JP5543463B2 - スリットバルブ制御 - Google Patents

スリットバルブ制御 Download PDF

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Publication number
JP5543463B2
JP5543463B2 JP2011525103A JP2011525103A JP5543463B2 JP 5543463 B2 JP5543463 B2 JP 5543463B2 JP 2011525103 A JP2011525103 A JP 2011525103A JP 2011525103 A JP2011525103 A JP 2011525103A JP 5543463 B2 JP5543463 B2 JP 5543463B2
Authority
JP
Japan
Prior art keywords
slit valve
valve door
door
rings
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011525103A
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English (en)
Japanese (ja)
Other versions
JP2012501421A5 (enExample
JP2012501421A (ja
Inventor
隆之 松本
真一 栗田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2012501421A publication Critical patent/JP2012501421A/ja
Publication of JP2012501421A5 publication Critical patent/JP2012501421A5/ja
Application granted granted Critical
Publication of JP5543463B2 publication Critical patent/JP5543463B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • H10P95/00—
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H10P72/3406—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0391—Affecting flow by the addition of material or energy

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2011525103A 2008-08-29 2009-08-20 スリットバルブ制御 Expired - Fee Related JP5543463B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US9328808P 2008-08-29 2008-08-29
US61/093,288 2008-08-29
US12/538,237 US8297591B2 (en) 2008-08-29 2009-08-10 Slit valve control
US12/538,237 2009-08-10
PCT/US2009/054469 WO2010025081A2 (en) 2008-08-29 2009-08-20 Slit valve control

Publications (3)

Publication Number Publication Date
JP2012501421A JP2012501421A (ja) 2012-01-19
JP2012501421A5 JP2012501421A5 (enExample) 2013-06-27
JP5543463B2 true JP5543463B2 (ja) 2014-07-09

Family

ID=41722235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011525103A Expired - Fee Related JP5543463B2 (ja) 2008-08-29 2009-08-20 スリットバルブ制御

Country Status (6)

Country Link
US (1) US8297591B2 (enExample)
JP (1) JP5543463B2 (enExample)
KR (1) KR101364010B1 (enExample)
CN (1) CN102138199B (enExample)
TW (1) TWI435016B (enExample)
WO (1) WO2010025081A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101840940B1 (ko) 2016-09-12 2018-03-21 에스케이실트론 주식회사 고온 상압 기상성장장치에 마련되는 챔버 간의 개폐 장치

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120042828A1 (en) * 2010-08-17 2012-02-23 Primestar Solar, Inc. Slit valve for vacuum chamber module
JP5044725B1 (ja) * 2012-04-27 2012-10-10 株式会社ブイテックス シール材のつぶし量が制御可能なゲートバルブ
TWI484531B (zh) * 2012-05-31 2015-05-11 Archers Inc 閥門總成以及閥門
EP2876341B1 (de) * 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
USD796562S1 (en) 2016-04-11 2017-09-05 Applied Materials, Inc. Plasma outlet liner
US10224224B2 (en) * 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
JP6405067B1 (ja) * 2018-04-13 2018-10-17 株式会社ブイテックス ゲートバルブの制御方法
US20230002906A1 (en) * 2021-07-01 2023-01-05 Mellanox Technologies, Ltd. Continuous-feed chemical vapor deposition system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4747577A (en) * 1986-07-23 1988-05-31 The Boc Group, Inc. Gate valve with magnetic closure for use with vacuum equipment
CH675286A5 (enExample) * 1988-02-04 1990-09-14 Sulzer Ag
US5975492A (en) * 1997-07-14 1999-11-02 Brenes; Arthur Bellows driver slot valve
JPH11182699A (ja) * 1997-12-22 1999-07-06 Toshiba Corp ゲートバルブ
US6079693A (en) * 1998-05-20 2000-06-27 Applied Komatsu Technology, Inc. Isolation valves
US6347918B1 (en) * 1999-01-27 2002-02-19 Applied Materials, Inc. Inflatable slit/gate valve
JP4092028B2 (ja) * 1999-02-08 2008-05-28 新明和工業株式会社 真空ゲート弁
JP2001021048A (ja) * 1999-06-29 2001-01-26 Varian Inc ランプアクチュエータ機構を有するゲートバルブ
JP3425938B2 (ja) * 2000-12-14 2003-07-14 入江工研株式会社 ゲート弁
AU2003254050A1 (en) * 2002-07-22 2004-02-09 Mdc Vacuum Products Corporation High-vacuum valve with retractable valve plate to eliminate abrasion
CN100408902C (zh) * 2003-05-13 2008-08-06 应用材料股份有限公司 密封一处理室一开口的方法与装置
US7841582B2 (en) * 2004-06-02 2010-11-30 Applied Materials, Inc. Variable seal pressure slit valve doors for semiconductor manufacturing equipment
US7422653B2 (en) * 2004-07-13 2008-09-09 Applied Materials, Inc. Single-sided inflatable vertical slit valve
US7494107B2 (en) * 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7469715B2 (en) * 2005-07-01 2008-12-30 Applied Materials, Inc. Chamber isolation valve RF grounding

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101840940B1 (ko) 2016-09-12 2018-03-21 에스케이실트론 주식회사 고온 상압 기상성장장치에 마련되는 챔버 간의 개폐 장치

Also Published As

Publication number Publication date
TWI435016B (zh) 2014-04-21
KR101364010B1 (ko) 2014-02-17
WO2010025081A3 (en) 2010-05-06
US20100051111A1 (en) 2010-03-04
WO2010025081A2 (en) 2010-03-04
CN102138199B (zh) 2013-11-27
KR20110063794A (ko) 2011-06-14
CN102138199A (zh) 2011-07-27
TW201026981A (en) 2010-07-16
US8297591B2 (en) 2012-10-30
JP2012501421A (ja) 2012-01-19

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