EP3127143A4 - Methods of recycling substrates and carrier substrates - Google Patents
Methods of recycling substrates and carrier substrates Download PDFInfo
- Publication number
- EP3127143A4 EP3127143A4 EP15773434.4A EP15773434A EP3127143A4 EP 3127143 A4 EP3127143 A4 EP 3127143A4 EP 15773434 A EP15773434 A EP 15773434A EP 3127143 A4 EP3127143 A4 EP 3127143A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrates
- methods
- recycling
- carrier
- carrier substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title 2
- 238000000034 method Methods 0.000 title 1
- 238000004064 recycling Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6835—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during build up manufacturing of active devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Devices (AREA)
- Separation, Recovery Or Treatment Of Waste Materials Containing Plastics (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461972575P | 2014-03-31 | 2014-03-31 | |
PCT/SG2015/000048 WO2015152817A1 (en) | 2014-03-31 | 2015-02-16 | Methods of recycling substrates and carrier substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3127143A1 EP3127143A1 (en) | 2017-02-08 |
EP3127143A4 true EP3127143A4 (en) | 2017-11-29 |
Family
ID=54240965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP15773434.4A Withdrawn EP3127143A4 (en) | 2014-03-31 | 2015-02-16 | Methods of recycling substrates and carrier substrates |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3127143A4 (en) |
CN (1) | CN106463451B (en) |
EA (1) | EA201691900A1 (en) |
TW (1) | TW201601192A (en) |
WO (1) | WO2015152817A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7059518B2 (en) * | 2017-04-03 | 2022-04-26 | 住友電気工業株式会社 | Method for manufacturing semiconductor optical devices |
CN109037263A (en) * | 2017-06-09 | 2018-12-18 | 美商晶典有限公司 | Micro- light-emitting diode display module and its manufacturing method with light-transmitting substrate |
CN109728142B (en) * | 2017-10-31 | 2021-02-02 | 展晶科技(深圳)有限公司 | Method for manufacturing light emitting diode crystal grain |
JP2021170595A (en) * | 2020-04-15 | 2021-10-28 | 国立大学法人東海国立大学機構 | Gallium nitride semiconductor device and manufacturing method thereof |
CN112967992B (en) * | 2020-12-07 | 2022-09-23 | 重庆康佳光电技术研究院有限公司 | Transfer method of epitaxial structure |
TWI741911B (en) * | 2020-12-16 | 2021-10-01 | 環球晶圓股份有限公司 | Method for removing epitaxial layer |
CN112786762B (en) * | 2021-01-04 | 2022-05-17 | 华灿光电(浙江)有限公司 | Light emitting diode epitaxial wafer and preparation method thereof |
CN113257971B (en) * | 2021-06-30 | 2021-10-22 | 南昌凯捷半导体科技有限公司 | Manufacturing method of red light mini-LED chip |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080038857A1 (en) * | 2006-08-11 | 2008-02-14 | Samsung Electro-Mechanics Co., Ltd | Method of manufacturing nitride-based semiconductor light-emitting device |
US20090253249A1 (en) * | 2008-04-07 | 2009-10-08 | Sony Corporation | Method of manufacturing semiconductor device |
US20120107962A1 (en) * | 2010-11-01 | 2012-05-03 | National Cheng Kung University | Method of fabricating epitaxial semiconductor devices |
US20130048945A1 (en) * | 2011-08-22 | 2013-02-28 | Lextar Electronics Corporation | Light-emitting semiconductor structure and method for fabricating light-emitting diode device |
US20130214284A1 (en) * | 2012-02-17 | 2013-08-22 | The Regents Of The University Of California | Method for the reuse of gallium nitride epitaxial substrates |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030189215A1 (en) * | 2002-04-09 | 2003-10-09 | Jong-Lam Lee | Method of fabricating vertical structure leds |
US8236583B2 (en) * | 2008-09-10 | 2012-08-07 | Tsmc Solid State Lighting Ltd. | Method of separating light-emitting diode from a growth substrate |
US8581229B2 (en) * | 2009-11-23 | 2013-11-12 | Koninklijke Philips N.V. | III-V light emitting device with thin n-type region |
US7781242B1 (en) * | 2009-12-10 | 2010-08-24 | Walsin Lihwa Corporation | Method of forming vertical structure light emitting diode with heat exhaustion structure |
WO2013004188A1 (en) * | 2011-07-07 | 2013-01-10 | 厦门市三安光电科技有限公司 | Solar cell, system, and manufacturing method thereof |
-
2015
- 2015-02-16 EP EP15773434.4A patent/EP3127143A4/en not_active Withdrawn
- 2015-02-16 EA EA201691900A patent/EA201691900A1/en unknown
- 2015-02-16 CN CN201580028692.3A patent/CN106463451B/en not_active Expired - Fee Related
- 2015-02-16 WO PCT/SG2015/000048 patent/WO2015152817A1/en active Application Filing
- 2015-03-10 TW TW104107540A patent/TW201601192A/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080038857A1 (en) * | 2006-08-11 | 2008-02-14 | Samsung Electro-Mechanics Co., Ltd | Method of manufacturing nitride-based semiconductor light-emitting device |
US20090253249A1 (en) * | 2008-04-07 | 2009-10-08 | Sony Corporation | Method of manufacturing semiconductor device |
US20120107962A1 (en) * | 2010-11-01 | 2012-05-03 | National Cheng Kung University | Method of fabricating epitaxial semiconductor devices |
US20130048945A1 (en) * | 2011-08-22 | 2013-02-28 | Lextar Electronics Corporation | Light-emitting semiconductor structure and method for fabricating light-emitting diode device |
US20130214284A1 (en) * | 2012-02-17 | 2013-08-22 | The Regents Of The University Of California | Method for the reuse of gallium nitride epitaxial substrates |
Non-Patent Citations (1)
Title |
---|
See also references of WO2015152817A1 * |
Also Published As
Publication number | Publication date |
---|---|
EA201691900A1 (en) | 2017-05-31 |
TW201601192A (en) | 2016-01-01 |
CN106463451B (en) | 2019-07-16 |
WO2015152817A1 (en) | 2015-10-08 |
CN106463451A (en) | 2017-02-22 |
EP3127143A1 (en) | 2017-02-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20161019 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
AX | Request for extension of the european patent |
Extension state: BA ME |
|
DAX | Request for extension of the european patent (deleted) | ||
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 33/08 20100101ALI20170724BHEP Ipc: H01L 21/77 20170101ALI20170724BHEP Ipc: H01L 33/00 20100101ALI20170724BHEP Ipc: H01L 21/683 20060101ALI20170724BHEP Ipc: H01L 21/64 20060101ALI20170724BHEP Ipc: H01L 21/02 20060101AFI20170724BHEP |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20171030 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 21/77 20170101ALI20171024BHEP Ipc: H01L 33/00 20100101ALI20171024BHEP Ipc: H01L 21/64 20060101ALI20171024BHEP Ipc: H01L 21/02 20060101AFI20171024BHEP Ipc: H01L 21/683 20060101ALI20171024BHEP Ipc: H01L 33/08 20100101ALI20171024BHEP |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Effective date: 20190409 |