KR101521254B1 - 이중으로 몰딩된 다중칩 패키지 시스템 - Google Patents
이중으로 몰딩된 다중칩 패키지 시스템 Download PDFInfo
- Publication number
- KR101521254B1 KR101521254B1 KR1020070140692A KR20070140692A KR101521254B1 KR 101521254 B1 KR101521254 B1 KR 101521254B1 KR 1020070140692 A KR1020070140692 A KR 1020070140692A KR 20070140692 A KR20070140692 A KR 20070140692A KR 101521254 B1 KR101521254 B1 KR 101521254B1
- Authority
- KR
- South Korea
- Prior art keywords
- integrated circuit
- capsule
- circuit die
- package system
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/114—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
- H10W74/117—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/479—Leadframes on or in insulating or insulated package substrates, interposers, or redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
- H10W70/614—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together the multiple chips being integrally enclosed
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/014—Manufacture or treatment using batch processing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/01—Manufacture or treatment
- H10W74/019—Manufacture or treatment using temporary auxiliary substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/111—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
- H10W74/121—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by multiple encapsulations, e.g. by a thin protective coating and a thick encapsulation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/075—Connecting or disconnecting of bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/241—Dispositions, e.g. layouts
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/50—Bond wires
- H10W72/531—Shapes of wire connectors
- H10W72/533—Cross-sectional shape
- H10W72/534—Cross-sectional shape being rectangular
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/10—Configurations of laterally-adjacent chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/618,806 US8178982B2 (en) | 2006-12-30 | 2006-12-30 | Dual molded multi-chip package system |
| US11/618,806 | 2006-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20080063197A KR20080063197A (ko) | 2008-07-03 |
| KR101521254B1 true KR101521254B1 (ko) | 2015-05-18 |
Family
ID=39582767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020070140692A Active KR101521254B1 (ko) | 2006-12-30 | 2007-12-28 | 이중으로 몰딩된 다중칩 패키지 시스템 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8178982B2 (https=) |
| JP (1) | JP5348632B2 (https=) |
| KR (1) | KR101521254B1 (https=) |
| TW (1) | TWI441265B (https=) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200802751A (en) * | 2005-11-01 | 2008-01-01 | Koninkl Philips Electronics Nv | An air cavity package for a semiconductor die and methods of forming the air cavity package |
| US8178982B2 (en) | 2006-12-30 | 2012-05-15 | Stats Chippac Ltd. | Dual molded multi-chip package system |
| TWI360207B (en) | 2007-10-22 | 2012-03-11 | Advanced Semiconductor Eng | Chip package structure and method of manufacturing |
| US7888184B2 (en) * | 2008-06-20 | 2011-02-15 | Stats Chippac Ltd. | Integrated circuit packaging system with embedded circuitry and post, and method of manufacture thereof |
| US8076786B2 (en) * | 2008-07-11 | 2011-12-13 | Advanced Semiconductor Engineering, Inc. | Semiconductor package and method for packaging a semiconductor package |
| US7842542B2 (en) | 2008-07-14 | 2010-11-30 | Stats Chippac, Ltd. | Embedded semiconductor die package and method of making the same using metal frame carrier |
| US7993941B2 (en) | 2008-12-05 | 2011-08-09 | Stats Chippac, Ltd. | Semiconductor package and method of forming Z-direction conductive posts embedded in structurally protective encapsulant |
| US8354304B2 (en) | 2008-12-05 | 2013-01-15 | Stats Chippac, Ltd. | Semiconductor device and method of forming conductive posts embedded in photosensitive encapsulant |
| JP5238523B2 (ja) | 2009-01-13 | 2013-07-17 | 株式会社日立国際電気 | 動画像符号化装置、動画像復号化装置、および、動画像復号化方法 |
| US8003445B2 (en) * | 2009-03-26 | 2011-08-23 | Stats Chippac Ltd. | Integrated circuit packaging system with z-interconnects having traces and method of manufacture thereof |
| US8569894B2 (en) | 2010-01-13 | 2013-10-29 | Advanced Semiconductor Engineering, Inc. | Semiconductor package with single sided substrate design and manufacturing methods thereof |
| TWI411075B (zh) | 2010-03-22 | 2013-10-01 | 日月光半導體製造股份有限公司 | 半導體封裝件及其製造方法 |
| US8409978B2 (en) | 2010-06-24 | 2013-04-02 | Stats Chippac, Ltd. | Semiconductor device and method of forming vertically offset bond on trace interconnect structure on leadframe |
| US8598709B2 (en) * | 2010-08-31 | 2013-12-03 | Infineon Technologies Ag | Method and system for routing electrical connections of semiconductor chips |
| US8753926B2 (en) * | 2010-09-14 | 2014-06-17 | Qualcomm Incorporated | Electronic packaging with a variable thickness mold cap |
| US9406658B2 (en) | 2010-12-17 | 2016-08-02 | Advanced Semiconductor Engineering, Inc. | Embedded component device and manufacturing methods thereof |
| US9034692B2 (en) * | 2011-03-21 | 2015-05-19 | Stats Chippac Ltd. | Integrated circuit packaging system with a flip chip and method of manufacture thereof |
| TWI590392B (zh) * | 2015-08-03 | 2017-07-01 | 矽品精密工業股份有限公司 | 電子封裝件及其製法 |
| JP7746888B2 (ja) * | 2022-03-14 | 2025-10-01 | 住友電気工業株式会社 | 半導体装置およびその製造方法 |
| CN117832190A (zh) * | 2022-09-28 | 2024-04-05 | 星科金朋私人有限公司 | 集成封装及其制造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970703618A (ko) * | 1995-04-05 | 1997-07-03 | 존 엠. 클락 3세 | 다층 리드 프레임(multi-layer lead frame) |
| US20060197210A1 (en) * | 2005-03-04 | 2006-09-07 | Hyun-Ki Kim | Stack semiconductor package formed by multiple molding and method of manufacturing the same |
| US20060258044A1 (en) * | 2005-05-11 | 2006-11-16 | Infineon Technologies Ag | Method of manufacturing a semiconductor device comprising stacked chips and a corresponding semiconductor device |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5200362A (en) * | 1989-09-06 | 1993-04-06 | Motorola, Inc. | Method of attaching conductive traces to an encapsulated semiconductor die using a removable transfer film |
| US5353498A (en) * | 1993-02-08 | 1994-10-11 | General Electric Company | Method for fabricating an integrated circuit module |
| US5841193A (en) * | 1996-05-20 | 1998-11-24 | Epic Technologies, Inc. | Single chip modules, repairable multichip modules, and methods of fabrication thereof |
| US20010052647A1 (en) | 1998-05-07 | 2001-12-20 | 3M Innovative Properties Company | Laminated integrated circuit package |
| US6300679B1 (en) * | 1998-06-01 | 2001-10-09 | Semiconductor Components Industries, Llc | Flexible substrate for packaging a semiconductor component |
| KR100302593B1 (ko) * | 1998-10-24 | 2001-09-22 | 김영환 | 반도체패키지및그제조방법 |
| US6078505A (en) | 1999-05-14 | 2000-06-20 | Triquint Semiconductor, Inc. | Circuit board assembly method |
| JP3497775B2 (ja) * | 1999-08-23 | 2004-02-16 | 松下電器産業株式会社 | 半導体装置 |
| JP2001320015A (ja) * | 2000-05-12 | 2001-11-16 | Sony Corp | 半導体装置およびその製造方法 |
| US6309912B1 (en) * | 2000-06-20 | 2001-10-30 | Motorola, Inc. | Method of interconnecting an embedded integrated circuit |
| JP2002134653A (ja) * | 2000-10-23 | 2002-05-10 | Matsushita Electric Ind Co Ltd | 半導体装置とその製造方法 |
| TW550997B (en) * | 2001-10-18 | 2003-09-01 | Matsushita Electric Industrial Co Ltd | Module with built-in components and the manufacturing method thereof |
| WO2003049184A1 (fr) * | 2001-12-07 | 2003-06-12 | Fujitsu Limited | Dispositif semi-conducteur et procede de fabrication correspondant |
| US6812552B2 (en) * | 2002-04-29 | 2004-11-02 | Advanced Interconnect Technologies Limited | Partially patterned lead frames and methods of making and using the same in semiconductor packaging |
| US7548430B1 (en) * | 2002-05-01 | 2009-06-16 | Amkor Technology, Inc. | Buildup dielectric and metallization process and semiconductor package |
| US20040080025A1 (en) * | 2002-09-17 | 2004-04-29 | Shinko Electric Industries Co., Ltd. | Lead frame, method of manufacturing the same, and semiconductor device manufactured with the same |
| SG137651A1 (en) * | 2003-03-14 | 2007-12-28 | Micron Technology Inc | Microelectronic devices and methods for packaging microelectronic devices |
| JP4204989B2 (ja) * | 2004-01-30 | 2009-01-07 | 新光電気工業株式会社 | 半導体装置及びその製造方法 |
| JP2005317903A (ja) * | 2004-03-31 | 2005-11-10 | Alps Electric Co Ltd | 回路部品モジュール、回路部品モジュールスタック、記録媒体およびこれらの製造方法 |
| JP2006120943A (ja) * | 2004-10-22 | 2006-05-11 | Shinko Electric Ind Co Ltd | チップ内蔵基板及びその製造方法 |
| TWI260056B (en) * | 2005-02-01 | 2006-08-11 | Phoenix Prec Technology Corp | Module structure having an embedded chip |
| JP2006295051A (ja) * | 2005-04-14 | 2006-10-26 | Sony Corp | 半導体装置及びその製造方法 |
| US7408254B1 (en) * | 2005-08-26 | 2008-08-05 | Amkor Technology Inc | Stack land grid array package and method for manufacturing the same |
| US8178982B2 (en) | 2006-12-30 | 2012-05-15 | Stats Chippac Ltd. | Dual molded multi-chip package system |
| US8384199B2 (en) | 2007-06-25 | 2013-02-26 | Epic Technologies, Inc. | Integrated conductive structures and fabrication methods thereof facilitating implementing a cell phone or other electronic system |
| US7888184B2 (en) | 2008-06-20 | 2011-02-15 | Stats Chippac Ltd. | Integrated circuit packaging system with embedded circuitry and post, and method of manufacture thereof |
-
2006
- 2006-12-30 US US11/618,806 patent/US8178982B2/en active Active
-
2007
- 2007-12-24 TW TW096149652A patent/TWI441265B/zh active
- 2007-12-28 JP JP2007339497A patent/JP5348632B2/ja active Active
- 2007-12-28 KR KR1020070140692A patent/KR101521254B1/ko active Active
-
2012
- 2012-04-10 US US13/443,067 patent/US8558399B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR970703618A (ko) * | 1995-04-05 | 1997-07-03 | 존 엠. 클락 3세 | 다층 리드 프레임(multi-layer lead frame) |
| US20060197210A1 (en) * | 2005-03-04 | 2006-09-07 | Hyun-Ki Kim | Stack semiconductor package formed by multiple molding and method of manufacturing the same |
| US20060258044A1 (en) * | 2005-05-11 | 2006-11-16 | Infineon Technologies Ag | Method of manufacturing a semiconductor device comprising stacked chips and a corresponding semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| US20120193805A1 (en) | 2012-08-02 |
| TW200836272A (en) | 2008-09-01 |
| US20080157402A1 (en) | 2008-07-03 |
| US8178982B2 (en) | 2012-05-15 |
| KR20080063197A (ko) | 2008-07-03 |
| US8558399B2 (en) | 2013-10-15 |
| JP2008166816A (ja) | 2008-07-17 |
| JP5348632B2 (ja) | 2013-11-20 |
| TWI441265B (zh) | 2014-06-11 |
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