KR101905590B1 - 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 - Google Patents
얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 Download PDFInfo
- Publication number
- KR101905590B1 KR101905590B1 KR1020177020575A KR20177020575A KR101905590B1 KR 101905590 B1 KR101905590 B1 KR 101905590B1 KR 1020177020575 A KR1020177020575 A KR 1020177020575A KR 20177020575 A KR20177020575 A KR 20177020575A KR 101905590 B1 KR101905590 B1 KR 101905590B1
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- South Korea
- Prior art keywords
- type region
- contact
- transparent conductive
- layer
- iii nitride
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H01L33/42—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
- H10H20/833—Transparent materials
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- H01L33/0079—
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- H01L33/10—
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- H01L33/30—
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- H01L33/32—
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- H01L33/505—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/032—Manufacture or treatment of electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/814—Bodies having reflecting means, e.g. semiconductor Bragg reflectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/851—Wavelength conversion means
- H10H20/8514—Wavelength conversion means characterised by their shape, e.g. plate or foil
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- H01L2933/0016—
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- Led Devices (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/624,268 | 2009-11-23 | ||
| US12/624,268 US8581229B2 (en) | 2009-11-23 | 2009-11-23 | III-V light emitting device with thin n-type region |
| PCT/IB2010/055147 WO2011061664A1 (en) | 2009-11-23 | 2010-11-12 | Iii-v light emitting device with thin n-type region |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127016290A Division KR101762368B1 (ko) | 2009-11-23 | 2010-11-12 | 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20170098304A KR20170098304A (ko) | 2017-08-29 |
| KR101905590B1 true KR101905590B1 (ko) | 2018-10-10 |
Family
ID=43502070
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020177020575A Active KR101905590B1 (ko) | 2009-11-23 | 2010-11-12 | 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 |
| KR1020127016290A Active KR101762368B1 (ko) | 2009-11-23 | 2010-11-12 | 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020127016290A Active KR101762368B1 (ko) | 2009-11-23 | 2010-11-12 | 얇은 n-형 영역을 갖는 ⅲ-v족 발광 디바이스 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8581229B2 (https=) |
| EP (1) | EP2504868B1 (https=) |
| JP (1) | JP5674806B2 (https=) |
| KR (2) | KR101905590B1 (https=) |
| CN (1) | CN102714255B (https=) |
| TW (1) | TWI523258B (https=) |
| WO (1) | WO2011061664A1 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102011012298A1 (de) * | 2010-12-28 | 2012-06-28 | Osram Opto Semiconductors Gmbh | Verbundsubstrat, Halbleiterchip mit Verbundsubstrat und Verfahren zur Herstellung von Verbundsubstraten und Halbleiterchips |
| KR20120099318A (ko) * | 2011-01-26 | 2012-09-10 | 엘지이노텍 주식회사 | 발광 소자 및 그 제조방법 |
| US10056531B2 (en) | 2011-08-26 | 2018-08-21 | Lumileds Llc | Method of processing a semiconductor structure |
| JP2014027092A (ja) * | 2012-07-26 | 2014-02-06 | Sharp Corp | 半導体発光素子 |
| US9728458B2 (en) | 2012-07-31 | 2017-08-08 | Soitec | Methods for fabrication of semiconductor structures using laser lift-off process, and related semiconductor structures |
| US9653647B2 (en) | 2013-06-14 | 2017-05-16 | Micron Technology, Inc. | Ultrathin solid state dies and methods of manufacturing the same |
| EP3127143A4 (en) * | 2014-03-31 | 2017-11-29 | Nanyang Technological University | Methods of recycling substrates and carrier substrates |
| DE102016124646A1 (de) * | 2016-12-16 | 2018-06-21 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiterbauelements |
| CN111933765B (zh) * | 2020-07-03 | 2022-04-26 | 厦门士兰明镓化合物半导体有限公司 | 微型发光二极管及制作方法,微型led显示模块及制作方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200370465Y1 (ko) * | 2004-04-23 | 2004-12-17 | 슈퍼노바 옵토일렉트로닉스 코포레이션 | 갈륨 질화물계 발광 다이오드의 수직 전극 구조 |
| JP2005012188A (ja) * | 2003-05-22 | 2005-01-13 | Matsushita Electric Ind Co Ltd | 半導体素子の製造方法 |
| JP2008053425A (ja) * | 2006-08-24 | 2008-03-06 | Matsushita Electric Ind Co Ltd | 半導体発光装置 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3757544B2 (ja) * | 1997-05-21 | 2006-03-22 | 昭和電工株式会社 | Iii族窒化物半導体発光素子 |
| WO2002056394A1 (en) | 2001-01-09 | 2002-07-18 | Emcore Corporation | Electrode structures for p-type nitride semiconductores and mehtods of making same |
| JP3896027B2 (ja) * | 2002-04-17 | 2007-03-22 | シャープ株式会社 | 窒化物系半導体発光素子およびその製造方法 |
| US7880182B2 (en) * | 2002-07-15 | 2011-02-01 | Epistar Corporation | Light-emitting element array |
| TWI249148B (en) * | 2004-04-13 | 2006-02-11 | Epistar Corp | Light-emitting device array having binding layer |
| JP4135567B2 (ja) * | 2003-06-10 | 2008-08-20 | 松下電器産業株式会社 | キャップ取り外し装置 |
| US20050173724A1 (en) * | 2004-02-11 | 2005-08-11 | Heng Liu | Group III-nitride based LED having a transparent current spreading layer |
| JP2005268581A (ja) * | 2004-03-19 | 2005-09-29 | Matsushita Electric Ind Co Ltd | 窒化ガリウム系化合物半導体発光素子 |
| US7361938B2 (en) * | 2004-06-03 | 2008-04-22 | Philips Lumileds Lighting Company Llc | Luminescent ceramic for a light emitting device |
| TWI299914B (en) * | 2004-07-12 | 2008-08-11 | Epistar Corp | Light emitting diode with transparent electrically conductive layer and omni directional reflector |
| US8334155B2 (en) * | 2005-09-27 | 2012-12-18 | Philips Lumileds Lighting Company Llc | Substrate for growing a III-V light emitting device |
| JP5232970B2 (ja) * | 2006-04-13 | 2013-07-10 | 豊田合成株式会社 | 半導体発光素子の製造方法及び半導体発光素子とそれを備えたランプ |
| JP4929924B2 (ja) * | 2006-08-25 | 2012-05-09 | サンケン電気株式会社 | 半導体発光素子、その製造方法、及び複合半導体装置 |
| JP2008177525A (ja) * | 2006-12-20 | 2008-07-31 | Showa Denko Kk | Iii族窒化物半導体発光素子の製造方法、及びiii族窒化物半導体発光素子、並びにランプ |
| US7951693B2 (en) * | 2006-12-22 | 2011-05-31 | Philips Lumileds Lighting Company, Llc | III-nitride light emitting devices grown on templates to reduce strain |
| US8704254B2 (en) * | 2006-12-22 | 2014-04-22 | Philips Lumileds Lighting Company, Llc | Light emitting device including a filter |
| TWI331411B (en) * | 2006-12-29 | 2010-10-01 | Epistar Corp | High efficiency light-emitting diode and method for manufacturing the same |
| US7791096B2 (en) * | 2007-06-08 | 2010-09-07 | Koninklijke Philips Electronics N.V. | Mount for a semiconductor light emitting device |
| US20090050905A1 (en) * | 2007-08-20 | 2009-02-26 | Abu-Ageel Nayef M | Highly Efficient Light-Emitting Diode |
| US20090140279A1 (en) * | 2007-12-03 | 2009-06-04 | Goldeneye, Inc. | Substrate-free light emitting diode chip |
| KR101025948B1 (ko) * | 2007-12-21 | 2011-03-30 | 삼성엘이디 주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
| US7939839B2 (en) * | 2008-09-11 | 2011-05-10 | Bridgelux, Inc. | Series connected segmented LED |
| US9117944B2 (en) * | 2008-09-24 | 2015-08-25 | Koninklijke Philips N.V. | Semiconductor light emitting devices grown on composite substrates |
| US8089091B2 (en) * | 2009-06-18 | 2012-01-03 | Koninklijke Philips Electronics N.V. | Semiconductor light emitting device with a contact formed on a textured surface |
| US20100327300A1 (en) * | 2009-06-25 | 2010-12-30 | Koninklijke Philips Electronics N.V. | Contact for a semiconductor light emitting device |
-
2009
- 2009-11-23 US US12/624,268 patent/US8581229B2/en active Active
-
2010
- 2010-11-12 KR KR1020177020575A patent/KR101905590B1/ko active Active
- 2010-11-12 EP EP10788136.9A patent/EP2504868B1/en active Active
- 2010-11-12 JP JP2012540516A patent/JP5674806B2/ja active Active
- 2010-11-12 KR KR1020127016290A patent/KR101762368B1/ko active Active
- 2010-11-12 WO PCT/IB2010/055147 patent/WO2011061664A1/en not_active Ceased
- 2010-11-12 CN CN201080062108.3A patent/CN102714255B/zh active Active
- 2010-11-23 TW TW099140450A patent/TWI523258B/zh active
-
2013
- 2013-10-09 US US14/049,282 patent/US8878160B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005012188A (ja) * | 2003-05-22 | 2005-01-13 | Matsushita Electric Ind Co Ltd | 半導体素子の製造方法 |
| KR200370465Y1 (ko) * | 2004-04-23 | 2004-12-17 | 슈퍼노바 옵토일렉트로닉스 코포레이션 | 갈륨 질화물계 발광 다이오드의 수직 전극 구조 |
| JP2008053425A (ja) * | 2006-08-24 | 2008-03-06 | Matsushita Electric Ind Co Ltd | 半導体発光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101762368B1 (ko) | 2017-07-27 |
| US8878160B2 (en) | 2014-11-04 |
| JP5674806B2 (ja) | 2015-02-25 |
| WO2011061664A1 (en) | 2011-05-26 |
| US20140034990A1 (en) | 2014-02-06 |
| TW201125161A (en) | 2011-07-16 |
| KR20120094502A (ko) | 2012-08-24 |
| TWI523258B (zh) | 2016-02-21 |
| EP2504868A1 (en) | 2012-10-03 |
| CN102714255A (zh) | 2012-10-03 |
| KR20170098304A (ko) | 2017-08-29 |
| US8581229B2 (en) | 2013-11-12 |
| JP2013511853A (ja) | 2013-04-04 |
| CN102714255B (zh) | 2015-10-21 |
| EP2504868B1 (en) | 2018-05-16 |
| US20110121332A1 (en) | 2011-05-26 |
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Comment text: Divisional Application for International Patent Patent event code: PA01041R01D Patent event date: 20170721 Application number text: 1020127016290 Filing date: 20120622 |
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