loading frame 1
Side, if support magnet 321 is transversely mounted, magnetic pole of the support magnet 321 away from the inwall of guide rail 21 is with magnetic part 31 close to outside
Pole polarity on the contrary, both attract each other；And for example support magnet 321 is arranged on the bottom of guide rail 21, and magnetic part 31 is arranged on
The bottom of loading frame 1, magnet 321 and the pole polarity close to each other of magnetic part 31 are supported on the contrary, both are mutually exclusive, such as Fig. 7
It is shown；If supporting magnet 321 vertically-mounted, pole polarity of the support magnet 321 close to the upper edge of guide rail 21 is leaned on magnetic part 31
The pole polarity in nearly outside is on the contrary, the magnetic polarity away from upper edge is identical with pole polarity of the magnetic part 31 close to outside, and two
Both attractive and repulsive force between person, as shown in Figure 8；Scheme that certain attraction and repulsive force combine or in guide rail
21 bottom and top are respectively provided with the design of support magnet 321.
Alternatively, above-mentioned magnetic part 31 can be the rotor of linear electric motors, and driving guidance magnets 322 are determined for linear electric motors
Son.
Alternatively, magnetic part 31 can use the permanent magnet of bar shaped, support magnet 321 and/or driving guidance magnets 322 as electricity
Magnet.The utility model embodiment also includes controller (not shown), and controller is led with support magnet 321 and/or driving
Electrically connected to magnet 322, with control support magnet 321 and/or the magnetic force of driving guidance magnets 322.Even support magnet 321 be
Electromagnet, controller electrically connect with support magnet 321；If driving guidance magnets 322 are electromagnet, controller is oriented to magnetic with driving
Iron 322 electrically connects；If support magnet 321 and driving guidance magnets 322 are electromagnet, controller is respectively with supporting magnet 321
Electrically connected with driving guidance magnets 322.
After supporting magnet 321 to be powered, current strength is adjusted, so that support magnet 321 produces enough electricity with magnetic part 31
Magnetic force floats loading frame 1.Reference picture 9~10, the operation principle that driving guidance magnets 322 drive loading frame 1 to move are：Control
Device control is along the driving guidance magnets 322 in the direction of motion of loading frame 1, a magnet unit before loading frame 1 with filling
Driving guidance magnets 322 and dress in the opposite polarity of magnetic part 31 of carrier 1, a magnet unit after loading frame 1
The polarity of magnetic part 31 of carrier 1 is identical (arrow show the direction of motion of loading frame in Figure 10).
In addition, above-mentioned magnet unit 32 also includes sensor 323, sensor 323 is used for the suspension position for detecting loading frame 1
Put, and be electrically connected with the controller.The positional information of the carrier member detected is fed back to controller, controller pair by sensor 323
Than the input current that support magnet 321 and/or driving guidance magnets 322 are adjusted or kept behind setting position, to correct loading frame 1
Position.
Alternatively, above-mentioned sensor 323 can be horizontal displacement sensors 3231, vertical displacement sensor 3232, or wrap
Include horizontal displacement sensors 3231 and vertical displacement sensor 3232.Sensor 323 includes level in the utility model embodiment
Displacement transducer 3231 and vertical displacement sensor 3232, wherein, horizontal displacement sensors 3231 are arranged on the top of guide rail 21
Edge, for detecting the horizontal level of loading frame 1, vertical displacement sensor 3232 is arranged on the bottom of guide rail 21, is filled for detecting
The vertical position of carrier 1, loading frame 1 can be made all the time with leading by horizontal displacement sensors 3231 and vertical displacement sensor 3232
Rail 21 keeps certain intermittent motion.
When loading frame 1 reaches setting position, fallen under loading frame 1 on guide rail 21.To be hit when avoiding loading frame 1 from falling
Support magnet 321 on guide rail 21 or the driving grade component of guidance magnets 322, magnet unit also includes in the utility model embodiment
Support member 324, when loading frame 1 is out of service, support member 324 is used to support loading frame 1, and ensures to prepare film layer on substrate
During, substrate will not shift.
Alternatively, support member 324 is mechanical support bar, and the height of mechanical support bar is more than the height of support magnet 321, and
Less than the height and loading suspension air gap sum of support magnet 321；Or support member 324 is Pneumatic extension bar, filled when needing to support
During carrier 1, Pneumatic extension bar is extended to support loading frame 1.Usual suspension air gap is smaller, causes mechanical support bar and suspended state
In the spacing pin of loading frame 1 it is smaller, loading frame 1 somewhat teetertotters, and easily hits mechanical support bar and produces friction skid.Cause
This, it is preferable that support member 324 uses Pneumatic extension bar in the utility model embodiment.
Alternatively, the section of guide rail 21 can be square or circular arc, and the guide rail 21 used in the utility model embodiment is cut
Face is circular arc, and in a magnet unit 32, driving guidance magnets 322 are two, and are separately positioned on the both sides of guide rail 21
Edge, support magnet 321 are single, and are evenly distributed between driving guidance magnets 322, support one in magnet 321
Positioned at the bottom of guide rail 21.
The utility model embodiment also discloses a kind of magnetron sputtering apparatus, including above-mentioned all base plate transmission devices.
Because the substrate provided in the base plate transmission device and the various embodiments described above installed in the magnetron sputtering apparatus of the present embodiment passes
Defeated apparatus structure is identical, therefore the two can solve the problem that identical technical problem, and reaches identical Expected Results.
It is described above, only specific embodiment of the present utility model, but the scope of protection of the utility model is not limited to
In this, any one skilled in the art can readily occur in change in the technical scope that the utility model discloses
Or replace, it should all cover within the scope of protection of the utility model.Therefore, the scope of protection of the utility model should be with the power
The protection domain that profit requires is defined.
Claims (10)
- A kind of 1. base plate transmission device, it is characterised in that including the loading frame, pedestal and magnetic levitation system for bearing substrate, Guide rail is provided with the pedestal, the magnetic levitation system includes the first magnet assembly being arranged on the loading frame and is arranged on The magnetic field phase interaction of the second magnet assembly in the guide rail, the magnetic field of first magnet assembly and second magnet assembly To make the loading frame suspend and be moved along the guide rail.
- 2. base plate transmission device according to claim 1, it is characterised in that first magnet assembly includes being arranged on institute The magnetic part of loading frame bottom is stated, second magnet assembly includes multiple magnetic lists being distributed along the guide rail bearing of trend Member, the magnet unit include support magnet and driving guidance magnets, can produced between the support magnet and the magnetic part Magnetic force be used for support the loading frame to be suspended in the guide rail；It can be produced between the driving guidance magnets and the magnetic part Raw magnetic force is used to drive the loading frame to move along the guide rail.
- 3. base plate transmission device according to claim 2, it is characterised in that the magnetic part is the rotor of linear electric motors, The driving guidance magnets are the stator of linear electric motors.
- 4. base plate transmission device according to claim 2, it is characterised in that the support magnet and/or the driving are led It is electromagnet to magnet, the magnetic levitation system also includes controller, the controller and the support magnet and/or the drive Action-oriented magnet electrically connects.
- 5. base plate transmission device according to claim 4, it is characterised in that the magnet unit also includes and the control The sensor of device electrical connection, the sensor are used for the levitation position for detecting the loading frame, and the controller can be according to described The positional information adjustment input support magnet of sensor feedback and/or the electric current of the driving guidance magnets.
- 6. base plate transmission device according to claim 5, it is characterised in that the sensor includes horizontal displacement sensors And/or vertical displacement sensor, the horizontal displacement sensors are arranged at the upper edge of the guide rail, for detecting the loading The horizontal level of frame；The vertical displacement sensor is arranged at the bottom of the guide rail, for detecting the vertical of the loading frame Position.
- 7. base plate transmission device according to claim 2, it is characterised in that the magnet unit also includes support member, institute Support member is stated to be used to support the loading frame.
- 8. base plate transmission device according to claim 7, it is characterised in that the support member is Pneumatic extension bar.
- 9. base plate transmission device according to claim 2, it is characterised in that the section of the guide rail is circular arc, one In the individual magnet unit, the driving guidance magnets are two, and are separately positioned on the both sides edge of the guide rail, described It is three to support magnet, and is evenly distributed between the driving guidance magnets, is led in the support magnet positioned at described for one The bottom of rail.
- 10. a kind of magnetron sputtering apparatus, it is characterised in that filled including board transport according to any one of claims 1 to 9 Put.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721235059.4U CN207193387U (en) | 2017-09-25 | 2017-09-25 | A kind of base plate transmission device and magnetron sputtering apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721235059.4U CN207193387U (en) | 2017-09-25 | 2017-09-25 | A kind of base plate transmission device and magnetron sputtering apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207193387U true CN207193387U (en) | 2018-04-06 |
Family
ID=61787139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721235059.4U Active CN207193387U (en) | 2017-09-25 | 2017-09-25 | A kind of base plate transmission device and magnetron sputtering apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207193387U (en) |
-
2017
- 2017-09-25 CN CN201721235059.4U patent/CN207193387U/en active Active
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