JP2000191137A - Non contact carrier device of plate article - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry out stable non-contact carriage by restraining vibration of a plate article in carriage. SOLUTION: A vibration restraining plate 4 is arranged with a prescribed clearance (damper clearance S2) with one surface 1a of a plate glass 1 between plural numbers of fluid holding parts 3. Compressed air P supplied from a supply port 3a of the fluid holding part 3 flows in a prescribed clearance (holding clearance S1) between the one surface 1a of the plate glass 1 and a holding surface 3c of the fluid holding part 3, a part of the compressed air P outflowing from the holding clearance S1 flows in the damper clearance S2, and the rest is discharged outside through a ventilation passage 6. An air layer is formed in the damper clearance S2 by the compressed air P flowing in the damper clearance S2, the air layer functions as a damper against vibration of the plate glass 1 and it damps vibration of the plate glass 1 in carriage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer apparatus for transferring a sheet-like material such as a glass plate, a semiconductor substrate, a ceramic plate or the like while supporting it in a non-contact state.

[0002]

2. Description of the Related Art For example, in the manufacture of sheet glass, there is a process of transferring the sheet glass for processing, inspection, packing, and the like. is there. In particular, in the case of flat glass that requires high-precision finishing, such as flat glass for liquid crystal displays and plasma displays, any fine scratches or dirt on the surface are judged to be defective. It is something that cannot be ignored by manufacturers.

[0003] Conventionally, in order to convey a plate-like object without flaws or the like, the surface of the plate-like object is brought into a non-contact state by a fluid holding device described in, for example, Japanese Patent Publication No. 1-51413. A transport device that transports while supporting is used. This type of transfer device is roughly divided into a device that attaches a fluid holding device to the tip of a robot hand and transfers a plate-like object by a robot operation while supporting a plate-like object in a non-contact state by a fluid holding device. One in which holding devices are arranged at predetermined intervals along the transfer direction, and one plate is transported by a plurality of fluid holding devices while one surface of the plate-like object is sequentially transported in a non-contact state (for example, Japanese Unexamined Patent Application Publication No. No. 7-257715).

[0004]

SUMMARY OF THE INVENTION The present invention is directed to a transport device belonging to the above-mentioned category among the transport devices described above. In this type of transport device, the leading end of a plate-like object is provided. When moving to the fluid holding device in the forward direction of the transport direction or when the rear end of the plate material moves away from the fluid holding device in the backward direction in the transport direction, the plate material vibrates, and in some cases, the plate material vibrates. One surface may come into contact with the holding surface of the fluid holding device. In particular, JP-A-7-257715
Fluid pressing that presses one surface of a plate-like object in the direction opposite to the direction of bending or the like in order to eliminate the inconvenience in conveyance due to bending or warpage of the plate-like object like the transfer device described in When a means (floating tool) is arranged, the fluid pressing means (floating tool)
The pressing force becomes a disturbance factor, and the vibration of the plate-like object increases, so that the contact with the holding surface of the fluid holding device easily occurs.

SUMMARY OF THE INVENTION The present invention is intended to suppress the vibration of a plate-like object at the time of conveyance in a conveyance device belonging to the above-described category, thereby enabling stable non-contact conveyance.

[0006]

According to the present invention, there is provided a non-contact conveying device for a plate-like object, comprising: a conveying means for conveying the plate-like object in a predetermined direction; The fluid holding unit has a supply port for the pressurized fluid, and a holding surface facing one surface of the plate-like object conveyed by the conveyance unit, and the pressurized liquid supplied from the supply port is provided. Fluid
A plate-like material that supports one surface of the plate-like material in a non-contact state while holding a predetermined holding gap with respect to the holding surface by flowing out through a holding gap between the holding surface and one surface of the plate-like material. In the non-contact transfer device, between the plurality of fluid holding units,
A vibration suppressing plate is provided at a predetermined gap from one surface of the plate-like object.

In the non-contact conveying device for a plate-like object according to the present invention, as described above, since the vibration suppressing plate is provided between the plurality of fluid holding portions, the vibration suppressing plate and one surface of the plate-like object are provided. A layer of pressurized fluid is formed in a predetermined gap between the layers, and the layer of pressurized fluid functions to attenuate the vibration of the plate-like object, thereby achieving stable non-contact conveyance of the plate-like object. Can be.

In the above configuration, the gap between the vibration suppressing plate and one surface of the plate-like object can be set to be larger than the holding gap between the holding surface of the fluid holding portion and one surface of the plate-like object. With such a configuration, even when the plate-shaped object vibrates due to pressure fluctuation or the like during the conveyance of the plate-shaped object, it is possible to prevent the end of the plate-shaped object from contacting the holding surface of the fluid holding unit. Can be avoided.

Further, a part of the pressurized fluid flowing out of the holding gap between the fluid holding portion and the vibration suppressing plate is released to a portion other than the gap between the vibration suppressing plate and one surface of the plate-like material. Ventilation path can be provided. With such a configuration, a flow occurs in the pressurized fluid, and the support function of the fluid holding unit can be secured.

[0010]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a non-contact conveying device for plate-like objects according to the present invention.

FIG. 1 conceptually shows a main part of a non-contact conveying device for a plate-like object according to this embodiment. FIG. 1A is a view (plan view) viewed from above, and FIG. 1B is a front view.

The non-contact transfer device for a plate-like object according to this embodiment is, for example, a transfer means 2 for transferring a sheet glass 1 in a predetermined direction (a direction indicated by an arrow in FIG. 1: a transfer direction), and a transfer means 2 for transferring the plate glass 1. The main components are a plurality of fluid holding portions 3 that support one surface 1a of the glass sheet 1 to be contacted in a non-contact state, and a vibration suppression plate 4 for attenuating the vibration of the glass sheet 1 during transportation.

The glass sheet 1 is used, for example, for a liquid crystal display or a plasma display.

The transporting means 2 may be any as long as it can transport the glass sheet 1 in a predetermined direction, and the configuration thereof is not particularly limited. While the rolling contact is supported by the conveyor 2a, the rear end of the plate glass 1 is pressed by the transfer attachment 2b, and the plate glass 1 is transferred in the arrow direction shown in FIG. The transport attachment 2b is driven by driving means (not shown). The roller conveyor 2a is driven and rotated by contact with the lower end of the sheet glass 1 to be conveyed. In addition, the conveyance posture of the plate glass 1 may be a tilted standing posture, or a horizontal prone posture. In the latter case, the upper or lower surface of the glass sheet 1 is supported by the fluid holding portion in a non-contact manner.

The plurality of fluid holding parts 3 are mounted on the mounting plate 5. The plurality of fluid holding units 3 are arranged at predetermined intervals in the transport direction, and in this embodiment, furthermore, in this embodiment, the upper and lower portions of the plate glass 1 to be transported are respectively arranged in two rows vertically. Have been.

As shown in FIG. 2, each fluid holding portion 3 has a supply port 3a to which a pressurized fluid, for example, compressed air P is supplied, one end communicating with the supply port 3a, and the other end having an opening. And a holding surface 3c formed on the periphery of the opening of the air chamber 3b. In this embodiment, the cross-sectional shape of the fluid holding portion 3 is circular, the diameter of the air chamber 3b is sufficiently larger than the diameter of the supply port 3a, and the holding surface 3c
Is a flat ring.

When the compressed air P is supplied from the supply port 3a through an air pipe (not shown), the compressed air P once flows into the air chamber 3b and is ejected from the opening of the air chamber 3b to the outside. When the glass sheet 1 is conveyed to the position where the fluid holding part 3 is disposed, the compressed air P ejected from the opening of the air chamber 3b flows into the gap S1 formed between the holding surface 3c and the one surface 1a of the glass sheet 1. I do. When the gap S1 is large,
The pressure in the air chamber 3b is reduced by the ejector effect, and at the same time, the static pressure in the gap S1 is reduced by the Bernoulli effect. On the other hand, when the gap S1 becomes smaller, the pressure in the air chamber 3b increases due to the pressure chamber type air cushion effect, and at the same time, the gap S
When a cushion effect is generated in the air flowing through the glass sheet 1, a repulsive force is generated against the glass sheet 1. in this way,
When the suction force and the repulsion force are balanced, the gap S1 between the one surface 1a of the sheet glass 1 and the holding surface 3c of the fluid holding portion 3 is held at a predetermined size δ1, and the one surface 1a of the sheet glass 1 holds the fluid. It is supported in a non-contact state with respect to the holding surface 3c of the portion 3. Hereinafter, the predetermined size δ1
Is referred to as a “holding gap S1”. The size δ1 of the holding gap S1 can be set to, for example, 0.3 mm, or a value slightly larger or slightly smaller than 0.3 mm.

In this embodiment, the vibration suppressing plate 4 is constituted by a single plate-like member, and is fixedly mounted on the mounting plate 5. Further, the vibration suppressing plate 4 is provided with through holes 4a at positions corresponding to the positions where the respective fluid holding portions 3 are arranged, and the respective fluid holding portions 3 are accommodated in the respective through holes 4a in a protruding state. .

As shown in FIG. 2, one surface 4 of the vibration suppressing plate 4
b is set back from the holding surface 3 c of the fluid holding unit 3 toward the mounting plate 5 by a predetermined dimension, so that one surface 4 b of the vibration suppressing plate 4 and the plate glass 1 supported by the fluid holding unit 3
Gap S2 (size δ2) formed between the first surface 1a
Is larger than the holding gap S1 by a predetermined dimension (δ2
> Δ1). The difference between δ2 and δ1 can be set to, for example, 1 mm, or a value slightly larger or slightly smaller than 1 mm. Hereinafter, the gap S2 thus set to the predetermined size δ2 is referred to as “damper gap S2”. Further, the inner diameter of the through hole 4 a of the vibration suppressing plate 4 is larger than the outer diameter of the fluid holding portion 3, and therefore, an annular ventilation having a predetermined passage width t between the fluid holding portion 3 and the vibration suppressing plate 4. Road 6 is formed. FIG. 2 shows an example in which one surface 4b of the vibration suppressing plate 4 is retracted toward the mounting plate 5 side from the holding surface 3c of the fluid holding unit 3, and the damper gap S2 is set to be larger than the holding gap S1. However, depending on the degree of vibration of the glass sheet 1, the damper gap S2 and the holding gap S1 may be set equal (δ2 = δ1).

As described above, the supply port 3a of the fluid holding unit 3
The compressed air P supplied from the storage space flows into the holding gap S1 via the air chamber 3b, a part of the compressed air P flowing out from the holding gap S1 flows into the damper gap S2, and the rest flows into the ventilation path 6. Is discharged to the outside through Damper gap S
An air layer is formed in the damper gap S2 by the compressed air P that has flowed into the sheet glass 2, and the air layer functions as a damper against the vibration of the sheet glass 1, and attenuates the vibration of the sheet glass 1 during transportation. The size δ2 of the damper gap S2
Is set to a value at which the vibration damping function of the vibration suppressing plate 4 can be effectively achieved. In addition, since a part of the compressed air P flowing into the holding gap S1 is discharged to the outside through the ventilation path 6, the function of supporting the plate glass 1 by the fluid holding unit 3 is sufficiently ensured.

In this embodiment, the vibration suppressing plate 4 is formed separately from the fluid holding portion 3, but the vibration suppressing plate 4 may be formed integrally with the fluid holding portion 3. In this case, it is preferable that the ventilation passages 6 are not formed in a single annular shape, but are formed as a plurality of holes and arranged around the vicinity of the fluid holding portion 3. It is also possible to adopt a configuration in which the ventilation path 6 is not provided.

[0022]

As described above, according to the plate-like object non-contact conveying device of the present invention, since the vibration suppressing plate is provided between the plurality of fluid holding portions, the plate-like object at the time of conveyance is provided. Vibration is attenuated by the vibration suppressing plate, and stable non-contact conveyance of the plate-like object can be realized. As a result, it is difficult for the surface of the plate-like material to have flaws or stains during transportation, and the product defect rate is greatly reduced.

Further, by setting the gap between the vibration suppressing plate and the plate-like material larger than the holding gap between the fluid holding portion and the plate-like material, vibration occurs in the plate-like material during conveyance. Even in such a case, it is possible to prevent the plate-shaped object from contacting the fluid holding portion and prevent the plate-shaped object from being damaged.

Further, by providing an air passage between the fluid holding portion and the vibration suppressing plate, the function of supporting the fluid holding portion can be sufficiently ensured.

[Brief description of the drawings]

FIG. 1 is a plan view (partial cross section) (FIG. A) and a front view (FIG. B) conceptually showing a main part of a non-contact transfer device for a plate-like object according to an embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view (FIG. A) showing a peripheral portion of the fluid holding section, and a view (FIG. B) of the fluid holding section viewed from a direction b in FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Sheet glass 2 Conveying means 3 Fluid holding part 3a Supply port 3c Holding surface 4 Vibration suppression plate 6 Ventilation path S1 Holding gap S2 Damper gap

Claims (3)

[Claims] 1. A transport device for transporting a plate-like object in a predetermined direction, and a plurality of fluid holding units arranged at predetermined intervals in the transport direction, wherein the fluid holding unit includes a pressurized fluid. Supply port, and a holding surface opposed to one surface of the plate-like object conveyed by the conveying means, and pressurized fluid supplied from the supply port is formed by the holding surface and one surface of the plate-like object. A non-contact conveying device for a plate-like object that supports one surface of the plate-like object in a non-contact state while holding a predetermined holding gap with respect to the holding surface by flowing out through a holding gap between the plurality of the plate-like objects; A non-contact transfer device for a plate-shaped object, wherein a vibration suppressing plate is disposed between the fluid holding portions and a predetermined gap from one surface of the plate-shaped object. 2. The non-contact transfer device for a plate-like object according to claim 1, wherein a gap between the vibration suppressing plate and one surface of the plate-like object is set larger than the holding gap. 3. A part of the pressurized fluid flowing out of the holding gap between the fluid holding portion and the vibration suppressing plate is removed by a part other than the gap between the vibration suppressing plate and one surface of the plate-like object. 3. The non-contact conveying device for plate-like objects according to claim 1, further comprising an air passage for releasing the air into the portion.