KR101365188B1 - 다중-사이트 프로브 - Google Patents

다중-사이트 프로브 Download PDF

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Publication number
KR101365188B1
KR101365188B1 KR1020107005841A KR20107005841A KR101365188B1 KR 101365188 B1 KR101365188 B1 KR 101365188B1 KR 1020107005841 A KR1020107005841 A KR 1020107005841A KR 20107005841 A KR20107005841 A KR 20107005841A KR 101365188 B1 KR101365188 B1 KR 101365188B1
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KR
South Korea
Prior art keywords
probe
semiconductor
matrix array
substrate
conductor
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KR1020107005841A
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English (en)
Korean (ko)
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KR20100055483A (ko
Inventor
앤드류 갱오소
리안 마르티네즈
Original Assignee
어드밴스드 마이크로 디바이시즈, 인코포레이티드
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Application filed by 어드밴스드 마이크로 디바이시즈, 인코포레이티드 filed Critical 어드밴스드 마이크로 디바이시즈, 인코포레이티드
Publication of KR20100055483A publication Critical patent/KR20100055483A/ko
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Publication of KR101365188B1 publication Critical patent/KR101365188B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2846—Fault-finding or characterising using hard- or software simulation or using knowledge-based systems, e.g. expert systems, artificial intelligence or interactive algorithms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020107005841A 2007-08-17 2008-08-15 다중-사이트 프로브 Active KR101365188B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/840,587 2007-08-17
US11/840,587 US7847568B2 (en) 2007-08-17 2007-08-17 Multi-site probe
PCT/IB2008/002158 WO2009024851A2 (en) 2007-08-17 2008-08-15 Multi-site probe

Publications (2)

Publication Number Publication Date
KR20100055483A KR20100055483A (ko) 2010-05-26
KR101365188B1 true KR101365188B1 (ko) 2014-02-21

Family

ID=40328863

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107005841A Active KR101365188B1 (ko) 2007-08-17 2008-08-15 다중-사이트 프로브

Country Status (6)

Country Link
US (1) US7847568B2 (enExample)
EP (1) EP2183603B1 (enExample)
JP (1) JP2010537187A (enExample)
KR (1) KR101365188B1 (enExample)
CN (1) CN101821634B (enExample)
WO (1) WO2009024851A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100069300A (ko) * 2008-12-16 2010-06-24 삼성전자주식회사 프로브 카드와, 이를 이용한 반도체 디바이스 테스트 장치 및 방법
US8519729B2 (en) * 2010-02-10 2013-08-27 Sunpower Corporation Chucks for supporting solar cell in hot spot testing
US9716031B2 (en) 2014-04-08 2017-07-25 Nxp Usa, Inc. Semiconductor wafer and method of concurrently testing circuits formed thereon
US9997423B2 (en) 2014-04-08 2018-06-12 Nxp Usa, Inc. Semiconductor wafer and method of concurrently testing circuits formed thereon
CN104615018A (zh) * 2014-12-18 2015-05-13 西安华芯半导体有限公司 一种调整同测芯片dc参数的方法
US10620236B2 (en) * 2017-06-12 2020-04-14 Marvell Asia Pte, Ltd. Multi-test type probe card and corresponding testing system for parallel testing of dies via multiple test sites
US12183609B2 (en) * 2022-03-03 2024-12-31 Micron Technology, Inc. Wafer carrier with reticle template for marking reticle fields on a semiconductor wafer
CN117199055A (zh) * 2022-06-01 2023-12-08 长鑫存储技术有限公司 封装结构及其制作方法、半导体器件

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1548450A2 (en) * 1999-08-19 2005-06-29 Fujitsu Limited Probe card and method of testing wafer having a plurality of semiconductor devices
WO2007007852A1 (ja) * 2005-07-14 2007-01-18 Teijin Chemicals Ltd. 発泡樹脂シートおよび液晶表示装置
EP1965422A1 (en) * 2005-12-22 2008-09-03 JSR Corporation Circuit board apparatus for wafer inspection, probe card, and wafer inspection apparatus

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US4038599A (en) * 1974-12-30 1977-07-26 International Business Machines Corporation High density wafer contacting and test system
US4692205A (en) * 1986-01-31 1987-09-08 International Business Machines Corporation Silicon-containing polyimides as oxygen etch stop and dual dielectric coatings
JPH0715969B2 (ja) * 1991-09-30 1995-02-22 インターナショナル・ビジネス・マシーンズ・コーポレイション マルチチツプ集積回路パツケージ及びそのシステム
JP3219844B2 (ja) * 1992-06-01 2001-10-15 東京エレクトロン株式会社 プローブ装置
KR100248569B1 (ko) * 1993-12-22 2000-03-15 히가시 데쓰로 프로우브장치
US6258609B1 (en) * 1996-09-30 2001-07-10 Micron Technology, Inc. Method and system for making known good semiconductor dice
US6404212B1 (en) * 1999-02-18 2002-06-11 St Assembly Test Services Pte Ltd Testing of BGA and other CSP packages using probing techniques
JP2000260852A (ja) * 1999-03-11 2000-09-22 Tokyo Electron Ltd 検査ステージ及び検査装置
US6812718B1 (en) * 1999-05-27 2004-11-02 Nanonexus, Inc. Massively parallel interface for electronic circuits
US6407568B1 (en) * 2000-02-10 2002-06-18 International Business Machines Corporation Apparatus for probing ends of pins
US6441629B1 (en) * 2000-05-31 2002-08-27 Advantest Corp Probe contact system having planarity adjustment mechanism
JP2002122630A (ja) * 2000-10-17 2002-04-26 Ando Electric Co Ltd Ｉｃテスタ調整装置
JP2002168906A (ja) * 2000-11-28 2002-06-14 Ando Electric Co Ltd テストヘッドの接続装置
US6547409B2 (en) * 2001-01-12 2003-04-15 Electroglas, Inc. Method and apparatus for illuminating projecting features on the surface of a semiconductor wafer
JP2003007784A (ja) * 2001-06-22 2003-01-10 Hitachi Maxell Ltd 半導体検査装置
US6674296B1 (en) * 2002-02-28 2004-01-06 Advanced Micro Devices, Inc. Probe card measurement tool
US20050212546A1 (en) * 2004-03-26 2005-09-29 Mark Lynch Method and apparatus for package testing
JP4521611B2 (ja) * 2004-04-09 2010-08-11 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
WO2006028238A1 (ja) * 2004-09-06 2006-03-16 Nec Corporation テストキャリア
JP4859174B2 (ja) * 2005-07-11 2012-01-25 日本電子材料株式会社 プローブカード
TW200729373A (en) * 2006-01-20 2007-08-01 Advanced Semiconductor Eng Test module for wafer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1548450A2 (en) * 1999-08-19 2005-06-29 Fujitsu Limited Probe card and method of testing wafer having a plurality of semiconductor devices
WO2007007852A1 (ja) * 2005-07-14 2007-01-18 Teijin Chemicals Ltd. 発泡樹脂シートおよび液晶表示装置
EP1965422A1 (en) * 2005-12-22 2008-09-03 JSR Corporation Circuit board apparatus for wafer inspection, probe card, and wafer inspection apparatus

Also Published As

Publication number Publication date
WO2009024851A2 (en) 2009-02-26
EP2183603A2 (en) 2010-05-12
CN101821634B (zh) 2013-08-14
JP2010537187A (ja) 2010-12-02
US20090045827A1 (en) 2009-02-19
CN101821634A (zh) 2010-09-01
US7847568B2 (en) 2010-12-07
WO2009024851A3 (en) 2009-04-30
KR20100055483A (ko) 2010-05-26
EP2183603B1 (en) 2012-10-31

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