KR101945789B1 - 전동 액추에이터 - Google Patents

전동 액추에이터 Download PDF

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Publication number
KR101945789B1
KR101945789B1 KR1020120147330A KR20120147330A KR101945789B1 KR 101945789 B1 KR101945789 B1 KR 101945789B1 KR 1020120147330 A KR1020120147330 A KR 1020120147330A KR 20120147330 A KR20120147330 A KR 20120147330A KR 101945789 B1 KR101945789 B1 KR 101945789B1
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KR
South Korea
Prior art keywords
negative pressure
pressure supply
axial direction
suction holes
dust
Prior art date
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Active
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KR1020120147330A
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English (en)
Korean (ko)
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KR20130082434A (ko
Inventor
요시히로 후카노
쇼이치 마카도
히로유키 시오미
Original Assignee
에스엠시 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of KR20130082434A publication Critical patent/KR20130082434A/ko
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Publication of KR101945789B1 publication Critical patent/KR101945789B1/ko
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18664—Shaft moves through rotary drive means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Cleaning In General (AREA)
  • Manipulator (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
KR1020120147330A 2012-01-11 2012-12-17 전동 액추에이터 Active KR101945789B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-002641 2012-01-11
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Publications (2)

Publication Number Publication Date
KR20130082434A KR20130082434A (ko) 2013-07-19
KR101945789B1 true KR101945789B1 (ko) 2019-02-08

Family

ID=48652722

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120147330A Active KR101945789B1 (ko) 2012-01-11 2012-12-17 전동 액추에이터

Country Status (6)

Country Link
US (1) US8973452B2 (https=)
JP (1) JP2013143824A (https=)
KR (1) KR101945789B1 (https=)
CN (1) CN103206500B (https=)
DE (1) DE102013100047A1 (https=)
TW (1) TWI583875B (https=)

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KR20140093212A (ko) * 2011-11-22 2014-07-25 가부시기가이샤 아이 에이 아이 액추에이터
US20140326091A1 (en) * 2013-05-06 2014-11-06 Velmex, Inc. Miniature Linear Positioning System
CN104728379B (zh) * 2013-12-18 2017-05-10 上银科技股份有限公司 滚珠螺杆支撑装置
CN103982613B (zh) * 2014-05-12 2016-04-20 武汉电力设备厂 一种用于带电环境下的直线运动装置
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
CN105549334B (zh) * 2016-01-28 2017-12-29 武汉华星光电技术有限公司 曝光机
DE102016211670A1 (de) * 2016-06-29 2018-01-04 MTU Aero Engines AG Vorrichtung zur Energieversorgung bewegter Maschinenkomponenten
CN109863450B (zh) * 2016-10-19 2022-04-29 索尼公司 光源单元和投影显示设备
CN106773551B (zh) * 2017-01-23 2018-11-09 武汉华星光电技术有限公司 曝光机
CN107882966A (zh) * 2017-12-27 2018-04-06 洛阳明创矿山冶金设备有限公司 一种可提高减速机效率的辅助装置
CN109139848A (zh) * 2018-08-31 2019-01-04 江门市天功自动化科技有限公司 一种新型滑座结构及其加工工艺
US20220074253A1 (en) * 2020-09-10 2022-03-10 Nick Ede Linear actuator
US11620868B2 (en) 2021-07-22 2023-04-04 Trinity Axis Inc. Techniques to dispense an item and release a jammed item from a dispensing system
CN113777891B (zh) * 2021-08-19 2022-08-26 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN114542677B (zh) * 2022-03-07 2025-10-24 奥特(南京)智能制造有限公司 一种用于直线传动机构中叠式抽拉防尘装置

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DE3620969A1 (de) * 1985-06-24 1987-01-02 Canon Kk Praezisionszufuehrmechanismus
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
WO1995006545A1 (en) * 1993-09-02 1995-03-09 Smc Kabushiki Kaisha Actuator structure
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
EP0896855B1 (en) * 1993-10-12 2003-02-26 SMC Kabushiki Kaisha Actuator
KR100190595B1 (ko) * 1994-04-05 1999-06-01 다카다 요시유키 전기 액추에이터
JP2700621B2 (ja) * 1995-02-20 1998-01-21 セイコー精機株式会社 ロボット
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CN101931285B (zh) * 2009-06-19 2014-11-05 黑田精工株式会社 直动装置
JP5417132B2 (ja) * 2009-11-26 2014-02-12 Ｎｔｎ株式会社 電動アクチュエータ
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP2013008857A (ja) * 2011-06-24 2013-01-10 Panasonic Industrial Devices Sunx Co Ltd ファイバレーザ発振器及びファイバレーザ加工装置

Also Published As

Publication number Publication date
JP2013143824A (ja) 2013-07-22
US20130174679A1 (en) 2013-07-11
CN103206500A (zh) 2013-07-17
TWI583875B (zh) 2017-05-21
KR20130082434A (ko) 2013-07-19
TW201341690A (zh) 2013-10-16
DE102013100047A1 (de) 2013-07-11
US8973452B2 (en) 2015-03-10
CN103206500B (zh) 2017-08-15

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