KR101669745B1 - 2층 플렉시블 배선용 기판 및 플렉시블 배선판 및 이들의 제조 방법 - Google Patents

2층 플렉시블 배선용 기판 및 플렉시블 배선판 및 이들의 제조 방법 Download PDF

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Publication number
KR101669745B1
KR101669745B1 KR1020147032650A KR20147032650A KR101669745B1 KR 101669745 B1 KR101669745 B1 KR 101669745B1 KR 1020147032650 A KR1020147032650 A KR 1020147032650A KR 20147032650 A KR20147032650 A KR 20147032650A KR 101669745 B1 KR101669745 B1 KR 101669745B1
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KR
South Korea
Prior art keywords
layer
copper
electroplating
flexible wiring
film
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KR1020147032650A
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English (en)
Korean (ko)
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KR20150003854A (ko
Inventor
히로시 다케노우치
마사시 노구치
세이지 고우카미
히로키 하타
도미오 시마무라
요시히데 니시야마
Original Assignee
스미토모 긴조쿠 고잔 가부시키가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B32B15/088—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyamides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/06—Wires; Strips; Foils
    • C25D7/0614—Strips or foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/09—Use of materials for the conductive, e.g. metallic pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2379/00—Other polymers having nitrogen, with or without oxygen or carbon only, in the main chain
    • B32B2379/08—Polyimides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0393—Flexible materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0137—Materials
    • H05K2201/0154—Polyimide
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0338—Layered conductor, e.g. layered metal substrate, layered finish layer, layered thin film adhesion layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1545—Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)
  • Manufacturing Of Printed Wiring (AREA)
KR1020147032650A 2012-04-24 2013-03-28 2층 플렉시블 배선용 기판 및 플렉시블 배선판 및 이들의 제조 방법 KR101669745B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2012-099306 2012-04-24
JP2012099306 2012-04-24
PCT/JP2013/059363 WO2013161507A1 (fr) 2012-04-24 2013-03-28 Substrat de câblage souple à deux couches, tableau de connexions souple et leurs procédés de production

Publications (2)

Publication Number Publication Date
KR20150003854A KR20150003854A (ko) 2015-01-09
KR101669745B1 true KR101669745B1 (ko) 2016-10-27

Family

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KR1020147032650A KR101669745B1 (ko) 2012-04-24 2013-03-28 2층 플렉시블 배선용 기판 및 플렉시블 배선판 및 이들의 제조 방법

Country Status (5)

Country Link
JP (1) JP6083433B2 (fr)
KR (1) KR101669745B1 (fr)
CN (1) CN104247576B (fr)
TW (1) TWI522019B (fr)
WO (1) WO2013161507A1 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
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JP6398596B2 (ja) * 2013-10-22 2018-10-03 住友金属鉱山株式会社 ２層フレキシブル配線用基板及びそれを用いたフレキシブル配線板
JP6299226B2 (ja) * 2014-01-10 2018-03-28 住友金属鉱山株式会社 金属張積層基板、配線基板、および多層配線基板
JP2015140447A (ja) * 2014-01-27 2015-08-03 住友金属鉱山株式会社 フレキシブル配線板
JP6667982B2 (ja) * 2014-01-27 2020-03-18 住友金属鉱山株式会社 フレキシブル配線板
JP6417964B2 (ja) * 2015-01-23 2018-11-07 住友金属鉱山株式会社 積層体基板、配線基板ならびにそれらの製造方法
JP6403095B2 (ja) * 2015-02-23 2018-10-10 住友金属鉱山株式会社 フレキシブル配線用基板およびフレキシブル配線板
JP6550811B2 (ja) * 2015-03-16 2019-07-31 大日本印刷株式会社 導電性パターンシートの製造方法、導電性パターンシート、タッチパネルセンサおよび画像表示装置
KR102502200B1 (ko) * 2016-08-11 2023-02-20 에스케이넥실리스 주식회사 회로 단선/단락을 방지할 수 있는 연성동박적층필름 및 그 제조방법
KR102329838B1 (ko) * 2019-04-30 2021-11-22 도레이첨단소재 주식회사 연성 금속박 적층 필름, 이를 포함하는 물품 및 상기 연성 금속박 적층 필름의 제조방법
CN112911817B (zh) * 2021-01-20 2022-03-11 南昌欧菲显示科技有限公司 挠性覆铜板的制作方法

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JP2008130585A (ja) * 2006-11-16 2008-06-05 Sumitomo Metal Mining Co Ltd 銅被覆ポリイミド基板とその製造方法
JP2009295656A (ja) * 2008-06-03 2009-12-17 Sumitomo Metal Mining Co Ltd フレキシブル配線板用基板及びその製造方法
JP2009298065A (ja) * 2008-06-16 2009-12-24 Sumitomo Metal Mining Co Ltd 金属被覆ポリイミド基板とその製造方法
JP2011017036A (ja) * 2009-07-07 2011-01-27 Ebara-Udylite Co Ltd 銅めっき方法

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JPH06269807A (ja) 1993-03-25 1994-09-27 Fukuda Metal Foil & Powder Co Ltd 銅箔の製造方法
JP3608840B2 (ja) 1995-04-07 2005-01-12 古河サーキットフォイル株式会社 フレキシブル配線板用電解銅箔
JP3563730B2 (ja) * 2002-06-07 2004-09-08 松下電器産業株式会社 フレキシブルプリント回路基板
JP4175060B2 (ja) * 2002-08-30 2008-11-05 宇部興産株式会社 ボンディングシ−トおよび積層体
JP4525682B2 (ja) * 2004-09-01 2010-08-18 住友金属鉱山株式会社 ２層フレキシブル基板及びその製造方法
KR100858309B1 (ko) * 2004-09-01 2008-09-11 스미토모 긴조쿠 고잔 가부시키가이샤 2층 플렉시블 기판 및 그 제조 방법
JP4968266B2 (ja) * 2007-01-24 2012-07-04 住友金属鉱山株式会社 ２層フレキシブル基板とその製造方法及び該２層フレキシブル基板より得られたフレキシブルプリント配線基板
JP5194602B2 (ja) * 2007-07-20 2013-05-08 住友金属鉱山株式会社 金属被覆ポリイミド基板の製造方法
JP5347980B2 (ja) * 2010-01-14 2013-11-20 住友金属鉱山株式会社 金属化ポリイミドフィルム、及びそれを用いたフレキシブル配線板
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Publication number Priority date Publication date Assignee Title
JP2008130585A (ja) * 2006-11-16 2008-06-05 Sumitomo Metal Mining Co Ltd 銅被覆ポリイミド基板とその製造方法
JP2009295656A (ja) * 2008-06-03 2009-12-17 Sumitomo Metal Mining Co Ltd フレキシブル配線板用基板及びその製造方法
JP2009298065A (ja) * 2008-06-16 2009-12-24 Sumitomo Metal Mining Co Ltd 金属被覆ポリイミド基板とその製造方法
JP2011017036A (ja) * 2009-07-07 2011-01-27 Ebara-Udylite Co Ltd 銅めっき方法

Also Published As

Publication number Publication date
JPWO2013161507A1 (ja) 2015-12-24
TWI522019B (zh) 2016-02-11
TW201352087A (zh) 2013-12-16
CN104247576A (zh) 2014-12-24
WO2013161507A1 (fr) 2013-10-31
KR20150003854A (ko) 2015-01-09
CN104247576B (zh) 2017-05-31
JP6083433B2 (ja) 2017-02-22

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