KR101502210B1 - 유체 중의 미립자 검출 장치 및 검출 방법 - Google Patents

유체 중의 미립자 검출 장치 및 검출 방법 Download PDF

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Publication number
KR101502210B1
KR101502210B1 KR1020127026580A KR20127026580A KR101502210B1 KR 101502210 B1 KR101502210 B1 KR 101502210B1 KR 1020127026580 A KR1020127026580 A KR 1020127026580A KR 20127026580 A KR20127026580 A KR 20127026580A KR 101502210 B1 KR101502210 B1 KR 101502210B1
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KR
South Korea
Prior art keywords
fluid
flow path
measured
fine particles
pipe
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KR1020127026580A
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English (en)
Korean (ko)
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KR20120127672A (ko
Inventor
후미타카 이치하라
히로시 스가와라
요시노리 오노
Original Assignee
오르가노 가부시키가이샤
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Publication of KR20120127672A publication Critical patent/KR20120127672A/ko
Application granted granted Critical
Publication of KR101502210B1 publication Critical patent/KR101502210B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means

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  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Sampling And Sample Adjustment (AREA)
KR1020127026580A 2010-07-21 2011-07-13 유체 중의 미립자 검출 장치 및 검출 방법 KR101502210B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2010-163940 2010-07-21
JP2010163940A JP5599249B2 (ja) 2010-07-21 2010-07-21 流体中の微粒子検出装置及び検出方法
PCT/JP2011/065996 WO2012011420A1 (ja) 2010-07-21 2011-07-13 流体中の微粒子検出装置及び検出方法

Publications (2)

Publication Number Publication Date
KR20120127672A KR20120127672A (ko) 2012-11-22
KR101502210B1 true KR101502210B1 (ko) 2015-03-12

Family

ID=45496847

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127026580A KR101502210B1 (ko) 2010-07-21 2011-07-13 유체 중의 미립자 검출 장치 및 검출 방법

Country Status (5)

Country Link
JP (1) JP5599249B2 (ja)
KR (1) KR101502210B1 (ja)
CN (1) CN102869977B (ja)
TW (1) TWI571623B (ja)
WO (1) WO2012011420A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180074250A (ko) * 2016-12-23 2018-07-03 주식회사 포스코 용액내 미립자 검출용 화상검출장치

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3021218A1 (fr) 2014-05-26 2015-11-27 Eydo Pharma Utilisation du cinnamaldehyde en association avec de l'eugenol et/ou du carvacrol pour lutter contre la resistance aux antibiotiques
WO2018147462A1 (ja) * 2017-02-10 2018-08-16 東ソー株式会社 粒子検出装置及び粒子検出方法
KR20230038866A (ko) * 2021-09-13 2023-03-21 세메스 주식회사 기판 처리 방법 및 기판 처리 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008046137A (ja) * 2002-01-22 2008-02-28 Praxair Technol Inc 二酸化炭素中の不純物を分析する方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4973937B2 (ja) * 2007-08-24 2012-07-11 オルガノ株式会社 高圧流体中の微粒子測定システムおよび微粒子測定方法
JP4997568B2 (ja) * 2007-08-24 2012-08-08 オルガノ株式会社 高圧二酸化炭素の微粒子測定システムおよび微粒子測定方法
TWM381713U (en) * 2010-01-22 2010-06-01 Kumtek Internat Co Ltd Fluid pipe heating device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008046137A (ja) * 2002-01-22 2008-02-28 Praxair Technol Inc 二酸化炭素中の不純物を分析する方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180074250A (ko) * 2016-12-23 2018-07-03 주식회사 포스코 용액내 미립자 검출용 화상검출장치
KR101897232B1 (ko) 2016-12-23 2018-09-11 주식회사 포스코 용액내 미립자 검출용 화상검출장치

Also Published As

Publication number Publication date
JP5599249B2 (ja) 2014-10-01
JP2012026792A (ja) 2012-02-09
WO2012011420A1 (ja) 2012-01-26
TW201229488A (en) 2012-07-16
TWI571623B (zh) 2017-02-21
CN102869977A (zh) 2013-01-09
KR20120127672A (ko) 2012-11-22
CN102869977B (zh) 2014-11-26

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