KR101333993B1 - Hand of robot and work carrying robot using it - Google Patents

Abstract

When carrying a workpiece such as a glass substrate processed under a high temperature environment, the hand can be cooled efficiently and uniformly, and at the same time, a hand having a lighter structure and a work carrying robot using the same are provided. .

The cooling medium is formed in the mounting portion 11 formed in a shape having a hollow 11a separated from the outside and carrying the work, and the hollow 11a at one end of the mounting portion 11. A medium introduction pipe 15 to be introduced and a medium discharge port 17 for discharging the cooling medium from the hollow 11a on the other end side of the mounting portion 11 are provided.

Description

HAND OF ROBOT AND WORK CARRYING ROBOT USING IT}

1 shows an outline of a work carrying robot according to an embodiment of the present invention. (a) is its top view, and (b) is its side cross-sectional view.

2 is a cross sectional top view of a hand according to an embodiment of the present invention.

Fig. 3A is a top view (partial cross-sectional view) of the mounting portion according to the embodiment of the present invention, and Fig. 3B is a side cross-sectional view thereof.

It is an enlarged view of the principal part of the hand which concerns on other embodiment in this invention.

<Description of the code>

1 work carrier robot

2 base charges

3, 4, 5 joints

6 first cancer

7 second cancer

8 compressor

9 air filter

10 hand

11 loading compartment

11a hollow

12 connections

12a hollow connection

13 medium pressure pipe

14 Media outlet

15a, 15b, 15c, 15d medium introduction tubes

16a, 16b, 16c, 16d media outlet

17 Media outlet

18 adsorption pad

19 sensor

20 Piping for adsorption pad

21 exhaust filter

W work (glass substrate)

<Technical Field>

TECHNICAL FIELD This invention relates to the hand of the robot which handles the workpiece | work, such as a glass substrate and a wafer, in high temperature environment, and the workpiece conveyance robot using this.

BACKGROUND ART [0002]

Conventionally, in the manufacturing process of flat panel displays (FPD), such as a liquid crystal display and a plasma display, and a semiconductor, in order to convey a board | substrate, such as flat glass and wafers which are these basic materials, as a workpiece | work from one process to another process, a board | substrate Many transfer robots are used. In addition, the manufacturing process includes the process of processing by a high temperature heating furnace. For example, when manufacturing a glass substrate, a glass substrate is taken out of the cassette for inter-process conveyance, a potion is apply | coated to the surface of a glass substrate, and it carries in to a high temperature heating furnace, dissolves a potion under the high temperature, and is glass It is to install a process for forming film-forming on the surface of the substrate. In this process, since a glass substrate is processed in a high temperature heating furnace, the glass substrate film-formed at high temperature by the normal glass substrate conveyance hand is continuously conveyed to the processing apparatus of the next process. At the time of such conveyance, when the glass substrate after film-forming is conveyed, and the glass substrate to be processed next is taken out by the hand which became high temperature in a heating furnace, and a potion is applied, the potion apply | coated to the glass substrate by the heat of a hand will be smudged. On the other hand, the hand may be heated to high temperature by continuous conveyance, and the hand itself may deform in the high temperature heating furnace.

In order to cope with such a problem, the robot hand which conveys a glass substrate is proposed, extending and contacting the pipe body which a cooling medium circulates around a hand, and cooling a hand in a high temperature environment. (Patent document 1 Reference)

[Patent Document 1] Japanese Patent Laid-Open No. 2002-346965

Problem to be solved by invention

However, in the hand of the robot of patent document 1, while the cooling medium circulates from the upstream part to the downstream part of a pipe body, the temperature of a cooling medium rises and it cannot fully cool the hand of a downstream part, There is a disadvantage of excessive cooling. In addition, only a portion of the cooling medium in contact with the circulating pipe body is cooled, so that the entire hand cannot be sufficiently cooled.

That is, there exists a problem that cooling becomes uneven not only in the upstream and lower part of the cooling medium of a hand, but also in the part which contact | connects the pipe body of a hand, and other parts. In addition, there is a problem that the hand itself is distorted due to non-uniform cooling, and deformation becomes easy.

Moreover, in the hand of the robot of patent document 1, since the pipe body which consists of a metal with high thermal conductivity etc. is extended and installed around the hand which processed the solid material, the hand becomes comparatively heavy, There is a problem that adversely affects the movement performance and the operation efficiency of the robot.

This invention is made | formed in order to solve said problem, The objective is being able to cool a hand efficiently and uniformly at the time of conveying a workpiece | work, such as a glass substrate processed in a high temperature environment, and compared with the conventional It is to provide a hand of a robot having a light weight structure and a work carrying robot using the same.

MEANS FOR SOLVING THE PROBLEMS [

In order to achieve this object, the hand of the robot of the present invention is formed in a shape having a hollow spaced apart from the outside, the mounting portion for loading the work, and the cooling medium in the hollow on one end side of the mounting portion. And a medium discharge port for discharging the cooling medium from the hollow on the other end side of the mounting portion.

According to the present invention, since the cooling medium is introduced into the hollow on one end side of the mounting portion which is insulated from the outside, the used cooling medium is discharged from the medium outlet provided on the other end side of the hollow. The cooling medium flows from the one end side of the hollow of the mounting portion to the other end side, and the mounting portion can be cooled uniformly and efficiently from the hollow inside thereof.

In the hand of the robot of the present invention, it is preferable that at least one or more medium ejection ports of the medium introduction pipe are provided in the hollow at the proximal end from the distal end of the mounting portion.

According to the present invention, by providing one or more medium ejection outlets of the medium introduction pipes in the hollow at the base end, the ejection of the coolant medium having a high cooling efficiency before use can provide By distributing a plurality of peripheral regions in the hollow, the inside of the hollow can be cooled uniformly and with high efficiency, and further, the mounting portion of the hand can be cooled uniformly and efficiently.

In the hand of the robot of the present invention, it is preferable that a plurality of the medium introduction pipes are provided, the lengths thereof are different, and the medium ejection openings are provided at their front ends.

According to the present invention, by discharging a cooling medium efficiently from a media outlet provided at the front end of a plurality of media introduction pipes having different lengths, the peripheral area of the media outlet having high cooling efficiency is dispersed in the hollow in accordance with the length of the medium introduction pipe. can do. Therefore, the mounting portion of the hand can be cooled efficiently and uniformly.

In the hand of the robot of the present invention, using the gas as the cooling medium, the medium discharge port is installed at or near the base end of the mounting portion, and at the same time, the cooling medium is discharged to the outside of the hollow through a dust removal filter. It is desirable to.

According to the present invention, since the used cooling medium is discharged as a clean gas from which dust is removed from the proximal end of the mounting portion or its vicinity, it is contaminated with the used cooling medium from which the workpiece placed on the mounting portion near the tip of the hand is discharged. It doesn't work.

In the hand of the robot of the present invention, the medium discharge port is preferably connected in communication with a medium discharge pipe for discharging the cooling medium to the outside of a work area of the robot.

According to the present invention, since the used cooling medium is discharged to the outside of the robot work area by the medium discharge pipe from the medium discharge port, the workpiece conveyed in the work area is not contaminated with the used cooling medium.

In the hand of the robot of the present invention, the mounting portion is preferably formed of a mixed material of carbon fiber and heat resistant resin. In this case, since the carbon fiber has good thermal conductivity, the mounting portion can be efficiently cooled by the cooling medium on the hollow side.

Moreover, in the hand of the robot of this invention, it is preferable to provide an aluminum layer on the surface of the said mounting part which contact | connects the said hollow exterior. In this case, the aluminum layer provided on the surface of the mounting portion reflects heat from the outside, preventing the mounting portion from deteriorating, and further improving the cooling efficiency by the cooling medium in the hollow.

In the hand of the robot of the present invention, it is preferable that the thickness of the mounting portion becomes thinner gradually from the base end to the tip end. According to the present invention, by forming the proximal end side of the mounting portion thickly and forming the proximal end side thinly, the rigidity of the proximal end can be increased, and further, a large work load can prevent the deflection of the enclosing portion from the proximal end. Moreover, the hollow space which arrange | positions a some medium introduction pipe in the base end side can be ensured.

The workpiece conveyance robot of the present invention is formed in a shape having a hollow spaced apart from the outside, and includes a loading portion for loading the work and a refrigerant introduction tube for introducing a cooling medium into the hollow on one end of the loading portion and the loading portion. And a work-loading hand having a refrigerant discharge port for discharging the cooling medium from the hollow on the other end side, and means for feeding the cooling medium into the medium introduction pipe.

According to the present invention, the cooling medium is conveyed to the medium introduction pipe, and the cooling medium is introduced to one end side into the hollow spaced apart from the outside of the work loading hand via the medium introduction pipe, and the medium is provided on the other end side of the hollow. By discharging the used cooling medium from the discharge port to cool the hand as a whole from the inner side, the hand can be cooled efficiently and uniformly.

As the workpiece conveyance robot of this invention, it is preferable to provide a dust removal filter between the said medium introduction pipe | tube and the said conveying means. In this case, it is possible to prevent the flow path of the medium from filling up or being discharged out of the hand without dust remaining in the hollow of the flow path of the cooling medium such as the medium introduction pipe or the medium discharge port and the work-holding hand.

EFFECTS OF THE INVENTION [

According to the hand of the robot of the present invention and the work conveying robot using the same, the above-mentioned hollow cores are separated from the high-temperature exterior by the mounting portion, the medium introduction pipe for introducing the cooling medium into the hollow on one end side, and the hollow on the other end side. By providing a medium outlet for discharging the cooling medium and introducing the cooling medium into the hollow on one side, the cooling medium is discharged from the one end side of the hollow on the other side by discharging the cooling medium from the other end of the hollow. It flows and can cool a loading part uniformly from the hollow inside.

Further, in the hand of the robot of the present invention, at least one or more medium discharge ports of the medium introduction pipe are installed in the hollow at the base end from the tip of the loading section, thereby distributing a plurality of peripheral regions of the medium ejection outlet having high cooling efficiency in the hollow. It can provide, and can cool the inside of the hollow of a mounting part uniformly and highly efficiently, and also can cool the mounting part efficiently and uniformly. In addition, by the uniform cooling, the twisting and deformation of the hand itself can be prevented.

Thus, according to this invention, when conveying the workpiece processed in a high temperature environment, the robot hand which can cool the whole hand uniformly and efficiently, and the workpiece conveyance robot using the same in a lightweight and simple structure compared with the past Can be realized.

BEST MODE FOR CARRYING OUT THE INVENTION [

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments for carrying out the present invention will be described with reference to the drawings.

1 shows an outline of a work carrier robot according to the present embodiment. Fig. 1A is a top view thereof and Fig. 1B is a side cross-sectional view thereof. This work conveyance robot 1 is provided with the conveyance system which is a structure for conveying and carrying out a workpiece | work with respect to the heating furnace of a high temperature environment, and the hand cooling system which is a structure for cooling a hand. In addition, the workpiece conveyance robot 1 of this embodiment is used by the manufacturing process of the panel display FPD which constant cleanness is calculated | required, and conveys the glass substrate W as a workpiece | work.

(Summary of Transfer System)

First, a conveyance system is demonstrated. The work conveying robot 1 (hereinafter simply referred to as "robot 1") includes a first arm 6 rotatable about the joint 3 on the base 2, and 2nd arm 7 rotatably connected to the joint part 4 of the front end side of the 1 arm 6, and the hand 10 rotatably connected to the joint part 5 of the front end part of the 2nd arm 7 It is raining.

Each of the joints 3 to 5 has a built-in pulley and at the same time, the joints 3 and 4 and the joints 4 and 5 are connected to each other by a timing belt so that the hand 10 always faces in a predetermined direction. It is installed to move. And the hand 10 is able to enter and exit with respect to the heating furnace which is not shown in figure, and loads and conveys the glass substrate W between a heating furnace and the cassette which is not shown in figure.

Moreover, the hand 10 is formed of the mixed material of carbon fiber and heat resistant resin so that it may mention later, and has the hand cooling mechanism for cooling the hand demonstrated in detail below. On the other hand, the base table 2, the 1st arm 6, and the 2nd arm 7 operate | move within the work area adjacent to a heating furnace. The structure arrange | positioned in these work areas is formed from materials, such as an aluminum alloy used at normal temperature, without requiring a special heat-resistant processing.

In addition, in this embodiment, although the robot 1 is made into the horizontal articulated robot which consists of a conveyance system which performs a conveyance operation | movement as mentioned above, application of this invention is not limited to such a horizontal articulated robot, but it is high temperature. It can be widely applied to the hand of a robot that carries a work under the environment. Moreover, it is not limited to a glass substrate as a workpiece | work, You may convey the wafer of a semiconductor etc. as a workpiece | work.

(Overview of Hand Cooling System)

The cooling system of the robot 1 is a path of a series of cooling mediums having means for conveying the cooling medium from the outside of the work area, a means for discharging the cooling mechanism in the hand 10 and the used cooling medium. In addition, the arrow in the middle shows the direction of the cooling medium, the arrow X of FIG. 1 (b) shows the atmospheric intake direction (the conveying direction of the cooling medium), and the arrow Y shows the discharge direction of the finished cooling medium. In addition, the cooling mechanism in the hand 10 is mentioned later.

The robot 1 has a compressor 8 for pumping air as a conveying means for conveying a cooling medium by using an atmosphere at room temperature as a cooling medium, and an air filter 9 on the hand 10 side of the compressor 8. ) Is installed.

The air filter 9 removes dust and water from the air pushed from the compressor 8 to make clean dry air. And the compressor 8 and the air filter 9 are connected to the medium feed pipe 13.

The medium pressure pipe 13 surrounds the inside of the robot 1 and presses clean dry air as a cooling medium to the hand 10. The medium conveying pipe 13 is a conveying system from the base table 2 to the mounting portion 11 of the hand 10 via the first arm 6, the second arm, and the indirect portions 3 to 5. It is connected so as not to drive and buffer. In the present embodiment, the medium pressure feeding pipe 13 is disposed so as to avoid buffering with the timing belt via an empty hole provided in the center of the pulley (not shown) of the indirect parts 3 to 5.

The robot 1 of this embodiment is a medium which discharges the used cooling medium after cooling the hand 10 to the outside of the work area in order to maintain the cleanliness required in the manufacturing process of the flat panel display FPD. The discharge pipe 14 is provided in the medium feeding pipes 13 so as not to buffer the conveying system. In addition, when the filter 14a is attached to the terminal of the medium discharge pipe 14, you may exhaust air which is a used cooling medium in a work area. Also in this case, since the exhaust part can be provided in the area | region away from the work conveyance area | region of a work area, it does not deteriorate a clean environment.

In the present embodiment, compressed air (atmosphere) and a compressor 8 for compressing the same are used as means for conveying the cooling medium and the cooling medium. Instead, liquids such as various gases and water are used as the cooling medium. It can be set as a structure to convey. For example, when compressed nitrogen contained in a bomb (cylindrical container containing a high-pressure gas) is used, the nitrogen is cooled when evaporated, whereby a good cooling medium can be obtained. In this case, since the nitrogen is clean, the air filter 9 can be omitted.

Moreover, when the compressed air is drawn in from the compressed air supply system for factories, the robot 1 does not need to have an independent compressor 8, which is economical. In addition, the medium feeding pipe 13 and the medium discharge pipe 14 may be connected through a cooler in a system in which the hand cooling system is closed. In addition, you may coat | cover the medium pressure feed pipe 13 with a heat insulating material as needed.

(Configuration of the cooling hand)

Next, the hand 10 of this embodiment and its cooling mechanism are demonstrated, referring FIG. 2 and FIG. 2 is a cross-sectional view of the upper surface of the hand according to the present embodiment. Fig. 3A is a cross sectional top view of a mounting portion of the hand according to the present embodiment, and Fig. 3B is a side cross-sectional view thereof. In addition, in FIG.3 (a) (b), the arrow X shows the conveying direction of a cooling medium, and the arrow Y shows the discharge direction of the used cooling medium.

The hand 10 puts the glass substrate W on the mounting part 11 as a workpiece | work, and is carrying in and carrying this out with respect to a heating furnace. The hand 10 is comprised from the four mounting parts 11 and the connection part 12 which mount a workpiece | work, and the mounting part 11 is integrally connected and supported by the connection part 12. As shown in FIG. Moreover, the joint part 5 which supports the hand 10 rotatably with respect to the 2nd arm 7 is provided in the substantially center part of the connection part 12. As shown in FIG. In addition, in this embodiment, although four mounting parts 11 on which glass substrate W is mounted are provided, it can be set as two or more suitable numbers according to the size of glass substrate W to convey.

The mounting part 11 is formed in the hollow elongate shape by the mixed material of carbon fiber and heat resistant resin, and the hollow 11a in the inside is in the sealed state in which it repels the external environment. In the hollow 11a inside this mounting part 11, the medium introduction pipe 15 which introduces the cooling medium from the medium feed pipe 13 is provided. The medium introduction pipe 15 has a medium ejection opening 16 at its tip. At the base end of the mounting portion 11, a medium discharge port 17 for discharging the used cooling medium from the hollow 11a is provided.

As shown in FIG. 2, four medium introduction pipes 15 are provided in each mounting part 11 as medium introduction pipes 15a, 15b, 15c, and 15d having different lengths. The medium introduction pipes 15a, 15b, 15c, and 15d are connected to the medium feed pipe 13 at the base end of the mounting portion 11, and branch off from the medium feed pipe 13. Moreover, the media ejection openings 16a, 16b, 16c, and 16d are provided in the front-end | tip of media introduction pipe | tube 15a, 15b, 15c, and 15d.

Since the lengths of the medium introduction pipes 15a, 15b, 15c, and 15d are different, the medium ejection ports 16a, 16b, 16c, and 16d are arranged at substantially equal intervals in the hollow 11b. By arranging the media outlets at equal intervals as described above, the inside of the hollow 11b can be cooled uniformly and efficiently, and furthermore, the mounting portion 11 is cooled uniformly and efficiently from the side of the hollow 11a. can do.

In this embodiment, although the medium introduction port 15 is arrange | positioned at substantially equal intervals by branching the medium introduction pipe 15 and changing the length, the medium introduction pipe 15 is removed from the medium feeding pipe 13. It is also possible to provide a plurality of medium ejection openings 16 at equal intervals from the base end to the tip without branching. Thus, by arranging a plurality of medium ejection openings 16 at equal intervals, a uniform and efficient cooling effect can be obtained similarly.

Next, since the mounting portion 11 including such a cooling mechanism is formed of a mixed material of carbon fiber and heat resistant resin having good thermal conductivity, the mounting portion 11 is a cooling medium introduced into the hollow 11a. Can be efficiently cooled.

In addition, an aluminum layer (not shown) is provided on the surface in contact with the outside of the mounting portion 11. The aluminum layer provided on the surface of the mounting portion reflects heat irradiated from the outside, thereby increasing the heat resistance of the mounting portion 11, preventing the mounting portion from deteriorating, and by a cooling medium introduced into the hollow 11a. Cooling efficiency can be improved further. In addition, when forming a mounting part, an aluminum layer is formed by a suitable method, such as vacuum deposition and foil sticking.

Moreover, the mounting part 11 is formed in the taper shape whose thickness becomes thinner toward the front-end | tip from the base end, and the cross section of the short longitudinal direction is substantially rectangular, and mounts the glass substrate W. As shown in FIG. The upper surface 11b to be laid is a flat plate shape. Therefore, since the base end of the mounting part 11 is thick and the tip is thin, the rigidity of a base end part can be improved. For this reason, sufficient rigidity can be ensured in the base end part which becomes the maximum moment. Moreover, since the tip side is lighter than the base end side, the center of the mounting part becomes the base end side, and the whole mounting part becomes light in weight. For this reason, since the resonance frequency of the robot 1 rises, the operation speed can be increased.

Moreover, since the base end of the mounting part 11 is thick and the tip is thin, even if the tip side is bent downward by the weight of the workpiece, it can be prevented from interfering with the lower mounting part 11 or the work. Moreover, since the surface 11b which mounts the glass substrate W becomes flat form, the glass substrate W can be kept stable.

In addition, a plurality of medium introduction pipes 15 can be arranged in the thickness direction on the proximal end of the mounting portion 11 formed thick. In this case, since the medium introduction pipe 15 can be expanded, more favorable cooling efficiency can be obtained.

Next, the connection part 12 connects and hold | maintains the base end of the four mounting parts 11, It is formed with the mixed material of carbon fiber and heat resistant resin similarly to the mounting part 11, and the mounting part ( It is made of box type of airtight structure independent from 11). The inside of the connection part 12 has the medium feed pipe 13 connected to the mounting part 11, the medium discharge pipe 14, wiring of the suction pad piping 20, the sensor 19, etc. which are mentioned later. The hollow 12a is passed through. In addition, the medium pressure feeding pipe 13 and the medium discharge pipe 14 which send the cooling medium before use are arrange | positioned so that it may not contact, and the medium pressure feeding pipe 13 is coat | covered with the heat insulating material as needed.

The central portion of the connecting portion 12 is connected to the second arm 7 by the joint portion 5. The joint part 5 passes through the medium feeding pipe 13, the medium discharge pipe 14, and the wiring of the suction pad pipe 20 and the sensor 19, which will be described later, while the second arm 7 side and the connection part hollow. It is a seal structure so that 12a may not be communicated. Therefore, high temperature air is not transmitted to the inside of the workpiece carrier robot body via the second arm 7 from the hand 10 side.

Next, the sensor 11 which scans the position of the glass substrate W with respect to the suction pad 18 and the hand 10 for adsorb | sucking and holding a workpiece | work on the upper surface 11b of the mounting part 11 ( 19) is installed.

The adsorption pad 18 adsorb | sucks this and keeps it stable, when mounting a workpiece | work on the mounting part 11. The suction pad piping 20 is connected to the suction pad 18 from the inside of the mounting portion 11. The suction pad piping 20 surrounds the inside of the robot 1 via the connecting portion 12 from the mounting portion 11 and is connected to a suction driving source (not shown).

When the glass substrate W is mounted on the mounting portion 11, the sensor 19 scans the workpiece so that the hand 10 faces the workpiece in front of the workpiece so that the relative position of the workpiece and the hand 10 is measured. To check. The wiring (not shown) of the sensor 19 surrounds the inside of the robot 1 via the connecting portion 12 from the mounting portion 11 in the same manner as the suction pad piping 20, and is not shown. It is connected to the operation control part of a robot.

(Hand cooling operation)

Next, the cooling operation of the hand in the workpiece conveyance robot comprised as mentioned above is demonstrated.

First, clean dry air as a cooling medium is pumped from the compressor 18 and the air filter 9 outside the work area to the medium feeding pipe 13. The dry air is branch-feeded from the connection part 12 of the hand 10 to each loading part 11 via the medium pressure pipe 13 in the robot 1. In addition, in the vicinity of the base end of the mounting portion 11, it branches to the medium introduction pipes 15a to 15d, and is fed to the hollow 11a of the mounting portion 11.

As shown in FIG. 2, the dry air conveyed to the medium introduction pipes 15a-15d blows out into the hollow 11a from each medium ejection opening 16a-16d. Here, the dry air blown out from the medium ejection opening 16a flows toward the base end of the loading section 11 while cooling the vicinity of the tip of the loading section 11 as shown by arrow A in the middle. Moreover, the dry air (arrow B) which blows off from the medium jet port 16b flows toward the base end of the loading part 11 by cooling the peripheral area | region of the medium jet port. In this way, the dry air (arrows C, D) ejected from the media ejectors 16c and 16d respectively cools the peripheral region of the respective media ejectors and loads the media outlet 17 at the proximal end of the loading section 11. Is drawn to. In this way, the used dry air (middle arrow E) is discharged | emitted out of the work area via the medium discharge pipe 14.

In this way, the dry air is continuously conveyed by the compressor 8, and is discharged from the medium outlet 17 after cooling the peripheral region of each of the medium ejection openings 16a to 16d, so that circulation of the cooling medium is formed. The circulation of this cooling medium is formed so that it always flows from the front end side of the loading part 11 toward the base end side in the hollow 11a.

In the present invention, since the hollow 11a of the mounting portion 11 is cooled by circulation of the cooling medium flowing from the front end side of the mounting portion 11 to the proximal side as described above, the mounting portion 11 Can be cooled efficiently from the side of the hollow 11a as a whole. Moreover, since the area | region in the vicinity of the dispersion media outlet 16a-16d is respectively cooled, it can cool uniformly from the front-end | tip of the loading part 11 to a base end.

In addition, since the circulation amount of such dry air (cooling medium) can control the pressure of the compressor 8 (pressure feed means) suitably, cooling ability can be adjusted suitably. Therefore, a temperature sensor may be provided in the mounting portion 11 to control the cooling capacity in accordance with the temperature of the mounting portion 11.

(Other Embodiments)

Next, another embodiment in the present invention will be described. 4 is an enlarged view illustrating main parts of the hand according to this other embodiment. In addition, about the structure similar to embodiment mentioned above, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

In the present embodiment, the difference from the above-described embodiment is that the dryness is directly used from the exhaust filter 21 provided in the connecting portion 12, instead of the medium discharge pipe 14 and the filter 14a at the tip thereof. It is set as the structure which discharges air (E).

In this embodiment, the exhaust filter 21 which removes dust is provided in the opposite side to the installation part of the mounting part 11 of the connection part 12. As shown in FIG. Moreover, the medium discharge port 17 of the mounting part 11 is formed with the short pipe | tube which communicates with the connection part hollow 12b. As shown by the arrow F in the middle, the pipe of the medium discharge port 17 is provided so as to exhaust the used dry air toward the exhaust filter 21 side. In addition, the medium discharge port 17 may be referred to as a simple hole.

Since the dry air is pumped and the joint part 5 of the connection part 12 has a seal structure, the dry air F discharged from the mounting part 11 by the structure mentioned above is the length of the connection part 12. FIG. It flows toward the exhaust filter 21 in the direction, and is exhausted from the exhaust filter 21 in the opposite direction to the mounting part 11, as shown by the arrow G in the middle.

According to this embodiment, the favorable cooling effect in the hollow 11a of the mounting part 11 can be acquired. In addition, the connection part 12 can be cooled by dry air discharged from the discharge port 17 (arrow F shown). Therefore, a better cooling effect can be obtained as a whole of the hand 10.

Moreover, the medium discharge pipe 14 does not need to surround the main body of the robot 1 from the joint part 5, and complicated piping can be simplified. In addition, in this embodiment, since the exhaust G of a cooling medium discharges in the opposite direction to the workpiece | work W mounted on the mounting part 11 from the exhaust filter 21, a workpiece | work is not polluted.

According to the hand of the robot of the present invention and the work conveying robot using the same, the above-mentioned hollow cores are separated from the high-temperature exterior by the mounting portion, the medium introduction pipe for introducing the cooling medium into the hollow on one end side, and the hollow on the other end side. By providing a medium outlet for discharging the cooling medium and introducing the cooling medium into the hollow on one side, the cooling medium is discharged from the one end side of the hollow on the other side by discharging the cooling medium from the other end of the hollow. It flows and can cool a loading part uniformly from the hollow inside.

Further, in the hand of the robot of the present invention, at least one or more medium discharge ports of the medium introduction pipe are installed in the hollow at the base end from the tip of the loading section, thereby distributing a plurality of peripheral regions of the medium ejection outlet having high cooling efficiency in the hollow. It can provide, and can cool the inside of the hollow of a mounting part uniformly and highly efficiently, and also can cool the mounting part efficiently and uniformly. In addition, by the uniform cooling, the twisting and deformation of the hand itself can be prevented.

Thus, according to this invention, when conveying the workpiece processed in a high temperature environment, the robot hand which can cool the whole hand uniformly and efficiently, and the workpiece conveyance robot using the same in a lightweight and simple structure compared with the past Can be realized.

Claims (10)

A mounting portion formed in a shape having a hollow spaced apart from the outside and carrying a work; A medium introduction pipe for introducing a cooling medium into the hollow at one end of the mounting portion; A medium discharge port for discharging said cooling medium from said hollow on the other end side of said mounting portion; A plurality of medium ejection openings of the medium introduction pipe are provided in the hollow located between the leading end and the base end of the mounting portion; Hand of the robot, characterized in that the plurality of media outlet is arranged along the longitudinal direction of the mounting portion. delete The method of claim 1, A plurality of the medium introduction pipes are provided, their lengths are different, and the medium ejection openings are provided at their ends. The method of claim 1, Using the gas as the cooling medium, the medium discharge port is installed at or near the base of the mounting portion, and the cooling medium is discharged to the outside of the hollow through a dust removal filter. hand. The method of claim 1, The medium discharge port is connected to a medium discharge pipe for discharging the cooling medium to the outside of the work area of the robot. The method according to any one of claims 1 and 3 to 5, The hand of the robot, characterized in that the mounting portion is formed of a mixed material of carbon fiber and a heat resistant resin. The method according to claim 6, A hand of a robot, wherein an aluminum layer is provided on a surface of the mounting portion facing the outside of the hollow. The method according to claim 6, Hand of the robot, characterized in that the thickness of the mounting portion is gradually thinner from the base end toward the tip. A mounting portion formed into a shape having a hollow spaced out from the outside to mount a work, a medium introduction tube for introducing a cooling medium into the hollow at one end of the mounting portion, and the hollow at the other end of the mounting portion. A work-loading hand having a media outlet for discharging said cooling medium; Means for feeding the cooling medium into the medium introduction pipe, A plurality of medium ejection openings formed in the medium introduction pipe are installed in the hollow located between one end and the other end of the loading part; And a plurality of the medium ejection openings are arranged along the longitudinal direction of the mounting portion. 10. The method of claim 9, And a dust removal filter is provided between the medium introduction pipe and the pressure feeding means.

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