KR101707277B1 - 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자 - Google Patents

조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자 Download PDF

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Publication number
KR101707277B1
KR101707277B1 KR1020140019467A KR20140019467A KR101707277B1 KR 101707277 B1 KR101707277 B1 KR 101707277B1 KR 1020140019467 A KR1020140019467 A KR 1020140019467A KR 20140019467 A KR20140019467 A KR 20140019467A KR 101707277 B1 KR101707277 B1 KR 101707277B1
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South Korea
Prior art keywords
optical
reflecting surface
optical system
light
illumination
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Expired - Fee Related
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KR1020140019467A
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English (en)
Korean (ko)
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KR20140108125A (ko
Inventor
노보루 오사카
료스케 후쿠오카
히토시 요시오카
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
KR1020140019467A 2013-02-28 2014-02-20 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자 Expired - Fee Related KR101707277B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013040033A JP6178588B2 (ja) 2013-02-28 2013-02-28 照明光学系、露光装置、デバイスの製造方法及び光学素子
JPJP-P-2013-040033 2013-02-28

Related Child Applications (1)

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KR1020170008091A Division KR101831552B1 (ko) 2013-02-28 2017-01-17 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자

Publications (2)

Publication Number Publication Date
KR20140108125A KR20140108125A (ko) 2014-09-05
KR101707277B1 true KR101707277B1 (ko) 2017-02-27

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ID=51617573

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KR1020140019467A Expired - Fee Related KR101707277B1 (ko) 2013-02-28 2014-02-20 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자
KR1020170008091A Expired - Fee Related KR101831552B1 (ko) 2013-02-28 2017-01-17 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자

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KR1020170008091A Expired - Fee Related KR101831552B1 (ko) 2013-02-28 2017-01-17 조명 광학계, 노광 장치, 디바이스의 제조 방법 및 광학 소자

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JP (1) JP6178588B2 (enExample)
KR (2) KR101707277B1 (enExample)
TW (1) TWI569104B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5843905B2 (ja) * 2013-04-23 2016-01-13 キヤノン株式会社 照明光学系、露光装置及びデバイス製造方法
CN114677441B (zh) * 2021-11-20 2025-08-12 余姚舜宇智能光学技术有限公司 光心测试方法、光心测试装置及电子设备
CN118922806A (zh) 2022-06-22 2024-11-08 株式会社和冠 电子笔

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6335786B1 (en) 1997-11-10 2002-01-01 Nikon Corporation Exposure apparatus
JP2002217085A (ja) 2001-01-15 2002-08-02 Canon Inc 照明装置及びこれを用いる投影露光装置
US7215863B1 (en) 2006-04-27 2007-05-08 International Business Machines Corporation Light pipe optical coupling utilizing convex-shaped light pipe end

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1182639B (it) * 1985-10-29 1987-10-05 Cselt Centro Studi Lab Telecom Procedimento per la fabbricazione di fibre ottiche con nucleo a sezione non circolare
JP3517573B2 (ja) * 1997-11-27 2004-04-12 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
DE19856575A1 (de) * 1998-12-08 2000-09-14 Zeiss Carl Fa Projektions-Mikrolithographiegerät
JP2001324762A (ja) * 2000-05-17 2001-11-22 Minolta Co Ltd 単板式液晶プロジェクタの照明光学系
DE102010026252B4 (de) * 2010-07-01 2012-08-02 Jenoptik Optical Systems Gmbh Lichtintegrator für rechteckige Strahlquerschnitte unterschiedlicher Abmessungen
JP5806479B2 (ja) * 2011-02-22 2015-11-10 キヤノン株式会社 照明光学系、露光装置及びデバイス製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6335786B1 (en) 1997-11-10 2002-01-01 Nikon Corporation Exposure apparatus
JP2002217085A (ja) 2001-01-15 2002-08-02 Canon Inc 照明装置及びこれを用いる投影露光装置
US7215863B1 (en) 2006-04-27 2007-05-08 International Business Machines Corporation Light pipe optical coupling utilizing convex-shaped light pipe end

Also Published As

Publication number Publication date
KR101831552B1 (ko) 2018-02-22
KR20170010336A (ko) 2017-01-26
KR20140108125A (ko) 2014-09-05
TWI569104B (zh) 2017-02-01
JP2014168022A (ja) 2014-09-11
TW201433885A (zh) 2014-09-01
JP6178588B2 (ja) 2017-08-09

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