KR101590833B1 - 와이어 소용 가공액 공급 노즐 및 와이어 소로의 가공액 공급 방법 - Google Patents

와이어 소용 가공액 공급 노즐 및 와이어 소로의 가공액 공급 방법 Download PDF

Info

Publication number
KR101590833B1
KR101590833B1 KR1020140088783A KR20140088783A KR101590833B1 KR 101590833 B1 KR101590833 B1 KR 101590833B1 KR 1020140088783 A KR1020140088783 A KR 1020140088783A KR 20140088783 A KR20140088783 A KR 20140088783A KR 101590833 B1 KR101590833 B1 KR 101590833B1
Authority
KR
South Korea
Prior art keywords
inner tube
holes
rod
wire
outer tube
Prior art date
Application number
KR1020140088783A
Other languages
English (en)
Korean (ko)
Other versions
KR20150017294A (ko
Inventor
요시히로 에토우
다이스케 하시모토
켄타 나카무라
Original Assignee
가부시키가이샤 사무코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 사무코 filed Critical 가부시키가이샤 사무코
Publication of KR20150017294A publication Critical patent/KR20150017294A/ko
Application granted granted Critical
Publication of KR101590833B1 publication Critical patent/KR101590833B1/ko

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007Use, recovery or regeneration of abrasive mediums
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/0007Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
KR1020140088783A 2013-08-06 2014-07-15 와이어 소용 가공액 공급 노즐 및 와이어 소로의 가공액 공급 방법 KR101590833B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013163464A JP6171700B2 (ja) 2013-08-06 2013-08-06 ワイヤーソー用加工液供給ノズルおよびワイヤーソーへの加工液供給方法
JPJP-P-2013-163464 2013-08-06

Publications (2)

Publication Number Publication Date
KR20150017294A KR20150017294A (ko) 2015-02-16
KR101590833B1 true KR101590833B1 (ko) 2016-02-02

Family

ID=52515864

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140088783A KR101590833B1 (ko) 2013-08-06 2014-07-15 와이어 소용 가공액 공급 노즐 및 와이어 소로의 가공액 공급 방법

Country Status (2)

Country Link
JP (1) JP6171700B2 (ja)
KR (1) KR101590833B1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101631989B1 (ko) * 2016-01-28 2016-06-20 영진앵글 주식회사 랙 시스템에 적용되는 커버링 어셈블리
CN110962248A (zh) * 2018-09-28 2020-04-07 胜高股份有限公司 线锯用加工液供给喷嘴及向线锯供给加工液的方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008161790A (ja) 2006-12-27 2008-07-17 Canaan Seiki Kk スリットノズル

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940989Y2 (ja) * 1979-01-26 1984-11-24 日立工機株式会社 給水量調節バルブ
JPH04372365A (ja) * 1991-06-21 1992-12-25 Amada Co Ltd 研削加工時における研削液供給方法およびその装置
JP3323621B2 (ja) * 1993-12-29 2002-09-09 株式会社日平トヤマ ワイヤソーのスラリ供給方法およびスラリ供給ノズル
JPH10156660A (ja) * 1996-11-29 1998-06-16 Nippei Toyama Corp 工作機械のクーラント供給装置
JP3658920B2 (ja) * 1997-04-18 2005-06-15 信越半導体株式会社 半導体インゴットのスライス装置
JPH1148119A (ja) * 1997-06-05 1999-02-23 Nippei Toyama Corp ワイヤソー
JP2000084824A (ja) * 1998-09-11 2000-03-28 Tokyo Seimitsu Co Ltd ワイヤソーのスラリ供給方法及び装置
JP2000141221A (ja) * 1998-11-02 2000-05-23 Tokyo Seimitsu Co Ltd ワイヤソーの加工液供給装置
JP2004195555A (ja) * 2002-12-16 2004-07-15 Komatsu Electronic Metals Co Ltd ワイヤソー用スラリーノズル

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008161790A (ja) 2006-12-27 2008-07-17 Canaan Seiki Kk スリットノズル

Also Published As

Publication number Publication date
JP2015030082A (ja) 2015-02-16
KR20150017294A (ko) 2015-02-16
JP6171700B2 (ja) 2017-08-02

Similar Documents

Publication Publication Date Title
KR100888989B1 (ko) 공작물로부터 다수의 웨이퍼를 슬라이싱하는 방법
TWI507282B (zh) 從工件同時切割多個切片之設備和方法
KR101590833B1 (ko) 와이어 소용 가공액 공급 노즐 및 와이어 소로의 가공액 공급 방법
SG185192A1 (en) Method for cutting workpiece with wire saw
US9744623B2 (en) Device and method for separating a longitudinally-extended cylindrical workpiece
JP2011082351A (ja) ワイヤーソーによるシリコンインゴットの切断方法およびワイヤーソー
US20140318522A1 (en) Method for slicing workpiece
JP2001001248A (ja) ワイヤーソーの切削方法とその装置
US6832606B2 (en) Wire saw and cutting method thereof
JP2010074056A (ja) 半導体ウェーハおよびその製造方法
CN110962248A (zh) 线锯用加工液供给喷嘴及向线锯供给加工液的方法
JP5530946B2 (ja) 半導体材料から成る結晶から多数のウェハを切断する方法
JP2015168030A (ja) ワイヤ放電加工装置、薄板の製造方法および半導体ウエハの製造方法
JP2008213103A (ja) ワイヤソーの加工液供給装置
JP5609143B2 (ja) 熱鋼板の冷却装置
CN204160642U (zh) 包括用于产生流体射流的喷嘴的半导体丝锯
CN207447540U (zh) 一种线切割机床用的喷水嘴
JP6881376B2 (ja) ワイヤーソー用スラリーノズル
TW202039149A (zh) 工件之切斷方法及工件之切斷裝置
KR200221338Y1 (ko) 압력 다이스
Li et al. Investigating depth-dependence of bubble behavior in micro deep hole drilling with micro EDM
EP2853348B1 (en) Water jet cutting focusing tube, water jet cutting mixing chamber and water jet cutting focusing tube with integrated mixing chamber
CN115958709B (zh) 碳化硅晶片的多线切割方法
US20230271348A1 (en) Ingot wafering systems and methods for slicing a silicon ingot
JP5505835B2 (ja) ワイヤソー

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant