KR101715032B1 - 이동 스테이지 - Google Patents

이동 스테이지 Download PDF

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Publication number
KR101715032B1
KR101715032B1 KR1020147026090A KR20147026090A KR101715032B1 KR 101715032 B1 KR101715032 B1 KR 101715032B1 KR 1020147026090 A KR1020147026090 A KR 1020147026090A KR 20147026090 A KR20147026090 A KR 20147026090A KR 101715032 B1 KR101715032 B1 KR 101715032B1
Authority
KR
South Korea
Prior art keywords
side groove
base
moving body
groove portion
moving
Prior art date
Application number
KR1020147026090A
Other languages
English (en)
Korean (ko)
Other versions
KR20150040786A (ko
Inventor
카츠아키 오이시
유키히로 오타키
Original Assignee
가부시키가이샤 수루가세이산플랫폼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 수루가세이산플랫폼 filed Critical 가부시키가이샤 수루가세이산플랫폼
Publication of KR20150040786A publication Critical patent/KR20150040786A/ko
Application granted granted Critical
Publication of KR101715032B1 publication Critical patent/KR101715032B1/ko

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    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Machine Tool Units (AREA)
KR1020147026090A 2013-02-15 2013-02-15 이동 스테이지 KR101715032B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2013/053663 WO2014125611A1 (ja) 2013-02-15 2013-02-15 移動ステージ

Publications (2)

Publication Number Publication Date
KR20150040786A KR20150040786A (ko) 2015-04-15
KR101715032B1 true KR101715032B1 (ko) 2017-03-10

Family

ID=51353641

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147026090A KR101715032B1 (ko) 2013-02-15 2013-02-15 이동 스테이지

Country Status (4)

Country Link
JP (1) JP5646065B1 (zh)
KR (1) KR101715032B1 (zh)
CN (1) CN104246899B (zh)
WO (1) WO2014125611A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210022289A (ko) 2019-08-20 2021-03-03 이노6 주식회사 Zt 스테이지
KR20210027307A (ko) 2019-08-20 2021-03-10 이노6 주식회사 Zt 스테이지

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101956242B1 (ko) * 2017-12-01 2019-03-08 주식회사 디피아이엔 로터리 스테이지의 정밀 구동시스템
CN108922577B (zh) * 2018-07-04 2020-12-22 山东大学 基于激光尺非定轴检测方法的xyθ微定位平台设计

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006046444A (ja) 2004-08-03 2006-02-16 Suruga Seiki Kk 移動装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0737543U (ja) * 1993-12-15 1995-07-11 積水化学工業株式会社 加工材固定台
WO2005124789A1 (ja) * 2004-06-15 2005-12-29 Thk Co., Ltd. Ｘｙガイドテーブル
JP5091721B2 (ja) * 2008-02-29 2012-12-05 日本ベアリング株式会社 直線運動装置及びテーブル装置
CN102396032B (zh) * 2010-06-02 2015-08-19 中富芳春 载物台机构

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006046444A (ja) 2004-08-03 2006-02-16 Suruga Seiki Kk 移動装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210022289A (ko) 2019-08-20 2021-03-03 이노6 주식회사 Zt 스테이지
KR20210027307A (ko) 2019-08-20 2021-03-10 이노6 주식회사 Zt 스테이지

Also Published As

Publication number Publication date
KR20150040786A (ko) 2015-04-15
WO2014125611A1 (ja) 2014-08-21
JPWO2014125611A1 (ja) 2017-02-02
JP5646065B1 (ja) 2014-12-24
CN104246899A (zh) 2014-12-24
CN104246899B (zh) 2017-02-15

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