KR101643542B1 - 열 처리 장치 - Google Patents

열 처리 장치 Download PDF

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Publication number
KR101643542B1
KR101643542B1 KR1020090117502A KR20090117502A KR101643542B1 KR 101643542 B1 KR101643542 B1 KR 101643542B1 KR 1020090117502 A KR1020090117502 A KR 1020090117502A KR 20090117502 A KR20090117502 A KR 20090117502A KR 101643542 B1 KR101643542 B1 KR 101643542B1
Authority
KR
South Korea
Prior art keywords
heat treatment
shelf
take
column
treatment apparatus
Prior art date
Application number
KR1020090117502A
Other languages
English (en)
Korean (ko)
Other versions
KR20100065100A (ko
Inventor
도시로 간다
Original Assignee
에스펙 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스펙 가부시키가이샤 filed Critical 에스펙 가부시키가이샤
Publication of KR20100065100A publication Critical patent/KR20100065100A/ko
Application granted granted Critical
Publication of KR101643542B1 publication Critical patent/KR101643542B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
  • Furnace Details (AREA)
KR1020090117502A 2008-12-05 2009-12-01 열 처리 장치 KR101643542B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008311525A JP4896954B2 (ja) 2008-12-05 2008-12-05 熱処理装置
JPJP-P-2008-311525 2008-12-05

Publications (2)

Publication Number Publication Date
KR20100065100A KR20100065100A (ko) 2010-06-15
KR101643542B1 true KR101643542B1 (ko) 2016-07-29

Family

ID=42345118

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090117502A KR101643542B1 (ko) 2008-12-05 2009-12-01 열 처리 장치

Country Status (3)

Country Link
JP (1) JP4896954B2 (ja)
KR (1) KR101643542B1 (ja)
TW (1) TWI400419B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016537600A (ja) 2013-10-07 2016-12-01 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 耐火物
TWI595202B (zh) * 2014-05-09 2017-08-11 Suncue Co Ltd Dryer of the hot air device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007201417A (ja) * 2005-12-28 2007-08-09 Tokyo Electron Ltd 熱処理用ボート及び縦型熱処理装置
JP2007333272A (ja) * 2006-06-14 2007-12-27 Espec Corp ラック、ラックシステム、熱処理装置、並びに、熱処理システム
JP2008032274A (ja) 2006-07-27 2008-02-14 Espec Corp 熱処理装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2820861B2 (ja) * 1993-06-16 1998-11-05 タバイエスペック株式会社 物品熱処理装置
JPH0763875A (ja) * 1993-08-26 1995-03-10 Ishikawajima Harima Heavy Ind Co Ltd 原子炉格納容器
KR100195970B1 (ko) * 1996-12-12 1999-06-15 허봉철 히터봉으로 구획된 열처리실을 갖는 상향장전식 열처리로
JP3578985B2 (ja) * 2000-12-20 2004-10-20 光洋サーモシステム株式会社 熱処理装置
JP2003165735A (ja) * 2001-11-29 2003-06-10 Showa Mfg Co Ltd ガラス基板用熱処理装置
JP4213991B2 (ja) * 2003-05-16 2009-01-28 高砂工業株式会社 バッチ式マイクロ波加熱炉
JP4476180B2 (ja) * 2004-06-28 2010-06-09 エスペック株式会社 熱処理装置
JP2007139234A (ja) * 2005-11-15 2007-06-07 Espec Corp 熱処理装置
JP4626821B2 (ja) * 2006-06-08 2011-02-09 株式会社ダイフク 物品保管装置
JP4896952B2 (ja) * 2008-12-04 2012-03-14 エスペック株式会社 熱処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007201417A (ja) * 2005-12-28 2007-08-09 Tokyo Electron Ltd 熱処理用ボート及び縦型熱処理装置
JP2007333272A (ja) * 2006-06-14 2007-12-27 Espec Corp ラック、ラックシステム、熱処理装置、並びに、熱処理システム
JP2008032274A (ja) 2006-07-27 2008-02-14 Espec Corp 熱処理装置

Also Published As

Publication number Publication date
JP2010133666A (ja) 2010-06-17
TW201028631A (en) 2010-08-01
JP4896954B2 (ja) 2012-03-14
KR20100065100A (ko) 2010-06-15
TWI400419B (zh) 2013-07-01

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