KR101796198B1 - 레이저 가공장치 및 이를 이용한 레이저 가공방법 - Google Patents

레이저 가공장치 및 이를 이용한 레이저 가공방법 Download PDF

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Publication number
KR101796198B1
KR101796198B1 KR1020150123208A KR20150123208A KR101796198B1 KR 101796198 B1 KR101796198 B1 KR 101796198B1 KR 1020150123208 A KR1020150123208 A KR 1020150123208A KR 20150123208 A KR20150123208 A KR 20150123208A KR 101796198 B1 KR101796198 B1 KR 101796198B1
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KR
South Korea
Prior art keywords
scanner
laser beam
driving
laser
light source
Prior art date
Application number
KR1020150123208A
Other languages
English (en)
Korean (ko)
Other versions
KR20170025997A (ko
Inventor
이병학
소재혁
김석규
이태경
Original Assignee
주식회사 이오테크닉스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 이오테크닉스 filed Critical 주식회사 이오테크닉스
Priority to KR1020150123208A priority Critical patent/KR101796198B1/ko
Priority to PCT/KR2016/008775 priority patent/WO2017039169A1/fr
Priority to TW105126487A priority patent/TWI645928B/zh
Publication of KR20170025997A publication Critical patent/KR20170025997A/ko
Application granted granted Critical
Publication of KR101796198B1 publication Critical patent/KR101796198B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/044—Seam tracking
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
KR1020150123208A 2015-08-31 2015-08-31 레이저 가공장치 및 이를 이용한 레이저 가공방법 KR101796198B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020150123208A KR101796198B1 (ko) 2015-08-31 2015-08-31 레이저 가공장치 및 이를 이용한 레이저 가공방법
PCT/KR2016/008775 WO2017039169A1 (fr) 2015-08-31 2016-08-10 Dispositif de traitement au laser et procédé de traitement au laser utilisant celui-ci
TW105126487A TWI645928B (zh) 2015-08-31 2016-08-19 雷射加工裝置以及使用該雷射加工裝置的雷射處理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150123208A KR101796198B1 (ko) 2015-08-31 2015-08-31 레이저 가공장치 및 이를 이용한 레이저 가공방법

Publications (2)

Publication Number Publication Date
KR20170025997A KR20170025997A (ko) 2017-03-08
KR101796198B1 true KR101796198B1 (ko) 2017-11-09

Family

ID=58188021

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150123208A KR101796198B1 (ko) 2015-08-31 2015-08-31 레이저 가공장치 및 이를 이용한 레이저 가공방법

Country Status (3)

Country Link
KR (1) KR101796198B1 (fr)
TW (1) TWI645928B (fr)
WO (1) WO2017039169A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210187682A1 (en) * 2019-12-24 2021-06-24 Fanuc Corporation Workpiece transfer system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017211982B4 (de) * 2017-07-13 2019-04-18 Trumpf Laser- Und Systemtechnik Gmbh Verfahren und Vorrichtung zum Fügen von mindestens zwei Werkstücken
KR102189459B1 (ko) * 2019-08-28 2020-12-11 주식회사 유니오텍 홀 가공 방법 및 그 장치
KR102654236B1 (ko) * 2022-03-07 2024-04-03 주식회사 코윈디에스티 레이저 빔의 균질도가 향상된 레이저 가공 시스템

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10289943A (ja) * 1997-04-16 1998-10-27 Canon Inc ステージ装置およびデバイス製造方法
JP5207827B2 (ja) * 2008-05-22 2013-06-12 キヤノン株式会社 ガルバノ装置、加工装置、ガルバノ装置におけるミラーの倒れ角を得る方法、および、加工方法
KR101186245B1 (ko) * 2010-05-26 2012-09-27 한국기계연구원 레이저 가공 시스템 및 이를 이용한 레이저 가공 방법
KR101388181B1 (ko) * 2012-09-04 2014-04-30 (주)하드램 유리 기판 레이저 절단 장치 및 방법
JP6521859B2 (ja) * 2013-02-13 2019-05-29 住友化学株式会社 レーザー光照射装置及び光学部材貼合体の製造装置
JP5364856B1 (ja) * 2013-02-27 2013-12-11 三菱重工業株式会社 加工装置、加工方法
KR20140144390A (ko) * 2013-06-10 2014-12-19 (주)엔에스 레이저를 이용한 필름 절단장치 및 절단방법
JP6345064B2 (ja) * 2013-11-22 2018-06-20 三菱電機株式会社 形状可変鏡およびレーザ加工装置
TWM486507U (zh) * 2014-03-13 2014-09-21 Tong Tai Machine & Tool Co Ltd 雷射加工系統、偵測模組及判斷電路

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210187682A1 (en) * 2019-12-24 2021-06-24 Fanuc Corporation Workpiece transfer system
JP2021100763A (ja) * 2019-12-24 2021-07-08 ファナック株式会社 ワーク搬送システム
US11679462B2 (en) * 2019-12-24 2023-06-20 Fanuc Corporation Workpiece transfer system
JP7420548B2 (ja) 2019-12-24 2024-01-23 ファナック株式会社 ワーク搬送システム

Also Published As

Publication number Publication date
WO2017039169A1 (fr) 2017-03-09
KR20170025997A (ko) 2017-03-08
TW201713445A (zh) 2017-04-16
TWI645928B (zh) 2019-01-01

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