KR101577637B1 - 기판의 단면을 클리닝하는 장치 - Google Patents

기판의 단면을 클리닝하는 장치 Download PDF

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Publication number
KR101577637B1
KR101577637B1 KR1020140018603A KR20140018603A KR101577637B1 KR 101577637 B1 KR101577637 B1 KR 101577637B1 KR 1020140018603 A KR1020140018603 A KR 1020140018603A KR 20140018603 A KR20140018603 A KR 20140018603A KR 101577637 B1 KR101577637 B1 KR 101577637B1
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KR
South Korea
Prior art keywords
brush
substrate
guide
groove
face
Prior art date
Application number
KR1020140018603A
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English (en)
Korean (ko)
Other versions
KR20150047410A (ko
Inventor
소이치 야나기사와
Original Assignee
가부시키가이샤 나가오카 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 가부시키가이샤 나가오카 세이사쿠쇼 filed Critical 가부시키가이샤 나가오카 세이사쿠쇼
Publication of KR20150047410A publication Critical patent/KR20150047410A/ko
Application granted granted Critical
Publication of KR101577637B1 publication Critical patent/KR101577637B1/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cleaning In General (AREA)
KR1020140018603A 2013-10-24 2014-02-18 기판의 단면을 클리닝하는 장치 KR101577637B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013221637A JP5651226B1 (ja) 2013-10-24 2013-10-24 基板の端面をクリーニングする装置
JPJP-P-2013-221637 2013-10-24

Publications (2)

Publication Number Publication Date
KR20150047410A KR20150047410A (ko) 2015-05-04
KR101577637B1 true KR101577637B1 (ko) 2015-12-15

Family

ID=52344872

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140018603A KR101577637B1 (ko) 2013-10-24 2014-02-18 기판의 단면을 클리닝하는 장치

Country Status (4)

Country Link
JP (1) JP5651226B1 (zh)
KR (1) KR101577637B1 (zh)
CN (1) CN104550063B (zh)
TW (1) TWI530331B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9889473B2 (en) 2015-11-30 2018-02-13 Nagaoka Seisakucho Corp. Apparatus for cleaning end surfaces of substrate
CN106733782A (zh) * 2017-01-26 2017-05-31 东莞市求是测试设备有限公司 一种pcb板清洁机
CN112369134B (zh) * 2018-07-06 2022-09-09 株式会社富士 元件供给装置
CN110802055A (zh) * 2019-11-28 2020-02-18 湖南潇龙机械设备制造有限责任公司 覆膜机木门预清洁组件
CN114040594B (zh) * 2021-11-12 2023-10-10 湖南高梁红电子科技有限公司 一种充电器加工工艺
CN115365191B (zh) * 2022-08-26 2023-07-25 合肥众禾动力新能源科技有限公司 一种锂电池除尘装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009233547A (ja) * 2008-03-26 2009-10-15 Nippon Electric Glass Co Ltd ガラス板端面洗浄装置およびその洗浄方法
JP2010207687A (ja) * 2009-03-09 2010-09-24 Nagaoka Seisakusho:Kk 基板搬送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3074145B2 (ja) * 1996-08-12 2000-08-07 三星ダイヤモンド工業株式会社 洗浄機能付き研磨装置
KR100436361B1 (ko) * 2000-12-15 2004-06-18 (주)케이.씨.텍 기판 가장자리를 세정하기 위한 장치
JP4486003B2 (ja) * 2005-07-07 2010-06-23 大日本スクリーン製造株式会社 基板洗浄ブラシ、ならびにこれを用いた基板処理装置および基板処理方法
JP4976341B2 (ja) * 2008-06-18 2012-07-18 東京エレクトロン株式会社 基板洗浄装置および基板洗浄方法、ならびに記憶媒体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009233547A (ja) * 2008-03-26 2009-10-15 Nippon Electric Glass Co Ltd ガラス板端面洗浄装置およびその洗浄方法
JP2010207687A (ja) * 2009-03-09 2010-09-24 Nagaoka Seisakusho:Kk 基板搬送装置

Also Published As

Publication number Publication date
TW201515725A (zh) 2015-05-01
JP2015080781A (ja) 2015-04-27
JP5651226B1 (ja) 2015-01-07
KR20150047410A (ko) 2015-05-04
TWI530331B (zh) 2016-04-21
CN104550063A (zh) 2015-04-29
CN104550063B (zh) 2017-05-10

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