KR101351667B1 - 진공 펌프 - Google Patents

진공 펌프 Download PDF

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Publication number
KR101351667B1
KR101351667B1 KR1020087002669A KR20087002669A KR101351667B1 KR 101351667 B1 KR101351667 B1 KR 101351667B1 KR 1020087002669 A KR1020087002669 A KR 1020087002669A KR 20087002669 A KR20087002669 A KR 20087002669A KR 101351667 B1 KR101351667 B1 KR 101351667B1
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KR
South Korea
Prior art keywords
rotor
pump
vacuum pump
tip radius
stage
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Active
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KR1020087002669A
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English (en)
Korean (ko)
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KR20080025194A (ko
Inventor
니겔 폴 쇼필드
피터 휴 버치
Original Assignee
에드워즈 리미티드
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Electrophonic Musical Instruments (AREA)
KR1020087002669A 2005-08-02 2006-07-18 진공 펌프 Active KR101351667B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0515905.8A GB0515905D0 (en) 2005-08-02 2005-08-02 Vacuum pump
GB0515905.8 2005-08-02
PCT/GB2006/002679 WO2007015056A1 (en) 2005-08-02 2006-07-18 Vacuum pump

Publications (2)

Publication Number Publication Date
KR20080025194A KR20080025194A (ko) 2008-03-19
KR101351667B1 true KR101351667B1 (ko) 2014-01-14

Family

ID=34983964

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087002669A Active KR101351667B1 (ko) 2005-08-02 2006-07-18 진공 펌프

Country Status (10)

Country Link
US (2) US20100158728A1 (https=)
EP (1) EP1910682B1 (https=)
JP (1) JP2009503358A (https=)
KR (1) KR101351667B1 (https=)
CN (1) CN101238294B (https=)
AT (1) ATE427426T1 (https=)
DE (1) DE602006006062D1 (https=)
GB (1) GB0515905D0 (https=)
TW (1) TWI453342B (https=)
WO (1) WO2007015056A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210138676A (ko) * 2019-04-05 2021-11-19 파이퍼 배큠 건식 진공 펌프 및 펌핑 설비

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0515905D0 (en) 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
JP4767625B2 (ja) * 2005-08-24 2011-09-07 樫山工業株式会社 多段ルーツ式ポンプ
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
CN102278309A (zh) * 2010-06-12 2011-12-14 中国科学院沈阳科学仪器研制中心有限公司 一种真空泵结构
JP5793004B2 (ja) * 2011-06-02 2015-10-14 株式会社荏原製作所 真空ポンプ
DE202011104491U1 (de) 2011-08-17 2012-11-20 Oerlikon Leybold Vacuum Gmbh Wälzkolbenpumpe
GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
CN103629113B (zh) * 2013-07-19 2016-01-20 浙江飞越机电有限公司 油箱侧置式双级旋片真空泵
JP6630174B2 (ja) * 2015-03-09 2020-01-15 株式会社荏原製作所 真空ポンプ
US20160265532A1 (en) * 2015-03-09 2016-09-15 Ebara Corporation Vacuum pump
DE202017001029U1 (de) 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
GB201707458D0 (en) * 2017-05-10 2017-06-21 Edwards Ltd Lubrication of gears in twin-shaft pumps
DE202017003212U1 (de) * 2017-06-17 2018-09-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
JP2019039395A (ja) * 2017-08-25 2019-03-14 樫山工業株式会社 多段ルーツポンプ
GB2570925B (en) 2018-02-12 2021-07-07 Edwards Ltd Reinforced vacuum system component
CN110500275B (zh) * 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的泵壳体结构
GB2590665B (en) * 2019-12-23 2022-06-08 Edwards S R O Pump configured to mitigate the effect of any rotor and stator clash and its method of manufacture
FR3107933B1 (fr) * 2020-03-04 2022-03-04 Pfeiffer Vacuum Technology AG Pompe à vide sèche et procédé de fabrication
GB2602625B (en) * 2020-12-15 2023-05-31 Edwards S R O Method for stopping a vacuum pump
CN112963346B (zh) * 2021-02-24 2022-06-07 西安交通大学 一种多级扭叶罗茨真空泵转子及其设计方法
FR3121716B1 (fr) * 2021-04-08 2023-03-24 Pfeiffer Vacuum Pompe à vide
GB2606223A (en) * 2021-04-30 2022-11-02 Edwards Ltd Stator for a vacuum pump
JP2023116194A (ja) * 2022-02-09 2023-08-22 株式会社荏原製作所 真空ポンプ
CN116066365B (zh) * 2023-03-23 2023-10-10 北京通嘉宏瑞科技有限公司 一种提高制程物容纳能力的真空泵组件及干式真空泵
CN119062574A (zh) * 2024-11-05 2024-12-03 浙江博亚精密机械有限公司 一种多级罗茨真空泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312173A (ja) * 1992-05-06 1993-11-22 Shimadzu Corp ドライ真空ポンプ
JP2000120538A (ja) * 1998-10-19 2000-04-25 Yoshio Abe 多段容積式圧縮機。
JP2002364569A (ja) * 2001-06-01 2002-12-18 Ulvac Japan Ltd 多段ルーツ真空ポンプ
JP2005155540A (ja) 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4068984A (en) * 1974-12-03 1978-01-17 H & H Licensing Corporation Multi-stage screw-compressor with different tooth profiles
GB8513684D0 (en) 1985-05-30 1985-07-03 Boc Group Plc Mechanical pumps
JPH03111690A (ja) * 1989-09-22 1991-05-13 Tokuda Seisakusho Ltd 真空ポンプ
JPH0518379A (ja) * 1991-06-23 1993-01-26 Ulvac Japan Ltd 多段ルーツ型真空ポンプ
DE4232119A1 (de) * 1992-09-25 1994-03-31 Mes Und Regeltechnik Geraeteba Regelung einer Wälzkolbenpumpe
JP3941484B2 (ja) * 2001-12-03 2007-07-04 アイシン精機株式会社 多段式真空ポンプ
US20030223897A1 (en) * 2002-06-03 2003-12-04 Jim Ferentinos Two-stage rotary screw fluid compressor
TW200506217A (en) * 2003-03-19 2005-02-16 Ebara Corp Positive-displacement vacuum pump
JP2005098210A (ja) 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ
GB0515905D0 (en) 2005-08-02 2005-09-07 Boc Group Plc Vacuum pump
JP5312173B2 (ja) 2009-04-22 2013-10-09 本田技研工業株式会社 パルサープレートの取付構造

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312173A (ja) * 1992-05-06 1993-11-22 Shimadzu Corp ドライ真空ポンプ
JP2000120538A (ja) * 1998-10-19 2000-04-25 Yoshio Abe 多段容積式圧縮機。
JP2002364569A (ja) * 2001-06-01 2002-12-18 Ulvac Japan Ltd 多段ルーツ真空ポンプ
JP2005155540A (ja) 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210138676A (ko) * 2019-04-05 2021-11-19 파이퍼 배큠 건식 진공 펌프 및 펌핑 설비
KR102799112B1 (ko) 2019-04-05 2025-04-21 파이퍼 배큠 건식 진공 펌프 및 펌핑 설비

Also Published As

Publication number Publication date
GB0515905D0 (en) 2005-09-07
DE602006006062D1 (de) 2009-05-14
US20110318210A1 (en) 2011-12-29
EP1910682B1 (en) 2009-04-01
TW200720546A (en) 2007-06-01
US20100158728A1 (en) 2010-06-24
ATE427426T1 (de) 2009-04-15
KR20080025194A (ko) 2008-03-19
CN101238294B (zh) 2012-09-26
US8702407B2 (en) 2014-04-22
WO2007015056A1 (en) 2007-02-08
TWI453342B (zh) 2014-09-21
CN101238294A (zh) 2008-08-06
EP1910682A1 (en) 2008-04-16
JP2009503358A (ja) 2009-01-29

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