JP2004241465A - Work position correcting apparatus and cassette transporting apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a work position correcting apparatus which can prevent damage to work when correcting the displacement of a thin plate work. <P>SOLUTION: A plurality of porous materials 7 are arranged on the work supporting surface 4 of a supporting body 2 and compressed air is spouted out from the porous materials 7. Accordingly, a work W extended over the work supporting surface 4 is supported by compressed gas on a non-contact basis. While non-contact supporting is maintained, the displacement of the work is corrected by position correcting members 3 arranged in the periphery. By this structure, since the displacement of work W is corrected under a non-contact state with the work supporting surface 4, the work W and the work supporting surface 4 are not rubbed with each other when correcting the displacement. Therefore, the work is not damaged. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a work position correcting device and a cassette conveying device.
[0002]
[Prior art]
[Prior art 1]
In the manufacturing process of a liquid crystal display panel or a semiconductor device, when processing a thin plate-like work such as a liquid crystal glass (liquid crystal substrate) or a wafer such as in an exposure process or a bonding process, accurate positioning of the work is required. There are processing steps. In such a processing step, the workpiece is first positioned before processing by the processing apparatus. In other words, the positional deviation caused when the work is transported from the previous processing step to the processing device constituting the processing step is corrected. This is called alignment.
[0003]
Conventionally, such a displacement has been corrected by supporting a work with a plurality of resin pins and abutting a contact member such as a roller in that state.
[0004]
[Prior art 2]
2. Description of the Related Art In a liquid crystal display panel manufacturing line, a cassette for temporarily storing liquid crystal glass is used for transport between manufacturing steps and adjustment of manufacturing timing. Such a cassette includes a cassette case having an opening, and a plurality of support members are provided in the cassette case. Then, the liquid crystal glass inserted into the cassette case through the opening is placed on the support member, and a plurality of liquid crystal glasses are accommodated in the cassette case at a constant interval (see Patent Document 1). ).
[0005]
When the liquid crystal glass completes the predetermined process and moves to the next process, a plurality of liquid crystal glasses that have completed the predetermined process are stored in this cassette. Then, this cassette is transported to the next step. The transfer is performed by placing a cassette on a transfer vehicle, or by providing a ball bearing on a transfer line and sliding the ball bearing on the ball bearing.
[0006]
[Patent Document 1]
JP-A-10-340949
[0007]
[Problems to be solved by the invention]
However, in the above-mentioned conventional technology 1, since the positional deviation is corrected in a state where the work is supported by the resin pin, the work and the resin pin are rubbed at a position where the work and the resin pin are in contact at the time of the correction. As a result, there is a problem that the contact surface of the work is damaged.
Such a problem is not limited to a liquid crystal glass or a wafer, but similarly occurs in the case of a thin plate-like work that requires precision processing that is not sensitive to scratches.
[0008]
Further, in the above-described conventional technology 2, since the cassette is transported using a transport vehicle or a ball bearing, vibration is inevitably generated during the transport. The vibration causes the liquid crystal glasses contained in the cassette to resonate. Such resonance causes a collision between the liquid crystal glass and a support member supporting the liquid crystal glass and a collision between the liquid crystal glasses. For this reason, there has been a problem that the liquid crystal glass is damaged or broken by resonance.
Such a problem is not limited to the transport of the liquid crystal glass, but similarly occurs in a case where a plurality of thin plate-like works which are not easily damaged or damaged are accommodated in a cassette and the cassette is transported.
[0009]
The present invention has been made in view of the above circumstances, and provides a work position correcting device and a cassette transfer device that can be handled in a manufacturing process of a thin plate-shaped work so that the work is not damaged or damaged. The purpose is to:
[0010]
Means for Solving the Problems and Effects of the Invention
Hereinafter, means and the like that can solve the above-mentioned problems will be enumerated in separate sections. The operation, effects, specific means, and the like will be additionally described as necessary.
[0011]
Means 1. In a work position correcting device that corrects a positional shift of a thin plate-shaped work supported by a support body,
A pressurized gas ejection portion is provided on the work support portion side of the support body, and the work is non-contact supported by the support body by the pressurized gas ejected from the ejection portion, and the position of the work is maintained while maintaining the non-contact state. Work position correction device for correcting misalignment.
[0012]
According to the means (1), the positional deviation of the work is corrected in a state where the thin plate-shaped work is supported by the supporting body in a non-contact manner. The correction of the positional deviation is performed by the correction unit. For this reason, unlike the related art in which the work is supported in contact, the work does not rub against the work supporting portion of the support body when correcting the positional deviation of the work. Thus, it is possible to prevent the work from being damaged by rubbing at the time of position correction.
[0013]
Means 2. Before supplying the work to the processing device that performs processing on the positioned thin plate-shaped work, in a work position correction device that supports the work by a support main body and corrects the positional deviation of the work,
A pressurized gas ejection portion is provided on the work support portion side of the support body, and the work is non-contact supported by the support body by the pressurized gas ejected from the ejection portion, and the position of the work is maintained while maintaining the non-contact state. Work position correction device for correcting misalignment.
[0014]
According to the means 2, in the processing apparatus that performs processing on the positioned thin plate-shaped work, when the processing is performed, if the work is displaced, appropriate processing cannot be performed on the work. . Therefore, in such a processing apparatus, it is necessary to correct the positional deviation of the work before the processing. In this regard, in the means 2, the positional deviation of the work is corrected in a state where the work is supported by the supporting body in a non-contact manner. The correction of the positional deviation is performed by the correction unit. For this reason, unlike the related art in which the work is supported in contact, the work does not rub against the work supporting portion of the support body when correcting the positional deviation of the work. Thus, it is possible to prevent the work from being damaged by rubbing at the time of position correction.
[0015]
In the case of a processing apparatus on a production line, the work is transferred by the transfer means from the previous processing step, and at that time, the work is inevitably displaced. For this reason, it is necessary to correct the positional deviation of the work described above. Therefore, this position correcting device that supports a work in a non-contact manner is particularly effective when used in a processing device on a production line.
[0016]
In the means 1 or 2, it is preferable that the correcting means is for correcting the positional deviation by contacting the peripheral edge of the thin plate-shaped work. Thereby, the surface and the back surface of the thin plate-shaped work are not damaged at all. Further, in the means 1 or 2, it is preferable to provide a plurality (more preferably, a large number) of ejection sections, and it is preferable that the ejection sections are evenly arranged over the entire area of the work supporting section.
[0017]
Means 3. 3. The work position correcting device according to claim 1 or 2, wherein the ejection section is formed of a porous body, and a passage for ejecting a pressurized gas from an upper surface of the porous body is provided in the support body.
[0018]
According to the means 3, since the ejection portion is formed of the porous body, the flow of the pressurized gas is restricted when the pressurized gas passes through the porous body, so that the static pressure is preferably generated. be able to. In addition, a static pressure can be generated more uniformly with the counterpart (the bottom surface of the work) than with a simple throttle passage. Thereby, the work can be supported in a non-contact manner in a stable state.
[0019]
In the means 3, if a port communicating with the passage is provided on the outer surface of the support main body, pressurized gas is supplied to the porous body through the port and the passage. Conversely, when a vacuum pressure is applied to the porous body through the port and the passage, the work can be adsorbed to the work supporting portion. Accordingly, it is possible to perform processing other than the positional deviation correction, such as checking with the imaging unit whether the positional deviation correction has been appropriately performed.
[0020]
Means 4. 4. The work position correcting device according to the means 3, wherein the porous body is constituted by a porous body having a surface drawing layer.
[0021]
According to the means 4, even when the weight of the work is heavy, the work can be stably supported in a non-contact manner. In other words, in the case of a normal porous body having no surface drawing layer, when the weight of the work becomes heavy, vibration occurs in the work from the beginning of floating due to the pneumatic hammer phenomenon, and it is possible to stably support the work without contact. become unable. In this regard, since the porous body having the surface restricting layer is used in the means 4, the flow of the pressurized gas whose flow has been once restricted is further restricted when passing through the surface restricting layer. With such a double aperture, even for a work having a weight that causes vibration, the occurrence of vibration can be prevented, and non-contact support can be performed in a stable state.
[0022]
Means 5. A pressurized gas ejection portion is provided on the cassette support portion side of the support main body, and the press body that accommodates a plurality of thin plate-shaped works is non-contact supported by the support main body by the pressurized gas ejected from the ejection portion, and the non-contact is provided. A cassette transport device that transports the cassette while maintaining the state.
[0023]
According to the means 5, the cassette is transported in a state where the cassette is supported by the supporting body in a non-contact manner. Therefore, unlike the related art in which the cassette is supported in contact, no vibration occurs due to contact with the support body when the cassette is transported. As a result, the work in the form of a thin plate accommodated in the cassette does not resonate due to vibration, and the work is damaged or damaged due to collision with the support supporting the work or collision between the works. Can be prevented. The cassette may be a rigid body capable of accommodating one or a plurality of thin work pieces.
[0024]
Means 6. The cassette conveying apparatus according to claim 5, wherein a plurality of the jetting sections are provided, and each jetting section is arranged at least at both ends in the cassette conveying direction.
[0025]
According to the means 6, when the cassette is transported, it is difficult to wobble, and the cassette can be transported in a stable state. Of course, it is possible to dispose the ejection parts at positions other than both ends in the cassette conveyance direction. Further, it is preferable that the ejection units are arranged at substantially equal intervals in the cassette transport direction.
[0026]
Means 7. 7. The cassette conveying apparatus according to claim 5, wherein the ejection section is formed of a porous body, and a passage for ejecting a pressurized gas from an upper surface of the porous body is provided in the support body.
[0027]
According to the means 7, since the ejection portion is formed of the porous body, the flow of the pressurized gas is restricted when the pressurized gas passes through the porous body, so that the static pressure is preferably generated. be able to. In addition, a static pressure can be generated evenly between the counterpart side (the bottom surface of the cassette) and the static pressure more than a simple throttle passage. Thereby, the cassette can be supported in a non-contact manner in a stable state.
[0028]
Further, if a port communicating with the passage is provided on the outer surface of the support body, the pressurized gas is supplied to the porous body through the port and the passage. Conversely, when a vacuum pressure is applied to the porous body via the port and the passage, the cassette can be adsorbed to the cassette support. Therefore, if it is necessary to stop the transport of the cassette at a predetermined position, the cassette can be sucked at that position and securely fixed.
[0029]
Means 8. 8. The cassette conveying device according to the means 7, wherein the porous body is constituted by a porous body having a surface drawing layer.
[0030]
According to the means 8, even when the weight of the cassette is heavy, the cassette can be stably supported in a non-contact manner. In other words, in the case of a normal porous body having no surface drawing layer, for example, when the weight of the cassette becomes heavy, such as a cassette containing liquid crystal glass, vibration occurs in the cassette from the beginning of floating due to the pneumatic hammer phenomenon. Therefore, the problem of vibration prevention cannot be solved. In this regard, since the porous body having the surface restricting layer is used in the means 7, the flow of the pressurized gas whose flow has been restricted once passes through the surface restricting layer is further restricted. With such a double diaphragm, even if the cassette is heavy enough to cause vibration, the occurrence of vibration can be prevented and the non-contact support can be performed in a stable state.
[0031]
Usually, a plurality of the porous bodies are provided along the transport direction at intervals shorter than the width of the cassette in the transport direction. A plurality of such porous bodies are provided in a plurality of rows in accordance with the size of the cassette. This is to prevent the static pressure action on the bottom surface of the cassette from being interrupted while the cassette is transported.
[0032]
BEST MODE FOR CARRYING OUT THE INVENTION
[First Embodiment]
The first embodiment will be described below with reference to FIGS. 1 is a plan view of the position correcting device, FIG. 2 is a partially enlarged view of a cross section taken along line AA of FIG. 1 in a state where the work is supported in a non-contact manner, and FIG. 3 corrects the positional deviation of the work. FIG. 4 is a schematic diagram showing a process, and FIG. 4 is a graph showing a relationship between a supply pressure and a flying height. In FIG. 3, the positional deviation of the work is emphasized for convenience of explanation.
[0033]
The position correcting apparatus 1 is used in a process where positioning is required when processing a thin plate-like work W which requires precision processing and is not easily scratched, such as a liquid crystal glass or a wafer.
[0034]
As shown in FIGS. 1 and 2, the position correction device 1 includes a support body 2 for supporting the work W in a non-contact manner, and a position correction member 3 for correcting a positional deviation of the work W supported in a non-contact manner on the support body 2. (Correction means). The support main body 2 has a square plate shape in the present embodiment. Legs (not shown) are provided on the bottom surface of the support main body 2, and the support main body 2 is installed at a predetermined distance from the installation surface by the legs. In addition, the shape of the support main body 2 is not limited to a square plate shape, and an arbitrary shape such as a disk shape can be selected. However, it is preferable that at least the work support surface 4 (work support portion) that supports the work W is a flat surface. Further, it is also possible to adopt a configuration in which the support main body 2 is directly installed on the installation surface.
[0035]
Many ports 5 are formed on the bottom surface of the support main body 2. Each port 5 is arranged in a lattice shape so as to cover the entire bottom surface of the support body 2. The port 5 may take various forms, for example, as a female screw hole in which a female screw for connecting a pipe is formed, or a one-touch joint may be provided. The same applies to each port described later in this specification. When the position correcting device 1 is used, a pipe from a pressure supply source (not shown) is connected to the port 5. Note that the port 5 can be provided on the outer peripheral surface of the support main body 2.
[0036]
The work support surface 4 which is the upper surface of the support main body 2 is provided with a large number of accommodation grooves 6 having a circular shape in plan view over the entire area of the support surface 4. Each accommodation groove 6 is formed in a one-to-one correspondence with each port 5, and is arranged in a lattice. A disk-shaped porous body 7 is accommodated in each accommodation groove 6 in a state of protruding from the work support surface 4 and is fixed in that state. The fixing is performed by, for example, bonding to the surface forming the accommodation groove 6 with an adhesive.
[0037]
In addition, the shape of the accommodation groove 6 and the porous body 7 is not limited to a circular shape in a plan view, and an arbitrary shape such as a square shape can be selected. However, it is preferable that both have the same shape. In addition, the arrangement of the accommodation grooves 6 and the porous body 7 may be any other arrangement such as a staggered arrangement, but is preferably arranged uniformly over the entire area of the work supporting surface 4.
[0038]
The porous body 7 can be made of, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel. It is also possible to use a synthetic resin material such as a sintered nylon resin or a sintered polyacetal resin, or sintered carbon or sintered ceramic. In addition, the porous body 7 has a porosity of about 40% and the diameter of the fine pores formed therein is about 0.1 mm. It is also possible to use. A sealing layer 8 is formed on the outer peripheral edge of the porous body 7. When pressurized air is supplied to the porous body 7 as described later, the pressurized air is applied to the porous body 7. 7 does not leak from the outer peripheral surface. The seal layer 8 is formed by applying or injecting a synthetic resin to the outer peripheral surface. The same applies to the porous body described hereinafter in this specification.
[0039]
On the bottom surface of each accommodation groove 6, a circulation groove 9 communicating with each accommodation groove 6 is formed. Each port 5 and the bottom surface of each flow groove 9 are communicated by a passage 10 formed in the support body 2. When a pressurized gas (for example, air) is supplied from a pressure supply source (not shown), the pressurized air flows through each port 5, each passage 10, each flow groove 9, the surface of each porous body 7, That is, it is ejected from the upper surface.
[0040]
It should be noted that a common passage may be provided in the middle of the passage as the passage 10, so that some or all of the ports 5 can be shared. Further, instead of directly attaching the porous body 7 to the support main body 2, a configuration in which a porous unit including the porous body is provided on the work supporting side of the support main body 2 can also be adopted.
[0041]
As shown in FIGS. 1 and 3, the position correcting member 3 includes a pair of X-axis correcting members 13 provided on a lateral side surface and a pair of Y-axis correcting members 14 provided on a vertical side surface. Have. Here, the length and width mean the length and width of the support body 2 in FIG. Each of the correction members 13 and 14 includes a support member 15 and rollers 16 that are supported by the support member 15 and contact the side surfaces of the support body 2 at both ends. As for the X-axis correction member 13, a pair of rollers 16 are provided at each end. As shown in FIG. 2, each roller 16 protrudes upward from the work support surface 4 of the support body 2, and when the work W is supported by the support body 2 as well as the side surface of the support body 2, the side surface of the work W It is configured to be able to come into contact therewith. Instead of the roller 16, a contact member made of a rubber material or a synthetic resin material that does not damage the work W can be employed.
[0042]
The position correcting member 3 is driven by a driving unit (not shown) at a position where all the rollers 16 are in contact with the side surface of the support main body 2 (first position), and at a position along the outer surface of the support main body 2 away from the side surface (first position). (Position 2 in FIG. 1). Further, both the X-axis correction members 13 and both the Y-axis correction members 14 are configured to move synchronously in directions opposite to each other. The control of the position correcting member 3 by the driving means (not shown) is performed as follows. That is, when the work W is transported onto the work support surface 4, each of the correction members 13, 14 is moved to the second position. When the transfer of the work W is completed and the work W is supported by the support main body 2, the correction members 13, 14 are moved from the second position to the first position.
[0043]
In the position correcting device 1 configured as described above, first, by the operation of a pressure supply source (not shown), the pressurized air flows through each port 5, each passage 10, and each flow groove 9 to the upper surface of each porous body 7. Squirts from the whole. Further, as shown in FIG. 3A, the pair of X-axis correction members 13 and the pair of Y-axis correction members 14 are respectively moved to the second position by driving means (not shown). In this state, the work W is placed on the work support surface 4 of the support main body 2 by driving the transfer device (not shown). At this time, since the pressurized air is ejected from the porous body 7 on the work support surface 4 side, the work W is supported in a floating state (non-contact state) with respect to the work support surface 4. That is, a pressure air layer is formed between the upper surface of the porous body 7 and the bottom surface of the work W (the surface on the work support surface 4 side), and a static pressure is generated. Thereby, the work W is supported by the support main body 2 in a non-contact manner. The work W has the same shape as the work support surface 4.
[0044]
The work W at this stage is still in a state in which a positional shift has occurred during transport, as shown in FIG. Then, in order to correct the positional deviation of the work W by the position correcting member 3 next, each X-axis correcting member 13 and each Y-axis correcting member 14 are respectively moved toward the first position by a driving device (not shown). As shown in FIG. 3B, while each of the correction members 13 and 14 moves to the first position, the roller 16 comes into contact with the side surface of the work W protruding from the side surface of the support body 2. Thereafter, when the correction members 13 and 14 are further moved, the roller 16 moves while being in contact with the side surface of the support main body 2, so that the position of the work W is forcibly corrected as shown in FIG. Will be done. Then, when the correction members 13 and 14 are finally arranged at the first position, the positional deviation caused when the work W is placed on the work support surface 4 is completely corrected. Become.
[0045]
As described above, in the position correcting apparatus 1 of the present embodiment, the position shift that occurs when the work W is transported while the work W is supported by the support main body 2 in a non-contact manner is corrected. Therefore, when the positional deviation is corrected, the work W and the work supporting surface 4 do not rub, and it is possible to prevent the front surface or the back surface of the work W from being damaged by the rubbing of both.
[0046]
Further, correcting the positional deviation while the work W is supported in a non-contact manner as in the position correcting apparatus 1 also has the following advantages (A) to (E).
[0047]
(A) No dust is generated due to friction between the work W and its supporting portion. Therefore, it is suitable for use in an environment where generation of dust is disliked, such as a clean room. Further, when the work W and its supporting portion are rubbed, vibrations due to stick-slip and rolling occur in the work W, but such vibrations do not occur.
[0048]
(A) Since the work W is supported in a non-contact manner, no sliding resistance is generated when correcting the positional deviation, and the driving force of the position correcting member 3 required for correcting the positional deviation can be small. Thereby, the drive mechanism of the position correcting member 3 can be reduced in size. In addition, an air nozzle may be provided around the non-contact supported work W instead of the contact member such as the roller 16 and the displacement of the work W may be corrected by the air jetted from the air nozzle.
[0049]
(C) By adjusting the supply pressure of the pressurized air supplied to each porous body 7 individually and individually, it is also possible to support the work W in an inclined state. For this reason, it is possible to cope with a process required to support the work W in such a state.
[0050]
(D) Even if any external force is applied to the non-contact supported work W, the pressurized air layer plays a role of a cushion, so that the influence of the external force on the work W can be reduced.
[0051]
(E) If a switching valve is provided in a pipe connected to each port 5 and each port is switched to be connected to a pressure supply source or a vacuum device by the operation of the switching valve, the work W of the supporting body 2 It is also possible to make the work support surface 4 adsorb. That is, the supply pressure is gradually decreased from the state in which the work W is supported in a non-contact manner by ejecting pressurized air from the upper surface of the porous body 7, and the work W is brought into contact with the work support surface 4. After that, the switching valve is driven by the control device to connect each port 5 to the vacuum device. Thereby, the work W can be attracted to the work support surface 4. If the work W can be sucked in this way, the position shift can be corrected by correcting the position shift, fixing the position by sucking the work W, and checking with a camera whether the position shift has been properly corrected. Other processing can be performed. Further, it is possible to perform processing on the work W on the work support surface 4.
[0052]
By the way, for example, when the size of the work support surface 4 of the support body 2 is 1200 mm × 1000 mm and the work W is a liquid crystal glass having the same shape and a thickness of 0.7 mm, the supply pressure of the pressurized air is reduced by the above-described configuration. By adjusting, it is possible to obtain a stable and appropriate flying height.
[0053]
The graph of FIG. 4 shows the relationship between the supply pressure to the porous body and the flying height of the sample when a 100 mm square porous body, similarly a 100 mm square sample, is used. As shown by the curve when the sample weight is 2 kg, the flying height can be increased by using a high supply pressure. However, if the flying height is made larger than about 130 μm, the work W will be vibrated and become unstable. On the other hand, if the flying height is too small, it is necessary to finish the upper surface of the porous body with high accuracy. This is because if the finishing accuracy of the upper surface of the porous body is low, the upper surface of the porous body may partially contact the workpiece W. Such a finishing process leads to an increase in manufacturing cost. For this reason, it is preferable to adjust the supply pressure so that the floating amount of the work W is about 50 μm. With such a floating amount, the work W can be levitated in a stable state where vibration does not occur, and an appropriate floating amount can be obtained because a special process for finishing the upper surface of the porous body with high precision is not required. Become.
[0054]
However, when the weight of the work W increases, the pneumatic hammer phenomenon occurs in the porous body 7 used in the above-described configuration, and the work W is supplied to the work W from the beginning when the work W starts to float by supplying the pressurized air. Vibration occurs, and the work W cannot be stably supported in a non-contact manner. For example, although no data is shown in the graph of FIG. 4, such a phenomenon occurs when the sample weight is 20 kg, 35 kg, and 60 kg.
[0055]
Therefore, when the weight of the work W is heavy enough to cause such a phenomenon, it is preferable to use a porous body that has been subjected to surface drawing in order to obtain a stable and appropriate floating amount. In the porous body subjected to the surface drawing, the fine pores in the surface portion are smaller than the fine pores in other portions. Surface drawing is performed by applying treatments such as plating, impregnation with synthetic resin, thermal spraying, coating of synthetic resin or metal, and surface compression on the surface of a normal porous body obtained by sintering synthetic resin. Is By using the porous body subjected to the surface drawing, generation of vibration of the work W due to the pneumatic hammer phenomenon can be prevented, and the work W can be stably supported without contact.
[0056]
The graph of FIG. 4 shows the relationship between the supply pressure and the flying height of the sample at a sample weight of 20 kg, 35 kg, and 60 kg when the porous body subjected to the surface drawing is used. As shown in the graph, an appropriate flying height can be obtained while preventing the occurrence of vibration.
[0057]
Note that the first embodiment can be configured as follows.
The driving configuration of the position correcting member 3 is not limited to the configuration described above, and various configurations are conceivable. For example, in the case where the work W is transported and supplied to the position correction device 1 from the lateral direction, if the X-axis correction member 13 is fixed, the vertical position correction is performed while the work W is transported and supplied. Then, when the entire work W is supported by the support main body 2, by moving the Y-axis correcting member 14 from the second position to the first position, the lateral position can be corrected.
[0058]
Some workpieces W are larger than the workpiece support surface 4. In this case, each of the correction members 13 and 14 is arranged at a position separated from the side surface of the support main body 2 in accordance with the size of the work W.
[0059]
Further, the correction members 13 and 14 at the first position are made to stand by in advance at a position separated from the side surface of the support main body 2, and after the work W is conveyed and supplied onto the support main body 2 by the conveyance device, each correction member 13 and 14 is corrected. The members 13 and 14 are moved in a direction in contact with the side surface of the support body 2 while being synchronized. The movement is used to correct the positional deviation of the work W. With such a configuration, a work W larger than the work support surface 4 can be handled. In addition, the actual positional deviation of the work W is not large as shown in FIG. 3 but is a slight deviation. Therefore, with such a configuration, the position correcting device 1 can be made more compact.
[0060]
In addition, some workpieces W are smaller than the workpiece support surface 4. In this case, the support main body 2 is not formed in a plate shape, and a gap is provided between the porous bodies 7 so that the X-axis correction member 13 and the Y-axis correction member 14 enter the gap. According to such a configuration, since each of the correction members 13 and 14 can be moved within the range of the work support surface 4, each of the correction members 13 and 14 is supported in a state where the work W is supported on the work support surface 4 in a non-contact manner. Is moved to the work W side, the displacement can be corrected.
[0061]
[Second embodiment]
Next, a second embodiment will be described with reference to FIGS. FIG. 5 is a plan view of the cassette support device, and FIG. 6 is a partially enlarged view of a cross section taken along line BB of FIG. 5 in a state where the cassette is supported in a non-contact manner.
[0062]
The cassette support device 21 is used in a device for accommodating a plurality of thin plate-like works W such as a liquid crystal display panel which is hard to be damaged or damaged in a cassette K and transporting the cassette K.
[0063]
As shown in FIGS. 5 and 6, the cassette support device 21 includes a support main body 22 for supporting the cassette K in a non-contact manner. The support main body 22 has a square plate shape in the present embodiment. Legs (not shown) are provided on the bottom surface of the support body 22, and the legs allow the support body 22 to be installed at a predetermined distance from the installation surface. Note that the shape of the support body 22 is not limited to a square plate shape, and an arbitrary shape such as a disk shape can be selected. However, at least the cassette support surface 23 (upper surface) supporting the cassette K is preferably flat. Further, a configuration in which the support main body 22 is directly installed on the installation surface may be adopted.
[0064]
A plurality of ports 24 (three in this embodiment) are formed along the transport direction on both sides of the bottom surface of the support main body 22 in the cassette K transport direction. When the cassette support device 21 is used, a pipe from a pressure supply source (not shown) is connected to the port 24. Note that the port 24 can be provided on the outer peripheral surface of the support body 22.
[0065]
A plurality of accommodation grooves 25 each having a circular shape in plan view are formed on the cassette support surface 23 of the support main body 22 so as to correspond to each of the ports 24. A disc-shaped porous body 26 is accommodated in each accommodation groove 25 so that the upper surface thereof and the cassette support surface 23 are flush with each other, and fixed in that state. The fixing is performed by, for example, adhering to the surface forming the accommodation groove 25 with an adhesive. The porous bodies 26 are arranged at both ends when viewed in the cassette K transport direction on the cassette support surface 23 side of the support main body 22, and are arranged at equal intervals in each end in the cassette K transport direction. Unlike the first embodiment, since the porous body 26 is provided so as to be flush with the cassette support surface 23, a porous body having no seal layer on the outer peripheral portion is used. .
[0066]
In addition, the shape of the accommodation groove 25 and the porous body 26 is not limited to a circular shape in a plan view, and an arbitrary shape such as a square shape can be selected. However, it is preferable that both have the same shape. Further, a porous body provided with a seal layer may be used, and the arrangement of the porous body 26 may be any other configuration such as a lattice.
[0067]
Here, for example, the cassette K used in the manufacturing process of the liquid crystal display panel, when accommodating a large number of liquid crystal glasses, weighs about 200 kg. When the weight of the cassette K is increased to this extent, as described in the first embodiment, a pneumatic hammer phenomenon occurs in a normal porous body obtained by simply sintering a synthetic resin or the like. Therefore, vibration is generated in the cassette K from the beginning when the pressurized air is supplied and the cassette K starts to float, and the cassette K cannot be stably supported in a non-contact manner. Therefore, in order to obtain a stable and appropriate floating amount, the cassette supporting device 21 uses a porous body 26 that has been subjected to a surface drawing process and has a surface drawing layer 27. The surface drawing is as described in the first embodiment. If the cassette K is light in weight and the pneumatic hammer phenomenon does not occur even when the work W is accommodated, a normal porous body without a surface drawing layer can be used.
[0068]
On the bottom surface of each accommodation groove 25, a circulation groove 28 communicating with each accommodation groove 25 is formed. Each port 24 and the bottom surface of each flow groove 28 are communicated by a passage 29 formed in the support body 22. When a pressurized gas (for example, air) is supplied from a pressure supply source (not shown), the pressurized air passes through each port 24, each passage 29, each flow groove 28, and further through a surface throttle layer 27. It is ejected from the surface of each porous body 26, that is, from the upper surface. It should be noted that a common passage may be provided in the middle of the passage 29, so that some or all of the ports 24 can be shared.
[0069]
In the cassette transport device using the cassette support device 21 configured as described above, usually, a plurality of the cassette support devices 21 are installed in the cassette K transport direction. When the transport distance is short, only one cassette support device 21 may be installed.
[0070]
In such a cassette transfer device, the operation of a pressure supply source (not shown) causes the pressurized air to flow through each port 24, each passage 29, each flow groove 28, and the surface throttle layer 27 of each cassette 24 in the cassette support device 21. Ejects from the entire top surface. As a result, the cassette K conveyed from another is supported in a floating state (non-contact state) with respect to the cassette supporting surface 23 of the cassette supporting device 21. That is, a pressure air layer is formed between the upper surface of the porous body 26 and the bottom surface of the cassette K (the surface on the cassette support surface 23 side), and a static pressure is generated. Thereby, the cassette K is supported by the support main body 22 in a non-contact manner. FIG. 6 shows a cassette K in which a large number of thin plate-shaped works W are placed on the mounting ribs 30 and accommodated. While maintaining the state in which the cassette K is supported in a non-contact manner, the cassette K is further transported in the transport direction by a driving device (not shown).
[0071]
As described above, in the cassette carrying device using the cassette supporting device 21 according to the present embodiment, since the cassette K can be carried in a non-contact supported state, vibration occurs when the cassette K is carried. The resonance of the thin plate-shaped work W accommodated in the housing can be prevented. This can prevent the work W from being damaged or damaged when the cassette K is transported.
[0072]
Transporting the cassette K in a non-contact supported state as in this cassette transport device also has the following advantages (A) to (C).
[0073]
(A) There is no generation of dust due to the contact between the cassette K and its supporting portion when the cassette K is transported. Therefore, it is suitable for use in an environment where generation of dust is disliked, such as a clean room.
[0074]
(A) Since the cassette K is supported in a non-contact manner, there is no sliding resistance when the cassette K is transported, and the driving force of the driving device required to transport the cassette K is small. This makes it possible to reduce the size of the driving device, and to provide an air nozzle around the cassette K in the transport direction, and to transport the cassette K by jet air from the air nozzle.
[0075]
(C) As in the first embodiment, if each port 24 is configured to be switched and connected to a pressure supply source or a vacuum device, the cassette K can be adsorbed to the cassette support surface 23 of the support main body 22. Become. Accordingly, when it is necessary to stop the transport of the cassette K, for example, when adjusting the manufacturing timing between the manufacturing processes or when the cassette K reaches a predetermined manufacturing process, the cassette K is sucked at a predetermined position, It can be securely fixed at that position.
[Brief description of the drawings]
FIG. 1 is a plan view of a position correcting device.
FIG. 2 is a partially enlarged view of a cross section taken along line AA of FIG. 1 in a state where the work is supported in a non-contact manner.
FIG. 3 is a schematic diagram showing a state in which the position of a work is corrected.
FIG. 4 is a graph showing a relationship between a supply pressure and a flying height.
FIG. 5 is a plan view of the cassette supporting device.
FIG. 6 is a partially enlarged view of a cross section taken along line BB of FIG. 5 in a state where the cassette is supported in a non-contact manner.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Position correction device, 2 ... Support main body, 3 ... Position correction member as correction means, 4 ... Work support surface as work support part, 7 ... Porous body as ejection part, 21 ... Cassette support device, 22 ... Support body, 23: Cassette support surface, 26: Porous body as ejection section, 27: Surface drawing layer, W: Work, K: Cassette.

Claims (8)

In a work position correcting device that corrects a positional shift of a thin plate-shaped work supported by a support body,
A pressurized gas ejection portion is provided on the work support portion side of the support body, and the work is non-contact supported by the support body by the pressurized gas ejected from the ejection portion, and the position of the work is maintained while maintaining the non-contact state. Work position correction device for correcting misalignment. Before supplying the work to the processing device that performs processing on the positioned thin plate-shaped work, in a work position correction device that supports the work by a support main body and corrects the positional deviation of the work,
A pressurized gas ejection portion is provided on the work support portion side of the support body, and the work is non-contact supported by the support body by the pressurized gas ejected from the ejection portion, and the position of the work is maintained while maintaining the non-contact state. Work position correction device for correcting misalignment. The position correcting device for a workpiece according to claim 1, wherein the ejection portion is formed of a porous body, and a passage for ejecting a pressurized gas from an upper surface of the porous body is provided in the support body. 4. The apparatus according to claim 3, wherein the porous body is formed of a porous body having a surface drawing layer. A pressurized gas ejection portion is provided on the cassette support portion side of the support body, and the pressurized gas ejected from the ejection portion supports the cassette accommodating a plurality of thin plate-shaped works in a non-contact manner with the support body, and the non-contact is provided. A cassette transport device that transports the cassette while maintaining the state. 6. The cassette conveying apparatus according to claim 5, wherein a plurality of the jetting sections are provided, and each jetting section is arranged at least at both ends in the cassette conveying direction. The cassette conveying apparatus according to claim 5, wherein the ejection section is formed of a porous body, and a passage for ejecting a pressurized gas from an upper surface of the porous body is provided in the support main body. The cassette conveying device according to claim 7, wherein the porous body is formed of a porous body having a surface drawing layer.

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