JP2013143824A - 電動アクチュエータ - Google Patents

電動アクチュエータ Download PDF

Info

Publication number
JP2013143824A
JP2013143824A JP2012002641A JP2012002641A JP2013143824A JP 2013143824 A JP2013143824 A JP 2013143824A JP 2012002641 A JP2012002641 A JP 2012002641A JP 2012002641 A JP2012002641 A JP 2012002641A JP 2013143824 A JP2013143824 A JP 2013143824A
Authority
JP
Japan
Prior art keywords
negative pressure
pressure supply
dust
electric actuator
dust collection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012002641A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013143824A5 (https=
Inventor
Yoshihiro Fukano
喜弘 深野
Shoichi Umakado
正一 馬門
Hiroyuki Shiomi
裕幸 塩見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2012002641A priority Critical patent/JP2013143824A/ja
Priority to US13/688,587 priority patent/US8973452B2/en
Priority to TW101145422A priority patent/TWI583875B/zh
Priority to KR1020120147330A priority patent/KR101945789B1/ko
Priority to DE102013100047A priority patent/DE102013100047A1/de
Priority to CN201310011454.4A priority patent/CN103206500B/zh
Publication of JP2013143824A publication Critical patent/JP2013143824A/ja
Publication of JP2013143824A5 publication Critical patent/JP2013143824A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/12—Casings or enclosures characterised by the shape, form or construction thereof specially adapted for operating in liquid or gas
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18664—Shaft moves through rotary drive means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Cleaning In General (AREA)
  • Manipulator (AREA)
  • Motor Or Generator Frames (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2012002641A 2012-01-11 2012-01-11 電動アクチュエータ Pending JP2013143824A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ
US13/688,587 US8973452B2 (en) 2012-01-11 2012-11-29 Electric actuator
TW101145422A TWI583875B (zh) 2012-01-11 2012-12-04 電動致動器
KR1020120147330A KR101945789B1 (ko) 2012-01-11 2012-12-17 전동 액추에이터
DE102013100047A DE102013100047A1 (de) 2012-01-11 2013-01-04 Elektrisches Stellglied
CN201310011454.4A CN103206500B (zh) 2012-01-11 2013-01-11 电动执行机构

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012002641A JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Publications (2)

Publication Number Publication Date
JP2013143824A true JP2013143824A (ja) 2013-07-22
JP2013143824A5 JP2013143824A5 (https=) 2015-01-22

Family

ID=48652722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012002641A Pending JP2013143824A (ja) 2012-01-11 2012-01-11 電動アクチュエータ

Country Status (6)

Country Link
US (1) US8973452B2 (https=)
JP (1) JP2013143824A (https=)
KR (1) KR101945789B1 (https=)
CN (1) CN103206500B (https=)
DE (1) DE102013100047A1 (https=)
TW (1) TWI583875B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2018074125A1 (ja) * 2016-10-19 2019-08-08 ソニー株式会社 光源装置および投射型表示装置

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20140093212A (ko) * 2011-11-22 2014-07-25 가부시기가이샤 아이 에이 아이 액추에이터
US20140326091A1 (en) * 2013-05-06 2014-11-06 Velmex, Inc. Miniature Linear Positioning System
CN104728379B (zh) * 2013-12-18 2017-05-10 上银科技股份有限公司 滚珠螺杆支撑装置
CN103982613B (zh) * 2014-05-12 2016-04-20 武汉电力设备厂 一种用于带电环境下的直线运动装置
JP6506508B2 (ja) * 2014-06-26 2019-04-24 日本トムソン株式会社 アクチュエータ
CN105549334B (zh) * 2016-01-28 2017-12-29 武汉华星光电技术有限公司 曝光机
DE102016211670A1 (de) * 2016-06-29 2018-01-04 MTU Aero Engines AG Vorrichtung zur Energieversorgung bewegter Maschinenkomponenten
CN106773551B (zh) * 2017-01-23 2018-11-09 武汉华星光电技术有限公司 曝光机
CN107882966A (zh) * 2017-12-27 2018-04-06 洛阳明创矿山冶金设备有限公司 一种可提高减速机效率的辅助装置
CN109139848A (zh) * 2018-08-31 2019-01-04 江门市天功自动化科技有限公司 一种新型滑座结构及其加工工艺
US20220074253A1 (en) * 2020-09-10 2022-03-10 Nick Ede Linear actuator
US11620868B2 (en) 2021-07-22 2023-04-04 Trinity Axis Inc. Techniques to dispense an item and release a jammed item from a dispensing system
CN113777891B (zh) * 2021-08-19 2022-08-26 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN114542677B (zh) * 2022-03-07 2025-10-24 奥特(南京)智能制造有限公司 一种用于直线传动机构中叠式抽拉防尘装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
JPH11235690A (ja) * 1998-02-18 1999-08-31 Shibaura Mechatronics Corp 産業ロボットにおける排気構造、及びこれを備えた産業ロボット

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3620969A1 (de) * 1985-06-24 1987-01-02 Canon Kk Praezisionszufuehrmechanismus
JPH0516092A (ja) * 1991-07-08 1993-01-26 Sony Corp 直交型ロボツトの集塵構造
WO1995006545A1 (en) * 1993-09-02 1995-03-09 Smc Kabushiki Kaisha Actuator structure
JP3347844B2 (ja) * 1993-10-12 2002-11-20 エスエムシー株式会社 バランサ
EP0896855B1 (en) * 1993-10-12 2003-02-26 SMC Kabushiki Kaisha Actuator
KR100190595B1 (ko) * 1994-04-05 1999-06-01 다카다 요시유키 전기 액추에이터
JP2700621B2 (ja) * 1995-02-20 1998-01-21 セイコー精機株式会社 ロボット
JP3695784B2 (ja) * 1995-03-08 2005-09-14 Ｓｍｃ株式会社 電動アクチュエータ
JP3705641B2 (ja) * 1996-01-19 2005-10-12 Ｓｍｃ株式会社 アクチュエータ
WO1998035435A1 (en) * 1997-02-05 1998-08-13 Smc Kabushiki Kaisha Actuator and apparatus for controlling the same
JP2000088070A (ja) * 1998-09-09 2000-03-28 Smc Corp 電動アクチュエータ
JP3543065B2 (ja) * 1999-04-16 2004-07-14 Ｓｍｃ株式会社 直線作動装置
JP2002046039A (ja) * 2000-08-01 2002-02-12 Smc Corp 電動アクチュエーター
US7070041B1 (en) * 2000-08-18 2006-07-04 Rexroth Star Gmbh Linear guide unit
US6656133B2 (en) * 2000-10-13 2003-12-02 Ethicon Endo-Surgery, Inc. Transmission assembly for a surgical biopsy device
JP2003014070A (ja) * 2001-07-02 2003-01-15 Smc Corp 電動アクチュエータ
JP4221564B2 (ja) 2002-11-01 2009-02-12 日本精工株式会社 電動アクチュエータ
JP2005036899A (ja) * 2003-07-15 2005-02-10 Smc Corp 電動アクチュエータ
DE102004055306B4 (de) * 2003-11-21 2007-06-14 Smc K.K. Stellglied
JP4500102B2 (ja) * 2004-05-13 2010-07-14 日本トムソン株式会社 スライド装置
JP2007270860A (ja) * 2006-03-30 2007-10-18 Smc Corp 電動アクチュエータ
KR101516456B1 (ko) * 2007-09-13 2015-05-04 티에치케이 가부시끼가이샤 방진 기구가 구비된 리니어 액추에이터
TWI383276B (zh) * 2007-12-04 2013-01-21 Smc Kk 電動致動器
TWI426685B (zh) * 2008-04-17 2014-02-11 Smc Kk 電動致動器
US8196484B2 (en) * 2008-04-18 2012-06-12 Tol-O-Matic, Inc. Electric actuator
JP5306838B2 (ja) * 2008-12-26 2013-10-02 ナブテスコ株式会社 電動アクチュエータ
CN101931285B (zh) * 2009-06-19 2014-11-05 黑田精工株式会社 直动装置
JP5417132B2 (ja) * 2009-11-26 2014-02-12 Ｎｔｎ株式会社 電動アクチュエータ
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP2013008857A (ja) * 2011-06-24 2013-01-10 Panasonic Industrial Devices Sunx Co Ltd ファイバレーザ発振器及びファイバレーザ加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02106282A (ja) * 1988-10-11 1990-04-18 Mitsubishi Electric Corp 産業用ロボット
JPH058194A (ja) * 1991-07-02 1993-01-19 Sony Corp 直交型ロボツトの集塵構造
JPH11235690A (ja) * 1998-02-18 1999-08-31 Shibaura Mechatronics Corp 産業ロボットにおける排気構造、及びこれを備えた産業ロボット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2018074125A1 (ja) * 2016-10-19 2019-08-08 ソニー株式会社 光源装置および投射型表示装置
US11280996B2 (en) 2016-10-19 2022-03-22 Sony Corporation Light source unit and projection display apparatus

Also Published As

Publication number Publication date
US20130174679A1 (en) 2013-07-11
CN103206500A (zh) 2013-07-17
TWI583875B (zh) 2017-05-21
KR20130082434A (ko) 2013-07-19
TW201341690A (zh) 2013-10-16
KR101945789B1 (ko) 2019-02-08
DE102013100047A1 (de) 2013-07-11
US8973452B2 (en) 2015-03-10
CN103206500B (zh) 2017-08-15

Similar Documents

Publication Publication Date Title
JP2013143824A (ja) 電動アクチュエータ
CN105378211B (zh) 真空钻孔系统和方法
CN204835770U (zh) 电动机
CN104551028A (zh) 一种气浮轴承及气浮高速高光电主轴
CN115020315B (zh) 清洗设备的卡盘装置及清洗设备
US10012243B2 (en) Pneumatic mechanism
JP6802238B2 (ja) 主軸装置
US8568032B2 (en) Clean room-suitable linear guide
CN103231164B (zh) 用于电阻焊机的真空开关
CN110762309A (zh) 一种cph油路旋转分配器装置
JP2003257909A (ja) 半導体ウェーハの加工装置
TWM594986U (zh) 油水分離機
CN117300179A (zh) 一种内藏回转油缸的机床主轴
CN209469912U (zh) 一种气浮旋转接头
CN203650118U (zh) 用于加工机的喷液装置
KR101795853B1 (ko) 실링장치 및 이를 구비한 공작기계
CN104723165B (zh) 用于加工机的喷液装置
CN212886153U (zh) 滚槽倒角一体机
TWM569806U (zh) Pneumatic tool with air guiding structure
CN102632418A (zh) 一种高速运转型气液自动夹紧装置
JP2574190B2 (ja) チャック用回転流体圧力シリンダ装置のシール構造
JP2012218127A (ja) 工作機械の切粉吸引機構
US9072569B2 (en) Medical air-driven handpiece with anti-retraction stop
SE1551218A1 (en) Power tool
US11787022B2 (en) Power screw driver

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141201

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20141201

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20150908

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20150909

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151109

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20160412