KR101792771B1 - 기판처리장치 - Google Patents

기판처리장치 Download PDF

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Publication number
KR101792771B1
KR101792771B1 KR1020160075242A KR20160075242A KR101792771B1 KR 101792771 B1 KR101792771 B1 KR 101792771B1 KR 1020160075242 A KR1020160075242 A KR 1020160075242A KR 20160075242 A KR20160075242 A KR 20160075242A KR 101792771 B1 KR101792771 B1 KR 101792771B1
Authority
KR
South Korea
Prior art keywords
magnetic force
carrier
substrate
force generating
substrate processing
Prior art date
Application number
KR1020160075242A
Other languages
English (en)
Korean (ko)
Inventor
정재욱
Original Assignee
(주)브이앤아이솔루션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)브이앤아이솔루션 filed Critical (주)브이앤아이솔루션
Priority to KR1020160075242A priority Critical patent/KR101792771B1/ko
Priority to PCT/KR2017/006340 priority patent/WO2017217816A1/ko
Priority to CN201780037309.XA priority patent/CN109690751B/zh
Priority to TW106120109A priority patent/TW201810500A/zh
Application granted granted Critical
Publication of KR101792771B1 publication Critical patent/KR101792771B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
KR1020160075242A 2016-06-16 2016-06-16 기판처리장치 KR101792771B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020160075242A KR101792771B1 (ko) 2016-06-16 2016-06-16 기판처리장치
PCT/KR2017/006340 WO2017217816A1 (ko) 2016-06-16 2017-06-16 기판처리장치
CN201780037309.XA CN109690751B (zh) 2016-06-16 2017-06-16 基板处理装置
TW106120109A TW201810500A (zh) 2016-06-16 2017-06-16 基板處理裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160075242A KR101792771B1 (ko) 2016-06-16 2016-06-16 기판처리장치

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020170140239A Division KR20170142131A (ko) 2017-10-26 2017-10-26 기판처리장치

Publications (1)

Publication Number Publication Date
KR101792771B1 true KR101792771B1 (ko) 2017-11-20

Family

ID=60664177

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020160075242A KR101792771B1 (ko) 2016-06-16 2016-06-16 기판처리장치

Country Status (4)

Country Link
KR (1) KR101792771B1 (zh)
CN (1) CN109690751B (zh)
TW (1) TW201810500A (zh)
WO (1) WO2017217816A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132099A (ko) 2018-05-18 2019-11-27 어플라이드 머티어리얼스, 인코포레이티드 마스크이송장치
KR20190132096A (ko) 2018-05-18 2019-11-27 어플라이드 머티어리얼스, 인코포레이티드 기판이송장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020001751A1 (en) * 2018-06-26 2020-01-02 Applied Materials, Inc. Magnetic levitation system for transporting a carrier, carrier for a magnetic levitation system, apparatus for transportation of a carrier, processing system for vertically processing a substrate, and method of switching a transport path of a carrier
CN116490697A (zh) * 2020-11-13 2023-07-25 应用材料公司 载体运输系统、磁稳定单元、载体和用于非接触式运输载体的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05105232A (ja) * 1991-10-17 1993-04-27 Ebara Corp 搬送台退避機構
JPH07117849A (ja) * 1993-10-22 1995-05-09 Ebara Corp 磁気浮上搬送装置
JPH11195687A (ja) * 1997-12-27 1999-07-21 Nippon Seiko Kk 基板搬送装置
KR101086191B1 (ko) * 2004-03-24 2011-11-25 엘지디스플레이 주식회사 기판 이송장치
KR20060011586A (ko) * 2004-07-30 2006-02-03 엘지.필립스 엘시디 주식회사 기판 이송 장치 및 스퍼터링 프로세스 장비
KR100707390B1 (ko) * 2005-12-19 2007-04-13 주식회사 아바코 기판 이송장치
KR20080046761A (ko) * 2006-11-23 2008-05-28 엘지디스플레이 주식회사 기판이송장치 및 이를 구비하는 박막 형성 장치
CN201369667Y (zh) * 2009-03-12 2009-12-23 北京京东方光电科技有限公司 磁力传动设备
JP5562734B2 (ja) * 2010-06-17 2014-07-30 住友重機械工業株式会社 搬送装置
JP5585689B2 (ja) * 2013-06-13 2014-09-10 株式会社ニコン 基板ホルダおよび貼り合せ装置
US20150034702A1 (en) * 2013-08-01 2015-02-05 Semigear Inc Apparatus & method for treating substrate
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190132099A (ko) 2018-05-18 2019-11-27 어플라이드 머티어리얼스, 인코포레이티드 마스크이송장치
KR20190132096A (ko) 2018-05-18 2019-11-27 어플라이드 머티어리얼스, 인코포레이티드 기판이송장치

Also Published As

Publication number Publication date
TW201810500A (zh) 2018-03-16
CN109690751B (zh) 2023-04-28
WO2017217816A1 (ko) 2017-12-21
CN109690751A (zh) 2019-04-26

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