WO2010025081A2 - Slit valve control - Google Patents

Slit valve control Download PDF

Info

Publication number
WO2010025081A2
WO2010025081A2 PCT/US2009/054469 US2009054469W WO2010025081A2 WO 2010025081 A2 WO2010025081 A2 WO 2010025081A2 US 2009054469 W US2009054469 W US 2009054469W WO 2010025081 A2 WO2010025081 A2 WO 2010025081A2
Authority
WO
WIPO (PCT)
Prior art keywords
slit valve
valve door
door
interior
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2009/054469
Other languages
English (en)
French (fr)
Other versions
WO2010025081A3 (en
Inventor
Takayuki Matsumoto
Shinichi Kurita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to CN2009801346841A priority Critical patent/CN102138199B/zh
Priority to KR1020117007242A priority patent/KR101364010B1/ko
Priority to JP2011525103A priority patent/JP5543463B2/ja
Publication of WO2010025081A2 publication Critical patent/WO2010025081A2/en
Publication of WO2010025081A3 publication Critical patent/WO2010025081A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • H10P95/00—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H10P72/3406—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy

Definitions

  • vacuum chambers i.e., load locks, transfer chambers, process chambers
  • process substrates may process substrates in single or batch substrate fashion.
  • substrates may be transferred to and from chambers in which vacuum must be maintained or established.
  • an opening through the chamber wall in the shape of a slit is frequently provided to accommodate the substrate being processed.
  • a method of sealing a chamber coupled to a slit valve assembly includes vertically actuating a slit valve door in a first direction within a slit valve assembly body from a first position to a second position, linearly actuating at least a first portion of the slit valve door for a first period of time, a first distance, and a first speed in a direction substantially perpendicular to the vertical actuation, and then linearly actuating the first portion of the slit valve door for a second period of time, a second distance, and a second speed.
  • the slit valve door has one or more sealing members coupled thereto.
  • the slit valve assembly body has and interior volume defined by walls and an opening extending through the slit valve assembly body that is aligned with the opening of the chamber.
  • the second distance is less than the first distance
  • the second speed is less than the first speed
  • the second period of time is about one-fourth the first period of time.
  • a method of sealing a chamber having an opening sized to permit a substrate to pass therethrough includes flowing a gas into an interior of a slit valve door to pressurize the interior of the slit valve door to a first pressure.
  • the slit valve door is disposed in a slit valve assembly body that is coupled with the chamber.
  • the slit valve assembly body has an opening therethrough that is aligned with the opening of the chamber.
  • the slit valve door has walls that enclose an interior volume.
  • the method also comprises expanding the slit valve door until one or more sealing members coupled to the slit valve door contacts an interior surface of the walls and the slit valve door is spaced a first distance from the interior surface of the wall.
  • Figure 3A is a schematic cross sectional view of a slit valve door assembly 300 with the slit valve door 306 in a lowered position.
  • Figure 3A is a schematic cross sectional view of a slit valve door assembly 300 with the slit valve door 306 in a lowered position.
  • Figure 3B is a schematic cross sectional view of the slit valve door assembly 300 of Figure 3A with the slit valve door 306 in a raised position.
  • Figure 3C is a schematic cross sectional view of the slit valve door assembly 300 of Figure 3A with the slit valve door 306 in the closed position.
  • the slit valve door 306 is disposed in the assembly body 302.
  • the body 302 has two openings 304A, 304B therethrough that permit substrates to pass from one chamber to another chamber.
  • One or more detectors 324 may be present to detect when the O-rings 314, 316 initially touch the inside surfaces 318, 320.
  • the detectors 324 may send a signal to the control box 310 which may control not only the vertical movement of the shaft 308, but also the flow of the gas into the slit valve door 306.
  • the flow of gas may be controlled based upon feedback from the detectors 324. Thereafter, the flow rate of the gas into the interior of the slit valve door 306 may be changed to compress the O-rings 314, 316 against the inside surfaces 318, 320 and provide a vacuum seal.
  • the first step may occur for between about 1 second to about 2 seconds and expand the slit valve door 306 between about 15 mm to about 20 mm.
  • the second step may occur for between about 1 second to about 2 seconds and expand the slit valve door 306 between about 1 mm to about 1.25 mm.
  • the interior volume 332 of the slit valve door 306 may be vented to atmosphere. However, the slit valve door 306 may not retract fully. Therefore, the inside volume 332 of the slit valve door 306 may be evacuated by a vacuum pump that may be coupled with the slit valve door 306. By drawing a vacuum in the inside volume 332 of the slit valve door 306, the slit valve door 306 may retract back to its original position. Once fully retracted, the slit valve door 306 may then be lowered.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
PCT/US2009/054469 2008-08-29 2009-08-20 Slit valve control Ceased WO2010025081A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2009801346841A CN102138199B (zh) 2008-08-29 2009-08-20 狭缝阀门的控制
KR1020117007242A KR101364010B1 (ko) 2008-08-29 2009-08-20 슬릿 밸브 제어
JP2011525103A JP5543463B2 (ja) 2008-08-29 2009-08-20 スリットバルブ制御

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US9328808P 2008-08-29 2008-08-29
US61/093,288 2008-08-29
US12/538,237 US8297591B2 (en) 2008-08-29 2009-08-10 Slit valve control
US12/538,237 2009-08-10

Publications (2)

Publication Number Publication Date
WO2010025081A2 true WO2010025081A2 (en) 2010-03-04
WO2010025081A3 WO2010025081A3 (en) 2010-05-06

Family

ID=41722235

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/054469 Ceased WO2010025081A2 (en) 2008-08-29 2009-08-20 Slit valve control

Country Status (6)

Country Link
US (1) US8297591B2 (enExample)
JP (1) JP5543463B2 (enExample)
KR (1) KR101364010B1 (enExample)
CN (1) CN102138199B (enExample)
TW (1) TWI435016B (enExample)
WO (1) WO2010025081A2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120042828A1 (en) * 2010-08-17 2012-02-23 Primestar Solar, Inc. Slit valve for vacuum chamber module
JP5044725B1 (ja) * 2012-04-27 2012-10-10 株式会社ブイテックス シール材のつぶし量が制御可能なゲートバルブ
TWI484531B (zh) * 2012-05-31 2015-05-11 Archers Inc 閥門總成以及閥門
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
USD796562S1 (en) 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
KR101840940B1 (ko) 2016-09-12 2018-03-21 에스케이실트론 주식회사 고온 상압 기상성장장치에 마련되는 챔버 간의 개폐 장치
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
JP6405067B1 (ja) * 2018-04-13 2018-10-17 株式会社ブイテックス ゲートバルブの制御方法
US20230002906A1 (en) * 2021-07-01 2023-01-05 Mellanox Technologies, Ltd. Continuous-feed chemical vapor deposition system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
CH675286A5 (enExample) * 1988-02-04 1990-09-14 Sulzer Ag
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
JPH11182699A (ja) * 1997-12-22 1999-07-06 Toshiba Corp ゲートバルブ
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6347918B1 (en) * 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
JP4092028B2 (ja) * 1999-02-08 2008-05-28 新明和工業株式会社 真空ゲート弁
JP2001021048A (ja) * 1999-06-29 2001-01-26 Varian Inc ランプアクチュエータ機構を有するゲートバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
AU2003254050A1 (en) * 2002-07-22 2004-02-09 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
CN100408902C (zh) * 2003-05-13 2008-08-06 应用材料股份有限公司 密封一处理室一开口的方法与装置
US7841582B2 (en) * 2004-06-02 2010-11-30 Applied Materials, Inc. Variable seal pressure slit valve doors for semiconductor manufacturing equipment
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7469715B2 (en) * 2005-07-01 2008-12-30 Applied Materials, Inc. Chamber isolation valve RF grounding

Also Published As

Publication number Publication date
TWI435016B (zh) 2014-04-21
KR101364010B1 (ko) 2014-02-17
WO2010025081A3 (en) 2010-05-06
JP5543463B2 (ja) 2014-07-09
US20100051111A1 (en) 2010-03-04
CN102138199B (zh) 2013-11-27
KR20110063794A (ko) 2011-06-14
CN102138199A (zh) 2011-07-27
TW201026981A (en) 2010-07-16
US8297591B2 (en) 2012-10-30
JP2012501421A (ja) 2012-01-19

Similar Documents

Publication Publication Date Title
US8297591B2 (en) Slit valve control
US10950476B2 (en) Electronic device manufacturing load port apparatus, systems, and methods
US20080210307A1 (en) Control of slit valve door seal pressure
US6612546B2 (en) Gate valve with delayed retraction of counter plate
KR200491849Y1 (ko) 슬릿 밸브 도어들을 구비한 로드 락 챔버
KR20010101757A (ko) 팽창성 슬릿/게이트 밸브
US20120247564A1 (en) Shockless slit valve control
CN103939628B (zh) 具有移动适配部分的用以耦接o形环的狭缝化tssl阀门
US6173938B1 (en) Two speed air cylinder for slit valve motion control
JP2012501421A5 (enExample)
KR20250112266A (ko) 벨로우즈 드라이브를 가진 가스 유입 밸브
AU2002318278B2 (en) Gate valve with delayed retraction of counter plate
AU2002318278A1 (en) Gate valve with delayed retraction of counter plate

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200980134684.1

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09810473

Country of ref document: EP

Kind code of ref document: A2

ENP Entry into the national phase

Ref document number: 2011525103

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20117007242

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 09810473

Country of ref document: EP

Kind code of ref document: A2