KR101364010B1 - 슬릿 밸브 제어 - Google Patents

슬릿 밸브 제어 Download PDF

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Publication number
KR101364010B1
KR101364010B1 KR1020117007242A KR20117007242A KR101364010B1 KR 101364010 B1 KR101364010 B1 KR 101364010B1 KR 1020117007242 A KR1020117007242 A KR 1020117007242A KR 20117007242 A KR20117007242 A KR 20117007242A KR 101364010 B1 KR101364010 B1 KR 101364010B1
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KR
South Korea
Prior art keywords
slit valve
valve door
sealing
door
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020117007242A
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English (en)
Korean (ko)
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KR20110063794A (ko
Inventor
타카유키 마츠모토
시니치 쿠리타
Original Assignee
어플라이드 머티어리얼스, 인코포레이티드
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Publication date
Application filed by 어플라이드 머티어리얼스, 인코포레이티드 filed Critical 어플라이드 머티어리얼스, 인코포레이티드
Publication of KR20110063794A publication Critical patent/KR20110063794A/ko
Application granted granted Critical
Publication of KR101364010B1 publication Critical patent/KR101364010B1/ko
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • H10P95/00—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H10P72/3406—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020117007242A 2008-08-29 2009-08-20 슬릿 밸브 제어 Active KR101364010B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US9328808P 2008-08-29 2008-08-29
US61/093,288 2008-08-29
US12/538,237 US8297591B2 (en) 2008-08-29 2009-08-10 Slit valve control
US12/538,237 2009-08-10
PCT/US2009/054469 WO2010025081A2 (en) 2008-08-29 2009-08-20 Slit valve control

Publications (2)

Publication Number Publication Date
KR20110063794A KR20110063794A (ko) 2011-06-14
KR101364010B1 true KR101364010B1 (ko) 2014-02-17

Family

ID=41722235

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117007242A Active KR101364010B1 (ko) 2008-08-29 2009-08-20 슬릿 밸브 제어

Country Status (6)

Country Link
US (1) US8297591B2 (enExample)
JP (1) JP5543463B2 (enExample)
KR (1) KR101364010B1 (enExample)
CN (1) CN102138199B (enExample)
TW (1) TWI435016B (enExample)
WO (1) WO2010025081A2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120042828A1 (en) * 2010-08-17 2012-02-23 Primestar Solar, Inc. Slit valve for vacuum chamber module
JP5044725B1 (ja) * 2012-04-27 2012-10-10 株式会社ブイテックス シール材のつぶし量が制御可能なゲートバルブ
TWI484531B (zh) * 2012-05-31 2015-05-11 Archers Inc 閥門總成以及閥門
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
USD796562S1 (en) 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
KR101840940B1 (ko) 2016-09-12 2018-03-21 에스케이실트론 주식회사 고온 상압 기상성장장치에 마련되는 챔버 간의 개폐 장치
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
JP6405067B1 (ja) * 2018-04-13 2018-10-17 株式会社ブイテックス ゲートバルブの制御方法
US20230002906A1 (en) * 2021-07-01 2023-01-05 Mellanox Technologies, Ltd. Continuous-feed chemical vapor deposition system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020038528A1 (en) * 1999-01-27 2002-04-04 Jeff Blahnik Inflatable slit/gate valve
US20060011140A1 (en) * 2004-07-13 2006-01-19 Jeff Blahnik Single-sided inflatable vertical slit valve
US7086638B2 (en) * 2003-05-13 2006-08-08 Applied Materials, Inc. Methods and apparatus for sealing an opening of a processing chamber

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
CH675286A5 (enExample) * 1988-02-04 1990-09-14 Sulzer Ag
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
JPH11182699A (ja) * 1997-12-22 1999-07-06 Toshiba Corp ゲートバルブ
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
JP4092028B2 (ja) * 1999-02-08 2008-05-28 新明和工業株式会社 真空ゲート弁
JP2001021048A (ja) * 1999-06-29 2001-01-26 Varian Inc ランプアクチュエータ機構を有するゲートバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
AU2003254050A1 (en) * 2002-07-22 2004-02-09 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
US7841582B2 (en) * 2004-06-02 2010-11-30 Applied Materials, Inc. Variable seal pressure slit valve doors for semiconductor manufacturing equipment
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7469715B2 (en) * 2005-07-01 2008-12-30 Applied Materials, Inc. Chamber isolation valve RF grounding

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020038528A1 (en) * 1999-01-27 2002-04-04 Jeff Blahnik Inflatable slit/gate valve
US7086638B2 (en) * 2003-05-13 2006-08-08 Applied Materials, Inc. Methods and apparatus for sealing an opening of a processing chamber
US20060011140A1 (en) * 2004-07-13 2006-01-19 Jeff Blahnik Single-sided inflatable vertical slit valve

Also Published As

Publication number Publication date
TWI435016B (zh) 2014-04-21
WO2010025081A3 (en) 2010-05-06
JP5543463B2 (ja) 2014-07-09
US20100051111A1 (en) 2010-03-04
WO2010025081A2 (en) 2010-03-04
CN102138199B (zh) 2013-11-27
KR20110063794A (ko) 2011-06-14
CN102138199A (zh) 2011-07-27
TW201026981A (en) 2010-07-16
US8297591B2 (en) 2012-10-30
JP2012501421A (ja) 2012-01-19

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