KR101707267B1 - 드라이 진공 펌프 장치 및 드라이 진공 펌프 장치에 사용되는 제어 장치 - Google Patents

드라이 진공 펌프 장치 및 드라이 진공 펌프 장치에 사용되는 제어 장치 Download PDF

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KR101707267B1
KR101707267B1 KR1020130113674A KR20130113674A KR101707267B1 KR 101707267 B1 KR101707267 B1 KR 101707267B1 KR 1020130113674 A KR1020130113674 A KR 1020130113674A KR 20130113674 A KR20130113674 A KR 20130113674A KR 101707267 B1 KR101707267 B1 KR 101707267B1
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South Korea
Prior art keywords
current limit
limit value
inverter
pump
value
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Korean (ko)
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KR20140044734A (ko
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고이치 이와사키
도시하루 나카자와
나오야 요시다
아츠시 오야마
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가부시키가이샤 에바라 세이사꾸쇼
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
KR1020130113674A 2012-10-05 2013-09-25 드라이 진공 펌프 장치 및 드라이 진공 펌프 장치에 사용되는 제어 장치 Active KR101707267B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2012-222878 2012-10-05
JP2012222878A JP6050081B2 (ja) 2012-10-05 2012-10-05 ドライ真空ポンプ装置

Publications (2)

Publication Number Publication Date
KR20140044734A KR20140044734A (ko) 2014-04-15
KR101707267B1 true KR101707267B1 (ko) 2017-02-15

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KR1020130113674A Active KR101707267B1 (ko) 2012-10-05 2013-09-25 드라이 진공 펌프 장치 및 드라이 진공 펌프 장치에 사용되는 제어 장치

Country Status (4)

Country Link
JP (1) JP6050081B2 (enExample)
KR (1) KR101707267B1 (enExample)
CN (2) CN107237752B (enExample)
TW (1) TWI601881B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107524608B (zh) * 2016-06-22 2019-11-01 泓记精密股份有限公司 电动燃油泵浦
JP6944249B2 (ja) * 2017-01-27 2021-10-06 株式会社荏原製作所 給水装置
JP2018178846A (ja) * 2017-04-12 2018-11-15 株式会社荏原製作所 真空ポンプ装置の運転制御装置、及び運転制御方法
FI20175411A1 (fi) * 2017-05-08 2018-11-09 Lappeenrannan Teknillinen Yliopisto Menetelmä ja ohjausjärjestelmä tyhjiöpumpun säätämiseksi
DE202018003585U1 (de) * 2018-08-01 2019-11-06 Leybold Gmbh Vakuumpumpe
CN111756296B (zh) * 2019-03-29 2022-06-17 安川电机（中国）有限公司 变频器及其输出电压的控制方法、真空系统的控制方法
KR102376859B1 (ko) * 2020-09-28 2022-03-22 주식회사 플랜 반도체 제조 설비의 배기 유체 처리 시스템 및 방법
JP7189394B1 (ja) * 2021-11-04 2022-12-13 株式会社アルバック 真空ポンプ、真空ポンプの制御方法、真空ポンプ用電力変換装置、圧縮機用電力変換装置および圧縮機
GB2619964B (en) * 2022-06-24 2024-12-25 Edwards Ltd Method for detection of a bearing condition of a vacuum pump
CN115145201B (zh) * 2022-07-19 2023-03-28 长沙昌佳自动化设备有限公司 一种干式真空泵专用控制器
CN116641881B (zh) * 2023-04-25 2024-01-23 北京通嘉宏瑞科技有限公司 真空泵控制方法、装置、计算机设备和存储介质
CN119021861B (zh) * 2024-09-02 2025-09-23 广东鸿浩半导体设备有限公司 一种适用于干泵的双机测试系统及其测试方法

Citations (2)

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Publication number Priority date Publication date Assignee Title
KR100654813B1 (ko) 2005-12-09 2006-12-08 삼성전자주식회사 Ｂｌｄｃ 모터의 속도제어 방법 및 냉장고의 냉장 또는냉동 속도 제어 방법
WO2009075157A1 (ja) 2007-12-13 2009-06-18 Mitsubishi Heavy Industries, Ltd. インバータ一体型電動圧縮機

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JPS5963394A (ja) * 1982-10-04 1984-04-11 Tokuda Seisakusho Ltd 真空排気装置
JPH05202888A (ja) * 1992-01-29 1993-08-10 Hitachi Ltd ドライ真空ポンプの駆動制御方法とその装置並びにドライ真空ポンプ用電源装置
JPH06346892A (ja) * 1993-06-10 1994-12-20 Hitachi Ltd ドライ真空ポンプ装置
JPH11287195A (ja) * 1998-03-31 1999-10-19 Ebara Corp 可変速駆動ターボ形ポンプの特性制御装置
US6920946B2 (en) * 2001-09-27 2005-07-26 Kenneth D. Oglesby Inverted motor for drilling rocks, soils and man-made materials and for re-entry and cleanout of existing wellbores and pipes
JP2003172292A (ja) * 2001-12-04 2003-06-20 Shimadzu Corp ターボ分子ポンプ駆動用電源装置
JP2004197644A (ja) * 2002-12-18 2004-07-15 Toyota Industries Corp 真空ポンプの制御装置
JP2005083316A (ja) * 2003-09-10 2005-03-31 Boc Edwards Kk モータ制御システム及び該モータ制御システムを搭載した真空ポンプ
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
GB0520470D0 (en) * 2005-10-07 2005-11-16 Boc Group Plc Method of operating a pumping system
JP2007262906A (ja) * 2006-03-27 2007-10-11 Nabtesco Corp ２段式真空ポンプ
JP4425253B2 (ja) * 2006-08-30 2010-03-03 ダイキン工業株式会社 油圧ユニットおよび油圧ユニットにおけるモータの速度制御方法
JP5424784B2 (ja) * 2009-08-28 2014-02-26 株式会社荏原製作所 ドライ真空ポンプ用電源装置、及びその運転方法
JP5448677B2 (ja) * 2009-09-25 2014-03-19 株式会社荏原製作所 真空ポンプシステム、及びその運転方法
TWI491804B (zh) * 2010-04-19 2015-07-11 Ebara Corp 乾真空泵裝置及該乾真空泵裝置之冷卻方法
JP2011226364A (ja) * 2010-04-19 2011-11-10 Ebara Corp ドライ真空ポンプ装置の冷却構造、及び冷却方法

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Publication number Priority date Publication date Assignee Title
KR100654813B1 (ko) 2005-12-09 2006-12-08 삼성전자주식회사 Ｂｌｄｃ 모터의 속도제어 방법 및 냉장고의 냉장 또는냉동 속도 제어 방법
WO2009075157A1 (ja) 2007-12-13 2009-06-18 Mitsubishi Heavy Industries, Ltd. インバータ一体型電動圧縮機

Also Published As

Publication number Publication date
TWI601881B (zh) 2017-10-11
TW201418578A (zh) 2014-05-16
CN103711697A (zh) 2014-04-09
JP2014074380A (ja) 2014-04-24
KR20140044734A (ko) 2014-04-15
CN107237752A (zh) 2017-10-10
CN103711697B (zh) 2017-11-10
CN107237752B (zh) 2019-05-28
JP6050081B2 (ja) 2016-12-21

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