CN108922577B - 基于激光尺非定轴检测方法的xyθ微定位平台设计 - Google Patents
基于激光尺非定轴检测方法的xyθ微定位平台设计 Download PDFInfo
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- CN108922577B CN108922577B CN201810725557.XA CN201810725557A CN108922577B CN 108922577 B CN108922577 B CN 108922577B CN 201810725557 A CN201810725557 A CN 201810725557A CN 108922577 B CN108922577 B CN 108922577B
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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CN201810725557.XA CN108922577B (zh) | 2018-07-04 | 2018-07-04 | 基于激光尺非定轴检测方法的xyθ微定位平台设计 |
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CN108922577B true CN108922577B (zh) | 2020-12-22 |
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US20030173833A1 (en) * | 2000-04-21 | 2003-09-18 | Hazelton Andrew J. | Wafer stage with magnetic bearings |
JP5646065B1 (ja) * | 2013-02-15 | 2014-12-24 | 株式会社駿河生産プラットフォーム | 移動ステージ |
CN105157560B (zh) * | 2015-05-29 | 2018-02-02 | 山东大学 | 一种三自由度精密激光检测装置 |
CN204778808U (zh) * | 2015-06-08 | 2015-11-18 | 武汉大学 | 六自由度磁悬浮平台 |
CN106113028B (zh) * | 2016-07-06 | 2018-07-24 | 山东大学 | 一种多驱动三自由度的板簧型微纳操作平台及方法 |
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Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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CI03 | Correction of invention patent | ||
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Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |