CN108922577A - 基于激光尺非定轴检测方法的xyθ微定位平台设计 - Google Patents
基于激光尺非定轴检测方法的xyθ微定位平台设计 Download PDFInfo
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- 238000001514 detection method Methods 0.000 title claims abstract description 30
- 238000013461 design Methods 0.000 title description 9
- 230000007246 mechanism Effects 0.000 claims abstract description 77
- 230000033001 locomotion Effects 0.000 claims abstract description 63
- 150000001875 compounds Chemical class 0.000 claims abstract description 50
- 239000011159 matrix material Substances 0.000 claims abstract description 44
- 239000002131 composite material Substances 0.000 claims abstract description 28
- 238000006073 displacement reaction Methods 0.000 claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 3
- 239000010703 silicon Substances 0.000 claims abstract description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 18
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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CN201810725557.XA CN108922577B (zh) | 2018-07-04 | 2018-07-04 | 基于激光尺非定轴检测方法的xyθ微定位平台设计 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030173833A1 (en) * | 2000-04-21 | 2003-09-18 | Hazelton Andrew J. | Wafer stage with magnetic bearings |
CN204778808U (zh) * | 2015-06-08 | 2015-11-18 | 武汉大学 | 六自由度磁悬浮平台 |
CN105157560A (zh) * | 2015-05-29 | 2015-12-16 | 山东大学 | 一种三自由度精密激光检测装置 |
CN106113028A (zh) * | 2016-07-06 | 2016-11-16 | 山东大学 | 一种多驱动三自由度的板簧型微纳操作平台及方法 |
JPWO2014125611A1 (ja) * | 2013-02-15 | 2017-02-02 | 株式会社駿河生産プラットフォーム | 移動ステージ |
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- 2018-07-04 CN CN201810725557.XA patent/CN108922577B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030173833A1 (en) * | 2000-04-21 | 2003-09-18 | Hazelton Andrew J. | Wafer stage with magnetic bearings |
JPWO2014125611A1 (ja) * | 2013-02-15 | 2017-02-02 | 株式会社駿河生産プラットフォーム | 移動ステージ |
CN105157560A (zh) * | 2015-05-29 | 2015-12-16 | 山东大学 | 一种三自由度精密激光检测装置 |
CN204778808U (zh) * | 2015-06-08 | 2015-11-18 | 武汉大学 | 六自由度磁悬浮平台 |
CN106113028A (zh) * | 2016-07-06 | 2016-11-16 | 山东大学 | 一种多驱动三自由度的板簧型微纳操作平台及方法 |
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Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |