JP4346765B2

JP4346765B2 - Substrate transfer robot

Info

Publication number: JP4346765B2
Application number: JP2000000026A
Authority: JP
Inventors: 邦明黒川; 英介堀; 正順平田
Original assignee: Ulvac Inc
Current assignee: Ulvac Inc
Priority date: 2000-01-04
Filing date: 2000-01-04
Publication date: 2009-10-21
Anticipated expiration: 2020-01-04
Also published as: JP2001189367A

Abstract

PROBLEM TO BE SOLVED: To provide a substrate-carrying robot that is suited for the transfer of a glass substrate. SOLUTION: Projecting members 28a and 28b are provided on a surface near the tip of a fork part 22 where a substrate is placed, at the same time, arm parts 23a and 23b are arranged at both the sides of the fork part 22, and retention members 24a and 24b are arranged at the position of the arm parts 23a and 23b near the root of the fork part. The substrate that is kept stationary at the upper portion of the fork part 22 is lowered, the end part of the substrate is slid on the inclined surface of the upper portion of the projecting members 28a and 28b or the projecting inclined surface of the retention members 24a and 24b and at the same time, is dropped onto the fork part 22. Even if the position of the substrate is deviated, the end part of the substrate can be placed at an accurate position. By providing support members 251-258 made of carbon on the fork part 22 and placing the substrate on it, a high-temperature substrate can be carried.

Description

【０００１】
【発明の属する技術分野】
本発明は基板搬送ロボットにかかり、特に、ガラス基板を搬送するのに適した基板搬送ロボットを提供する。
【０００２】
【従来の技術】
従来より、真空雰囲気中で基板を搬送するために、基板搬送ロボットは広く用いられている。
【０００３】
図１０(ａ)は、従来技術の基板搬送ロボットのフォーク部１１０の平面図であり、同図(ｂ)は側面図である。このフォーク部１１０は先端が二股に分かれており、その部分の表面には、凹部１１２が形成されている。
【０００４】
この凹部１１２は、円形のシリコン基板を落とし込めるような平面パターンに形成されている。図１０(ｃ)の符号１０５は、凹部１１２内に落とし込んだ状態のシリコン基板を示している。
【０００５】
この状態では、シリコン基板１０５の端部は、凹部１１２の壁面と接触するか、接触しているのに近い状態になり、フォーク部１１０を水平移動させても、シリコン基板１０５はフォーク部１１０上を滑らずに搬送されるようになっている。
【０００６】
しかしながら、近年用いられているガラス基板は上記のようなシリコン基板に比べて縁部分が破損しやすい。また、ガラス基板は矩形であるため、それを落とし込んで搬送できるような凹部を形成しようとすると、フォーク部が大型化するという問題がある。
【０００７】
【発明が解決しようとする課題】
本発明は上記従来技術の不都合を解決するために創作されたものであり、その目的は、ガラス基板の搬送に適した基板搬送ロボットを提供することにある。
【０００８】
【課題を解決するための手段】
上記課題を解決するために、請求項１記載の発明は、フォーク部上に基板を水平に載置し、前記フォーク部を水平方向に移動させ、前記基板を搬送する基板搬送ロボットであって、前記フォーク部の先端部分には、上部に斜面を有する突起部材が配置され、前記基板を前記フォーク部の上方に位置させ、該基板を降下させたときに、前記基板は、端部が前記斜面上を滑りながら前記フォーク部上に載置されるように構成され、前記フォーク部はアルミナで形成され、その表面にはアルミニウムの保護膜が形成された基板搬送ロボットである。
請求項２記載の発明は、請求項１記載の基板搬送ロボットであって、前記突起部材は、側面が前記フォーク部表面に垂直に配置された円柱形状の部分と、前記円柱形状の部分の上部底面上に設けられた円錐台形状の部分で構成され、前記円錐台形状の部分の側面が前記斜面として用いられる基板搬送ロボットである。
請求項３記載の発明は、フォーク部上に矩形の基板を水平に載置し、前記フォーク部を水平方向に移動させ、前記基板を搬送する基板搬送ロボットであって、前記フォーク部の両脇には腕部が配置され、前記各腕部には、突部を有する保持部材が設けられ、前記フォーク部上に前記基板を載置したときに、前記基板の三辺が前記突部に接触できるように構成され、前記フォーク部はアルミナで形成され、その表面にはアルミニウムの保護膜が形成されたことを特徴とする基板搬送ロボットである。
請求項４記載の発明は、請求項３記載の基板搬送ロボットであって、前記各突部の上部には斜面が設けられ、前記基板を前記フォーク部の上方に位置させ、前記基板を降下させたときに、前記基板は、端部が前記突部の前記斜面上を滑りながら前記フォーク部上に載置されるように構成された基板搬送ロボットである。
請求項５記載の発明は、請求項３又は請求項４のいずれか１項記載の基板搬送ロボットであって、前記フォーク部の先端部分には突起部材が配置され、前記フォーク部上に載置された前記基板の四辺のうち、前記突部に接触しない辺は、前記突起部材に接触できるように構成された基板搬送ロボットである。
請求項６記載の発明は、根本部分が回転軸にそれぞれ取り付けられ、前記回転軸の回転によって伸縮する左腕と右腕と、前記左腕と前記右腕の先端に設けられ、基板が載置されるフォーク部とを有し、前記フォーク部上に四辺形の基板を水平に載置し、前記フォーク部を水平方向に移動させ、前記基板を搬送する基板搬送ロボットであって、前記左腕と前記右腕にそれぞれ設けられた左保持部材と右保持部材と、前記左保持部材と前記右保持部材にそれぞれ設けられた第一、第二の左突部と第一、第二の右突部とを有し、前記第一の左突部と前記第一の右突部には、前記基板の四辺のうち前記回転軸に最近の一辺に接触可能で前記フォーク部表面に対して垂直な第一の垂直面と、前記第一の垂直面の上方に位置し、前記一辺に接触可能で前記フォーク部の先端に向けて傾斜された斜面とが形成され、前記第二の左突部と前記第二の右突部には、前記一辺の左側の辺と右側の辺にそれぞれ接触可能で前記フォーク部表面に対して垂直な第二の垂直面と、前記第二の垂直面の上方に位置し、前記左側の辺と前記右側の辺に接触可能で前記フォーク部に向けて傾斜された斜面とが形成され、前記基板を前記フォーク部の上方に位置させ、前記基板を降下させたときに、前記基板は、端部が前記突部の前記斜面上を滑りながら前記フォーク部上に載置されるように構成され、前記フォーク部の先端部分には突起部材が配置され、前記フォーク部上に載置された前記基板の四辺のうち、前記突部に接触しない辺は、前記突起部材に接触できるように構成された基板搬送ロボットである。
請求項７記載の発明は、請求項５又は請求項６のいずれか１項記載の基板搬送ロボットであって、前記突起部材には斜面が設けられ、前記基板を前記フォーク部の上方に位置させ、前記基板を降下させたときに、前記基板は、端部が前記突部の斜面、又は前記突起部材の斜面のいずれか一方又は両方の斜面上を滑りながら前記フォーク部上に配置されるように構成された基板搬送ロボットである。
請求項８記載の発明は、請求項７記載の基板搬送ロボットであって、前記突起部材は、側面が前記フォーク部表面に垂直に配置された円柱形状の部分と、前記円柱形状の部分の上部底面上に設けられた円錐台形状の部分で構成され、前記円錐台形状の部分の側面が前記斜面として用いられる基板搬送ロボットである。
請求項９記載の発明は、請求項１乃至請求項８のいずれか１項記載の基板搬送ロボットであって、前記フォーク部上には支持部材が配置され、前記基板は前記支持部材上に乗せられるように構成された基板搬送ロボットである。
請求項１０記載の発明は、請求項１乃至請求項９のいずれか１項記載の基板搬送ロボットが真空槽内に配置された搬送室である。
請求項１１記載の発明は、請求項１０記載の搬送室と、該搬送室に接続された処理室であって、真空雰囲気中で前記基板の処理を行う処理室とを有する真空処理装置である。
【０００９】
本発明は上記のように構成されており、フォーク部の両脇に配置された腕部に、突部を有する保持部材が配置されている。
【００１０】
フォーク部上に矩形形状の基板を配置した場合、その基板の四辺のうち、三辺が突部に接触できるように構成されており、各突部により、基板がフォーク部に対して静止されるようになっている。基板の三辺は突部に近接して位置し、突部に接触できるようになっていればよく、必ずしも三辺が同時に突部に接触している必要はない。
【００１１】
また、フォーク部の先端には、突起部材が配置されており、基板の残りの一辺は、突起部材に接触できるようになっている。従って、基板の四辺が保持部材の突部又は突起部材に接触できるようになっており、矩形の基板はフォーク部上にしっかり保持されることになる。
【００１２】
また、保持部材や突起部材には斜面が設けられており、基板をフォーク部上に載置する際に、基板とフォーク部との相対的な位置がずれていた場合、フォーク部の上方に基板を静止させた状態から降下させると、基板の端部が斜面に当たり、基板が斜面上を滑り、フォーク部上に乗せられるようになっている。従って、基板の位置がずれていた場合でも、フォーク部上の正確な位置に載置することができる。
【００１３】
カーボン製の部材等の上を基板が滑り落ちる場合には、パーティクルが発生するので、突起部材や保持部材を耐熱性の樹脂で構成しておき、斜面上を基板が滑っても、パーティクルが発生しないようにするとよい。
【００１４】
また、本発明ではフォーク部上には耐熱性を有する支持部材が配置されており、基板は支持部材の上端部に接触した状態でフォーク部上に載置されるようになっている。従って、基板はフォーク部とは直接接触しないので、高温に加熱された基板を載置しても、フォーク部が高温に加熱されないようになっている。
【００１５】
更に、フォーク部はアルミナで構成され、その表面には輻射率の小さいアルミニウムから成る保護膜が形成されているので、基板から放射される輻射熱が大きくても、フォーク部を構成する材料が昇温しにくいようになっている。従って、基板の温度ムラが無くなり、反りが補正される。
【００１６】
【発明の実施の形態】
図１を参照し、符号１０は本発明の一例の基板搬送ロボットであり、搬送室５９内に配置されている。
【００１７】
この搬送室５９には、複数の処理室５１〜５５と、基板搬出入室５６とが接続されており、各室５１〜５９によってマルチチャンバ型の真空処理装置５０が構成されている。
【００１８】
基板搬送ロボット１０を説明すると、図２(ａ)を参照し、この基板搬送ロボット１０は、回転機構１７と、左腕１１及び右腕１２と、載置部１３とを有している。
【００１９】
回転機構１７内には図示しないモータが配置されており、該モータには回転軸１５が取り付けられている。回転軸１５は、二重構造になっており、筒状の外周部分と、その外周部分の内部に挿通された棒状の内部部分とで構成されている。外周部分と内部部分は、モータの回転力が同方向にも逆方向にも伝達されるように構成されており、逆方向に伝達された場合、外周部分と内部部分とは、反対方向に回転するように構成されている。
【００２０】
この回転軸１５の上端部分は、回転機構１７の上部に突き出されており、左腕１１の一端と右腕１２の一端とが、水平に配置された状態で、それぞれ外周部分と内部部分に接続されている。
【００２１】
左腕１１及び右腕１２は、それぞれ２個の部材１１₁、１１₂、１２₁、１２₂が連結されて構成されており、折れ曲げ可能になっている。
【００２２】
左腕１１の他端と右腕１２の他端とは、１個の載置部１３に取り付けられており、左腕１１と右腕１２の根本の部材１１₁、１２₁が互いに反対方向に回転する場合、左腕１１及び右腕１２は折り畳まれるか、又は折り畳まれた状態が元に戻され、その結果、載置部１３が水平方向に直線的に移動するようになっている。他方、左腕１１及び右腕１２が同方向に回転する場合、載置部１３は、水平面内で回転移動するようになっている。
【００２３】
載置部１３を説明すると、該載置部１３は、取付板１４と、フォーク部２２とを有している。載置部１３は、取付板１４が左腕１１及び右腕１２に取り付けられており、フォーク部２２は、水平に配置され、板２１を介して取付板１４に取り付けられている。
【００２４】
図２(ｂ)は、上記の基板搬送ロボット１０が配置された搬送室５９と、該搬送室５９に接続された処理室５１〜５５との関係を示す図である。
【００２５】
各処理室５１〜５５内には、基板載置台６４が配置されており、該基板載置台６４には、昇降ピン６５が挿通されている。
【００２６】
搬送室５９と各処理室５１〜５５の間に配置された隔壁６２には、開閉可能な通路６３が設けられており、回転機構１７を動作させ、載置部１３を水平方向に直線移動させると、フォーク部２２が通路６３を通過し、処理室５１〜５５内を出入りできるようになっている。
【００２７】
上記フォーク部２２の付近Ａの拡大図を図３に示す。
図３を参照し、フォーク部２２は、アルミナから成り先端側が二股に分かれた板で構成されており、その表面には、アルミニウム等の輻射率の小さな材料から成る保護膜２７が形成されている。
【００２８】
図中、二股に分かれた部分のうち、一方の二股部分を符号２６ａで示し、他方の二股部分を符号２６ｂで示す。各二股部分２６ａ、２６ｂの保護膜２７上には、支持部材２５₁〜２５₈と突起部材２８ａ、２８ｂとがそれぞれ配置されている。
【００２９】
支持部材２５₁〜２５₈は、各二股部分２６ａ、２６ｂ上に離間してそれぞれ４個ずつ固定されており、また、突起部材２８ａ、２８ｂは各二股部分２６ａ、２６ｂの先端付近の位置に固定されている。
【００３０】
図４に、支持部材２５₁〜２５₈の斜視図を示す。支持部材２５₁〜２５₈は、カーボンが有底円筒形状に成形されて構成されており、ねじ３７によって、底面がフォーク部２２上にねじ止め固定されている。
【００３１】
ねじ３７の上端は、支持部材２５₁〜２５₈の上端よりも低い位置に存しており、
【００３２】
支持部材２５₁〜２５₈上に後述する基板を乗せたときに、基板はねじ３７には接触しないようになっている。
【００３３】
図５に、突起部材２８ａ、２８ｂの拡大斜視図を示す。図６に、突起部材２８ａ、２８ｂ及びフォーク部２２の断面図を示す。突起部材２８ａ、２８ｂは、ポリイミド等の耐熱性樹脂が略円柱形状に成形されて構成されており、その一方の底面がフォーク部材２２の保護膜２７表面に密着されている。他方の底面は、フォーク部２２の鉛直上方を向いており、その先端部分は面取り成形され、その結果、突起部材２８ａ、２８ｂには、円柱形状の部分３４と円錐台形状の部分３５とが構成されている。
【００３４】
円柱形状の部分３４の側面４８₁はフォーク部２２表面に対して垂直になっており、他方、円錐台形状の部分３５の外周部分により、突起部材２８ａ、２８ｂの中心位置から外方に向けて傾斜された斜面４８₂が構成されている。側面４８₁と斜面４８₂とは、突起部材２８ａ、２８ｂの全周に亘って設けられている。
【００３５】
円柱形状の部分３４の底面には、ねじ部３９が設けられており、突起部材２８ａ、２８ｂは、フォーク部２２に設けられたねじ穴２９に、ねじ部３９によってねじ止め固定されている。
【００３６】
突起部材２８ａ、２８ｂの斜面４８₂は、上述したように、全周に亘って設けられているから、ねじ止めする際に、突起部材２８ａ、２８ｂが静止した向きによらずに、斜面４８₂には、フォーク部２２の根本方向に面する部分が存している。
【００３７】
次に、再度図３を参照し、フォーク部２２の両脇には、それぞれ腕部２３ａ、２３ｂが配置されている。
【００３８】
この腕部２３ａ、２３ｂは、金属の棒である、水平にされた状態で、一端が取付板１２にそれぞれ取り付けられている。
この腕部２３ａ、２３ｂは、フォーク部２２の両脇に、フォーク部２２とは離れた位置に配置されており、フォーク部２２の根本付近であって、各腕部２３ａ、２３ｂのフォーク部２２と面する位置に、保持部材２４ａ、２４ｂが取り付けられている。
【００３９】
腕部２４ａ、２４ｂのうち、図３の上部に記載された腕部２４ａの先端部分Ｂの拡大図を図７に示す。
【００４０】
保持部材２４ａ、２４ｂはポリイミド等の耐熱性樹脂で構成されており、各保持部材２４ａ、２４ｂのフォーク部２２に対向する部分には、その耐熱性樹脂から成り、フォーク部２２側にそれぞれ突出された大突部３１と小突部３２、３３が設けられている。大突部３１の突出量は、小突部３２、３３よりも大きくなっている。
【００４１】
各突部３１〜３３は、腕部２３ａ、２３ｂの長手方向に沿って列設されている。各突部３１〜３３のうち、大突部３１は、フォーク部２２先端の突起部材２８ａ、２８ｂから最も離れた位置に配置されており、小突部３２、３３は、大突部３１よりも突起部材２８ａ、２８ｂに近い位置に配置されている。
【００４２】
大突部３１の、フォーク部２２先端方向に向いた部分は、フォーク部２２の表面に対して垂直な側面４１₁が形成されており、また、大突部３１の上端部分であって、側面４１₁と連続した部分には、フォーク部２２の先端に向けて傾斜された斜面４１₂が設けられている。
【００４３】
各小突部３１、３２は、フォーク部２２に面する部分に、フォーク部２２表面に対して垂直な側面４２₁、４３₁がそれぞれ設けられており、また、各突部３１、３２の上端の側面４２₁、４２₂と連続した部分には、フォーク部２２に向けて傾斜された斜面４２₂、４３₂が設けられている。
【００４４】
図３紙面の上部に記載された保持部材２４ａは上記のような構成であり、同図の下部に記載された保持部材２４ｂも、上記保持部材２４ａと同様の構成になっている。各保持部材２４ａ、２４ｂの突部３１〜３３は、それぞれフォーク部２２に向けられており、２個の保持部材２４ａ、２４ｂの突部３１〜３３同士は、フォーク部２２を間に挟んで向かい合わせになっている。
【００４５】
各突部３１〜３３の高さは、側面４１₁〜４３₁の下端部がフォーク部２２表面と同じ高さかそれよりも低く、斜面４１₂〜４３₂がフォーク部２２表面よりも高い位置に存するように配置されている。
【００４６】
また、突起部材２８ａ、２８ｂは、フォーク部２２の表面上に配置されているから、突起部材２８ａ、２８ｂと各突部３１〜３３で定められる領域内のフォーク部２２表面に矩形形状の基板を配置する場合、その基板の大きさは、一辺が大突部３１と突起部材２８ａ、２８ｂの間の間隔で決まり、他の辺が２個の保持部材２４ａ、２４ｂの小突部３２、３３の間の間隔で決まる。
【００４７】
図８の符号８は、上記のようなフォーク部２２上に載置可能な大きさの矩形形状の基板を示している。
【００４８】
図２(ｂ)は、その大きさの基板８が、昇降ピン６５の先端に乗せられた状態を示している。
【００４９】
次いで、左腕１１及び右腕１２を伸ばし、フォーク部２２を昇降ピン６５間に差し挟む。図９(ａ)は、フォーク部２２が基板８の直下位置で静止している状態を示している。
【００５０】
この状態から昇降ピン６５を降下させ、基板８をフォーク部２２上に載置する場合、基板８がフォーク部２２の根本側(板２１側)にずれていると、図９(ｂ)の符号Ｄで示すように、基板８の端部が保持部材２４ａ、２４ｂの大突部３１の斜面４１₂に当接される。
【００５１】
昇降ピン６５が更に下方に移動されると、基板８は斜面４２₂を滑りながら下方に移動し、同図(ｄ)に示すように、支持部材２５上に乗せられる。
【００５２】
基板８が支持部材２５上に乗った状態では、基板８の四辺は、２個の保持部材２４ａ、２４ｂの大突部３１の側面４１₁と小突部３２、３３の側面４２₁、４３₁と、２個の突起部材２８ａ、２８ｂの側面４８₁に接触するか、非接触であっても非常に近接して位置している。従って、基板８は、保持部材２４ａ、２４ｂと突起部材２８ａ、２８ｂによって保持されていることになり、左腕１１及び右腕１２が伸縮し、フォーク部２２が水平移動しても、基板８は、フォーク部２２に対して静止した状態が維持される。
【００５３】
他方、基板８がフォーク部２２の先端側にずれていた場合、同図(ｃ)の符号Ｅで示すように、基板８の端部が突起部材２８ａ、２８ｂの斜面４８₂に当接され、斜面４８₂上を滑りながら下方に移動し、支持部材２５上に乗せられる(同図(ｄ))。
【００５４】
また、基板８が、フォーク部２２の長手方向に対し、垂直方向にずれていた場合、基板８の端部は小突部３２、３３の斜面４２₂、４３₂に当接され、その斜面４２₂、４３₂を滑りながら移動し、支持部材２５(２５₁〜２５₈)に乗せられる。結局、基板８が斜面４１₂〜４３₂、４８₂に当接できる範囲であれば、位置ズレがあってもフォーク部２２上の定まった位置に配置されることになる。
【００５５】
大突部３１や小突部３２、３３、及び突起部材２８ａ、２８ｂは耐熱性の樹脂で構成されており、基板８の端部が、いずれの斜面４１₂〜４３₂、４８₂上を滑ってもパーティクルは発生しないようになっている。
【００５６】
この基板８は、処理室５１〜５５内で、スパッタリングやエッチング等の真空処理がされており、４００℃以上の温度に昇温されている。基板８は、フォーク部２２上では、支持部材２５₁〜２５₈上に乗せられている。支持部材２５₁〜２５₈はカーボン製であり、耐熱性が高いので、基板８によって加熱されても変形しない。また、真空中であるから、支持部材２５₁〜２５₈が高温になっても、酸素と反応することはない。
【００５７】
更に、アルミナ製のフォーク部２２の表面には、アルミニウムから成る保護膜２７が形成されているので、基板８の熱輻射は保護膜２７によって反射され、フォーク部２２が昇温しにくいようになっている。従って、基板の温度ムラが無くなり、反りが補正される。
【００５８】
なお、上記真空処理装置５０は、一つの搬送室５９に対し、複数台の処理室５１〜５５が接続されたマルチチャンバ型であったが、本発明の真空処理装置はそれに限定されるものではなく、搬送室に１台の処理室が接続された真空処理装置も含まれる。
【００５９】
また、上記基板搬送ロボット１０は、二本の腕(左腕１１と右腕１２)が折れ曲がることで伸縮し、フォーク部２２上の基板８を搬送する構造であったが、本発明の基板搬送ロボットは腕の本数によって限定されるものではない。
【００６０】
【発明の効果】
本発明によれば、基板とフォーク部の相対位置がずれていても、フォーク部の所定位置に基板を載置することができる。また、基板が高温であっても、フォーク部上に載置して搬送することができる。
【図面の簡単な説明】
【図１】本発明の真空処理装置の一例
【図２】(ａ)：本発明の基板搬送装置の一例 (ｂ)：搬送室と処理室の関係を説明するための図
【図３】本発明の基板搬送装置のフォーク部とその周辺の拡大斜視図
【図４】支持部材の拡大斜視図
【図５】突起部材の拡大斜視図
【図６】突起部材の断面図
【図７】保持部材の拡大斜視図
【図８】フォーク部に基板を乗せた状態を説明するための図
【図９】(ａ)〜(ｄ)：基板が斜面上を滑る状態を説明するための図
【図１０】従来技術の基板搬送装置のフォーク部を説明するための図
【符号の説明】
８……基板
１０……基板搬送ロボット
２２……フォーク部
２３ａ、２３ｂ……腕部
２４ａ、２４ｂ保持部材
２５₁〜２５₈……支持部材
２７……保護膜
２８ａ、２８ｂ……突起部材
３１〜３３……突部
３４……円柱形状の部分
３５……円錐台形状の部分
４１₂〜４１₃、４８₂……斜面
５０……真空処理装置
５９……搬送室[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate transfer robot, and particularly provides a substrate transfer robot suitable for transferring a glass substrate.
[0002]
[Prior art]
Conventionally, a substrate transfer robot has been widely used to transfer a substrate in a vacuum atmosphere.
[0003]
FIG. 10A is a plan view of the fork unit 110 of the prior art substrate transfer robot, and FIG. 10B is a side view thereof. The fork portion 110 has a bifurcated tip, and a concave portion 112 is formed on the surface of that portion.
[0004]
The recess 112 is formed in a planar pattern that can drop a circular silicon substrate. Reference numeral 105 in FIG. 10C denotes the silicon substrate that has been dropped into the recess 112.
[0005]
In this state, the end portion of the silicon substrate 105 is in contact with or close to the wall surface of the recess 112, and the silicon substrate 105 remains on the fork portion 110 even if the fork portion 110 is moved horizontally. It is designed to be transported without slipping.
[0006]
However, the glass substrate used in recent years is easily damaged at the edge portion as compared with the silicon substrate as described above. In addition, since the glass substrate is rectangular, there is a problem that the fork portion is increased in size if an attempt is made to form a recess that can be dropped and conveyed.
[0007]
[Problems to be solved by the invention]
The present invention was created to solve the above-described disadvantages of the prior art, and an object thereof is to provide a substrate transfer robot suitable for transferring a glass substrate.
[0008]
[Means for Solving the Problems]
In order to solve the above problems, an invention according to claim 1, horizontally placing a substrate on a fork, to move the fork portion in the horizontal direction, a substrate transport robot for transporting the substrate, A protruding member having a slope on the top is disposed at the tip portion of the fork portion, and when the substrate is positioned above the fork portion and the substrate is lowered, the substrate has an end portion on the slope surface. The substrate transport robot is configured to be placed on the fork portion while sliding on the top, the fork portion is formed of alumina, and an aluminum protective film is formed on a surface thereof .
A second aspect of the present invention is the substrate transfer robot according to the first aspect, wherein the protruding member includes a columnar portion whose side surface is disposed perpendicular to the surface of the fork portion, and an upper portion of the columnar portion. The substrate transfer robot includes a truncated cone-shaped portion provided on a bottom surface, and a side surface of the truncated cone-shaped portion is used as the inclined surface.
According to a third aspect of the invention, horizontally placed rectangular substrate on the fork portion, moving the fork portion in the horizontal direction, a substrate transfer robot for transferring the substrate, both sides of the fork portion Arm portions are arranged, and each arm portion is provided with a holding member having a protrusion, and when the substrate is placed on the fork portion, the three sides of the substrate come into contact with the protrusion. The substrate transport robot is characterized in that the fork part is made of alumina and an aluminum protective film is formed on the surface of the fork part .
According to a fourth aspect of the present invention, there is provided the substrate transfer robot according to the third aspect, wherein an inclined surface is provided on an upper portion of each of the protrusions, the substrate is positioned above the fork portion, and the substrate is lowered. when the said substrate is configured substrate transfer robot such that the end is placed on the fork portion while sliding the upper inclined surface of said projection.
The invention according to claim 5 is the substrate transfer robot according to claim 3 or 4, wherein a projection member is disposed at a tip portion of the fork portion, and is placed on the fork portion. Of the four sides of the substrate, the side that does not contact the protrusion is a substrate transfer robot configured to be able to contact the protruding member.
According to a sixth aspect of the present invention, a fork portion having a base portion mounted on a rotating shaft, provided on the left arm and the right arm that expands and contracts by rotation of the rotating shaft, and on the tip of the left arm and the right arm, on which a substrate is placed. has the door, the placed on the fork portion of the substrate of the quadrilateral horizontally moving the fork portion in the horizontal direction, a substrate transfer robot for transferring the substrate, each of the right arm and the left arm A left holding member and a right holding member provided; first and second left protrusions and first and second right protrusions provided on the left holding member and the right holding member, respectively; In the first left protrusion and the first right protrusion, a first vertical surface perpendicular to the fork surface and capable of contacting one of the four sides of the substrate that is closest to the rotation axis. , Located above the first vertical surface, capable of contacting the one side and A slope inclined toward the tip of the ark portion is formed, and the second left protrusion and the second right protrusion can contact the left side and the right side of the one side, respectively. A second vertical surface perpendicular to the surface of the fork portion, and an inclined surface that is located above the second vertical surface and that can contact the left side and the right side and is inclined toward the fork portion When the substrate is positioned above the fork portion and the substrate is lowered, the substrate is placed on the fork portion while the end portion slides on the slope of the protrusion. is configured to be, above the tip portion of the fork portion is disposed projecting member, among four sides of the substrate placed on the fork, the side not in contact with the projection, the said projecting member A substrate transfer robot configured to be able to contact.
A seventh aspect of the present invention is the substrate transfer robot according to the fifth or sixth aspect , wherein the protruding member is provided with an inclined surface so that the substrate is positioned above the fork portion. When the substrate is lowered, the substrate is arranged on the fork portion while the end portion slides on one or both of the inclined surface of the protruding portion and the inclined surface of the protruding member. This is a substrate transfer robot configured as follows.
The invention according to an eighth aspect is the substrate transfer robot according to the seventh aspect, wherein the projecting member includes a cylindrical portion having a side surface disposed perpendicular to the fork portion surface, and an upper portion of the cylindrical portion. The substrate transfer robot includes a truncated cone-shaped portion provided on a bottom surface, and a side surface of the truncated cone-shaped portion is used as the inclined surface.
The invention according to claim 9 is the substrate transfer robot according to any one of claims 1 to 8, wherein a support member is disposed on the fork portion, and the substrate is placed on the support member. A substrate transfer robot configured to be configured as described above.
A tenth aspect of the present invention is a transfer chamber in which the substrate transfer robot according to any one of the first to ninth aspects is disposed in a vacuum chamber.
The invention described in claim 11 is a vacuum processing apparatus comprising: the transfer chamber according to claim 10; and a processing chamber connected to the transfer chamber, the processing chamber performing processing of the substrate in a vacuum atmosphere. .
[0009]
This invention is comprised as mentioned above and the holding member which has a protrusion is arrange | positioned at the arm part arrange | positioned at the both sides of the fork part.
[0010]
When a rectangular substrate is arranged on the fork portion, the four sides of the substrate are configured so that three sides can come into contact with the protrusion, and the substrate is stationary with respect to the fork portion by each protrusion. It is like that. It is only necessary that the three sides of the substrate are located close to the protrusions so as to be able to contact the protrusions, and the three sides do not necessarily need to be in contact with the protrusions at the same time.
[0011]
Further, a protruding member is disposed at the tip of the fork portion, and the other side of the substrate can come into contact with the protruding member. Therefore, the four sides of the substrate can come into contact with the protrusions or protrusions of the holding member, and the rectangular substrate is firmly held on the fork portion.
[0012]
In addition, the holding member and the projecting member are provided with a slope, and when the substrate is placed on the fork portion, if the relative position between the substrate and the fork portion is shifted, the substrate is located above the fork portion. When the board is lowered from the stationary state, the end of the board hits the slope, and the board slides on the slope and can be placed on the fork. Therefore, even when the position of the substrate is shifted, it can be placed at an accurate position on the fork.
[0013]
When the substrate slides down on a carbon member, etc., particles are generated, so the protrusion member and holding member are made of heat-resistant resin, and no particles are generated even if the substrate slides on the slope. It is good to do so.
[0014]
In the present invention, a heat-resistant support member is disposed on the fork portion, and the substrate is placed on the fork portion in contact with the upper end portion of the support member. Accordingly, since the substrate does not directly contact the fork portion, the fork portion is not heated to a high temperature even when a substrate heated to a high temperature is placed.
[0015]
Furthermore, the fork part is made of alumina, and a protective film made of aluminum with a low emissivity is formed on the surface of the fork part. Therefore, even if the radiant heat radiated from the substrate is large, the material constituting the fork part is heated. It has become difficult to do. Accordingly, the temperature unevenness of the substrate is eliminated and the warp is corrected.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Referring to FIG. 1, reference numeral 10 denotes a substrate transfer robot according to an example of the present invention, which is disposed in a transfer chamber 59.
[0017]
A plurality of processing chambers 51 to 55 and a substrate carry-in / out chamber 56 are connected to the transfer chamber 59, and a multi-chamber type vacuum processing apparatus 50 is configured by each of the chambers 51 to 59.
[0018]
The substrate transfer robot 10 will be described with reference to FIG. 2A. The substrate transfer robot 10 includes a rotation mechanism 17, a left arm 11, a right arm 12, and a placement unit 13.
[0019]
A motor (not shown) is disposed in the rotation mechanism 17, and a rotation shaft 15 is attached to the motor. The rotating shaft 15 has a double structure, and includes a cylindrical outer peripheral portion and a rod-shaped inner portion inserted through the outer peripheral portion. The outer and inner parts are configured so that the rotational force of the motor is transmitted in the same direction as well as in the opposite direction. When transmitted in the opposite direction, the outer and inner parts rotate in the opposite direction. Is configured to do.
[0020]
The upper end portion of the rotating shaft 15 protrudes from the upper portion of the rotating mechanism 17, and one end of the left arm 11 and one end of the right arm 12 are horizontally connected to the outer peripheral portion and the inner portion, respectively. Yes.
[0021]
The left arm 11 and the right arm 12 are configured by connecting _two members 11 ₁ , 11 ₂ , 12 ₁ , 12 ₂ , respectively, and can be bent.
[0022]
The other end of the left arm 11 and the other end of the right arm 12 are attached to one mounting portion 13, and when the base members 11 ₁ , 12 _{1 of} the left arm 11 and the right arm 12 rotate in opposite directions, The left arm 11 and the right arm 12 are folded, or the folded state is returned to the original state. As a result, the placement unit 13 moves linearly in the horizontal direction. On the other hand, when the left arm 11 and the right arm 12 rotate in the same direction, the placement unit 13 rotates in a horizontal plane.
[0023]
Explaining the mounting portion 13, the mounting portion 13 includes a mounting plate 14 and a fork portion 22. In the mounting portion 13, the mounting plate 14 is attached to the left arm 11 and the right arm 12, and the fork portion 22 is disposed horizontally and attached to the mounting plate 14 via the plate 21.
[0024]
FIG. 2B is a diagram illustrating a relationship between the transfer chamber 59 in which the substrate transfer robot 10 is disposed and the processing chambers 51 to 55 connected to the transfer chamber 59.
[0025]
A substrate mounting table 64 is disposed in each of the processing chambers 51 to 55, and lifting pins 65 are inserted into the substrate mounting table 64.
[0026]
A partition wall 62 disposed between the transfer chamber 59 and each of the processing chambers 51 to 55 is provided with a path 63 that can be opened and closed, and operates the rotation mechanism 17 to linearly move the placement unit 13 in the horizontal direction. Then, the fork 22 passes through the passage 63 and can enter and exit the processing chambers 51 to 55.
[0027]
An enlarged view of the vicinity A of the fork portion 22 is shown in FIG.
Referring to FIG. 3, the fork portion 22 is made of a plate made of alumina and having a bifurcated tip side, and a protective film 27 made of a material having a low emissivity such as aluminum is formed on the surface thereof. .
[0028]
In the drawing, one of the forked portions is indicated by reference numeral 26a, and the other forked portion is indicated by reference numeral 26b. On the protective film 27 of each bifurcated portion 26a, 26b, support members 25 _{1 to} 25 ₈ and projecting members 28a, 28b are respectively arranged.
[0029]
Four support members 25 _{1 to} 25 ₈ are fixed on each of the bifurcated portions 26a and 26b at a distance from each other, and the protruding members 28a and 28b are fixed at positions near the tips of the bifurcated portions 26a and 26b. Has been.
[0030]
FIG. 4 is a perspective view of the support members 25 _{1 to} 25 ₈ . The support members 25 _{1 to} 25 ₈ are configured by molding carbon into a bottomed cylindrical shape, and the bottom surface is screwed and fixed onto the fork portion 22 by screws 37.
[0031]
The upper end of the screw 37 is located at a position lower than the upper ends of the support members 25 _{1 to} 25 ₈ ,
[0032]
When a substrate described later is placed on the support members 25 _{1 to} 25 ₈ , the substrate does not come into contact with the screw 37.
[0033]
FIG. 5 shows an enlarged perspective view of the protruding members 28a and 28b. FIG. 6 shows a cross-sectional view of the protruding members 28a and 28b and the fork portion 22. As shown in FIG. The projecting members 28 a and 28 b are configured by molding a heat-resistant resin such as polyimide into a substantially cylindrical shape, and one bottom surface thereof is in close contact with the surface of the protective film 27 of the fork member 22. The other bottom surface faces vertically upward of the fork portion 22, and the tip end portion thereof is chamfered. As a result, the projecting members 28a and 28b are constituted by a cylindrical portion 34 and a truncated cone portion 35. Has been.
[0034]
The side surface 48 ₁ of the cylindrical portion 34 is perpendicular to the surface of the fork portion 22, and on the other hand, the outer peripheral portion of the truncated cone-shaped portion 35 faces outward from the center position of the protruding members 28 a and 28 b. tilted slopes 48 ₂ is formed. The side surface 48 ₁ and the inclined surface 48 ₂ are provided over the entire circumference of the protruding members 28a and 28b.
[0035]
A screw portion 39 is provided on the bottom surface of the cylindrical portion 34, and the protruding members 28 a and 28 b are screwed and fixed to the screw holes 29 provided in the fork portion 22 by the screw portion 39.
[0036]
As described above, the slopes 48 ₂ of the projecting members 28a and 28b are provided over the entire circumference. Therefore, when the screws are screwed, the slopes 48 ₂ do not depend on the direction in which the projecting members 28a and 28b are stationary. There is a portion facing the root direction of the fork portion 22.
[0037]
Next, referring again to FIG. 3, arm portions 23 a and 23 b are arranged on both sides of the fork portion 22, respectively.
[0038]
One end of each of the arm portions 23 a and 23 b is attached to the mounting plate 12 in a horizontal state, which is a metal rod.
The arm portions 23a and 23b are disposed on both sides of the fork portion 22 at positions away from the fork portion 22, and are near the root of the fork portion 22 and the fork portions 22 of the arm portions 23a and 23b. The holding members 24a and 24b are attached to the positions facing each other.
[0039]
FIG. 7 shows an enlarged view of the distal end portion B of the arm portion 24a described in the upper part of FIG. 3 among the arm portions 24a and 24b.
[0040]
The holding members 24a and 24b are made of a heat-resistant resin such as polyimide. The portions of the holding members 24a and 24b facing the fork portion 22 are made of the heat-resistant resin and protrude toward the fork portion 22 side. A large protrusion 31 and small protrusions 32 and 33 are provided. The protruding amount of the large protrusion 31 is larger than that of the small protrusions 32 and 33.
[0041]
Each protrusion 31-33 is lined up along the longitudinal direction of arm part 23a, 23b. Of the protrusions 31 to 33, the large protrusion 31 is disposed at a position farthest from the protrusion members 28 a and 28 b at the tip of the fork portion 22, and the small protrusions 32 and 33 are more than the large protrusion 31. It arrange | positions in the position close | similar to the protrusion members 28a and 28b.
[0042]
A portion of the large protrusion 31 facing the tip of the fork portion 22 is formed with a side surface 41 ₁ perpendicular to the surface of the fork portion 22, and is an upper end portion of the large protrusion 31, In a portion continuous with 41 ₁ , a slope 41 ₂ is provided that is inclined toward the tip of the fork portion 22.
[0043]
Each small protrusion 31, 32 is provided with a side surface 42 ₁ , 43 ₁ perpendicular to the surface of the fork part 22 at a portion facing the fork part 22, and the upper end of each protrusion 31, 32. Slopes 42 ₂ and 43 _{2 that} are inclined toward the fork portion 22 are provided at portions that are continuous with the side surfaces 42 ₁ and 42 ₂ .
[0044]
The holding member 24a described in the upper part of FIG. 3 has the above-described configuration, and the holding member 24b described in the lower part of FIG. 3 has the same configuration as the holding member 24a. The protrusions 31 to 33 of the holding members 24a and 24b are respectively directed to the fork part 22, and the protrusions 31 to 33 of the two holding members 24a and 24b face each other with the fork part 22 therebetween. It is a combination.
[0045]
The heights of the protrusions 31 to 33 are such that the lower end portions of the side surfaces 41 ₁ to 43 ₁ are the same height as or lower than the surface of the fork portion 22 and the inclined surfaces 41 ₂ to 43 ₂ are higher than the surface of the fork portion 22. It is arranged to exist.
[0046]
Further, since the protruding members 28a and 28b are arranged on the surface of the fork portion 22, a rectangular substrate is formed on the surface of the fork portion 22 in the region defined by the protruding members 28a and 28b and the protruding portions 31 to 33. In the case of the arrangement, the size of the substrate is determined by the interval between the large protrusion 31 and the protruding members 28a, 28b on one side, and the small protrusions 32, 33 of the two holding members 24a, 24b on the other side. It is determined by the interval between.
[0047]
Reference numeral 8 in FIG. 8 indicates a rectangular substrate having a size that can be placed on the fork portion 22 as described above.
[0048]
FIG. 2B shows a state in which the substrate 8 having the size is placed on the tip of the elevating pin 65.
[0049]
Next, the left arm 11 and the right arm 12 are extended, and the fork portion 22 is sandwiched between the lift pins 65. FIG. 9A shows a state in which the fork portion 22 is stationary at a position directly below the substrate 8.
[0050]
When the lift pins 65 are lowered from this state and the substrate 8 is placed on the fork portion 22, if the substrate 8 is displaced to the base side (the plate 21 side) of the fork portion 22, the symbol in FIG. as shown by D, the end portion of the substrate 8 is in contact with the inclined surface 41 ₂ of the large protuberance 31 of the holding member 24a, 24b.
[0051]
When the lift pin 65 is further moved downward, the substrate 8 moves downward while sliding slope 42 _2, as shown in FIG. 2 (d), it is placed on the support member 25.
[0052]
In a state where the substrate 8 is on the support member 25, the four sides of the substrate 8 are the side surfaces 41 ₁ of the large projections 31 and the side surfaces 42 ₁ and 43 _{1 of the} small projections 32 and 33 of the two holding members 24a and 24b. When the two projecting members 28a, or in contact with the side surface 48 ₁ of 28b, be a non-contact are positioned very close. Accordingly, the substrate 8 is held by the holding members 24a and 24b and the projecting members 28a and 28b. Even if the left arm 11 and the right arm 12 expand and contract and the fork portion 22 moves horizontally, the substrate 8 is A state of being stationary with respect to the portion 22 is maintained.
[0053]
On the other hand, the substrate 8 may have shifted to the front end side of the fork unit 22, as shown at E in FIG. (C), the end portion of the substrate 8 is brought into contact with the inclined surface 48 ₂ of the projecting members 28a, 28b, moves downward while sliding slope 48 ₂ above, is placed on the support member 25 (FIG. (d)).
[0054]
Further, when the substrate 8 is displaced in the vertical direction with respect to the longitudinal direction of the fork portion 22, the end portion of the substrate 8 is brought into contact with the inclined surfaces 42 ₂ and 43 ₂ of the small protrusions 32 and 33, and the inclined surface 42. _2, 43 ₂ move while sliding, it is placed on the support member 25 (25 ₁ to 25 _8). Eventually, as long as the substrate 8 is in a range in which the substrate 8 can be in contact with the inclined surfaces 41 ₂ to 43 ₂ , 48 ₂ , the substrate 8 is disposed at a fixed position on the fork portion 22 even if there is a positional deviation.
[0055]
The large protrusion 31, the small protrusions 32 and 33, and the protruding members 28a and 28b are made of heat resistant resin, and the end of the substrate 8 slides on any of the inclined surfaces 41 ₂ to 43 ₂ and 48 _2. However, no particles are generated.
[0056]
The substrate 8 is subjected to vacuum processing such as sputtering and etching in the processing chambers 51 to 55 and is heated to a temperature of 400 ° C. or higher. The substrate 8 is placed on the support members 25 _{1 to} 25 ₈ on the fork portion 22. Since the support members 25 _{1 to} 25 ₈ are made of carbon and have high heat resistance, they are not deformed even when heated by the substrate 8. Moreover, since it is in a vacuum, even if the supporting members 25 _{1 to} 25 ₈ reach a high temperature, they do not react with oxygen.
[0057]
Further, the surface of the Aluminum Na steel fork portion 22, the protective film 27 made of aluminum is formed, the heat radiation substrate 8 is reflected by the protective film 27, as the fork portion 22 is hardly heated It has become. Accordingly, the temperature unevenness of the substrate is eliminated and the warp is corrected.
[0058]
The vacuum processing apparatus 50 is a multi-chamber type in which a plurality of processing chambers 51 to 55 are connected to one transfer chamber 59. However, the vacuum processing apparatus of the present invention is not limited thereto. There is also included a vacuum processing apparatus in which one processing chamber is connected to the transfer chamber.
[0059]
The substrate transfer robot 10 has a structure in which the two arms (the left arm 11 and the right arm 12) are expanded and contracted to transfer the substrate 8 on the fork portion 22, but the substrate transfer robot of the present invention is It is not limited by the number of arms.
[0060]
【The invention's effect】
According to the present invention, the substrate can be placed at a predetermined position of the fork portion even if the relative position of the substrate and the fork portion is shifted. Even if the substrate is hot, it can be placed on the fork and transported.
[Brief description of the drawings]
1 is an example of a vacuum processing apparatus of the present invention. FIG. 2A is an example of a substrate transfer apparatus of the present invention. FIG. 1B is a diagram for explaining a relationship between a transfer chamber and a processing chamber. FIG. 4 is an enlarged perspective view of the support member, FIG. 5 is an enlarged perspective view of the protruding member, and FIG. 6 is a sectional view of the protruding member. FIG. 8 is a diagram for explaining a state in which the substrate is placed on the fork portion. FIG. 9 is a diagram for explaining a state in which the substrate slides on the slope. [Fig. 1] A diagram for explaining a fork portion of a prior art substrate transfer apparatus.
8 ...... substrate 10 ...... substrate transport robot 22 ...... fork 23a, 23b ...... arms 24a, 24b holding member 25 ₁ to 25 ₈ ...... support member 27 ...... protective film 28a, 28b ...... projecting members 31 to 33... Projection 34... Cylindrical portion 35... Frustum-shaped portions 41 _{2 to} 41 ₃ and 48 ₂ ... Slope 50... Vacuum processing device 59.

Claims

Horizontally placing a substrate on a fork, to move the fork portion in the horizontal direction, a substrate transport robot for transporting the substrate,
The distal end portion of the fork portion, is disposed projecting member having slopes on the top,
When the substrate is positioned above the fork portion and the substrate is lowered, the substrate is configured to be placed on the fork portion while an end portion slides on the slope ,
A substrate transport robot in which the fork portion is made of alumina and an aluminum protective film is formed on the surface thereof .

The projecting member includes a columnar portion whose side surface is disposed perpendicular to the surface of the fork portion, and a truncated cone-shaped portion provided on an upper bottom surface of the columnar portion. The substrate transfer robot according to claim 1, wherein a side surface of the portion is used as the inclined surface.

Horizontally placed rectangular substrate on the fork portion, moving the fork portion in the horizontal direction, a substrate transport robot for transporting the substrate,
Arms are arranged on both sides of the fork part, and each arm part is provided with a holding member having a protrusion,
When the substrate is placed on the fork portion, the three sides of the substrate are configured to come into contact with the protrusion ,
The substrate transport robot according to claim 1, wherein the fork portion is formed of alumina, and an aluminum protective film is formed on a surface thereof .

A slope is provided at the top of each protrusion,
The substrate is positioned above the fork portion, when lowering the said substrate, the substrate is configured so that the end portion is placed on the fork portion while sliding the upper inclined surface of the projection The substrate transfer robot according to claim 3.

A protrusion member is disposed at a tip portion of the fork portion, and a side that does not contact the protrusion among the four sides of the substrate placed on the fork portion can be in contact with the protrusion member. The substrate transfer robot according to claim 3 or 5.

A left arm and a right arm, each of which has a root portion attached to a rotation shaft and expands and contracts by rotation of the rotation shaft;
The left arm and the fork portion on which the substrate is placed, provided at the tip of the right arm;
Horizontally placing a substrate quadrilateral on the fork, to move the fork portion in the horizontal direction, a substrate transport robot for transporting the substrate,
A left holding member and a right holding member respectively provided on the left arm and the right arm;
The first and second left protrusions and the first and second right protrusions respectively provided on the left holding member and the right holding member;
In the first left protrusion and the first right protrusion, a first vertical surface perpendicular to the fork surface and capable of contacting one of the four sides of the substrate that is closest to the rotation axis. , Located above the first vertical surface, and can be contacted with the one side, and a slope inclined toward the tip of the fork portion is formed,
In the second left protrusion and the second right protrusion, a second vertical surface that can contact the left side and the right side of the one side and is perpendicular to the fork part surface, Located above the second vertical surface, the left side and the right side can be contacted and a slope inclined toward the fork portion is formed,
When the substrate is positioned above the fork portion and the substrate is lowered, the substrate is configured to be placed on the fork portion while the end portion slides on the slope of the protrusion. And
A protrusion member is disposed at a tip portion of the fork portion, and a side that does not contact the protrusion among the four sides of the substrate placed on the fork portion can be in contact with the protrusion member. Substrate transfer robot.

The protruding member is provided with a slope,
When the substrate is positioned above the fork portion and the substrate is lowered, the substrate has an end portion on one or both of the inclined surface of the protruding portion and the inclined surface of the protruding member. The substrate transfer robot according to claim 5 , wherein the substrate transfer robot is configured to be disposed on the fork portion while sliding.

The projecting member includes a columnar portion whose side surface is disposed perpendicular to the surface of the fork portion, and a truncated cone-shaped portion provided on an upper bottom surface of the columnar portion. The substrate transfer robot according to claim 7, wherein a side surface of the portion is used as the inclined surface.

The substrate transfer robot according to claim 1, wherein a support member is disposed on the fork portion, and the substrate is placed on the support member.

A transfer chamber in which the substrate transfer robot according to claim 1 is disposed in a vacuum chamber.

11. A vacuum processing apparatus comprising: the transfer chamber according to claim 10; and a processing chamber connected to the transfer chamber, the processing chamber performing processing of the substrate in a vacuum atmosphere.