KR101891345B1 - 박판형 워크의 연삭 방법 및 양두 평면 연삭반 - Google Patents

박판형 워크의 연삭 방법 및 양두 평면 연삭반 Download PDF

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KR101891345B1
KR101891345B1 KR1020120024979A KR20120024979A KR101891345B1 KR 101891345 B1 KR101891345 B1 KR 101891345B1 KR 1020120024979 A KR1020120024979 A KR 1020120024979A KR 20120024979 A KR20120024979 A KR 20120024979A KR 101891345 B1 KR101891345 B1 KR 101891345B1
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South Korea
Prior art keywords
grinding
work
sharpness
workpiece
difference
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Korean (ko)
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KR20120106577A (ko
Inventor
아츠시 시바나카
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고요 기카이 고교 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/06—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent requiring comparison of the workpiece with standard gauging plugs, rings or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR1020120024979A 2011-03-18 2012-03-12 박판형 워크의 연삭 방법 및 양두 평면 연삭반 Active KR101891345B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2011060521 2011-03-18
JPJP-P-2011-060521 2011-03-18
JP2011243138A JP5851803B2 (ja) 2011-03-18 2011-11-07 薄板状ワークの研削方法及び両頭平面研削盤
JPJP-P-2011-243138 2011-11-07

Publications (2)

Publication Number Publication Date
KR20120106577A KR20120106577A (ko) 2012-09-26
KR101891345B1 true KR101891345B1 (ko) 2018-08-24

Family

ID=46757088

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120024979A Active KR101891345B1 (ko) 2011-03-18 2012-03-12 박판형 워크의 연삭 방법 및 양두 평면 연삭반

Country Status (4)

Country Link
JP (1) JP5851803B2 (enExample)
KR (1) KR101891345B1 (enExample)
DE (1) DE102012204092A1 (enExample)
TW (1) TWI558507B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6383700B2 (ja) * 2015-04-07 2018-08-29 光洋機械工業株式会社 薄板状ワークの製造方法及び両頭平面研削装置
JP6749726B2 (ja) * 2016-08-09 2020-09-02 株式会社ディスコ 研削方法
JP7013908B2 (ja) * 2018-02-06 2022-02-01 トヨタ自動車株式会社 磨耗量測定装置
CN109344522B (zh) * 2018-10-17 2023-07-04 沈阳透平机械股份有限公司 一种用于轴流压缩机的静叶磨削量的计算方法及系统
CN112894520B (zh) * 2021-02-20 2023-04-18 南京超图中小企业信息服务有限公司 一种木板加工用双面抛光机
JP7601685B2 (ja) * 2021-03-31 2024-12-17 株式会社ディスコ 研削装置
CN119489375A (zh) * 2024-11-20 2025-02-21 西安奕斯伟材料科技股份有限公司 一种硅片研磨装置、方法及可读存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003236748A (ja) 2002-02-14 2003-08-26 Sumitomo Heavy Ind Ltd 研削装置
JP2005238444A (ja) * 1999-05-07 2005-09-08 Shin Etsu Handotai Co Ltd 両面同時研削方法および両面同時研削盤並びに両面同時ラップ方法および両面同時ラップ盤
JP2007096015A (ja) * 2005-09-29 2007-04-12 Shin Etsu Handotai Co Ltd 半導体ウェーハの両頭研削装置、静圧パッドおよびこれを用いた両頭研削方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6296553B1 (en) * 1997-04-02 2001-10-02 Nippei Toyama Corporation Grinding method, surface grinder, workpiece support, mechanism and work rest
JP2003071713A (ja) 2001-08-29 2003-03-12 Nippei Toyama Corp 研削装置及びウェーハの厚さ管理方法
JP4319092B2 (ja) * 2004-06-03 2009-08-26 住友重機械工業株式会社 両面加工装置
DE102007030958B4 (de) * 2007-07-04 2014-09-11 Siltronic Ag Verfahren zum Schleifen von Halbleiterscheiben

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005238444A (ja) * 1999-05-07 2005-09-08 Shin Etsu Handotai Co Ltd 両面同時研削方法および両面同時研削盤並びに両面同時ラップ方法および両面同時ラップ盤
JP2003236748A (ja) 2002-02-14 2003-08-26 Sumitomo Heavy Ind Ltd 研削装置
JP2007096015A (ja) * 2005-09-29 2007-04-12 Shin Etsu Handotai Co Ltd 半導体ウェーハの両頭研削装置、静圧パッドおよびこれを用いた両頭研削方法

Also Published As

Publication number Publication date
JP5851803B2 (ja) 2016-02-03
TWI558507B (zh) 2016-11-21
JP2012210698A (ja) 2012-11-01
KR20120106577A (ko) 2012-09-26
DE102012204092A1 (de) 2012-09-20
TW201249594A (en) 2012-12-16

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